Microflown Technologies The Netherlands: Microflown: A New Category of Sensors

1
Microflown Technologies
The Netherlands
www.microflown.com
info@microflown.com
Microflown: a new category of sensors
Agenda
Introduction to Microflown Technologies
Sound Intensity
Measurement techniques traditional
systems
Advanced scanning techniques :
Scan&Paint

[3-29]
[30-69]
[70-88]

[89-126]

2
Company introduction
3
Company Introduction
1994: Invention Microflown by Hans-Elias de Bree at University Twente
1997: Ph.D. Hans-Elias de Bree
1998: Founding Microflown Technologies B.V. (de Bree, Koers)
2001: Industrializing product
2003: Introduction broad banded sensor element
2004: First applications scientifically proven / first arrays sold
2005: Rapid growth in (automotive + aerospace) industry
2005: De Bree appointed Professor Vehicle Acoustics at the HAN University,
Arnhem School of Automotive Engineering
2008: Strategic decision to explore the defense & security market
2010: 20 FTE company, 1,3 MEURO turnover
2011: Microflown AVISA

4
Working principle
Microflown SEM picture: two heated wires
5
Working principle
Microphone measures sound pressure (result)

Microflown measures Particle Velocity (cause)

Acoustical <-> electrical <-> energy
Sound pressure <-> voltage <-> potential
Particle velocity <-> amperes <-> kinetic

6
Working principle
PRESSURE WAVE
7
Working principle
PRESSURE WAVE PARTICLE VELOCITY
8
Working principle
output
A
T
[
k
]
velocity
distance
0
upstream downstream
9
Working principle
u
A
D
u
u
sum
u
p
p
p
p
B
u
sum
u
p
p
C
u
u
p
p
10
Working principle
Surface velocity measurement:
No background noise and reflection problems

Figure of eight High surface velocity
and low surface
pressure
Low surface velocity
and high surface
pressure
11
Working principle
Mems based sensor
Clean room technology is
used to create the small
elements on a waver

University of Twente

12
Working principle
Wirebonded elements

13
Microflown probes
14
Standard probes
Scanning Probes
1D Velocity
For small object
High temperatures
Non contact vibration
15
Standard probes
PU probes
Particle Velocity
Sound Pressure
1D Sound Intensity
1D Sound Energy
Impedance
16
Standard probes
PU Probes: Placement of p and u
17
Standard probes
Metal Mesh
Wind shield, DC flow
up to 2 m/s
Protecion of the
wires
Calibration including
mesh
18
Standard probes
USP probes
3D Particle Velocity
Sound Pressure
3D Sound Intensity
3D Sound Energy
Impedance
Acoustic Vector Sensor
19
Standard probes
High dB Scanning Probe
Above 135dB acoustics becomes non linear
Standard sensor overloads at 130dB
Measurement at 170dB is possible with packaged sensor
20
Microflown applications
21
Standard probes
From product development till end of line control

22
Insitu abosorption
Acoustic camera
Scan & Paint Scan&Listen
PNCAR
Automotive
23
3D intensity stream lines
Reverberant room
characterization
In-situ impedance
PNCAR
Space and Aerospace
24
3D sound source
location
Virtual Arrays
Environmental noise
25
Scan & Paint
Acoustic Camera
In situ impedance
Point by point
intensity
Manufacturing industries
26
Acoustic EOL
Leak testing
End of Line Control
27
Sound diffusion
3D intensity
visualization
Impedance
measurement
Room acoustics
28
Military applications
Aircrafts location
Air to ground
applications
Hostile fire location
Surveillance
29
What is intensity?
Theoretical approach

Intensity
32
Sound intensity is useful for measurement of sound power, identification and ranking of
sources, visualization of sound fields, measurement of transmission loss, identification of
transmission paths
Sound intensity is defined as the sound power per unit area
Intensity: Time averaged rate per unit area at which work is done by one element of fluid
on an adjacent element

Intensity and Particle velocity are vectors, therefor they have a direction related to their
magnitude.
Sound intensity units are W/m2

=< >
=< >
=
1
0

Intensity
33
In far field pressure and velocity have equal phase so I is a real quantity.
However, in the near field pressure and velocity are out of phase,
leading to have an active and reactive part of the intensity
Active intensity [ I ]
Active intensity is the real part of the time
averaged product between pressure and
velocity. This term is commonly called
acoustic intensity because is associated to
the acoustic energy that propagates away
from the source
Reactive intensity [ J ]
Active intensity is the imaginary part of the
time averaged product between pressure and
velocity. This term is associated with the
evanescent energy carried by the particle
velocity
I
J
Real
Imaginary
Reactivity index
34
The reactivity index is the ratio between
reactive (J) and active intensity (I)

When reactivity takes high values lead to
low active intensity. This can be seem as
lack of radiation efficiency, i.e. there is a
vibrating surface which moves the air but
is not able to compress it.

The size of the near field is related to the
wavelength assessed, therefore the
reactivity index also depends on
frequency.
Pressure-Intensity index
35
The presure-intensity index is the ratio between square rms pressure (
rms
2
) and
unbiased active intensity (
)

This coefficient is useful for determining the accuracy of intensity measurements
undertaken with a P-P intensity probe.

Sound Intensity-PP probes
PP intensity
37
Traditionally the measurement of sound intensity is performed by P-P probes.

The measurement procedure makes use of two microphones. The sound pressure
is the average of the two corresponding pressure signals. The intensity is calculated
at the center of the space separating the two microphones.

The P-P intensity is then obtained by the following relation:

Where the first term is the promediated pressure value and the second term is the
estimated particle velocity.

( ) ( ) ( ) ( )
t
t
t
pp
d
r
p p t p t p
u p I
}

A
+
= = t
t t
2 1 2 1
2

PP intensity
38
Average pressure
between the two closely
spaced microphones
Estimation of the particle
velocity from the pressure
gradient valid for free field
plane waves
PP intensity - ERRORS
39
Phase mistmatch error
between pressure
microphones
Pressure-intensity index is directly
related with the measurement error
40

Phase mismatch error :

A small error in the microphones phase matching can lead to an uncorrect intensity
estimation.
This is the reason why the manufacturers need to pair the microphones, to try to
find in the production, the more similar sensors to form the probe.

|
|
.
|
\
|
A
=
A
~
I
c p
r k
I
c
p
r k
I I
rms
pe
rms
pe
pp pp

/
1
2 2
41
r k
r k
I I
pp
A
A
=
sin
/
Too high frequency: the wavelength is

too small compared to the microphone
spacing
Too low frequency: the pressure gradient is
too small to determine the velocity
Finite difference error (depends on the microphone separation):

The estimation of the velocity term is the pressure gradient between the two
pressure signals, this can lead to the following cases

PP intensity - Limitations
42
Reverberant sound fields:
The usable frequency region of these
sensors is drastically reduced when the
pressure-intensity index is HIGH,
because of the small ratio between
phase measurements at microphone
positions. This effect appears in
reverberant conditions where:
high pressure level
Intensity level tending to 0
Free field conditions:
The spacer needs to be changed for
each frequency range, in order to
adapt it to the interest wave legth.
PP intensity - Limitations
43
Near field measurements:
The probe can be used but the usable
frequency range is reduced drastically
because of the appearance of
evanescent waves.
The gradient of pressure to estimate
the particle velocity is on longer usable

NOTE: Evanescent waves: An
evancescent wave is a near field
standing wave with an exponential
amplitude decay from the boundary at
which the wave was formed
Properties of PP probes
44
Advantages
Not sensitive to DC flow
Flat frequency response

Disadvantages
Only for plane waves
Distributed sensor
Exact microphone pairing needed
Microphone spacing depends on frequency
Accuracy is strongly dependent into the
pressure-intensity index
Sound intensity P-U probes
PU intensity
46
The working principle is based upon measuring the temperature
difference in the cross sections of two extremely sensitive heated
platinum wires that are placed in parallel. The incident sound flown
produces a difference in temperature, leading into a voltage
difference proportional to the flow.
P-U intensity :
Intensity is then described by the real part of the product of pressure and
particle velocity, both measured quantities.
Pressure and particle velocity are directly measured so no assumptions
about the sound field are required
PU probes - ERRORS
47
Reactivity index:
The reactivity is the ratio between active (Re) and
reactive ( Im) intensity of the sound field.

If the reactivity takes a HIGH value there is not
intensity produced, the sound source is only pushing
air back and forward. In this case a small phase
mismatch between P and U sensor can produce an
error:

This is due to happen fat the vicinity of the sound
source at low frequencies.
This effect can be solved by the usage of the particle
velocity itself for sound localization purposes.
{ } pu J
pu
Im 2 / 1 = Reactive intensity :
( )
field e e pu
I
I
J
I I tan 1 1
=
|
.
|
\
|
=
Calibration errors of P-U probes
48
One can state that if the measured phase of the sound field is less than 80 degrees
(less than 7dB of reactivity index), a calibrated P-U probe has a measurement error
less than 0.5dB
Measurements show that a phase
matching of 1 degree is possible with
a calibration based on a short
standing wave tube method or the
piston on a sphere method. The
enhanced calibration based on the
sound power ratio technique a phase
matching error of 0.15 degrees can
be obtained
Properties of P-U probes
49
Advantages
Small size. Point measurement
Usable for near field measurement
Broadband solution
Usable in reverberant conditions
Pressure and Velocity measured
almost in same point ( non
distributed sensor).

Disadvantages
Response decreases with frequency
Sensitive to DC flow
Accuracy is dependent into the
reactivity index

PU and PP performance comparisson
Experimental results
51
Sound intensity measurements of a broadband noise source using a P-U
probe (red) and a P-P probe (blue)
PP and PU intensity measurements
52
53
54
Difference
because of
area
assigned in
each method
Sound power measured at two surfaces
55
Expected 10,6 dB difference because of
dimensions
Dipole sound source

1 dB deviation because of bad
location of PP probe while
measuring

Sound power measured at two surfaces
56
After correction of
phase mismatch of
PU, intensity
graphs coincide
Very reactive
worst scenario for
PU probe

PU probes calibration method

Piston on a sphere
58
As there is not a reference particle velocity sensor the principle is to insert the
pressure and velocity sensors into a known sound field in which P and U are
related by the known acoustic impedance ( Z).
Problem: this is not possible for
all frequencies, low frequencies:
Lower loudspeaker radiation
Spherical waves

Solution: 3 step method
Step 1: High frequencies
Step 2: Low frequencies
Step 3: Combination
Applying the 3 steps the calibration is usable for 20-20KHz
Step 1: High frequency calibration
59
A known sound field is generated
Known relation between U-P via Z ( Z= P/U)
Usable for 100-20.000 Hz.

Step 2: Low frequencies
60
Loudspeaker cannot radiate as much energy as in high frequencies
Backgound noise too much influence
Different method:
Pref is inserted IN the sphere
U is located next to the membrane
Known noise field generated
From the relation of the difference in pressure inside the sphee and
the movement of the membrane, is obtained the response.
Usable until first mode of sphere
The phase is obtaine dbut the results magnitud is not
determined. Need of Step 3

Step 3: Combination 1 and 2
61
Not known magnitude of calibration at low frequencies because of lack
of:
Vo: exact sphere volume
Ao: piston area
R: exact distance to membrane
Step 1 and 2 overlay

Result
62
Result: non flat response of the sensor. Needs to be equalized via Signal
conditioner
+
3D intensity

3D sound intensity probes
64
The combination of 3 velocity
elements along with a
pressure sensor makes
possible to measure intensity
vectors in 3D

The small size of the 3D
intensity probe guarantee
that the four measured
quantities (
and )
are measured at the same
point in the space

65
Sound intensity streamlines of loudspeakers vibrating in phase
(left) and vibrating in anti-phase (right).
100Hz
66
Sound intensity streamlines of loudspeakers vibrating in phase
(left) and vibrating in anti-phase (right).
500Hz
67
Sound intensity streamlines of
a loudspeaker driven close to
a metal plate.
68
Noise mapping
69
Energy characterization and difussion
Measurement Techniques

Type of noises
72
Noise
Deterministic Non deterministic
Periodic Non periodic
Random Transient
Sinusoidal
Complex
periodic
Stationary
Non-
Stationary
Ergodic
Non-Ergodic
Deterministic noise
73
Deterministic: a signal whos values can be predicted from current or past
information
Numerical: denoted by a number or colletion of numbers
Analytic: denoted by an equation which defines the process.

Non deterministic noise
74
Random / Stochastic process: a function usually of time, that takes on a definite
wave form each time a chance experiment is performed that cannot be
predicted in advance.
DEF 2: a family of time dependent signals for which the value at a specific time
may be regarded as a random variable.
Stationarity: invariance of stadistical properties with respect to the time origin.
Narrow band process: stationary process in which significant samples
are limited to a slim band of frequencies in relation with a central
frequency of the band.
Color noises: narrow band processes which energetic content and
statistical properties are distributed in a certain manner
Wide band process: stationary process which significant values appear
in a range proportional of the magnitud of the central frequency of the
band.

Color noise
75
White noise is a signal/process with a flat spectrum. The
signal has equal power in any band of a given
bandwith.
Grey noise: is random white noise subjected to a
psychoacoustic equal loudness curve over a given
range of frequencies, giving the listener the
perception that it is equally loud at all frequencies
Pink noise: the frequency spectrum is linear in logarithmic
space, it has equal power in bands that are
proportionally wide.
Brown noise: stationary random signal who's power
spectrum falls of at a constant rate of 6 dB per octave
Violet noise: Violet noise's power density increases 6 dB
per octave with increasing frequency(density
proportional to f
2
) over a finite frequency range
Blue noise: Blue noise's power density increases 3 dB per
octave with increasing frequency (density proportional
to f ) over a finite frequency range

Transient noise
76
Impulse: unwanted, almost instantaneous (thus impulse-like) sharp sounds
Burst noise : sudden step-like transitions between two or more discrete levels
Sweep noise: a signal, commonly of constant amplitude, that locally resembles a
sine wave but whose instantaneous frequency changes with time
Chirp noise: rapid frequency sweep signal

Measurement techniques
Conventional measurement techniques

Point by point measurements
79
Suitable for:
Stationary noise
Measurement process:
Definition of an imaginary measurement
plane.
Definition of a grid on the plane
In every grid position perform a
measurement for every noise component
to be characterized
Result:
Vector per grid point.
Traditional scanning technique
80
Suitable for:
Stationary noise
Definition of an imaginary measurement plane.
Scanning of the whole interest area
Result:
Single intensity value per area promediated value

Simultaneous measurement
81
Suitable for:
Stationary noise
Transient noise
Allocation of sensors/ array deployment
Audio capture of several channels
Direct measurement, no signal
processing
Result:
Color maps of noise distribution in time

Advanced measurement methods
New scanning techniques: Scan&Paint
83
Suitable for:
Stationary noise
Definition of an imaginary measurement
plane.
Automatic post process assigning location
of probe- audio measurement
Result:
Color map of various indexes
Spectrograms of every located
measurement point
Global index to characterize an area

Intensity based sound source localization
84
Suitable for:
Any noise
Sensors allocation
Simple signal processing
Result:
DOA: direction of arrival of noise
Spectrograms of each 3D directions
Global and narrow band levels
Limitations:
Free field assumptions for simple
algorithm
Increase number of sensors to detect
coherent noise sources

Conventional beamforming
85
Suitable for:
Stationary noise
Transient noise
Definition: Signal processing techniqued ised in arrays for directional signal
transmission . This directional information is obtained by combining elements in
the array
Allocation of sensors/ array deployment
Audio capture of several channels
Beam forming signal processing
Result:
Color maps of noise distribution
Limitations
Frequency limitations by spacing and array size
High cost

Holography
86
Suitable for:
Stationary noise
Definition: Method to estimate the sound field near a source by measuring
acoustic parameters away from the source via an array of pressure and/or
particle velocity transducers.
Processing after acquiring information from array
Result:
Color map of the interest area
Limitations:
Frequency limitations because of spacing and array dimension
Assumes free field
Regular grid
Heavy calculations
High cost
Airborne transfer path measurements
87
Suitable for:
Stationary noise
Combination of the characterization of a noise source
with the propagation path to the listener in order to
obtain information about the contribution of a specific
noise in the whole perceive sound pressure level
Measurements divided in two steps: source and
transfer path characterization
Result:
Noise source listener ranking
Limitations:
High cost
Typically measured in reverberant environments
Surface noise source detected not structural problems

S

Virtual arrays beamforming
88
Suitable for:
Stationary noise
Deffinition of an imaginary measurement plane.
Measurement of two reference positions
Automatic post process assigning location of probe-
audio measurement
Result:
Color map of various indexes
Spectrograms of every located measurement point
Global index to characterize an area and noise source
location
Limitations:
Size and distance
Heavy calculations

Advanced measurement techniques:
Scan & Paint

Scan&Paint principle
91
The PU probe is moved along
the virtual plane while the
movement is recorded by
the video camera.

The location of each measured
position is extracted from
the video and synchronized
with the 2 audio channels.

Scan&Paint principle
92
Pressure Velocity
Scan&Paint principle: post-processing
93
Two methods to cover the full
frequency range:
- Velocity method (for low
frequencies)
- Intensity method (for high
frequencies)

Low frequencies
94
In the near field of the surface the particle velocity is equal to the surface
velocity. The influence to background noise is low.

At higher frequencies the velocity method fails because:
The area of consistent velocity is too small. There are many modes
in the material which require many measurement points
The sensor is not in the near field any more
High frequencies
At high frequencies the sensor is not in the (very) near field any more and
the intensity is used. There are no P-I index problems like with P-P intensity
probes

At low frequencies the intensity method fails because the sound source is
too reactive
Measurement procedure
Measurement procedure
96
Measurement examples
Scan & Paint
Example 1: Large gas turbine enclosure
There are big stationary engines ( used for Heat & Power )
The goal was to measure the performance of the special designed enclosures.
Specially regarding acoustic leakages. With Scan & Paint we could perform the
measurement on a large surface in short time period in highly reverberant
conditions.

98
Scan & Paint
Selection of measurement points on the backside of the housing
99
Scan & Paint
Velocity map at 65Hz
100
Scan & Paint
Low frequency High frequency
101
Scan & Paint
Example 2: Building acoustics
102
Scan & Paint
103
Example 3: Leak detection in buildings
Studying the spectra of
different areas allows to
produce narrow band maps
focused on detecting
weaknesses

This technique is suitable for
localizing acoustic leakage
with a very high spatial
resolution in a clear and easy
way
Scan & Paint
Example 4: Automotive | Comparison test of compo-
nents in a windtunnel
See the effect of the noise due to windflow
related to the interior noise when using
different type of components or make
adjustment to the components used on the
outside of a car like a mirror or window wiper.

The test are performed with the car in a
windtunnel when using Scan & Paint to map
the effect to the noise in the interior inside
the car.

104
Scan & Paint
Left the velocity map of the standard wiper and right the velocity map of
the wiper with adjustments made.

105
Scan & Paint
Left the velocity map of the car without rearview-window and right the
velocity map of the car with the rearview-window.

106
Scan & Paint
Example 5: Automotive | Optimization material package
To see where to place absorbing
materials effectively and measure the
effect after installing the materials. First
the door was measured without
materials and secondly with materials
placed based on the first measurement.
A sound source is positioned in the
interior and with pink noise as
excitation.

107
Scan & Paint
Example 5: Automotive | Optimization material package
Door | no damping Door | with damping
108
Scan & Paint
Example 6: Automotive NVH| Component optimization
The opening of the ventilation
system of the dashboard show
important acoustic leakages

The shell radiation of an intake system
is measured on the test bench exciting
the plastic filter with white noise from
a loudspeaker

109
Scan & Paint
Example 6: Automotive NVH| Component optimization
A volume super-charger show the crank
frequency emission from the aluminum
case.
The intake system radiation at lower
frequency in engine running condition
can be optimized
110
Scan & Paint
Example 7: Automotive NVH| Sound source localization
Exterior noise of a car. The colormap
show the engine radiation through the
weak areas.
The front part of the engine without
cover show high velocity emission.
111
Scan & Paint
Example 8: Electronic / white consumer goods
Optimize the noise performance of a washing
machine. Localize the hotspots suggest and
adapt changes and compare result.

Overall result of this case: 4dB lower Sound
Power ( measured by the standard sound
pressure method )

112
Scan & Paint
Example 8: Electronic / white consumer goods
200Hz
Dominant source
113
Scan & Paint
0.5Kg damping
72dB PVL 68dB PVL
114
Scan & Paint
Example 9: Electronic goods | Commercial printer
Optimize the noise performance of a printers
developed for offices. Localize the origin of the
noise problem.

115
A mode is created in the
backplate. This mode made the
printer very noisy but the origin
causing the mode was needed
to be localized.
Scan & Paint
With Scan & Paint the gear
wheel that was causing
structure borne noise ( the
created mode in the
backplate).

The amount of teeth, the
material of the gear wheel
or the connection with the
backplate could be options
to reduce this structure
borne noise.

116
Scan & Paint
117
Scan & Paint
Example 10: Electronic goods | Clima and Microwave
With Scan & Paint low frequency noise
from the cooling system (airflow)can be
separated by the noise coming from the
body frame of the clima.

The button panel on the right
side show higher sound emission
above 2000Hz.

118
Scan & Paint
Example 11: Ground Vehicles | High speed train | In situ
transparency measurements
In situ transparency measurements
using Scan & Paint were performed
as alternative to the traditional
transmission loss measurements.
Mainly to identify positions of
leakages.

119
Scan & Paint
The pressure distribution (and the velocity distribution) is
measured both out and inside the train, to correct the non-
uniformity of the sound field as the excitation pattern
(emitter side).
The average velocity over the surface is calculated for both
sides, and a simple formula is applied to estimate the
transmission loss from the velocity or so called the
transparency:

120
Scan & Paint
Inside TGV velocity distribution Outside TGV velocity distribution
121
Scan & Paint
122
Scan & Paint
Example 12: Industrial machinery | Sound source localization
Industrial machinery can be tested in
non-anechoic conditions.

123
Scan & Paint
Example 13: Airplane | Leakage detection
Acoustic leakage on a plane section. The
sound is generated out from the plane to
simulate the engine noise level.
124
Scan & Paint
Example 14: Airplane | In situ absorption
The Scan&Paint
absorption show
the effect of the
flame cover on a
plane seat.

The colormap of
absorption can
be calculated
measuring with
the impedance
gun.
125
Scan & Paint
Example 15: Absorption & Reflection coefficients
126

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Too high frequency: the wavelength is

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