MEMS TECHNOLOGY

BY S.APPA RAO

INTRODUCTION

MEMS: micro-electro-mechanical systems of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.

Combination

MEMS PROCESS PowerPoint

Same as the process steps used for making conventional electronic circuits

FABRICATION PROCESS:

DEPOSITION:

CHEMICAL DEPOSITION

Chemical vapour deposition

PHYSICAL DEPOSITION

Sputtering

LITHIOGRAPHY:

Application Optical

of photo resist

exposure to print an image of the mask onto the resist

Immersion

in an aqueous developer solution to dissolve the exposed resist

ETCHING:

DRY ETCHING WET ETCHING

MATERIALS FOR MEMS:

Materials

are the basic things required to develop micro sensors

Metals Polymers Ceramic

materials Semiconductors Composite materials

MICRO MACHINING TECHNOLOGY:

Process

of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices

TYPES OF MICROMACHINING:

BULK micromachining:

SURFACE micromachining:

LIGA process:

MEMS ACCELEROMETRER:
CONVENTIONAL ACCELEROMETER SENSOR
Made of bulky and heavy metal parts Require high operating voltage/current Needs careful maintenance Highly expensive not throwaway type

PIEZO-RESISTIVE ACCELEROMETER:

LAYOUT OF THE RESISTOR:

MASKS that are used 4 ACCELEROMETER:

FABRICATION PROCESS:

Contd.

INTERFACE ELECTRONIC CKT

MEMS ACCELEROMETER

ADVANTAGES:

Significantly lower manufacturing costs

Small inertial mass

Particularly realized in the area of: sensors signal switching

TECHNICAL LIMITATIONS:

Imprecise fabrication methods

Expensive and complex packaging

CAD Design tool inaccuracies

APPLICATIONS:

Accelerometers in consumer electronics devices such as game controllers Communications biotechnology

FUTURE:

As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives. It has the potential to change our daily life as much as computer