Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Tng hp mng mng

- Phn x magnetron

Cc Phng Php Tng hp v Phn tch Vt liu

Phn x (Sputtering):
L k thut ch to mng mng da trn nguyn l truyn ng
nng bng cch dng cc ion kh him c tng tc di in
trng bn ph b mt vt liu t bia vt liu, truyn ng nng
cho cc nguyn t ny bay v pha v lng ng trn .

Cc Phng Php Tng hp v Phn tch Vt liu

Cc giai on c bn
One
Two

Three
Four

Chun b vt liu phn x ( Bia Target )

Chun b vt liu ph mng ( - Substrate ).

To mi trng chn khng.

Phn x.

Cc Phng Php Tng hp v Phn tch Vt liu

Chun b Vt liu phn x

Kim loi/
Hp kim

Bia
Gm
(dn in/
in mi)

Cc Phng Php Tng hp v Phn tch Vt liu

Chun b Vt liu ph mng

Lam thy tinh (glass)
Wafer Silic (Si)
Mt s loi vt
liu dng lm
ph mng

Inox
S, gch men
Polymer

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

Chun b Vt liu ph mng
Quy trnh x l trc khi ph mng

X l th
-Dng kim: NaOH, nc ra sunplay,

-Dng axit: HF, HCL,

-Dng sng siu m (my siu m)
ra.
- Ra li bng nc sch (nc ct)
- Sy kh
Lm sch cht hu c b mt .

X l tinh
Lm sch b mt bng phng
in trong chn khng trc
khi cho ph mng.

Cc Phng Php Tng hp v Phn tch Vt liu

To mi trng chn khng

H thng bm dng to mi trng chn khng
Bm s cp

Bm th cp

- Ht kh hay hi t th tch cn ht,

-Lm vic ch vi iu kin khi trong

bt u t p sut kh quyn.

th tch t c chn khng ban u

- Cc loi bm s cp: Bm quay du,

(p sut khi ng ~ 10-2 torr).

Bm Booster (Roots),

- Cc loi bm th cp: Bm phn t

To chn khng ban u cho bm th

(Turbo), Bm khuch tn,

cp hot ng.

To chn khng cho qu trnh phn x

7

Cc Phng Php Tng hp v Phn tch Vt liu

n v p sut (n v o chn khng)

atmtphe
k thut
(at)

atmtphe
(atm)

torr
(Torr)

pao (p sut)
trn mt ins
vung
(psi)

pascal
(Pa)

bar
(bar)

1 Pa

1
N/m2

105

1 bar

100000

106 dyn/cm2

1,0197

0,98692

750,06

14,504

1 at

98.066,5

0,980665

1 kgf/cm2

0,96784

735,56

14,223

1 atm

101.325

1,01325

1,0332

1 atm

760

14,696

1 torr

133,322

1 Torr;
1 mmHg

19,337103

1 psi

6.894.76 68,948103 70,307103 68,046103

51,715

1 lbf/in2

1.0197105 9.8692106 7.5006103 145,04106

1,3332103 1,3595103 1,3158103

Cc Phng Php Tng hp v Phn tch Vt liu

Bm chan khong
Vung lam viec cua cac bm chan khong

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

Bng 1. Cc thng s to mng ZnO:N
p sut bung
p sut nn
p sut phn x
Kh phn x
ph
Khong cch bia-
Cng sut phn x RF
Nhit
Thi gian phn x

< 510-6 torr

510-5 torr
310-3 torr
N2/Ar ; N2O/Ar
Thy tinh; Corning 7059
5 cm
100W
250oC
15 pht
10

Cc Phng Php Tng hp v Phn tch Vt liu

Qu trnh phn x

Pha hi

Pha rn
(Mng - Film)

Pha hi

Pha rn
(Bia-Target)
11

Cc Phng Php Tng hp v Phn tch Vt liu

Nguyn l: l qu trnh truyn ng nng.

Vt liu ngun c to thnh dng cc tm bia v c t
ti in cc (thng l catot), trong bung c ht chn
khng cao v np kh him vi p sut thp (c 102 MBar).

Di tc dng ca in trng, cc nguyn t kh him b ion

ha, tng tc v chuyn ng v pha bia vi tc ln v bn
ph b mt bia, truyn ng nng cho cc nguyn t vt liu ti
b mt bia.
Cc nguyn t c truyn ng nng s bay v pha v
lng ng trn . Cc nguyn t ny c gi l cc nguyn t
b phn x.
12

Cc Phng Php Tng hp v Phn tch Vt liu

S phn x Magnetron

S phn x phn ng ca TiN

13

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

Da vo s kt hp
ca in trng v t
trng

Nht plasma trn

b mt cathode hay bia
phn x

Cng t trng c iu
chnh (500 2000G) sao cho cc in
t b tc ng mnh cn cc ion th
khng.
Cc in t thc hin cc chuyn ng
cycloid trong in trng v t trng
vung gc h s ion ha rt cao.
Phng in magnetron c th duy tr p
sut rt thp (< 10-2 Pa) v mt dng in
cao hn rt nhiu so vi phng in khng c
t trng.
14

Cc Phng Php Tng hp v Phn tch Vt liu

H magnetron cn bng

H magnetron khng cn bng

B (hng v)
in trng

S
N

S
N
T trng
khp kn

Cc e chu tc dng
ca t trng ngang

T trng
khng khp kn

Cc e t chu tc dng
ca t trng ngang

t b e
va p

e ch yu chuyn
ng gn bia

b nhiu e
va p mnh

e theo in trng
n vi v ln

t b
t nng

Thch hp to mng cho

cc loi khng chu
c T0 cao: nha, giy,

b
t nng

Thch hp to cc
mng yu cu T0 cao
15

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

P = 1- 10 mtorr
N = 1012 1015 cm-3
ne = 1010 1012 cm-3
Te = 2 5 eV

T trng gi cc in t trong vng

plasma c dng ng hm hnh tr
trn b mt bia to ra s n mnHnh 1. M t h phn x magnetron phng
khng u ca bia phn x.

DC

16

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

Phng in DC da trn s sinh ra in
t th cp cathode, do in th
ln ca bia l cn thit duy tr plasma
v pht x in t tng gn tuyn tnh vi
vn tc ion bn ph

Bia

(a)

Bia

Plasma RF c duy tr bi s ion ha

ca in t dao ng trong th tch
plasma. Cc in t c th theo kp tn
s RF 13.56 MHz trong khi ion th khng
do qun tnh ln.

(b)

Hnh 2. S phn b th trong phn x

magnetron cn bng ch DC v RF
17

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

-Trong phng in
RF th bia phn x
thp hn.
- Tuy nhin, s by cc
in t trn b mt
bia li khng tt nh
trong ch DC.

- Mt plasma trn
cao hn so vi
trng hp DC.

Hnh 3. Th phn x cathode trong

magnetron DC v RF theo cng sut phng
in i vi bia ZnO p sut 0.8 Pa
18

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

- Phn x DC
cho vn tc ph cao
hn t 1.5 n 2 ln so
vi RF cng cng sut.
- i vi DC vn tc ph
bt u tng t cng sut
bng khng.
- Trong khi RF ta c
th quan st thy cng
sut ngng khong trn
10W, do th phng in
thp khng
phn x.

Hnh 4. Vn tc lng ng trong

magnetron DC v RF theo cng sut
phng in
19

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

Vn tc ph
c xc nh bi
nng lng ion
bia v nng lng
ca nguyn t Ar
phn x trong ch
DC cao hn
so vi RF.
Hnh 5. S ph thuc ca vn tc ph
theo nng lng ion bn ph
20

Cc Phng Php Tng hp v Phn tch Vt liu

Phng php Phn x magnetron

Trong trng hp RF gn nh c lp vi p sut,
th trong trng hp DC cng sut nhit gim
mnh khi tng p sut.

Nhit sinh ra trn trong qu trnh phn x ch

RF s cao hn so vi DC.
Cng sut nhit trn tng t l theo cng sut
phng in.
Ngun nhit cung cp cho trong phn x RF ch
yu t cc ht trong plasma, ch khng phi duy
nht t cc ht phn x t bia.
(RF) ng gp nhit ln gy bi cc ht t
plasma sau khi vt qua rng rt nh ca v
m khng va chm nn c lp vi p sut.
(DC) ng gp nhit ln ch yu gy bi cc ion Cc ht trung ha chu cc va chm vi
Ar c gia tc trong vng st th cathode, b phn Hnh
t kh
trong
2.8 v
S b
phnhit
thuc ha
ca cng
sutqung
nhit
trnt
trong
phn x
v RF
bia ZnO
phn x v trung ha, sau i v pha .
ng
bia n
DCnn
cng
sut
vo: a). p sut lm vic
nhit trn b).
Cng
ph sut
thuc
vo p sut.
21
phng in

Cc Phng Php Tng hp v Phn tch Vt liu

u im ca phng php phn x magnetron

Nhit thp, c th xung n nhit phng
bm dnh tt ca mng trn
Vn tc ph cao, c th t 12 m/pht
ng nht cao v dy, mt khi lng mng cao, gn vi mt
khi
D dng iu khin v tnh lp li cao trong qu trnh ch to mng
Cc hp kim v hp cht ca cc vt liu vi p sut hi rt khc
nhau c th d dng phn x
Bng phn x phn ng trong hn hp kh, nhiu hp cht c th
c ph t vt liu n cht
Phng php c chi ph khng cao
C kh nng ph mng trn din tch rng, c th t 3m x 6m
22