VALLIAMMAI ENGINEERING COLLEGE

DEPARTMENT OF ELECTRONICS AND INSTRUMENTATION ENGINEERING

EE6303 LINEAR INTEGRATED CIRCUITS AND APPLICATIONS
UNIT I IC FABRICATION
PART A
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What is the purpose of oxidation process in IC fabrication?

What is parasitic capacitance?
List the basic processes used in IC Fabrication.
What is meant by ion implantation? Give its advantages.
Why inductors are difficult to fabricate in integrated circuits?
What is the significance of using buried layer?
What are the advantages of polysilicon gate MOSFET over aluminium gate?
List the advantages of integrated circuit over discrete component circuit.
List out the reaction compounds and doping hydrides used in Chemical Vapour
Deposition?