MEMS Capacitive Pressure Sensor

Fig. Capacitive Pressure Sensor

The 3D structure of a capacitive pressure sensor is shown above. It works on the principle that changes
in capacitance measures the change in pressure. The model consists for two plates, one is fixed and the
other is movable. When a pressure is applied to the suspended movable plate, the distance between the
plates change, thereby changing the capacitance. This change in capacitance is measured, which gives
the change in pressure.