Micro sensors and actuators

Lecture 2
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Lecture Outline
Reading:
Todays lecture
Introduction CMOS GDS Layout to Fabrication
layout CAD
klayout
Beam design
CMOS GDS Layout to Fabrication
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CMOS Inverter
KJ Chang, 2009
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CMOS Silicon Wafer
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Thermal Oxide
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CVD Oxide
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CMP Planarization
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Photo Mask (asl called Reticle)
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Photoresist
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Light to Create Patterns on Wafer
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UV Light, Mask, and Wafer
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Etch after UV Light
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Doping of Ions also Called PIMP
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Notch for
alignment
Wafer and Notch
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Lightly Doped Drain and Silicide
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Damascene for Copper
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Dual Damascene for Copper
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Design Rules
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Enclosure Rules for Contact/Via
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Misalignment in Thin Film
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Extended Gate for Manufacturing
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vert
lat
r
r
1 A
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klayout
klayout is a software tool for creating designs for microfabrication
Download site: http://www.klayout.de
Install klayout
Copy *.rbm to the installation directory
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Exercise 1: Start klayout
Toolbars can be enabled and disabled by right-clicking in the
empty space in the upper toolbar.
File/Setup
Grid Units category. Observe that the Display and snapping are set
to (0.01 m)
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Exercise 2: Setting up drawing layers
Edit\Layer
Create layers. 1 ,2 and 3.
choose layer toolbox. Set the color and stipple.
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Drawing Simple Shapes
Active Layer
Edit/Mode/Box
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Selecting
Esc: stop command
Edit/Select
Left mouse button
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Scrolling and Zooming
Scrolling
the arrow keys
Zooming
the scroll wheel
Display/Zoom
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Move to Layer
Left mouse button
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Moving and Sizing
Edit/Mode/Move
Edit/Properties
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Practice
Draw a box, you first specify one point for a corner:
(10,10)
and then another point for the opposite corner
(20,20)
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Technology file
File/Load Layer Properties: select polymumps.lyp
When you send a GDS file to someone else, you should also send a
Technology file so that they can view the design in the same way
that you see it.
To load a cadence technology file
File/Import Candence Tecfile: be sure both polymumps.tf and
display.drf are in the same directory.
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Hierarchical Design
Hierarchical design is based on grouping parts of the layout into
cells, which can then be re-used and combined to create complex
designs.
Ex.
Draw two boxes in different layers, one inside the other. Rename this
cell to box1, using Edit/Cell/Rename cell.
create another new cell and rename it anchor
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to add a reference to the cell box1 in anchor.
Edit/Mode/Instance.
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Advantage
simply update the parent cell, and all of your designs will be
automatically updated.
significant memory usage and computer performance advantages
for layouts that use cells over layouts that draw every feature as a
new shape (a flat design).
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Selecting and Viewing Cells
View/Cells
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Creating, Adding, and Deleting Cells
Edit/Cell/New cell
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Instances of cells are deleted from a drawing using Edit/Cell/Delete
Cell. This is a select-first command; select the cell, then choose the
delete command.
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Instances of cells in a drawing can also be converted to shapes.
This is called flattening a cell. The command Edit/Cell/Flatten
cell.
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Tutorial: Beam Design
(Coventor, Inc., 2008)
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(Coventor, Inc., 2008)
Nitride: isolation
Boron phospho-silicate glass (BPSG): sacrificial layer
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Layer
Substrate: define the boundaries of the active area
Nitride
0.2 m
Poly0
Mask name: poly0
Resist1: PSG1
2 m
Anchor1: define anchor
Mask name: anchor1, color yellow
Poly1: etch poly1
Mast name: poly1, color Red
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3D model
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View cross section
Copy the ruby module "xsection.rbm" to the installation path of
KLayout. That is the place where the KLayout binary is installed.
In order to use the cross section generator, a description of the
process must be provided. Such a description is stored in files with
extension ".xs". They contain a step-by-step receipe how the layer
stack is formed. Statements will describe individual process steps
such a etching, deposition and material conversion (i.e. implant).
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View Cross Section
Tools/XSection Scripts/XSection Script" opens a file browser and
you are prompted for the .xs file
To create a cross section
draw a ruler into the layout indicating the line along which the cross
section is created.
Choose "Tools/XSection Scripts/XSection Script" to select the ".xs"
file and to generate the cross section in a new layout window.