Scribd Logo
Upload

Welcome to Scribd!

  • 33 views

    Mechanical Material2

    Uploaded by

    sasis
    The document discusses micromachining of silicon for mechanical materials. It notes that silicon is a stiff material that requires thinning for appreciable strain. It describes additive processes like chemical and physical deposition that can be used to deposit thin layers, and removal processes like chemical and physical etching that can be used to etch silicon in bulk or as films, either anisotropically or isotropically. Examples provided of bulk micromachining of silicon include a capillary for an insulin infuser, a mask for a cylindrical micromotion sensor, and a series connected photovoltaic converter battery.

    Copyright:

    © All Rights Reserved
    Download as PPTX, PDF, TXT or read online from Scribd
    Flag for inappropriate content

    You might also like

    Mechanical Material2

    Uploaded by

    sasis
    33 views11 pages
    The document discusses micromachining of silicon for mechanical materials. It notes that silicon is a stiff material that requires thinning for appreciable strain. It describes additive processes like chemical and physical deposition that can be used to deposit thin layers, and removal processes like chemical and physical etching that can be used to etch silicon in bulk or as films, either anisotropically or isotropically. Examples provided of bulk micromachining of silicon include a capillary for an insulin infuser, a mask for a cylindrical micromotion sensor, and a series connected photovoltaic converter battery.

    Original Description:

    Mechanical Material2

    Copyright

    © © All Rights Reserved

    Available Formats

    PPTX, PDF, TXT or read online from Scribd

    Did you find this document useful?

    Is this content inappropriate?

    Report this Document
    The document discusses micromachining of silicon for mechanical materials. It notes that silicon is a stiff material that requires thinning for appreciable strain. It describes additive processes like chemical and physical deposition that can be used to deposit thin layers, and removal processes like chemical and physical etching that can be used to etch silicon in bulk or as films, either anisotropically or isotropically. Examples provided of bulk micromachining of silicon include a capillary for an insulin infuser, a mask for a cylindrical micromotion sensor, and a series connected photovoltaic converter battery.

    Copyright:

    © All Rights Reserved
    Download as PPTX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pptx, pdf, or txt
    33 views11 pages

    Mechanical Material2

    Uploaded by

    sasis
    The document discusses micromachining of silicon for mechanical materials. It notes that silicon is a stiff material that requires thinning for appreciable strain. It describes additive processes like chemical and physical deposition that can be used to deposit thin layers, and removal processes like chemical and physical etching that can be used to etch silicon in bulk or as films, either anisotropically or isotropically. Examples provided of bulk micromachining of silicon include a capillary for an insulin infuser, a mask for a cylindrical micromotion sensor, and a series connected photovoltaic converter battery.

    Copyright:

    © All Rights Reserved
    Download as PPTX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pptx, pdf, or txt
    of 11

    Mechanical Material

    SILICON?

    Stiff => Thinning is required for appreciable strain

    Micromachining of

    SILICON?
    Additive Processes:
    Chemical and Physical Deposition
    (Thin Layers only) (Single/Poly)
    Removal Processes: Chemical and Physical Etching
    (Wet/Dry/Plasma/Inert/Reactive)
    (Bulk/Film) (Anisotropic/Isotropic)

    MICROMACHINING of SILICON =>


    (a) BULK (substrate)
    (b) SURFACE (films)

    BULK MICROMACHINING
    (Etchants: Isotropic/Anisotropic)

    BULK MICROMACHINED
    (Silicon Capillary for Insulin
    Infuser)

    BULK MICROMACHINED
    (Silicon Capillary for Insulin
    Infuser)

    BULK MICROMACHINED
    (Silicon Capillary for Insulin
    Infuser)

    BULK MICROMACHINED
    (Silicon Mask for Cylindrical Micromotion
    Sensor)

    BULK MICROMACHINED
    (Series Connected Photovoltaic Converter
    Battery)

    BULK MICROMACHINED
    (Series Connected Photovoltaic Converter
    Battery)

    BULK MICROMACHINED
    (Series Connected Photovoltaic Converter
    Battery)

    You might also like