Capacitance Measurement

Apr. 2012
LCR Division
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LCR Division
CONTENTS
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1. Introduction
2. LCR meters and Measurement Principle
2-1. LCR meters
2-2. Measurement Theory
2-3. ALC Function for High CV 2 3. ALC Function for High CV
3. Characteristics of MLCC
3 1 T t Ch t i ti 3-1. Temperature Characteristics
3-2. DC Bias Characteristics
3-3. AC Voltage Characteristics
3-4. Aging Characteristics
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3-5. DC Bias Aging Characteristics
1. Introduction
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A capacitor is an electrical device that can store energy in the electric field between a pair of closely spaced
conducting plates. Capacitance value means the measure of how much charge a capacitor can store at a certain
lt C it f MLCC h ld b d d i t i diti h t t voltage. Capacitance of MLCC should be measured under appropriate measuring conditions such as temperature,
voltage (AC/DC), and frequency. Especially, when you measure a high dielectric MLCC (Class II: X7R, X6S, X5R,
Y5V) by LCR meter, you may be careful to obtain a reasonable capacitance using specified measurement conditions.
Before measurement, the equipment should be used with correct meter setting and have the capability required for
t it t Th t l t diti f it f Cl I d II MLCC accurate capacitance measurement. The actual measurement conditions of capacitance of Class I and II MLCCs are
shown in tables below. The temperature used for these conditions is 25 degree.
CLASS I
Nominal Capacitance Frequency Voltage(AC) Voltage(DC)
1,000pF 1MHz 10% 0.5~5Vrms
(Generally 1Vrms)
No Bias
CLASS I
(Generally, 1Vrms)
> 1,000pF 1KHz 10%
CLASS II
Nominal Capacitance Frequency Voltage(AC) Voltage(DC)
10uF 1KHz 10% 1.0 0.2Vrms No Bias
* 10uF 1KHz 10% 0.5 0.1Vrms
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> 10uF 120Hz 20% 0.5 0.1Vrms
* Exceptions: Please check the specification on the web site
2-1. LCR meters
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LCR M O i A li i
LCR meters are used for measurement of the capacitance and dissipation factor of MLCCs.
Typical LCR meters are shown in Table including 4288A, 4268A, 4284A, and E4980A by Agilent Technologies Corp.
LCR Meter Overview Application
4288A
1kHz/1MHz
Capacitance
High-speed sorting tests of ceramic
capacitors.
Class I
Class II
( 10 F)
Capacitance
Meter
( 10uF)
4268A
120Hz/1kHz
Constant test level for high value ceramic
capacitor tests.
Class II
Capacitance
Meter
*Auto level control (ALC)
4284A
Precision
Wide frequency Range Class I
Precision
LCR Meter
4284A : 20Hz to 1 MHz
E4980A : 20Hz to 2 MHz
Auto level control (ALC)
Class II
Option 001.
power and DC bias enhancement (+/- 40V)
E4980A
Precision
LCR Meter
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ALC: The automatic level control (ALC) feature adjusts the voltage across the DUT to the same level as the signal voltage level
setting. By this feature, you can maintain a constant level of voltage of measurement signals applied to the DUT.
Technical overview is available at www.agilent.com
2-2. Measurement Theory
Confidential
When the AC voltage (V) is applied to the DUT and the AC current (I) is flowing through the DUT, the impedance
(|Z|) can be calculated according to the Ohms raw (|Z|=V/I). The measurement circuit depends on the frequency.
So, there are two methods (Auto Balance Bridge and RF I-V). It also depends on the type of fixture.
DUT
I
V
R: Resistance
A
V
Source
V lt
Voltage
Meter
Current
Meter
X: Reactance
IZI: Absolute value of impedance
: Phase of impedance
Voltage
Meter Meter
I
V
Z =
Fig. Circuit model
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2-2. Measurement Theory
Confidential
Energy loss is zero in the ideal capacitor. But, real capacitor has dielectric loss and electrode loss by the parasitic
resistance. Loss of capacitor is shown by the delaying of phase angle between AC voltage and current. p y y g p g g
DF (Dissipation Factor) is described as tano. Here, o means delayed phase angle.
Imaginary (X)
jX ESR Z + =
j
Imaginary (X)
Inductive
(High freq.)
C
L X
jX ESR Z
c
c c
=
+
1
e
e
X
|Z|
ESR
DF
Z X Z ESR
=
|
|
|

|
= =
= =
1
tan
sin , cos
o
u u
o
| |
Capacitive
(Low freq )
u
X Q
DF
|
|
.

\
tano
ESR
-j
Real (R)
(Low freq.)
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j
Fig . Impedance characteristics of general Capacitor
2-3. ALC (Automatic Level Control) Function
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The automatic level control (ALC) feature adjusts the voltage across the DUT to the same level as the signal
voltage level setting. By this feature, you can maintain a constant level of voltage of measurement signals applied
to the DUT. The ALC feature uses a monitorable feedback circuit to iterate a feedback loop as shown in figure.
The feedback loop consists of level measurement and level change. The time is required for level adjustment
and dependent on how many times the feedback loop is iterated and dependent on how many times the feedback loop is iterated.
Feedback loop
DUT
V
p
DUT
Source
V lt
R
HIGH LOW
Voltage
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Fig. Circuit model from Users Guide provided by Agilent Technologies
2-3. ALC Function
Confidential
The automatic level control (ALC) feature adjusts the voltage across the DUT to the same level as the signal
voltage level setting. When ALC function is off, the capacitance was measured as ~43 F and when ALC function
if on the capacitance was measured as ~49 F at AC voltage of 0 5V The difference between ALC function on if on, the capacitance was measured as ~49 F at AC voltage of 0.5V. The difference between ALC function on
and off was ~6 F. However, we cant see the difference at AC voltage of 0.5V when looking at the figure of
capacitance change. Therefore, the correct capacitance value can be obtained by using ALC function.
40
ALC (on)
ALC (off)
50.0
55.0
0
20
C
(
%
)
( )
35.0
40.0
45.0
a
p

(
u
F
)
-40
-20
0 0 0 5 1 0

C
20.0
25.0
30.0
0 0 0 5 1 0
C
a
ALC (on)
ALC (off)
Fig. Capacitance of 0603 X5R 47F with AC voltage
Fig. Capacitance change of 0603 X5R 47F with AC voltage
0.0 0.5 1.0
AC voltage(V)
0.0 0.5 1.0
AC voltage(V)
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for ALC on and off (Agilent 4284A, 120Hz)
for ALC on and off (Agilent 4284A, 120Hz)
3-1. Temperature Characteristics
Temp vs. C
Confidential
Temperature coefficient of capacitance (TCC) can be described as the change of capacitance dependent on
temperature in MLCCs. There are several TCC categories found in Class I and II. TCC of Class I and II MLCCs are
shown in figure. Class I MLCCs are composed of paraelectric material and show simple TCC behaviors. It has a
li i ti i it ith t t Th h i it ith t t i d li l linear variation in capacitance with temperature. The change in capacitance with temperature is expressed linearly
as parts per million per degree centigrade (PPM/).
Class II MLCCs such as X5R and X7R show irregular and high change in capacitance with temperature. This is due
to the ferroelectric nature of the dielectric material of barium titanate (BaTiO
3
). The change in capacitance with
t t i d t h ifi d t t F l X7R th t temperature is expressed as a percent change over a specified temperature range. For example, X7R means that
the capacitance can change by +/-15% across a temperature range of -55to 125.
40
% C
Table. Temperature characteristics of Class I and II MLCCs
Class
Temperature
Coefficient
Dielectric
Constant
Operating
Temperature
Capacitance
Change
20
+15%
+85
o
C
+125
o
C
+22%
+105
o
C
p g
Class I C0G 6 ~ 400 -55 ~ +125 0 30ppm/
X5R -55 ~ +85 15%
6S %
-20 -40 -60 25 40 60 80 100 120
+15%
C0G
Class II
1,000 ~
20,000
X6S -55 ~ +105 22%
X7R -55 ~ +125 15%
Y5V -30 ~ +85 -82 ~ +22%
-20
20 40 60 25 40 60 80 100 120
X7R
X5R
-15%
-22%
X6S
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-40
X6S
Fig. Capacitance change of X5R, X7R, Y5V, C0G with temperature
3-2. DC Bias characteristics
DC bias vs. C
Confidential
DC bias is an important electrical parameter affecting the capacitance of MLCCs. DC bias characteristics can be
described as the phenomena of capacitance loss in Class II with increasing DC voltage. This behavior is dependent
on the dielectric formulation, microstructure, and internal construction of MLCC as well as DC voltage load.
Cl II MLCC b d B TiO ith f l t i di l d DC bi li it th di l t lti i Class II MLCCs are based on BaTiO
3
with ferroelectric dipoles and DC bias limits the dipole movements resulting in
reduction of the dielectric constant and capacitance.
The DC bias characteristics of C0G, X5R, X7R, and Y5V MLCCs are shown in figure. Class I MLCC, C0G shows the
stable capacitance value because of its paraelectric structure without dipoles although its relative dielectric constant
i d f it d l th Cl II h X5R X7R d Y5V I f Y5V it h th t
.
]
is orders of magnitude lower than Class II such as X5R, X7R, and Y5V. In case of Y5V, it shows the most severe
degradation despite of the highest dielectric constant. X5R/X7R have high dielectric constants which are preferred
for high capacitance applications.
X5R / X7R
C0G
h
a
n
g
e

[
a
r
b
Y5V
a
c
i
t
a
n
c
e

c
h
10 20 30 40 50
Y5V
DC voltage [V]
C
a
p
a
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Fig. Capacitance change of X5R, X7R, Y5V, C0G with DC voltage
(HP 4284A, 25
o
C, 1.0Vrms, 1kHz (X7R, Y5V) / 1MHz (C0G))
AC voltage vs. C
3-3. AC voltage characteristics
Confidential
AC voltage characteristics can be described as the phenomena of capacitance change in Class II with increasing
AC voltage. Class I MLCCs composed of paraelectric material do not show this phenomenon. The AC voltage
h t i ti f Cl II MLCC h i fi I Cl II MLCC Y5V h th h ith characteristics of Class II MLCCs are shown in figure. In Class II MLCCs, Y5V shows the more severe change with
AC voltage than X5R/X7R. This is due to the non-linear characteristics in voltage-polarization curve of ferroelectric
materials. Thus, the slope in the curve increases and the capacitance increases as AC voltage increases.
20
40
20
40
0
20
C
(
%
)
0
20
C
(
%
)
-40
-20

C
-40
-20

C
Fig Capacitance change of 0402 X5R 10 F 6 3V
40
0.0 0.5 1.0
AC voltage(V)
40
0.0 0.5 1.0
AC voltage(V)
Fig Capacitance change of 0603 X5R 47F 4 0V
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Fig. Capacitance change of 0402 X5R 10 F, 6.3V
with AC voltage (Agilent 4284A, 1kHz)
Fig. Capacitance change of 0603 X5R 47F, 4.0V
with AC voltage (Agilent 4284A, 120Hz)
3-4. Aging Characteristics
Time vs. C
Confidential
Aging is a time dependent phenomenon encountered in Class II MLCCs. Class I MLCCs do not show aging
due to the paraelectric nature of the composed material. However, Class II MLCCs such as X5R, X7R, and
Y5V have ferroelectric dielectrics based on BaTiO
3
and the capacitance is decreased logarithmically over time.
Figure shows the aging behavior of Class I and II MLCCs with different temperature characteristics. Aging rate g g g p g g
increases with dielectric constant of the material. C0G shows a constant capacitance value independent of
time due to its paraelectric characteristics while Y5V the highest capacitance value and X5R/X7R have an
intermediate aging rate. Aging is intrinsically reversible. The capacitance can be recovered after heat
treatment. MLCCs can be returned to ferroelectric structure by heating above the Curie point (at least 1 hr at
C
t
= C
0
(1 - k log
10
t)
C
t
= Capacitance value, t hours after the start of aging
C
0
= Initial capacitance value, k = Aging constant, t = Aging time
y g p (
150) and cooling to room temperature.
0
C0G
X7R/X5R
g

r
a
t
e

[
%
]
C0G
X7R/X5R
-10
0
Slope (k) ~ 2~5%
Y5V
y
p
i
c
a
l

a
g
i
n
Y5V
-20
-30
Slope (k) ~ 5%~
1 2 3
Time [log
10
t hr]
4 5
0 1 2 3
Time [log
10
t hr]
T
y
4 5
-40
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Fig. Typical aging rate of X7R/X5R, Y5V, C0G with aging time
De-aging : Decreased capacitance is recovered after heat treatment ( above 150)
3-5. DC Bias Aging Characteristics
DC bias, Time vs. C
Confidential
In order to increase the capacitance density of MLCCs, the dielectric layer thickness should be reduced and this
means the increase in the electric field applied to dielectric layers. The aging characteristics under DC bias
becomes more important in the high-end products with ultra thin dielectric layers. DC bias aging characteristics
can be explained as the capacitance change with time under DC bias applied because the aging can be can be explained as the capacitance change with time under DC bias applied because the aging can be
observed in the working condition. The effective capacitance can be described as the capacitance observed in
working condition. The effective capacitance is more important than the nominal capacitance because the
nominal capacitance is dependent on DC-bias, temperature and time. Better effective capacitance can be
obtained by the improvement of DC-bias and aging characteristics.
34

34
28
30
32
n
c
e

(
u
F
)
c
e

(

F
)
32
30
28
22
24
26
28

C
a
p
a
c
i
t
a
n
C
a
p
a
c
i
t
a
n
c
28
26
24
22
1 10 100 1000 10000
20
22
Time (hr)
22
20
1 10 100 1000 10000
Time (hr)
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Fig. Capacitance of 0805 X5R47uF, 6.3V with time in the measurement condition of
85, 1.2V(DC) (E4980A, 1kHz)