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GNN3 - A. Downard, New Zealand
GNN3 - A. Downard, New Zealand
Alison Downard
MacDiarmid Institute for Advanced Materials and Nanotechnology
Department of Chemistry, University of Canterbury
Christchurch, New Zealand
The MacDiarmid Institute is a virtual
institute with researchers located at
universities and Crown Research
Laboratories throughout NZ
Auckland
Multilevel nanoimprint
a) Optical micrograph
of a large scale 3D
map of NZ in
developed resist.
b) Imprinted pattern
from SiN mold
N
N
5
nm
5
μm
330nm period dot pattern formed by IL
Oxford Plasmalab
Plus80 RIE system
DI3100 AFM
Molecular Beam Epitaxy
Edwards AUTO500
Sputterer