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21 Piezoelectric Sensors
21 Piezoelectric Sensors
Yongrae Roh
Kyungpook National University
Daegu, Korea
Contents
I. Piezoelectricity
II. Electromechanical Equivalent Circuit
III. Sensing Principles of Piezoelectric Sensors
1.
2.
3.
Impedance measurement
Sensor system for SHM
Bulk wave measurement
Other examples
I. Piezoelectricity
Linear conversion of electro-mechanical energy: reversible
Electrical Energy Mechanical Energy
k eff 2 =
D = E + d
=dE+s
= permittivity
d = piezoelectric constant
sE = elastic compliance
Variations
D = e + E
= s D + gD
= C D hD
= C E e E
E = g + T D
E = h + D
c22
c23
c33
[c ] =
symmetric
c14
c15
c24
c34
c25
c35
c44
c45
c55
Permittivity
11 12 13
[ ] =
22 23
sym.
33
Piezoelectric constants
e11 e12
e13 e14
e15
e23 e24
e33 e34
e25
e35
e16
e26
e36
c16
c26
c36
c46
c56
c66
b
y
Cubic ; a = b = c, = = = 90o
Tetragonal ; a = b c, = = = 90o
Orthorhombic ; a b c, = = = 90o
Monoclinic ; a b c, = = 90o
Triclinic ; a b c, 90o
Hexagonal ; a = b c, = = 90o , = 120o
Rhombohedral (trigonal);
a = b c, = = 90 o , = 60 o
[c ] =
c12
c11
0
0
0
0
c33
c44
symmetric
c44
0
0
,
0
0
c66
c c
c66 = 11 12
2
Permittivity
Piezoelectric constants
0
0
11
[ ] =
11 0
sym.
33
0
0
[e] = 0
0
e
31 e32
E = c11
2
2c12
0 0
0 e24
e33 0
c11 + c12
e15
0
0
0
0
c12
c11 + c12
Vibration modes
Heckman Diagram
Corresponding
material constants
p=
3836
P ( polarizati on)
T (temperature)
3834
Frequency [kHz]
3832
3830
3828
FET
3826
D
S
Wi
3824
3822
RG
3820
0
2000
4000
6000
8000
10000
T im e [1 0 s e c ]
Pyroelectric
element
CA
RA
Meas. or
display
system
Nonlinearity
crystal
oscilloscope
' =
A
T Tc
A = Curie constant
Hysteresis Loop (Sawer-Tower circuit)
Tc = Curie-Weiss temperature
Piezoelectric materials
Single crystals
(SiO2, LiNbO3, LiTaO3)
Polycrystalline ceramics
(PZT, PbTiO3, BaTiO3)
Thin films
Fabrication of piezoceramics
Raw Materials and Weighing
Mixing & Milling
Calcination
Crushing
roller
Hammer
mill
Ball mill
Fabrication process
* densification by sintering
Czochralski method
Keeping a melt of a powder in a chamber, just above its melting point
Insertion of a seed crystal fixed to a rotating tube into the chamber.
Placing the seed at the surface of the melt; inoculent
Slow withdrawing of the tube with rotation; cooling
Continuous crystallization of the melt,
while serving as a subsequent nucleus
Comparison of properties
PZT-5A PZT-5H PMN-PT
3
2
Density
(Kg/m3)
7,750
7500
7,840
33T at 1KHz
(after poling)
2,000
3,400
4,990
k33
0.705
0.75
0.922
kt
0.49
0.505
0.621
d33(pC/N)
374
593
1,560
4,350
4,560
3,600
34
34
28.2
Sound
velocity
Acoustic Z
(Mrayl)
Piezocomposite materials
0-0
1-0
2-0
3-0
1-1
2-1
3-1
2-2
:polymer
:piezoceramic
3-2
3-2
3-3
3-3
*NASA, Langley
u
m
+
R
Rm
du
+ k u dt + Rm u
dt
= ma + kx + Rm u
f =m
Impedance analogue:
V =L
u
m
Rm
1/k = Cm
dI 1
+ I dt + RI
dt C
I
L
R
C,
Cm : mechanical compliance
Za
Zb
PZT
-C0
C0
Z a = iZ 0 tan
kt
2
Z0
sin kt
Z 0 = ctD lW
Z b = i
1:
Mason
= C 0 h33
Redwood
PZT
1:
Rm
R0
Cm
Mm
C0
ZL
_-
Load
Rm / 2
+
V
R0
Mm / 2
R0 = electrical resistance
Cm 2
iM
C0
ZL / 2
C0 = electrical capacitance
Rm = motional resistance
Cm = motional capacitance
Mm = motional inductance
Input admittance
Y IN = Y E + YM =
= turning ratio
1
+ i C 0 +
R0
R m + R L + i (M m
+ XL)
C m
k eff
f p2 fs2
fa 2 fr 2
fn2 fm 2
C1
=
=
2
2
C 0 + C1
fp
fa
fn2
D = E + e
D = electric displacement,
= stress,
, = permittivity
or
D = E + d
E = electric field,
= strain
e, d = piezoelectric constant
Piezoelectric accelerometer
Mass, m
PZT
Vibrating structure
F
F = ma with a known m
Measured F is proportional to a
E = g
V = E t
= g t
= gt F / A
= g t m a / A
Force sensor
Pressure sensor
Impact hammer
Piezoelectric gyroscope
Coriolis Force:
vv
F=2mv
Wxx
Fy
Wxx
: angular velocity
Y
X
v : linear velocity
3
PZT
2.5
dVab
1.5
dVcd
0.5
2. Resonant Sensor
Change in dynamic properties of a sensor
Attachment of a piezoelectric resonator to a structure
Change of structural property
Change of sensor property
.resonant frequency
.Q-factor (f0 /f)
change in impedance spectra
PC
Impedance [Ohm]
Output display
Non
N=1
N=3
N=5
N=7
N=9
3200
3300
3400
Frequency [kHz]
3500
3600
FEM simulation
*N = number of cracks on the aluminum plate
Impedance [Ohm]
100
10
N=1
N=2
N=3
N=4
N=5
N=6
N=7
N=8
N=9
N=10
N=11
3M
4M
1
2M
5M
Frequency [Hz]
6M
high sensitivity
limited detection area
Variable
Gain
Amp.
Piezoceramic
vibrator
AGC(Automatic Gain
Control) Amplifier
Maintain amplitude ~ 1Vpp
Variable
Phase Shifter
Piezo-vibrator
+
Piezoceramic patch
Oscillator circuit
PZT-Oscillator sensor
25500
25600
25700
25800
25900
26000
N=1
N=3
N=5
N=7
N=9
13000
12000
11000
10000
9000
8000
7000
N=11
d=1
Number of cracks
d=2
d=3
d=4
d=5
Crack length
d=6
d=7
VP = [
Eg (1 )
]1/ 2
(1 + )(1 2 )
. S wave:
VS = [
E
]1/ 2
2 (1 + )
2 Z1
Z1 + Z 0
R=
Z1 Z 0
Z1 + Z 0
. Reflection coeff.:
E = Youngs modulus
= density
= Poissons ratio
Ultrasonic transducers
connector
backing
material
matching
circuit
backing
layer
piezoelectric
element
matching
layer
wear plate
Applications:
1. Medical Diagnosis
2. Nondestructive Evaluation Test
3. Imaging, Holography Sensor
4. Distance, Level Sensor
5. Thickness Sensor
6. Flow Sensor
7. Structural Health Monitoring
Through-Transmission Test
Pulse-Echo Test
transducer
A1 ,t1
A2,t2
A1 A2
d
structure
defects
A0,t0
Trx
Trx
structure
A1,t1
Trx
y
x
|impedance|
1
.1
.01
.0-1
0
0
0
S
P
1.0
2.0
3.0
frequency (MHz)
thickness mode
piezoelectric
element
P wave transducer
Impedance spectrum
thickness shear mode
piezoelectric
element
S wave transducer
Flat transducer
Internal structure
Sensor operation
Linear array
Convex array
High resolution
Phase shift
Time delay
Beam steering
Dynamic focusing
input
IDT
Excitation by a piezoceramic patch
output
IDT
40 cm
Waveform(thickness of a plate : 1 mm
S0 mode
A0 mode
0.4
0.3
30 cm
0.2
25 cm
20 cm
15 cm
Voltage(V)
35 cm
Voltage(v)
Crack Length = 0 m
Crack Length = 0.02 m
Crack Length = 0.04 m
Crack Length = 0.06 m
Crack Length = 0.08 m
B->C, X= 0.05 m
Number of cracks = 1
0.1
0.0
-0.1
10 cm
-0.2
5 cm
Origin
-0.3
Time(ms)
0.064
S0
0.068
0.072
Time(ms)
S0
A0
6000
5000
Group velocity(m/s)
4000
3000
A0
2000
1000
0.0
0.2
0.4
0.6
0.8
1.0
Frequency(MHz)
1.2
1.4
1.6
Applications
Pressure vessels, storage tanks,
heat exchangers, piping,
reactors, aerial lift devices,
nuclear power plants
etc.
1. Analytic analysis
2. Equivalent circuit analysis
3. Finite element analysis
Rigid
baffle
r
r
S = 2a 2
p = i 0 cku0 r r
= 2i 0 cu0
P
+a2
At a far field
e ik d
k
i ( r 2 + a 2 r )
e 2
k
sin[ ( r 2 + a 2 r )]
2
0c
ka 2 i (t kr ) 2 J1 (ka sin )
Au0
e
P =i
2
r
ka sin
P = Pax H s ( ) ,
near
field
A = piston radius
Pax = on-axis pressure
Hs() = directional factor
d
N
kd sin )
NA
2
P(r , , t ) =
ei ( t kr )
r N sin( 1 kd sin )
2
sin(
P ( r , ) = Pax ( r ) H e ( )
, where Pax ( r ) =
NA
= on - axis pressure
r
N
sin( kd sin )
2
= directional factor
H e ( ) =
1
N sin( kd sin )
2
Radiation pattern
Accurate, complicated
Limited applicability
REM / 2
R0
CEM
M EM
iM
C0
S = 2a 2
EA =
EM
MA
Power dissipated in R mR / 2
=
Power dissipated in motional branch
EM
R
1
R
| iM |2 ( EM
)
+ mR
2
2
2
=
RmR
1
R
e2
| iM |2 ( EM
)
+
+
2
2 R0
2
2
QM =
R (R + R ) / 2
EM
QE = w0C0 0 mR
R
+
R + mR REM
0
2
M EM
CM
M
1 lt
=
2
4 N
4N 2
4N 2
E
2 ( t / ls11
)
= N2
Cm
RmR / 2
matching
circuit
backing
layer
piezoelectric
ceramics
matching
layer
Z04
Z02
backing
load
time domain
Z03
frequency domain
Z05
ZMR
V0
Impedance analysis
K uu
0
M
2
+
Ku
0 0
K u
u
= F
Q
at 2 mm
5.0E+04
at 3 mm
(dyne/cm2)
3.0E+04
1.0E+04
-1.0E+04
-3.0E+04
-5.0E+04
1.00E-05
1.18E-05
1.33E-05
1.48E-05
1.63E-05
1.78E-05
1.93E-05
time domain
2500
2000
at 1 mm
2.473 MHz
1800
at 2 mm
2000
1(upper PZT)
28 kHz, 308
1600
at 3 mm
2(lower PZT)
1400
28 kHz, 213
Impedance(|Z|)
Magnitude
1500
1000
500
1200
1000
800
600
400
19.9 kHz
200
0
0
1x10
2x10
3x10
4x10
5x10
frequency
spatial domain
frequency domain
6x10
0
15000
20000
25000
30000
35000
40000
frequency
impedance analysis
1. Impedance Measurement
Thickness Mode Resonator
PZT
Rm / 2
+
V
R0
Lm / 2
Cm 2
iM
C0
ZL / 2
Mechanical load
- function of structural
conditions
Input Admittance
Y IN = Y E + YM
1
=
+ i C 0 +
R0
2
R m + R L + i (M m
1
+ XL)
C m
1 C0 + Cm
Lm C 0 C m
1. Impedance measurement
2 Z
0
A L0 CL0
Impedance (Ohm)
z Frequency Shift:
Frequency (Hz)
1. Impedance measurement
Experimental setup and Procedure
0.8
10
Im p ed an ce
0.7
10
0.6
10
0.5
10
10
2.2
2.3
2.4
2.5
2.6
2.7
2.8
Frequency (MHz)
2.9
6
x 10
PZT 1
10000
0.7
10
No damage
Damage Case I-1
Damage Case I-2
0.8
10
-10000
Damage I-2
-20000
PZT 1
PZT2
PZT3
Im p ed an ce
0.7
No damage
Im pedance
F re q u e n c y S h ift ( H z )
No damage
Damage Case I-1
Damage Case I-2
0.8
10
0.6
10
0.5
10
0.4
10
-30000
Damage I-1
10
0.6
10
0.5
10
0.4
10
0.3
10
-40000
0.3
Damage Case
2.2
2.3
2.4
2.5
2.6
2.7
Frequency (MHz)
PZT 2
2.8
2.9
6
x 10
10
2.2
2.3
2.4
2.5
2.6
2.7
Frequency (MHz)
PZT 3
2.8
2.9
6
x 10
N=1
N=2
N=3
N=4
N=5
N=6
N=7
N=8
N=9
N=10
N=11
10
32.79
32.78
Impedance [Ohm]
Impedance [Ohm]
100
d=3cm, N=1
d=4cm, N=1
d=5cm, N=1
d=7cm, N=1
32.77
32.76
32.75
32.74
32.73
32.72
1
2M
3M
4M
5M
6M
Frequency [Hz]
856
858
860
862
864
866
868
Frequency [kHz]
PZT oscillator
Oscillator circuit
Portable ultrasonic
measurement system
electrode
Oscillator
circuit
Piezoceramic vibrator
100
40
Impedance [Ohm]
10000
0
-20
4.55 MHz
1000
-40
100
-60
-80
10
lateral mode
80
60
40
10000
20
125 kHz
1000
-20
-40
-60
100
-100
-80
-120
-100
10
1000
2000
3000
4000
Frequency [kHz]
5000
6000
100
200
300
Frequency [kHz]
400
500
Magnitude [degree]
20
Magnitude [degree]
thickness mode
Im pedacne
Phase
Impedance [Ohm]
100000
Im pedacne
Phase
100000
GPIB
GPIB
Output display
Frequency counter
Oscillator
Frequency counter
50 cm
Oscillator
10 cm
PZT
Experimental plate specimen
f1 effects of cracks
+ effects of environment
FEM analysis
125200
125000
124800
124600
124400
frequency [Hz]
Frequency [Hz]
125400
124200
Measurement
125400
125300
125200
125100
124000
125000
N=1
N=3
N=5
N=7
N=9
N=11
N=1
N=3
Number of cracks
N=5
N=7
N=9
N=11
Number of cracks
125000
Frequency [Hz]
73400
FEM analysis
73200
73000
72800
72600
72400
73600
124000
Measurement
123000
122000
121000
120000
72200
119000
d=1
d=2
d=3
Length of crack
d=4
d=5
d=1
d=2
d=3
d=4
d=5
Length of cracks
d=6
d=7
1.0005
124100
thickness
lateral
124050
Frequency [Hz]
Normalized frequency
1.0000
0.9995
0.9990
0.9985
124000
123950
123900
123850
0.9980
None N=1
123800
N=1
Num. of crack
N=3
N=5
N=7
N=9
N=11
Num. of Crack
1.000
125400
Impedance [Ohm]
0.999
Y Axis Title
0.998
0.997
thickness
0.996
0.995
lateral
125200
125000
124800
124600
124400
124200
124000
0.994
0
X Axis Title
10
d=1cm
Frequency [Hz]
11
Bulk
transducer
Piezo
-patch
PZT sensor
Oscilloscope
0.05 m
0.05 m
0.05 m
Specimen
0.1 m
PZT
0.05 m
crack
0.01 m
Damage scenario
Transducer ->sensor
(Through transmission)
B->C
D->C
Position
of cracks
E
F
E
F
Number
of cracks
Range
of crack length
from 1 to 3
form 0 to 0.09 m
0.05 m
0.5 MHz
-3 dB
12.7871
-6 dB
17.6608
o
o
1 MHz
12.7157
17.5607
o
o
1 MHz
frequency
Voltage(v)
Voltage(v)
P/Pax
0.5 MHz
-3 dB
10.314
-6 dB
17.734
o
o
1 MHz
15.589
19.934
o
o
0.2 m
0.05 m
0.1 m
C
0.05 m
PZT
0.05 m
crack
: 0.1 m
a
a
a
a
: 0.15 m
0 .1 0
= 0 .0 1 0
= 0 .0 1 5
= 0 .0 2 0
= 0 .0 2 5
m
m
m
m
: 0.25 m
Voltage(V)
0 .0 5
0 .0 0
-0 .0 5
-0 .1 0
0 .0 9
0 .1 0
0 .1 1
0 .1 2
T im e (m s )
0 .1 3
0 .1 4
0.1995
0.3002
0.3999
0.5
estimated (m)
0.0998
0.1501
0.1999
0.25
B->C
1.4
1.0
0.8
0.6
0.4
0.2
0.0
D->C
1.4
1.2
Normalized magnitude
Normalized magnitude
1.2
Crack 1, X=0.05 m
Crack 2, X=0.05 m
Crack 3, X=0.05 m
Crack 1, X=0.1 m
Crack 2, X=0.1 m
Crack 3, X=0.1 cm
1.0
Crack 1, X=0.05 m
Crack 2, X=0.05 m
Crack 3, X=0.05 m
Crack 1, X=0.1 m
Crack 2, X=0.1 m
Crack 3, X=0.1 cm
0.8
0.6
0.4
0.2
0.0
0.00
0.02
0.04
0.06
0.08
0.10
0.00
0.02
Crack length(m)
0.04
0.06
0.08
0.10
Crack length(m)
Normalized amplitude of the first peak of original signals (driving frequency=0.5 MHz)
B->C
1.4
1.0
0.8
0.6
0.4
1.2
1.0
0.6
0.4
0.2
0.0
0.0
0.02
0.04
0.06
Crack length(m)
0.08
0.10
Crack 1, X=0.05 m
Crack 2, X=0.05 m
Crack 3, X=0.05 m
Crack 1, X=0.1 m
Crack 2, X=0.1 m
Crack 3, X=0.1 m
0.8
0.2
0.00
D->C
1.4
Normalized magnitude
Normalized magnitude
1.2
Crack 1, X=0.05 m
Crack 2, X=0.05 m
Crack 3, X=0.05 m
Crack 1, X=0.1 m
Crack 2, X=0.1 m
Crack 3, X=0.1 m
0.00
0.02
0.04
0.06
0.08
0.10
Crack length(m)
The amplitudes are continuously decreasing as the crack lengths are increased
to enter the ultrasonic beam.
Crack number =2
Crack number =3
B->C, X= 0.05
X=0.05 m, B->C
0.048
Number of Cracks = 1 EA
Number of Cracks = 2 EA
Number of Cracks = 3 EA
0.047
TOF(ms)
X
F
crack
0.046
0.045
0.044
0.06
0.07
Length of Cracks(m)
0.08
4. Other Example
4. Other Example