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  • Simplified CMOS Process: Amir M. Sodagar

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    The document describes the simplified CMOS process for fabricating a basic CMOS chip. It involves growing silicon dioxide layers on a p-type silicon wafer and creating n-well and p-well regions through doping. Metal layers and contacts are then added to connect the n-type and p-type transistors on the chip. The process is illustrated over 15 steps.

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    The document describes the simplified CMOS process for fabricating a basic CMOS chip. It involves growing silicon dioxide layers on a p-type silicon wafer and creating n-well and p-well regions through doping. Metal layers and contacts are then added to connect the n-type and p-type transistors on the chip. The process is illustrated over 15 steps.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
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    Download as pdf or txt
    24 views15 pages

    Simplified CMOS Process: Amir M. Sodagar

    Uploaded by

    api-3804613
    The document describes the simplified CMOS process for fabricating a basic CMOS chip. It involves growing silicon dioxide layers on a p-type silicon wafer and creating n-well and p-well regions through doping. Metal layers and contacts are then added to connect the n-type and p-type transistors on the chip. The process is illustrated over 15 steps.

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    of 15

    Simplified CMOS Process

    Amir M. Sodagar K.N.Toosi University of Technology 1


    Simplified CMOS Process

    SiO2

    Si wafer, p-substrate

    SiO2

    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 2


    Simplified CMOS Process

    SiO2

    Si wafer, p-substrate

    SiO2

    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 3


    Simplified CMOS Process

    SiO2

    N-Well

    Si wafer, p-substrate

    SiO2

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 4


    Simplified CMOS Process

    SiO2

    N-Well

    Si wafer, p-substrate

    SiO2

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 5


    Simplified CMOS Process

    SiO2

    N-Well

    Si wafer, p-substrate

    SiO2

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 6


    Simplified CMOS Process

    SiO2

    N-Well

    Si wafer, p-substrate

    SiO2

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 7


    Simplified CMOS Process

    SiO2

    N-Well

    Si wafer, p-substrate

    SiO2

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 8


    Simplified CMOS Process

    SiO2

    N-Well

    Si wafer, p-substrate

    SiO2

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 9


    Simplified CMOS Process

    SiO2
    n+ n+

    N-Well

    Si wafer, p-substrate

    SiO2
    n+ n+

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 10


    Simplified CMOS Process

    SiO2
    n+ n+ p+ p+

    N-Well

    Si wafer, p-substrate

    SiO2
    n+ n+ p+ p+

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 11


    Simplified CMOS Process

    SiO2
    n+ n+ p+ p+

    N-Well

    Si wafer, p-substrate

    SiO2
    n+ n+ p+ p+

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 12


    Simplified CMOS Process

    SiO2
    n+ n+ p+ p+

    N-Well

    Si wafer, p-substrate

    SiO2
    n+ n+ p+ p+

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 13


    Simplified CMOS Process

    Metal
    SiO2
    n+ n+ p+ p+

    N-Well

    Si wafer, p-substrate

    Metal
    SiO2
    n+ n+ p+ p+

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 14


    Simplified CMOS Process

    rc
    e n r ce n
    u te ai u ate rai
    So G a D r So G D
    Metal
    SiO2
    n+ n+ p+ p+

    N-Well

    Si wafer, p-substrate

    Metal
    SiO2
    n+ n+ p+ p+

    N-Well
    Si wafer, p-substrate

    Amir M. Sodagar K.N.Toosi University of Technology 15

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