:

1388

)XRF (X-Ray Fluorescence

:

x x ( x-ray

)fluorescence

Target

)XRF (X-Ray Fluorescence

:

) (Photo electron

) (Fluorescent Radiation.

2/0oA 20oA .
.

)XRF (X-Ray Fluorescence

)XRF (X-Ray Fluorescence

. X
L K K L .

)XRF (X-Ray Fluorescence

.
.

)XRF (X-Ray Fluorescence

:

2

) a( z

z c a .

)XRF (X-Ray Fluorescence

x
) (Qualitative
) (Quantitative.
X

)XRF (X-Ray Fluorescence

:
:
: ()

XRF (X-Ray Fluorescence)

Fluorescence X-Ray Spectroscopy
Source -1
Detectors -2
Analyzers -3

-4

)XRF (X-Ray Fluorescence

-1 Source
40-100 Kv .
) (Generator x-Ray .
.

x
. x

)XRF (X-Ray Fluorescence

)XRF (X-Ray Fluorescence

:

)XRF (X-Ray Fluorescence

-2
) (Counters X
.
X
.

)XRF (X-Ray Fluorescence

-2

:
) Proportional

) Geiger
) Scintillation
) Semiconductor
X .
( ) ( ) .

)XRF (X-Ray Fluorescence

-2

) Proportional
() 10cm 2 cm ()

. 1000 .
X
.
.

)XRF (X-Ray Fluorescence

-2

) Proportional
.

( ) . .

)XRF (X-Ray Fluorescence

-2

) )(Geiger Counters
1500

.
.

)XRF (X-Ray Fluorescence

-2

) )(Scintillation
X ) (NaI

) (Ta . X
NaI Ta+
.

)XRF (X-Ray Fluorescence

-2

) )(Scintillation

.
( -
) . )(Dynode

)XRF (X-Ray Fluorescence

-2
) )(Scintillation
.

)XRF (X-Ray Fluorescence

-2

) )(Semiconductor Counters
.

X . ) Si(Li ) Ge(Li
. ) Si(Li ()
.

)XRF (X-Ray Fluorescence

)XRF (X-Ray Fluorescence

-3 Analyzers

.
.

.
.
) (d .

)XRF (X-Ray Fluorescence

-3 Analyzers

d .
2d

d ( Z) d
( Z)

)XRF (X-Ray Fluorescence

-4

XRF .

absorption Scattering
. XRD .

.

XRF (X-Ray Fluorescence)

XRF
(SEM, TEM)
(ICP-AES)
(OES) Optical Emission Spectroscopy

(AAS) Atomic Absorption Spectroscopy

(AES) Auger Electron Spectroscopy
Direct- Current plasma emission spectroscopy
Particle-Induced x-Ray emission

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