Pump Packages

Turbomolecular Packages
I BOC Edwards TIC Controlled Pumping Stations
Edwards combines the proven design of their EXT Series turbo pumps with a backing pump in an integrated unit.

Pumps

Features: Fully assembled turnkey pumping solution Turbo pump and backing pump with integrated TIC controller Rotary vane or scroll backing pumps available System start/stop from on-board controller Pumping and gauge control from integrated TIC controller RS-232 and RS-485 communication protocols available Integrated air-cooling kit Ultimate pressures to 5 x 10-10 mbar

Applications: UHV systems Beam lines Load locks Surface science High-energy physics

Options: Gauge heads and cables Oil mist eliminators

Pump Packages
Turbo Pump Model EXT 70H EXT 70H EXT 70H EXT 70H EXT 225H EXT 225H EXT 225H EXT 225H Pumping Speed (N2L/sec) 65 65 65 65 220 220 220 220 Inlet Flange ISO63-K ISO63-K 412" CF 4 12" CF ISO100-K ISO100-K 6" CF 6" CF Backing Pump Model E2M1.5 XDS5 E2M1.5 XDS5 RV3 XDS5 RV3 XDS5 Backing Pump Type Rotary Vane Scroll Rotary Vane Scroll Rotary Vane Scroll Rotary Vane Scroll Pumping Speed CFM (m3/hr.) 1.2 (1.6) 3.5 (4.8) 1.2 (1.6) 3.5 (4.8) 2.3 (3.3) 3.5 (4.8) 2.3 (3.3) 3.5 (4.8) Part No. ED-NRY0FC000 ED-NRY0FD000 ED-NRY0FE000 ED-NGAD47000 ED-NRY0FF000 ED-NRY0FG000 ED-NRY0FH000 ED-NGX850000 Price

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