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Hollow Cathode Discharge Facility Experiment
Hollow Cathode Discharge Facility Experiment
Name:
Date:
Goal:
Substrate:
Sample Name:
Turn on Rotary Pump and Chiller
P = 0.03 Torr
Turn on TMP
B.P. = 3.0 x 10-5 Torr
Slow Down TMP
Turn off TMP
Feed in gases
W.P. =
Start RUN
V=
I=
Time =
End run
Shutdown
Remarks: