X Ray Diffraction

Lectures 6-8

Bragg Diffraction

Miller Indices

These figures from:

http://en.wikipedia.org/wiki/Miller_index
Look up the site and also read this topic
From a book for better understanding

Diffraction

passivation
Cu

Stress (MPa)

Stress (MPa)

500

Passivated 1.0 m Cu Film

400

(111) grains
(100) grains

Silicon

diffusion
barrier

300
200
100
0
-100
-200
0

80 160 240 320 400 480 560 640

Temperature (oC)
Data: Baker, Kretschmann, Arzt, Acta Mat. 49, 2145 (2001)

XRD v/s curvature measurements

Kraft and Nix, J. Appl. Phys., 83 (6), March 1998, p 3035

Welzel et al., J. Appl. Cryst., 38, 2005, p 1-29

http://www.doitpoms.ac.uk/tlplib/fibre_composites/lamina_loading.php?printable=1

X Ray strain measurement (Isotropic)

X Ray strain measurement

Psi angles for <422> family of planes
In (111) oriented film

Cornella et al. Appl. Phys. Lett.

71(20), November 1997, p 2949

Kraft and Nix, J. Appl. Phys.,

83 (6), March 1998, p 3035

Grazing Incidence X-Ray Scattering

Penetration of x-rays
into the sample is a
strong function of
Incidence angle

From: http://ssrl.slac.stanford.edu/materialscatter/scatter-grazing.html

Grazing Incidence X-Ray Scattering

GIXS measurement (Al film)

critical angle = 0.2 degrees

Doerner and Brennan Journal of Applied Physics, 63 p 126 (1988)

PURE AL, 8700 eV

By varying the incident angle, , it is possible to sample different depths into the
film. Thus we can measure the strains at various depths with this technique.

GIXS