Scribd Logo
Upload

Welcome to Scribd!

  • Single Crystal Silicon For MEMS

    Uploaded by

    sasis
    22 views10 pages
    Single crystal silicon is commonly used for microelectromechanical systems (MEMS) due to its mechanical and electrical properties. It is a very stiff material, requiring thinning to achieve appreciable strain for MEMS. Single crystal silicon has anisotropic properties that impact its electrical, thermal, mechanical, and chemical behavior. Etching techniques, including isotropic and anisotropic etching, are used to bulk micromachine single crystal silicon into cavity structures and cantilevers for MEMS.

    Original Description:

    micro

    Original Title

    MEMS1

    Copyright

    © © All Rights Reserved

    Available Formats

    PPTX, PDF, TXT or read online from Scribd

    Did you find this document useful?

    Is this content inappropriate?

    Report this Document
    Single crystal silicon is commonly used for microelectromechanical systems (MEMS) due to its mechanical and electrical properties. It is a very stiff material, requiring thinning to achieve appreciable strain for MEMS. Single crystal silicon has anisotropic properties that impact its electrical, thermal, mechanical, and chemical behavior. Etching techniques, including isotropic and anisotropic etching, are used to bulk micromachine single crystal silicon into cavity structures and cantilevers for MEMS.

    Copyright:

    © All Rights Reserved
    Download as PPTX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pptx, pdf, or txt
    22 views10 pages

    Single Crystal Silicon For MEMS

    Uploaded by

    sasis
    Single crystal silicon is commonly used for microelectromechanical systems (MEMS) due to its mechanical and electrical properties. It is a very stiff material, requiring thinning to achieve appreciable strain for MEMS. Single crystal silicon has anisotropic properties that impact its electrical, thermal, mechanical, and chemical behavior. Etching techniques, including isotropic and anisotropic etching, are used to bulk micromachine single crystal silicon into cavity structures and cantilevers for MEMS.

    Copyright:

    © All Rights Reserved
    Download as PPTX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pptx, pdf, or txt
    of 10

    Single Crystal Silicon for MEMS

    Mechanical Material

    SILICON?

    Stiff => Thinning is required for appreciable strain

    Single Crystal Silicon for


    MEMS

    Single Crystal Silicon for


    MEMS

    Structure of Single Crystal


    Silicon

    Miller Indices for Single Crystal


    Silicon

    Miller Indices for Single Crystal


    Silicon

    SCS has
    anisotropic
    properties:
    Electrical,
    Thermal,
    Mechanical,
    Chemical

    ETCHING for BULK


    MICROMACHINING
    (Isotropic/Anisotropic)

    ETCHING for BULK


    MICROMACHINING
    (Isotropic/Anisotropic)

    ETCHING for BULK


    MICROMACHINING
    (Cavity/Cantilever Anisotropic)

    You might also like