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Mass Flow Vs Volumetric Flow and Unit
Mass Flow Vs Volumetric Flow and Unit
Introduction
SLPM
m
v
Equation 3
Substitute Equation 1 into Equation 2 to redefine gas density:
mP
=
nRT
Equation 4
Mass flow is equal to density times volumetric flow rate:
m=Q
Equation 5
Redefine mass flow using gas density as derived from the
Ideal Gas Law. Substitute Equation 3 into Equation 4:
mP
Qx
m=
nRT
Example 1
3
Assume a volumetric flow rate of Q = 200 cm /min of nitrogen
(N2) at standard temperature of 0 C and 1 atm, and solve for
true mass flow (g/min):
Given:
3
Q = 200 cm /min
m = 28.0134 g in 1 mole of N2
n = 1 mole
P = 1 atm
3
R = 82.1 (cm 1 atm)/(mole K)
T = 273.15 K(0 C)
Answer:
m = 0.2498 (g/min)
2 Honeywell
3.0
Finding Volumetric Flow (Q) from True Mass Flow
(g/min)
Microbridge products are specified in standard volumetric
flow (Qs) such as standard cubic centimeters per minute
(SCCM) or standard liters per minute (SLPM) which can be
translated into true mass flow as indicated above.
The microbridge sensor is a mass flow device rather than a
volumetric one. At a constant mass flow, the microbridge
device will give the same output even if there are temperature
or pressure changes. Because the microbridge sensor senses
mass flow, confusion may result when mass flow sensors are
used with volumetric devices, such as rotometers or pith-ball
indicators. Accurate mass flow calculations for volumetric
devices require consideration of both temperature and
pressure ranges.
At varying temperatures and pressures, these other volumetric
devices indicate different flow rates than those indicated by
microbridge sensors. Simple calculations can be used to show
the relationship between mass flow and nonstandard
volumetric flow.
An AWM3100V with a mass flow rate of 0.2498 g/min
(200 SCCM) at the same pressure of 1.0 atm but at a different
temperature, 25 C, has a 5 Vdc output voltage, indicating a
standard flow rate(Qs) of 200 SCCM. The rotometer, however,
would indicate a nonstandard volumetric flow rate, (Q).
Use Equation 5 to rearrange the formula for the volumetric flow
value to calculate the rotometer nonstandard volumetric flow
rate.
Equation 6
Q=
nRT
m
mP
Mass
Flow
That is,
ms
mx
Therefore,
mPx Qx = mPs
nRTs
nRTx
Equation 7: Solving for Qx yields:
Sensor
Mass
Flow
Sensor
4.0
Finding volumetric Flow (Qx) from Standard
Volumetric Flow (QS):
Qx = Qs
Equation 7
Equation 7 calculates volumetric flow (Qx) at X conditions
from volumetric flow (Qs) at reference conditions of 0 C and 1
atm.
Given:
Qs = 200 SCCM
Ps = 1 atm
Px = 1 atm
Ts = 273.15 K (0 C)
Tx = 298.15 K (25 C)
Answer:
Qx = Qs
3 Honeywell
Ps Tx
Px Ts
Ps Tx
= 218.3 cm3/min
Px Ts
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008043-2-EN
November 2012
Copyright 2012 Honeywell International Inc. All rights reserved.