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Ellipsometry (Silicon) : Method/ Film 30º Angle 50º Angle
Ellipsometry (Silicon) : Method/ Film 30º Angle 50º Angle
Ellipsometry (Silicon) : Method/ Film 30º Angle 50º Angle
30 Angle
50 Angle
Thickness (nm)
Refractive Index
Thickness (nm)
Refractive Index
M1: ZnO
83.0742
1.967764
83.0273
2.034415
M2: ZnO
82.9668
1.968240
83.9809
2.035605
M2: ZTO
82.9344
1.968954
83.9229
2.033939
Averaged Values
Method/ Film
Thickness (nm)
Refractive Index
M1: ZnO
83.0508
2.001090
M2: ZnO
83.4739
2.001923
M2: ZTO
83.4287
2.001447
* Neglected 70 Angles due as values did not fall into range of refractive indexes.
Remarks
M1: ZnO
3.0925eV
M2: ZnO
2.9942eV
Bad Scattering
M2: ZTO
3.7216eV
Unclear Transition
M2 ZnO
0.024
0.02
0.039
y = 0.0296x - 0.0916
0.019
M2 ZTO
y = 0.0331x - 0.1028
0.029
0.015
0.019
0.01
0.009
0.005
0.014
0.009
0.004
-0.001
-0.001
0
0
0