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表面电阻率测试标准
表面电阻率测试标准
1.1Todefinetherequirementsandproceduresofsurfaceresistivitytest.
2 Scope:
2.1Thetestmethoddescribedinthedocumentcoverdirectcurrentproceduresfor
thedeterminationofDCsurfaceresistanceandsurfaceresistivityofelectrical
materials.
2.2Thisdocumentshallbeapplicabletosolidmaterialsandproducts usedand/or
producedby PEAK,exceptofmetalmaterials..
,
/
3 Instrument
3.1MCPHT260 Resistivitymeter
MCPHT260
3.2ModelPSI870SurfaceResistance/ResistivityIndicator
PSI870 /
3.3PRF912 miniatureconcentricringfixture
PRF912
3.4SRM110SurfaceResistivityMeter
SRM110
4 External Referencedocuments:
4.1ASTMD25793StandardtestmethodsforDCresistanceorconductanceof
insulating materials
4.2ASTMD4496:TestmethodforDCresistanceorconductanceofmoderately
conductivematerials
5 Definitions
5.1 ModeratelyconductiveDescribeasolidmaterialhavingavolumeresistivity
between1and 10,000,000ohmcm.
1010,000,000ohmcm
5.2Surfaceresistance(Rs)TheratiooftheDCvoltageappliedtothetwoelectrodes
(onthesurfaceofaspecimen)tothecurrentbetween them.expressedin
ohm.(symbolis)
(Rs)
ohm,
5.3Surfaceresistivity(s)Thesurfaceresistancemultipliedbythatratioofthe
specimen dimensions(widthofelectrodesdefiningthecurrentpathdividedby
the distancebetweenelectrodes)whichtransformsthemeasuredresistanceto
thatobtainediftheelectrodeshadformedtheoppositesidesofasquare.
Remarks: Surfaceresistivityisexpressedinohms.Itispopularlyexpressed also
asohms/square.(thesizeofthesquareisimmaterial).
(s)
ohm, /
ohms/square
6
GeneralRequirements:
6.1Thelabassistantinvolvedinthemeasurementshallbetrainedandcertified.
7 Testspecimen
7.1Thespecimenmaybeofanypracticalformconsistentwiththeparticular
objective,suchasflatplates,tapesortubes.
7.2A minimumofthreespecimenisrequired.
8 Conditioning.
8.1Unlessotherwisespecifiedorrequired,thespecimenshallbeconditionedunder
theconditionof232Cand505%RH.
232C 505%
TestProcedureforMCPHT260
MCPHT260
9.1 Operation environmentfortheinstrumentis: temperature:0~40C,relative
humidity below80%.
0C40C 80%
9.2 Turnonpowerswitch
9.3 Push[PROBE]keytosetprobetypeasHRS.Eachtimekeyispushedprobe
typeindicatorchange.HRSturnson atthesametimeresistivitycorrection
factor10.09showsindataindicator.press[ENTER]keytofinishthesetting
[PROBE] HRS[PROBE]
HRS 10.09
[ERTER]
9.4 Push[TIMER]Keytosettesttime.Generallychoose10seconds.
[TIMER], 10
9.5 Push[SPLYVOLT]key toselectsuppliedvoltage.Eachtimekeyispushed,
suppliedvoltageindicatorchangedaccordingly.refertoTable1toselecta
suitablevoltage:
[SPLYVOLT] 1
9.6 Push[AUTO/MANUAL]key selectmeasuringrangemode.by and key.
[AUTO/MANUAL],
ohm,
1
10
1041010
1.00X1049.99X1010
2
100
1061011
1.00X1069.99X1011
3
250
1061011
1.00X1069.99X1011
4
500
1071012
1.00X1079.99X1012
9.6.2Atmanualmode,mostsuitablerangecanbeset.however,itneedtodo
measurementinautomodefirsttogetthewholerangeofsurfaceresistivity
ofthematerial
MANUAL
,
9.7 Push[SINGLPRNT]keytosetprintmode.selectsingleprintmode.eachtime
measuringiscompleted,measuringdataisprintout.
[SINGLPRNT],SINGLE
9.8 Push[UNIT]keytoselect/asmeasuringunit.
[UNIT]/
9.9 Placethesampleontheinsulativesideofsupportplate,thenpresstheMCP
probeagainstsampletoensurethesurfaceofelectrodeandsampleinfullyand
intimatelycontact.
MCP
9.10Push[START/HOLD]key,measurementstart,theMEASURElightsonand
twinklesduringmeasurement.
[START/HOLD]MEASURE()
9.11 Duringmeasurement,S.Rdataisindicatedatmeasureddataindicator.
9.13Repeat step9.99.12tostartanothertest..
9.99.12
9.14 Turnoffthepowerwhentestfinished.
10 TestProceduresforSRM110
SRM110
10.1Generaldescription.
10.1.1
Table2detailedthereadingsandcorrespondingeffective
measurementrangeofSRM110.
SRM110 2
Table2 Readingsandcorresponding effectivemeasurementrangeofSRM110
2 SRM110
No.
1
2
3
4
5
6
7
Displaysegment
(ohms/sq.)
104
105
106
107
108
109
1010
Effectivemeasurementrange
(ohms/sq.)
<104
104105.5
(1043.16x105)
5.5
6.5
10 10
(3.16x1053.16x106)
106.5107.5
(3.16x1063.16x107)
107.5108.5
(3.16x1073.16x108)
108.5109.5
(3.16x1083.16x109)
109.51010.5 (3.16x1093.16x1010)
1011
1012
1012.5
8
9
10
101051011.5 (3.16x1010
1011.51012.5 (3.16x1011
>1012.5
(>3.16x1012)
10.1.2
Whenpoweronthemeter,checkifthebatteryofthemeterisfully
chargedornot.Ifthelowbatteryindicatorlampisonrefertofig.2.It
needtoberechargedPleaserechargeitwithsuppliedchargerforabout12
hours.inadvance(refertotheSRMmanualforrechargingtimeofthe
battery)anditcannotbeusedduringcharging.
2 12
10.2Placespecimensonan insulativeflatsurface.
10.3SwitchontheSurfaceResistivityMeter(SRM)andplaceitonthespecimen. as
indicatedonFigure1,AndthencheckthereadingsontheSRM
(SRM) 1
SRM
S R M 1 1 0
S A M P L E
Fig.1: Demonstrationofsurfaceresistivitytest
1
10.4 Duringthetest,besurethattheparallelbarorthefootelectrodesofthe
SRMisfullyandintimatelycontactwiththesamplesurface.ReferFigure2.
2
O F F /O N
L O W
B A T T E R Y
S W I T C H
S R M 11 0
S A M P L E
F O O T
( E L E C T R O D E )
Fig 2:DemonstrationofsurfaceresistivitytestII
2II
10.5Ifnecessary,recordthereadingsoftheSRM110inthedatarecordsheet.
11 TestProceduresforPSI870
PSI870
11.1GeneraldescriptionofPSI870
PSI870
11.1.1
Figure3detailedthename
ofeachpartoftheinstrument.
3 .
11.1.2
ThePSI870haseleven(11)
LEDsprovideresistance(lowerscale)
and
resistivity
(upper
scale)
measurementindicationinonedecade
increments.
PSI870 11 LED
Figure3:DemonstrationofPSI8
3 PSI870
11.1.3
The decade changeover point from one decade to another is 1/2
decade on logarithmic scale, i.e,3.16x10n. see table 3 for
detail..
1/2
3.16x10n, 3
Table3 Readingsandcorrespondingeffectivemeasurementrangeof PSI870
3 PSI870
No.
Readings
Effectivemeasurementrange
(ohmsorohms/sq.)
(ohmsorohms/sq.)
2
10 (LOWERscaleonly)
1
3.16x1013.16x102
2
103
3.16x1023.16x103
3
104
3.16x1033.16x104
4
105
3.16x1043.16x105
5
106
3.16x1053.16x106
6
107
3.16x1063.16x107
7
108
3.16x1073.16x108
8
9
10
11
12
109
1010
1011
1012UPPERscale only
Insulative
3.16x1083.16x109
3.16x1093.16x1010
3.16x10103.16x1011
3.16x10113.16x1012
>3.16x1011 ohmsor>3.16x1012
ohms/sq.
11.1.4
Instrumentresolutionisoneorderofmagnitude.
11.2Initial OperationalCheck
11.2.1
OnceanewbatteryisinstalledinthePSI870,oreachtimethe
instrumentisused,andwhenevertheinstrumentsperformanceorbattery
functionareinquestion,checkitsinitialfunctionasfollows.
11.2.2
Placetheinstrument,withelectrodesdown,onacleanmetalflatplate.
MeasuretheresistanceoftheplateusingtheoperationproceduresA
describedinnextparagraph.
11.2.4Placetheinstrument,withelectrodesdown,onacleanplasticinsulatingflat
plate.Measuretheresistanceoftheplate.
11.2.5 IftheREDLEDlocatedattherightendofthescalebriefly,thentheRED
centerpanelExceedsPSI870RangeLEDshouldlight.Thisindicatesa
veryhighresistanceinsulativematerialmeasurement.Otherwiseitmeans
theunitisnotfunctioningproperly,orthebatteryisdead.
LED PSI870
ExceedsPSI870Range LED
11.2.6
Iftheinitialoperationalcheckisok,thenproceedtomeasurement
procedures.otherwise,changebatteryorhaveauthorizedpersonnelcheck
andfixedtheproblem.
11.3ProcedureA:measurethesurfaceresistivitywiththebrassbarelectrodes.
A
11.3.1
Placethesampletobemeasuredonaninsulativeflatsurface
11.3.2
Placetheelectrodeswitchontopoftheequipmentto
theELECTRODESOFFposition.rightside
ELECTRODESON
11.3.3
PlacethePSI870onthesurfacetobemeasured,electrodesdown
againstthetestmaterial.Makesuretheelectrodeswitchisin
theELECTRODESONposition.
PSI870
11.3.4
Applyanproperandbalancedforcebyhandsothatthefulllengthof
eachelectrodeismakingevencontactwiththesamplesurface.Otherwisea
measurementerrorofuptoonemagnitudemayoccur
11.3.5
PlaceyourindexfingerdirectlyontheGREENPresstoTestbutton
andpushingthePresstoTestbutton.
PresstoTest
11.3.6
ContinueapplyingsteadypressureuntiloneLEDremainson,indicting
astablemeasurement.(Approximately5seconds)
LED 5
11.3.7
ReadtheLEDindicationfromtheUPPERscaletogetsurface
resistivityohms/square.
LED
11.3.8
ReadtheLEDindicationfromtheLOWERscaletogetsurface
resistanceinohms.
LED
11.4ProcedureB:measuresurfaceresistivitywiththePRF912microprobe
B PRF912
11.4.1ConnecttheadditionaltestcabletoPRF912byBNCconnectionsystem
Locatethe2lockingstudsonthefixturesmaleconnector.Matchthemto
groovesofthefemaleconnector.Thensimplypushandtwistthefemale
connectorclockwiseuntilitlocksontothefixture.
Refertofig3.
PRF912
2
3.
Fig.3ConnectadditionalcabletoPRF912sBNCfixture
3 PRF912
11.4.2
Placetheelectrodeswitchontopoftheequipmentto
theELECTRODESOFFposition.
ELECTRODESOFF
11.4.3
Insertoneleadofthecableintoeachinputjackoftheresistance
referenceinput&Auxiliaryconnectionsatthetopendoftheunit.
11.4.4
PlacethePRF912verticallyonthetestareaandlowerituntilthe
springloadedcenterelectrodemakesdirectcontactwiththematerialunder
test..
PRF912,
11.4.5
Applysufficientpressureontheprobeuntilthecenterandouter
springloadedelectrodearepartiallycompressedwhileincontactwiththe
testmaterial.Thiswillinsurereproduciblemeasurement
,
11.4.6
HandheldthePSI870,,thenpushthegreenPresstoTestbuttonon
thefrontofthepanel..
Note:beingcarefulnottotouchthebrasselectrodesbyyourbodyor
materials.duringthetestmode,otherwisetheindicatedreadingmaybe
affected.
PSI870PresstoTest
11.4.7
ContinuepushingthePresstoTestbuttonuntiloneLEDremains
on,indicatingastablemeasurement.(about5seconds).
LED 5
11.4.8
ReadtheLEDindicationfromtheUPPERscaletogetsurface
resistivityohms/square.
LED
11.4.9
ReadtheLEDindicationfromtheLOWERscaletogetsurface
resistanceinohms.
LED
11.5ProcedureCmeasurementofpointtopointresistance.
C
11.5.1
Connecttheadditionaltestcabletostandardbananaplugthrough
BNCconnectors.referto11.6.1forconnectionprocedure.
11.6.1
11.5.2
Otherfixtures,NFPAelectrodes,extendedleads,clipsorclampscan
beconnectedtoaboveassemblytomeasuregeneralresistanceofother
materials.
11.5.3
Placetheelectrodeswitchontopoftheequipmentto
theELECTRODESOFFposition.
ELECTRODESOFF
11.5.4
Insertoneleadintoeachinputjackoftheresistancereferenceinput
&Auxiliaryconnectionsatthetopendoftheunit,
11.5.5
Positiontheplugsdirectlyovertestarea,apply appropriatepressure
ontheplug toinsurethetwotipsoftheplugare inintimatecontactwiththe
testmaterial.Thiswillinsurereproduciblemeasurement.
11.5.6
HandheldthePSI870,beingcarefulnottotouchthebrasselectrodes,
thenpushthePresstoTestbuttononthefrontofthepanel.
PSI870PresstoTest
11.5.7
ContinuepushingthePresstoTestbuttonuntiloneLEDremains
on,indicatingastablemeasurement.(about5seconds).
LED 5
11.5.8
TheresistanceinOhmsbetweenthetwotippointsisreadfromthe
UPPERscaleabovetheLEDs.
NoteTheUPPERscaleunitofmeasureinthisRttmeasurementmodeisohms,
notohms/sq.
ohm,
LED
ohm,.
12 TestReport
12.1Followinginformationshallbeincludedintheformaltestreportatleast.
12.1.1
Adescriptionandidentificationofthematerial.
12.1.2
Shapeanddimensionsofthetestspecimen
12.1.3
Typeoftestinstrument.
Conditioningofthespecimen.hoursathumidityandtemperature,etc.
12.1.4
Testconditionsandparameters.
12.1.5
Measuredvaluesofsurfaceresistanceand/orresistivity.
/
13 Others
13.1Formoreinformationon,pleaserefertotherespectiveoperationmanualofeach
instrument.