Cleanroom Class Limits and Certification

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Cleanroom Class Limits

Class limits (maximum allowable particles)

ISO
CLASS
CLASS
CLASS
CLASS
CLASS
CLASS

3
4
5
6
7
8

FED STD 209E

0.1 m

0.3 m

0.5 m

1,000 / 35

102 / 3

35 / 1

5.0 m

10

10,000 / 350

1,020 / 30

352 / 10

100

100,000 / 3,500

10,200 / 300

3,520 / 100

1,000

1,000,000 / 35,000

102,000 / N/A

35,200 / 1,000

10,000

350,000

N/A

352,000 / 10,000

70

1000,000

3,500,000

N/A

3,520,000 / 100,000

700

ISO 14644-1 (per cubic meter)

Fed Std. 209 E USA (per cubic foot)
ISO standard requires results to be shown in cubic meters (1 cubic meter = 35.314 cubic feet)

Cleanroom Class 1

540 to 600+ air changes per hour (98%+ ceiling coverage)

ULPA filters (99.9995% on .12 microns)
Gel/Flush grid ceiling systems with raised floors are required
Outside/makeup air to be prefiltered with a HEPA filter

Cleanroom Class 10

540 to 600 air changes per hour (85-90% ceiling coverage)

99.999% on 0.3 microns, with a raised floors
90%+ coverage with low wall returns
Gasketed grids with negative plenums acceptable
HEPA filters on makeup air

Cleanroom Class 100

400 to 480 air changes per hour (60-80% ceiling coverage)
99.99% HEPA filters
Raised floor assures optimal performance. Low wall returns work when they are no further than 12' from the
center of the room
Gasketed ceiling grid

Cleanroom Class 1,000

120 to 150 air changes per hour (40-50% ceiling coverage)

99.99% HEPA filter
Gasketed ceiling grid
Raised floor delivers best performance, but low wall returns are very common

Cleanroom Class 10,000

45 to 60 air changes per hour (10-20% ceiling coverage)
99.97% or 99.99% HEPAs
Low wall or ceiling returns acceptable in most applications

http://www.modularcleanrooms.com/class.html

06/09/2013

Cleanroom Class Limits and Certification

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Cleanroom Class 100,000

20 to 30 air changes per hour (5% ceiling coverage)
HEPA filters or 95% HEPAs (95%+ ASHRAE box filters) located downstream of the HVAC unit
Heat load may require more air changes
1. Room layout with equipment must be evaluated to look for return air paths and possible cross contamination.
2. 95% ASHRAE filters when new may only be 70% and could affect the particle level.

Important point to consider concerning filter coverage

A 300 sq. ft. cleanroom may need 90% coverage (38 HEPAs) for Class 100 at the "operational" mode, 60%
coverage (23) in the "at rest" mode, and only 40% (15) to meet Class 100 at "as built". The same rules can
and do apply to Class 1,000 and Class 10,000 levels.

Modular Cleanrooms Inc.

3740 Paris Street
Denver, Colorado 80239

1-800-496-7666 Toll Free U.S.A.

1-303-371-0272 International Calls
1-303-371-0270 Fax

Tap-To-Call Toll Free U.S.A. (tel:+18004967666)

Tap-To-Call International (tel:+13033710272)

ModularCleanrooms.com (http://www.modularcleanrooms.com)
sales@modularcleanrooms.com (mailto:sales@modularcleanrooms.com)
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http://www.modularcleanrooms.com/class.html

06/09/2013