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Nhom 20 - Cac Phuong Phap Gia Cong Vi Co
Nhom 20 - Cac Phuong Phap Gia Cong Vi Co
MEMS l cc h thng vi c in c kch thc cc chi tit nm trong thang o Micromet. Trong phn ny chng ta s kho st cc phng php ch to cc b phn ca MEMS nh bnh rng, dy xch, u d, thanh chn ang c s dng hin nay, gm 3 loi chnh: gia cng khi, gia cng b mt, LIGA. Ngoi ra cn c gia cng s dng tia LASER
Hinh 1
Hinh 2
B n mon s dng cho tm wafer 4inch ca vin cng ngh LAAS Toulouse Php.
Lp u tin c th l lp cch in hay lp hy sinh, thng lm bng SiO2 c ngng t trn b mt tm nn bng phng php kch thch nhit. dy ca lp Oxit c th c iu khin bi mc nhit v m. nhng lp tip theo cng l nhng mng mong bng silicon nitride. Nhng lp ny c ph bng phng php ha l ph t pha hi - CVD. Kim loi v hp kim c ph ln bng phng php Spider in hay Evaporation.
Phng php ny c dng ch to ra nhiu chi tit s dng cho thng mi nh cc b phn ca my tnh, Iphone, xe hi, cc cm bin, b truyn ng siu nho, th RFID ...
Comb Driver
Micro Actuator
Cc giai on ca k thut LIGA kh ging vi 2 k thut surface v bulk: Deposit Expose Develop Electroform Planarize Strip Release
Vt liu nhy sng: PMMA (polymethyl methacrylacte) hay Pleaxiglass Lp mt n c lm bng ng hoc vng (vt liu khng cho tia x truyn qua) t trn tm vt liu cho tia x truyn qua (Beryllium). Ngun sng thng s dng tia X (ly t my gia tc). Deposit: ph 1 lp vt liu nhy vi tia X nh PMMA ln b mt tm bn dn. Expose: tip dng k thut quang khc to mt n khun ri dng tia X chiu ln.
Develop: loi bo i phn vt liu b tia X chiu vo ta c khun ca chi tit. Electroform: tin hnh m in ln phn khun.
Planarize: tin hnh CMP mi phng phn chi tit li ln. Strip: loi bo phn vt liu nhy tia X ban u (PMMA). Release: ly chi tit ra khoi tm nn. Sau y l qu trnh ch to bnh rng bng phng php LIGA
Cu hoi trc nghim: 1. Ti sao phi thc hin tin trnh khuy khi tin hnh phng php n mn t ng hng. a. Do tc n mn ca lp mt n chm hn so vi lp nn. b. Do mt phn b cc ht trong tm nn khng ng u. c. Do tc n mn ca hn hp n mn i vi mt bn chm hn so vi hng khc. d. ha tan hn hp cht n mn. 2. Trong phng php gia cng vi c b mt, cn phi to bao nhiu lp hy sinh? a. 1 b. 2 c. 3 d. Ty theo cu trc ca chi tit cn ch to. 3. Trong k thut LIGA, c im no u th hn so vi phng php Surface v Bulk? a. C kh nng ch to chi tit c cu trc phc tp vi t l hnh dng cao. b. C chi ph sn xut r hn. c. Phng php tin hnh n gin.