DESIGN OF A RF

NEMS SWITCH
By
TEJASVI VEERABHADRAIAH
ECE 581
Outline
History
Application of MEMS
MEMS FABRICATION
Types of sensing and Actuation
Introduction to NEMS
RF NEMS Switch and working
NEMS APPLICATIONS
References
History
MEMS- Micro Electro Mechanical Systems
1950s Richard Feynman, electrical motor "smaller than
1/64th of an inch

Application of MEMS
Pressure Sensors
Accelerometer
Gyro meter
Thermal Ink-jet Printer
Fuel Injector
Optical Switch's
Bio-medical application
MEMS FABRICATION
Silicon micro-machining
o Bulk micro-machining (~1960)
o Wafer bonding (glass ~1970, Si ~1985)
o Surface micro-machining (~1985)
o Deep-etching process (~1995)
LIGA (~1978)
Electroplating (~1950)
Micro-EDM, Laser micromachining, Micro-stereo
lithography
Types of sensing and Actuation
Electrostatic Sensing and Actuation
Thermal Sensing
Piezo-resistive Sensors
Piezo-electric Sensing and actuation
Magnetic Actuation
Introduction to NEMS
NEMS- Nanoelectromechanical systems
Challenges to NEMS
1. Detection of displacements for a 10nm diameter beam
translates into a fraction of a nanometer
2. NEMS transducer must ultimately be capable of resolving
displacements in the 10^(-15)-10^(-12) m range
3. Electrostatic transduction, the staple of MEMS, does not scale
well into the domain of NEMS 10-18 farad.
4. Optical methods
RF NEMS Switch


RF NEMS Switch Working
Dimensions
NEMS APPLICATIONS
NEM switched Capacitor
References
http://en.wikipedia.org/wiki/Microelectromechanical_systems
http://en.wikipedia.org/wiki/Nanoelectromechanical_systems
Eugene Siew*, King Yuk Chan, Rodica Ramer, Andrew
Dzurak.The School of Electrical Engineering and
Telecommunications,The University of New South Wales,
Sydney 2052, NSW Australia.Design of RF NEMS SWITCH Marrix
RF MEMS and NEMS Technology, Devices,and Applications
Peter Gammel, Georg Fischer, and Jrmie Bouchaud Bell
labs Journals