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Introduction To Microelectronic Fabrication Second Edition: Richard C. Jaeger
Introduction To Microelectronic Fabrication Second Edition: Richard C. Jaeger
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INTRODUCTION TO
MICROELECTRONIC
FABRICATION SECOND
EDITION
by
RICHARD C. JAEGER
First Printing Errata - Updated 07/30/03
Page number: Correction
42: Problem 2.5 180-nm should be 120-nm.
65: Problems 3.11 and 3.12: Assume a temperature of 1100 oC.
104: Problem 4.4(b) should refer to Fig. 4.12 .
106: Problem 4.10(e) should refer to part (d) .
106: Figure P4.10: The spacings between resistor legs should all be 3l.
107: Problem 4.14: Assume NB = 1016/cm3 .
107: Problem 4.15: Assume a 0.3 W-cm p-type substrate.
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107: Problem 4.21(c): the temperature should be 950 oC; Problem 4.21(d)
should refer to Fig. 4.12.
128: Problem 5.18: "minimum substrate temperature" should be " maximum
substrate temperature"
150: Problem 6.5: 1000 molecules/cm3 ; Problem 6.14: A1 should be Al
169: The gray shading in Fig. 7.18 is almost invisible. Here is a corrected
drawing: Download Fig. 7.18
171: The gure captions for Fig. 7.20 are reversed.
176: Problem 7.12(c): ... if a 1- mm thick "low-K"...
199: Problem 8.4: Compare the ve yield ...; Problem 8.5 should refer to Fig.
8.16 not Fig. 8.11.
200: Problem 8.12. Assume a die cost of $1.00 to nd the die sizes.
200: Problems 8.13 and 8.15: References to Fig. 8.11 should be to Fig. 8.16.
212: Paragraoh above Section 9.2: "scale factor a = square root of 2"
265: Problem 10.2: NE/DE = should be GE = ...; Problem 10.3: What epitaxial
layer doping may
267: Problem 10.13: Reference should be to Table 10.1 not Table 10.2.
268: Problem 10.22: "What is a lower bound ..."; Problem 10.27: 1 m should be
1 mm.
270: Table 11.1: Density should be in g/cm3 .
273: Third line: 22o should be 35o.
Answer Corrections
1.5
1.13
3.7
4.3
5.21 hrs
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4.15
5.1
5.3
5.5
5.7
60.7 sec
5.11
5.13
53 nm, 870 nm
6.1
820 psec
6.3
6.11
6.15
6.17
7.5
5 x 10-9W-cm2
8.3
8.7
8.13
17%, 8.3%
9.13
9.21
384 l2, 40 l 2
10.3
90 V
10.9
10.13
10.19
33 nm
10.27
6-7 V, 8 V
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