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Physical Vapor Deposition (PVD)

Evaporation PVD Sputtering PVD




Evaporation Induction Electron
Beam Gun
Arc Diode Magnetron Ion beam Triode




Hollow
Cathode
Filament
EB gun












Self
accelerated
Work
accelerated







Plasma assisted PVD (PAPVD)


DC diode Triode RF Pulsed
Plasma
Ion Beam
Assisted
coating


ARE

BARE Dual beam sputtering




Thermionic ally
Assisted triode

Ionized cluster beam

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