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  • 353 Xtal Growth

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    Ramakrishnan Ram
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    The document discusses several crystal growth techniques used in semiconductor manufacturing including liquid phase epitaxy (LPE), metal-organic chemical vapor deposition (MOCVD), organometallic vapor phase epitaxy (OMVPE), and molecular beam epitaxy (MBE). It provides an example of blue laser diodes grown using MBE with transmission electron microscope (TEM) and scanning electron microscope (SEM) images showing the epitaxial layers and fabricated laser device.

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    crystal growth techniques. useful file for starters.

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    The document discusses several crystal growth techniques used in semiconductor manufacturing including liquid phase epitaxy (LPE), metal-organic chemical vapor deposition (MOCVD), organometallic vapor phase epitaxy (OMVPE), and molecular beam epitaxy (MBE). It provides an example of blue laser diodes grown using MBE with transmission electron microscope (TEM) and scanning electron microscope (SEM) images showing the epitaxial layers and fabricated laser device.

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    © All Rights Reserved
    Download as PPT, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as ppt, pdf, or txt
    22 views5 pages

    353 Xtal Growth

    Uploaded by

    Ramakrishnan Ram
    The document discusses several crystal growth techniques used in semiconductor manufacturing including liquid phase epitaxy (LPE), metal-organic chemical vapor deposition (MOCVD), organometallic vapor phase epitaxy (OMVPE), and molecular beam epitaxy (MBE). It provides an example of blue laser diodes grown using MBE with transmission electron microscope (TEM) and scanning electron microscope (SEM) images showing the epitaxial layers and fabricated laser device.

    Copyright:

    © All Rights Reserved
    Download as PPT, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as ppt, pdf, or txt
    of 5

    Crystal Growth Techniques

    LPE (Liquid Phase Epitaxy)



    MOCVD (Metal-Organic Chemical Vapor Deposition)
    OMVPE (Organometallic Vapor Phase Epitaxy)

    MBE (Molecular Beam Epitaxy)

    LPE (Liquid Phase Epitaxy)


    MOCVD (Metal-Organic Chemical Vapor Deposition)
    OMVPE (Organometallic Vapor Phase Epitaxy)

    MBE (Molecular Beam Epitaxy)
    Epitaxial Growth Example

    Blue laser diodes grown by MBE

    ~3 nm (~ 5-6 atomic layers)
    TEM image of cross-section showing epitaxial
    layers.
    SEM image showing fabricated laser.
    Gold contact

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