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  • MEMS Assignment 22-09-14

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    Students were assigned a project to model and simulate a MEMS device of their choice using COMSOL software. They must perform a literature review on their chosen device, model its design in COMSOL, and conduct static and dynamic analysis to validate results against existing literature. A report on the project is due October 11th, 2014 and topics suggested include micro-pressure sensors, micro-cantilevers, micro-gyroscopes, micro-accelerometers, MEMS RF-switches, microfluidics, and microhotplates.

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    Students were assigned a project to model and simulate a MEMS device of their choice using COMSOL software. They must perform a literature review on their chosen device, model its design in COMSOL, and conduct static and dynamic analysis to validate results against existing literature. A report on the project is due October 11th, 2014 and topics suggested include micro-pressure sensors, micro-cantilevers, micro-gyroscopes, micro-accelerometers, MEMS RF-switches, microfluidics, and microhotplates.

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    22 views1 page

    MEMS Assignment 22-09-14

    Uploaded by

    PalluRaju
    Students were assigned a project to model and simulate a MEMS device of their choice using COMSOL software. They must perform a literature review on their chosen device, model its design in COMSOL, and conduct static and dynamic analysis to validate results against existing literature. A report on the project is due October 11th, 2014 and topics suggested include micro-pressure sensors, micro-cantilevers, micro-gyroscopes, micro-accelerometers, MEMS RF-switches, microfluidics, and microhotplates.

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    © All Rights Reserved
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    ASSIGNMENT

    Date of Submission: 10-11-2014

    Marks: 30

    Choose a MEMS device of your interest for which process model and design is available in
    literature. Each group will do a literature review, model the design and perform
    static/dynamic analysis on COMSOL to validate with results available in literature. Prepare
    a report on the exercise and submit softcopy of your project latest by 10/11/2014. The
    suggestions on topics are given below but are not exclusive.
    1. Micro-Pressure sensor
    2. Micro-cantilever for various applications.
    3. Micro-gyroscope
    4. Micro-accelerometer
    5. MEMS RF-switch
    6. Microfluidics.
    7. Microhotplate.

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