Physics and Technology of Semiconductor Devices A.S.GROVE Falrehlld Semiconductor, Fale Alto University f Caforna, Berkeley John Wiley an Sons, In, New York» London - Sydneyori 1957 yb Way tn sti. Ti ay pr Rent as ot end ay oem ie wn pio statin. heya Cong Cain Cad Nant: TO "Flint Un eof ee Preface The 1980 was the dead Ia which sencantncar dees rt 10 rominece sad stated great nduecn sgneoen lett deste, [Bos of te rear tod eagieering work as Ged fo gers ‘Toe 960 canbe suerte dead a Wi on semcongule levies aed itp ae tage Oy toe pln vcs eveock ‘mani deve, “The purpose oft book io provide a introduction co the yee tf easlagy af pe ler eer, jy Geis made by the Pant tebtology. To besuttephyia ig uaerjig the beeen ted the apron of tse devces conti fom hoe undeyng ot ‘Rbvetion ath eatin of vos ae fom other emlooducters, ‘other technologie Howey, problem viewed in gene tr tnd 12 be vay dif to save To sender & probes abe, re mo oncenete ong est inert fxr Wit smprtan er a oy seem doe, fer estas, tn 80 Be np for late ‘Bie inde Are rut sppoxmatos woe dere wel he hae: ‘ene ofthe former ater pve ene tery poor greet ‘evans on tate. Mow stl ool nthe pst aoe ty ‘coset 9 ose alr ae ppetn elation to geo nus. oy devin. To ts On, he empha 8 om thse wish se ipo indtatng wit las son conten "Alters bit deen f the lat tcbology, the ext cides Int three pars The tous dels With tose pre of sodas‘echo whic ro innately iol in deeming te ec ‘Sosa af emiondoo geviesThe he roses darued ‘Shure growth themal xan and sollte ifiion=—ae te Ineo by Nish the semlcadatr esa is tehed ito devie (id haste “Te send pert ls wth nonhcors and seicndetor devices ‘A Simaary of te mot inpran es ofthe bad teary of ks {lowed dacuson a semionductors under seme coat fons Tarp jaeoas whee re the bull olock of mort Inportatsericonstor deve ae cosine foe By {eaten of upon ans sod jncin ete trans “One f the pls ving plage chology that I reno exelat contol ae eenicondctr sce. Thi cata endef rice deat pr of smicondctorderces snd hat ‘Uo lot he api ceslopnent pew type of deve One af ae ‘Be wltice teats tant, endy seen In impact 10 {be jaan isi among ace eves Ths te ed part of fen conics fects and rafoeantoled dees. This Pat Jes dicuson he they of setcondutor ses, sce efes fon pe anton, the sure Hebets reir, a the ats of ‘Hidon-leon sie stem "Toe ext pronaly intended or vse by wsorsnderadete or seayear udtate rents in ek! enghesng snd materiale feces Fort remon I hve stomped te hep the mot port hepa santero ntfs pc mode Fern fl to the stucent wien be Dormers prating ence Situ To nave hs purpose jmcpes see peeraly ered ih ul sonersal conpuatane or With experimen) eansenents ‘Tow natn to boot the reader’ codec nthe prise, the aston sag contin mono wheat in at be Sed Te a ww cwtenaty oo “Te suture fs Dok ws ao beled bythe may i develo ‘The mater conte in bbs oe hse af Ire gen at Fiji Semicon to sent ad engners ho were ogo ‘serch, cewopen, massnctareg, 24 ppicaion work mvSPng ‘ericondoor coves ond terse cee on geste coat edpat at the Uahwrnty of Caloris Heise” The rata, ‘pans frm, wat tee Sadi the Fair cou ote fling {es wel by Profesor CA Mead, Calon Ist of Teche orgy and. ©. Lames, Uanersy of Washing ints wn [eadtne excel egierng cou 1 saeanty fom the many suggestions of the reviewers: D. J. Fagerai ie Spow, L. Vaca SSUES Wier of Fes Seniesa Ftouon 9 Lohse, Uersy of Wasson C a Me Cala ns Teteelogy, IL Ml, Stato Unset. sad W. 6. Otdnam, Uige eng ef Calra,Beiy ta fr nt oP el or i tsnaeSnelating ie character ad fo Me 8. Sec nM Dory a rt boy mh te satin, sd tration, Fay} woul Inet enpes ay appecaoa a ‘Panagemen of Fahd Semcon or rvs te oorooaed ‘ich te wig of hs ook espe Palo Ato, Caferia AS GROVE Pivary 1957Contents Ineroducton: The Planar Technology ‘Chapter | Vapor-Phave Growch 1LL Kasi of Grom 1 Some Pope of Gases ‘Shapter 2 Thermal Oxieeion 1 Kinetics of Oxide Growth 22 Spe Charge Ete on Oxidation chapter 3. Saltestate Dision 42 The TrciporHeimoa 43 Dawe Lapere 34 Donations rom Sing ica Thor) 35 Redauittion of lmpuctis dig Trees rion 1 Dafoe rough iioe Dass ayer (Ode Masi) 4M The Rebun of Inputs Ia Basal GrowthIL SEMICONDUCTORS AND SEMICONDUCTOR DEVICES chapter 4 lament of Semionducter Physles ” 441 The Band They of oi 8 {12 Boctons an Hts a Semicon 8s 123 FemsDiae Diseibuion Function ce 2 Ue tyonent Formula for Semizondtors ia Eglin 125 trent Bosrons ad Holes ioe Chapter 5. Semiconductors under Nom-Egulibrum i” 41 Iyjctioo a $2 Kw ot Rain Prose cy £5 bite in Low-Level ejection oe [54 Since Resmibanses| Re [55 cig of Revombiotion Generation Caters 10 ‘chapter & pe Jonetons (1 Blew ‘2 2 SpuceCanpe Repo or Sip Jasons = r 3 Shace-Conge Rep or Licey Grace junctions < | 16) 4 Space-chngeRepon for Deed Juntons 18 (65 Copano Vong Characters 1 ‘Ge Cureatvoinge Cacteritie rm (65 Junton Brando or 168 Tannen Betaior caer] Chapter 7 Junction Transetors oe 7 Prine of Trantor Action 2 72 ComentFowing ine Trasoe:Cureat ais ae 7h Lottine and Modiaatons of te Simple Thor 7a Bee Renee + 48 Mecimum votage tsiaons : 1 Misamis Vaage Linton 45 Thema Litton : BEBE chapter 8 uneton Fels fect Transistors 0 1 Pipes of Operation om £82 Chartrinie of anton Fa. Traine | at £83 Modisasonr ofthe Single Theo 2s Im SURFACE EFFECTS AND SURFACE-CONTROLLED Devices ‘chapter 9 Theory of Semiconductor Surfses 6 9A Characeries ofSuace Spac-Charge Repions—Equ 92 The lel MIS (or MO Susie m 93 Ett of Wook Puncion Dien, Charge, ad Ses fon MOS Charest = Chapter 19 Surface Effects on pa Junctions 0 104 Chasis of Sue Spice Charge Repast—Noo- gulibvium Case 20 102 GutContratiea iat Srsire Be 103 Recombination. Gereratan Prowse ate Baio Spe ‘Charge Reon Pa 14 Fie laducedJuneons sod Chas Caeats Xs 103 Surfer Efecto uocine eeakdows Vola By Chapter IH Surface Fal-Mect Transntore << 37 111 Priel f Operation a 113 Chamois of Ste Reise Pansies” || 321 13 Medio ote Senie Theory z 114 Otter Types of Sartae Fis Tres Be Chapter 12 Properties ofthe SilconSileon Dioxide 121 Fas Surfer Stet, ss 123 Space Charge within he Oxide | | a123 Suraooste Charge {But Barer Ene 125 Sure Most | 126 Condcton on One Sut 129 Oter saa SERRE List of Symbols « linputyconseaton gaint tthe ust, SE cei a he el tip for Stok essen ars of meng putin Sled ance nen efit ia the genet ticsip forte teem xt ‘of slut as prs as covant ‘eto bs ator _setonbreskgowm tage olson ae uncton elon votgs, with ent open ‘eletorto-taterbekdownsvlge i uopet Spates er unt nn elvan Coctton of xian onde fs Bik cosastnton forests of exo doping py a he sof an inane ig pacty contnon of pectin the blk oe ‘oil gre apstane ‘Societe dn the ies ntertice Soncetatos af te oan a he grec etaace ‘pactane per uae foie ice cnocaenion “ ‘pcan per sles ofthe surtace ycectaa oon ‘purty consetatn witha he ast ep! ohtet Spree total eases of alee in at ‘sal essen eid purer ‘Biknes of alba! chaste of junction fletee {fasion coecieet ctve isin soetict [Biton iftaion sect {bitsy of eons ty of ures onde ety of walormly dt surface rexmbaaan- ert ener (ten a ener) oncention of smformly dated Duk resomBintion: geet ee (per on Yau a ee) creel cron ey {enor ner oor Seven energy it ondoction band ‘chit eecte feat reakdown ‘on corp se Feral lev ‘Seen ecg tgs Feral lvl or eons ‘Scon erry ats Fer ve! or ole ‘Stn ottefomiien ep. “lstoa egy atthe nie Fons eve ‘Sse Soe encondocor race ‘erp ee of eeominaton gars eter Seton cn mice Be edge, sf elerons| pobaiy ef cups by am hon ‘tie gency of operation rite of gettin f ecole prs ito sborbed ght (pers na ome) cndictunce ofthe Detlargal cahre of « jcioo fle of gna of estonsble pin in ark (pe ite 0d vlan). (Ut of Smal ww fe Be ‘ane osductase Tramcondanane in he string Henry's consent ssp marr cof tems of oceans in commotrbase cnet gia tommoreater urea uo ‘sip common-emier eret gis ‘pub matrantr count terme of Consens ia ‘eee ise easter coer See cent ‘ales exrest ‘alesse reve caret, with ets ope feselocer ree oes wil tse ‘ison erent fi iret ato gin feertion carer si coment otras constant Gea oedictiay Sls contr fone bane og “ison eth of elactroae ‘ima eng obsbe & & aso mbt segregation coset of impury at te eles eee ‘ose ms Supt Sor ‘overnite eon en mypesnlcondcte foorentatan of Skocoar in aa nye mmoodacor ia iba conten of eras ype tmicaccter Scocetatin of Sears pape someones, in eg ‘in lero consent he uae fonseonsson af sat inputs ‘ete denny of sats the Condatin band ecenbaion af donor impute, ‘ety fut reine aeation sent per ui ek. foocetstns of uk sombntongeseation eter Pet ‘elane five dts of ute the valence eed icone Concetaton of ok nan nay seconde ‘Socmvaton of ae la at Nope tmleodior Ue equ ‘ia ceocrttion of ols ina pang emiondcae ‘Secrataton of erie ye seibodactor negubum Se ona ste tre ragaide of deonic care, 16 « 10 solos fatal amount of mporis per tit rin he ol tsa sumer of inputs per tse ote be reon of © charge pero are within te arise Gepleton elo the oe of tong iesnn cai por ul ser win te suce depletion region athe oe rong erin, nas core pra rn 00 te pte ‘hare fru aren wit oe ode ‘hare p ut ares duo sos in the inversion yer 0, charge per ont run te eomiconductr ,, ied acetate charge dent ye ne Real stay contat R toa ecombintion te (Perot ine ad sla) HR teosstor combina er By dines ene Ry thermal resistance Rte estan of « gure re se spreading este hee estnee fe esto ioe Pheer race of te emit fon 5 suticecsabiotion eocty Sow Riu ses ein veoety SI” Stace recombination Ft AUG6e without a ste pesechrg ein Tempera Ty jase temperate {ine interval betes sons ‘pons in of fleet anistor lf ue 8 lacy ‘elciy of udurbed ens erate of eater reeboatongeserton ine ak (ger i dod oe) erate of eum seaman geneton at «suis (pee Seite ane are) erage it locity ‘term velociy of aie Sim grow tc velage ‘erage bus voage op a alge Sai olge he att of strationforward ie fund wage geval ‘pps jamin volage ‘Chee crop aren one Feige ‘ce or eo ope elton ein with of metals Jno Sid othe ition region win the eye ron at ream center it ‘Suto eniter te junction spaceshag elon {Nut oe only oped repos eptnl Goce {eptteo sgn within equim ‘peices ih of ace apetonrepan TBmunut wt of far epieton repos fsa wal of uface pletion fein, nostri [tos depth de (ute thoes aon common bit ern gs Senora te ain the reverse nein teuipo fer ommor-emiter creat ia fete ee) ‘eras boundary ayer heen, Fermtny of ie space (886 10% fem a S841) Tiel ay ico ony Seon moby fe miy aot Symbols i esi ressety paecture deny ‘Sedutviy ape eromecton fet tn ts ge rein ition fon ete fee within a veered depletion ope lteie of inn ype semconicer Live of eens apy emiennctor ‘Seerontti potent ‘tl woage of merge pr uton Feri poet. ‘Suiice presi tl poem variation scrou sutace sol pe see wort foes ae ‘neabsemeduetor work fnetion aie ‘emiesductor wre fetIntroduction: The Planar Technology ‘Toe planar thology nd semiconductor ders ade by this he ogy ete it deed lo eas The plas tecolgy as see ‘com tbe pip iebod of fabri wmicondctor ies md Inet eet, an as srogl coud abe apy Wid whieh ‘emiccndetrdevens have dace” elder pes of tone compe ‘at abd peneted nto eatey oe secon pens. ‘ie eae important technol! aves te pasar echnslgy voted rm mv pon teacher snet Tht velo a wel 1 te eens of paar elngy are est stated by conser ip in compatson with wo of te met inpret ae sesoner Secelanetontchigas the grom jon Piola the aly wtion meted. ‘Tese st ted te Bae Te the rows anton mth eon rel is grown oat of ‘bat ofthe semlondacer wih i doped = ern pe ken foe ‘pein ths cup) Atsome pit nie prot proey he Gop ‘cnn isthe met cen ches Tr eto, by ope {Dil contalngg donrsgpe punter to ibe elt AS a Tea he {ef be uns wil be grown ming, Waen the row x competed, the canal ir tesdoned ito lie be cots the pw joni at Indes te ted ine. «This method was evenly snp othe ft years Following the ‘avention ofthe neon trnratar For lstee, I led tbe stwenden However, a8 semzoedscior devises reashed at fa sew sppintons, : sccniactpa | demic‘ pena genteel Toe ice { “joe wih wih theory ofthe caret ctl Pe, ‘Eimaods soon denoted te inks intaons of toy oslo ae Tea amie metod devdope Seen tn onal acon nts Sar p= | ee a ee Src ye tet hs ed gated { ‘Soteneaksor Howes poeta ou sas et { eek oe mt ire pin nti of | oe ‘primo edo comet ify nin ie | * _juuetions are formed in a manner similar to the alloying process in that eee thc owls need toa source ohh emecton ef | rome mp cn ty sige Hwee | et ps nce puts pee i ‘ltt cy mtn dion lcm eno if Hey ree ape Wit the additional discovery that a thin layer of silicon dioxide cam { xy mat nin tort sf | Steen ee of pte sl othe Sy i dt rcasemcenaoe deca ees py for oi be dete cer he senate | Sesh my aban ag pe | aly i selected areas, defined by photolithography, where tbe oxide layer t Stace { {al ny, cette es cme ser denna easy sa ne { {ke masking property of slices duce for proce defintion ot device {i aoney elo mes wee ey np tat tee { ‘icin oan tn ceed ne ee pe i “See of a fer, he my of ont eo _Strenrcoens tu San pn seer ces ( it evened et fait of ever chron Realy | ‘eral dat ln ur neon eee cmon | ‘tees ei i at ne eee 1 sc cvs ts ry pr ago Now ipo fat | ‘tly as ecco ene es Ca ‘cg apy set trcngetoe™ ' og ag i pan pony eh ne i eto att sa cr aun, mamege pet contain oenope imparts pe emo entre see) ened TPES TO ampere gh enough 20 al eaten selon ee cane be pte so ali ite ie ara wi HPC ste | Se Peete “rettteeaatedomvat Sear eee sent Eo ine hei egy et seer em “hing bp D8 > Gasoghn hat nye bab SC {ALN lat We Dusen. “A Daca rn yy Dis Fn German Sage Es Shi Teun io Bae ota don Soe 0050 8 part I SOLID-STATE TECHNOLOGY * Vapor-Phase Growth Thermal Oxidation Solid-State DiftusionVapor-Phase Growth Vepocphee ows etsigues ace employe lo wniconstor ech slog forthe dopotion of tas (og aurnu) owing Si0p, and semiconductors (ep, soe). OF these proce, te ost inpotas oe Pom the saps af dvi fnbroten be gown of Sele eu eocondactr fra oon tel en wtseees of Che Ste secconductr. Such roth tll option Gest for arenes Spe, "Tae mporane of pail growth ia emionductor eis echoogy ise tate ese wt ts the put saneeateo oe Mm at be ‘Shas independent of he mparin win the bate coeeg Tle concen pe Thas el rou eat eed to orn ‘et jcionsbeoee te ele man te abt. Me pore "End at be se oro fins of etl ow ip coneseton ‘pe substan wich costa te ime typeof put Io much Mee ‘cetraos.In ths manet te set vesanme susie wilh the ‘bse an be redo witoateerwae suopng he erasers jamendo ie the eal prowh of eons 0 porate as teen stdin pent en. ‘Thev oe sverl ic such roth inte performed. In thi chute ne sndy the etd whch most iy dnd inte etal growth of ion! tbeYaponpime rection i. ason teuncionde. (Prt ronew of other pes of rporpoe. YagerPae Grom powth reactions, se he Reaing References tad at the end of thie apie) “Two pes of acters that have been employe nthe eta roth tse Pie. Fb ow he ra ‘aco sed oe ploeerig ork of Thee > Fire 10 sbows te ‘rol macaw in ore eet vein y Shep” The ner tpl peer ay eda eat inch ws owe ‘Sunray or nny, bac re of te Suing s cram concession of sleon‘cublnde ery the fence: ie foe just scan wales eg baa asepton which form, Bete By snctiecoupng to vooiegsery seul cls orn aoe ‘he rector ul has quarts or gst mall. Sine inguevon ening i ciple tb mals Yolo cl drag te eavth prow Tht es Snteecpesion on there wal sree msi cootaminaion ‘Gomete wale — vines "Whi vapepase dpoion of iter ean take place at elt low vertu eptanlpowt uel egies realy igh Sept ‘empertere, pial) ove TORO io the case Of rn. Epis [powh eer igh temperate bese ceposted atone met Sad ‘Ber proper poses wa he ental iat ere fo eat na ple outs, Arte tonpestas ef depocion edhe ci of ‘Be dpe sums devrene, athe rag fly Bom ore td ‘bor deci, eventual os tees alse “Te veal sce Wiehe the row fon Smee SiC, + 284 = Sit) + aC, “Tisesin i evens i nn tke pce te ston IF ‘Re daver gr eee the feer conte HC), feral or sch ‘ir han grows fac wa tate place, 1. abo known tat en ain campeing ration te ple ssmunaeey with te row ron gee se SC + Sil) 28, ‘As el the SiC conetao ever ph, eng of te son ile pe ren ihe sven oft cps contrat ocd ‘nite inering gs seam. Thisohn a Pee 2 wk ee {Been of eons of SIC the pone ain. (Conse ‘eck ition Yao terieaT heen a STietty the epton nore as el ce teen wt thee est fone Stern cng te ceger ENE Sion sal gro nh ow covseteao ion antes Flere 1.2, wih » pil gown rte of int nn egos te —te moe ration of iC ine gs depends of nowt eV ‘eure Pie approximately Hoes. 1 KINETICS OF GROWTH iis fx orth he Bs of 7 cu rer ad aes ge 13 sie mel The cil 5 datdsnas ofthe los mnie See ee a enn tec om We shat now sy the tk of he ge 9th sue fee growing nF, and te fi oe akg Ms ins eae cnn se rove acon eee ean the umber fos o eles cs Shainevlttime) i fount the Box F yee ies forme . FimkdCo- oo) a senet Cot8 Cy arth consettons fb IC lode pe ai ths Code ioe pas atthe ies, rempecie, hd a Se eae ct. Taxco hee a the reno roving Fam Suk by oma wits Rekete ca 1 wo te chal ereectin ra comin, i YE Eon ue nognr fo Oeste ecb a Bu se an re tas of as str SE oper eon rcs; in te eof 8 ere emi reo, wich ee hot, he oon othe ‘reacting species “ TORI = = Li cn wr atte tre cut to Sos the ts omi e os ‘Sithinadiree em nse - aoe ine ‘Tis fora shove tat he sc een slp 0 ba he ‘Deano acon eed main Stuer hank hep tn bts cnenetbo pecs ‘Tn condion i commtnly are! os afcerseton ee icc oe ly po be po on fe & an raf a tele Se ° Nr ietom, oe sete 6 he munber of " sion ats incorpo no a Volue (ited Ts vluecor stage 0% Gen Noting that Gy = YC stbre Cy th ot sumer of molecules pe sue eens he a, ‘epi te expen forthe owt ate vn tele Sy as Rene > Note he ftwig nro i ean, Fin pie hat the ‘eprom ate Yi proporonl tthe mci Cacion Ff af he rescing ‘pros hawebave coarse lnapesnt wi rege ‘Sito for tal velo of Y mak’ scored ol usa Secon he goth eat pen eee trad | Binet atten epa he inti | tani cad tl etcsearion cones ens {Boling cna he pow vb gener Siar actacrmncionconell 8) + Shor (mance ott an 1 eit puting we hal inne no coment ato te sen pot lmnc ta obo ten in agit ‘See: ory ts cera ot atic a oshe mp pendent Sn onthe a ery Se poate lows a8 one ‘e Eat J es ergy abo 196%. These ao ‘wre a Te etnies tnt seem vn oe beer an pone WP ger At high fempeatre the Seng A ea eel terpere Mss Bomabate ev of an eo fw ee epost Shae a? Se a ener, ern epee, te spl el expla he "eee of ee cect a a Tos tenn Se od or tbe ae of aa 1 IOemee tod ky 10 emits HOW, Numba of the Sine onde of magne oY extrac ror There ts Sane Inthe etl reser Ta iode ofthe growth oc git ovesiplie det not oni tbe Bf te een prod the ea approximation tht ‘cece te stare ation ee ave cred aa, vd oly Ferlow vals of Yo te tenpertre gaint resent Oa restore extreme Sepsis te properties of he al ‘ry rascal betwen the feted substte ithe cod te ‘Neves, th sple nodesl pees te evel etn obser ‘perme. Ie ene fhe te regs of te oth proce the felranfr andthe sureceetton foaled ious pet Ia a oder of ugstace Sumatera ‘at cotta’ ate gapase magne eoeicet hy fom te ‘Gone Thode 0 ein good gly pa fm, growth tpertue vet be realy gh As ru os dual ental Freres tke plc isthe maser contaid repo, oe set Seon ee ‘Sinner the schisms Wich deemine oghare miele La GASPHASE MASS TRANSFER Jp Seton 1.1 we apposite the fom He Dulko he gt oe stato the sl by ie forma. Fin hdce~ Co ‘We 0w colder Ihe fsa which dein 1 Staprantilm Moc! . ‘These owibi piue ofthe mastransfer proces i shown Io ‘ig 3 ats pita Weel eg one mt tn eae at ‘esse med lng whic om uth ee race win» wor ‘iy Utd abo,» stagan fs of ere # ett the ao “rasp the eine specs seo Tn stant in posed JO" ene xen Po cart fr nate) en food ape wih mdepecdes a te ofthe chy of oxygen aad wast ied a, St Sher pes 2 Lp Nd fiten es 3 ‘Teetemperasie dependence of tener ate conta 2 i own in gure 26 rs ein fe aa ate cows 84a depos om ‘emperareotpoealy with ap neato eacgy af tem PCr Eat tn The et hate nope eee of 2 ‘ene apd hat 2 oe oie Sencha energy of 800 ‘Shine by mdepedent tacit” ‘lentes that tee oot det he msn with hc eae Sze ince, by (We expr fom Eton 210 tht 0! ky $28 h tte sms wil determin the gate a ities eat » an ts ratasatan op pin at hgh rime et Si arena ingest cee toa sen Gu eat occ te Seog tga sen siesta Rprsarasdeuntr stearic gma epecned speeches Eton sain ” te mode! of onan diced in wit ten. Tere emis one Sport vneyplased stration. Tes fund tat data cba! by ‘eosin ongen ca ony be bough ato coastal ereonet wih ther) we saat sfstour inl eson of, = 200 Cait ‘mesures of oxide grow a dy open alow epee inde ‘Sorters acta sted tal nef ondaon. Threaten Figure? 7, where heen apt oon gases ieee wl ae Fe The itl exci pne (Oen OS sbseuen isn growth, [sein that he ier porn of be ie ‘hatocr tere ie carve exrapoler to apostasy = 200A ‘ater than oaero. "Ts at evo ound cooly hough expen Ten ith dy oxygen Hower, ste tpi nil phe (or [SS aover ban obsered ip uation a met amet ‘A porsbi explanation fr hs observation mig Debate eo} of space anges oncom procs 122 SPACE-CHARGE EFFECTS ON OXIDATION Soar weave ranted he oiaton pecs at proceded tough tee totan oft esha oliig pairs te oi HOW ‘tr this may oot be te ee. "Ar we hav sued evr, i rows that onion prossds ough Aeon fe oni psn sro he onder a8 rgJ ‘he motion fslizon, Other exesinent studying he lft of en et $i appear the cde on he nia ate ave ase oo ‘kag pss agian tO, eps cap ™ "We ean ao Specsne abot te acon tang pace the gaonde ‘wut. Let spore, for estanc, at llr anyon om he tp paired the interop i ey atthe one foes ites sgavey charged oxygen oka ao pote bole feenring to the ees 0,5 0,- + bate Both te oxygen Se and te ole bea Lo move ser the ois yer foward the taco However, he at eee eure Rowing sore ie ‘ue uta be aeor The ol, wich es adie ob, move ‘ser In ee ase aed fe ove on and raps he en Wi ‘So cassette iy aot rested to tees ef femal natin ‘een Winer have the coupled tein f two care specs that hone ies bles abl dere lew ret Ti ak ‘ith ton of he soe of th? specie Cabern and Mt have conser ths proces ea, The theory pest thao longs the cde ens sata tan «eel ‘Exeso-thue wl be ap inal rapid cagaten pace Ar the oxide [yors bond ts cea hoes is rat of grow il dow dows, Estates of tise hows (led exe Dede feng) ad 120A forsinor eaten nO, and forces st H,0. Sloe e fis ae eb pest wit the eberved theo below ch te ‘nator staple Opens, aad tesco Io alt be ‘dec xperinealy, thir mechan ey sau for te ep ‘eval eberaton cre a i ra obeeitad Sania naan TREC OMS. ” Efi A Da Ma ron 1 En 188 2.2.5. Sn nd W, ia on Fema of Ose Fo Ss” J Bic eo Go 3.1K om,“ cen 8 Ong Pa Edy Merwe apps Bonne es Peper Son Caprese es 4. Bhool ey 16 327 (90 di of So Dry Ox pe, Wet Cn ad SERS gener enna «tc Tea onan Reaeoasyr eer me me Ea a a EERE Strat ene oe __ nay eS RISE mers coe he ve, can pm 2 ple acpi saci ens 7. Joga “Eton Ei Fo S868 On". Con Pe 2 herocearte SR ee ae Se Seana guia stm fom 2 oRte cata mec eenmae ape tn ern a rt See tessteses 22 tagmat sie taencn (2 Aer sep ta) + sep 0. om SEmesss 26% ene nee 7 ig Wat sen 1 ered ow bl ee i a ge sani war aga 107 cota yer onto dy amp an wa pr TRE = ieee 1 oxidin forthe cae when Heary’s i 2 be Spt pare | : Fe rainy bee oe ny nee tring ee of ty Sesto cuenta a ep ce (Te pas ema Set aan te | 1 loe eousnon | 3 Solid-State Diffusion “The pricpal aim of emenodutorehaoogy ito cone th pean crs of npr win se veges of osha ‘Sywal The sont practi nay of acting tie troop slitte “sion As res teat of ais npr melons tittecstaied er etn, Sihstais nee sated te falta tbe sect haat fp json and ster sme Stor devi formed by sods citsen canbe deemed 1 the measurement f the impunity soesnrtoss Using suena ‘eafiremests concnraton nthe ange 10 pap ilo ee Be ‘ermine reistvaly sss. “is chplet, we us litte din, with emphasis on the sitision Stimpuries een We en by deriving he otal IE thet of tae pees, nd he anopor equa web Oars ‘te dattusin na ld ‘Ten we i teat ermaton sas fvalaton of ied Lae, using imple in ther. Dvinons From his theory du to Sek aera te wo-einennal ODE of Png? secondate dency, te charge are th spat, ‘era te mtaton re then snared “The sean fal ofthe caper one a wenn of thr salite “ugon protens eacousted in he fabvesion of seneendict eves Thue aloe the sedation of paris dui eal ufig, the diaion af imparts trosgh x scot donde hye 486 the itibaon of puri dng ep gros31 FLUX “The hn rf any pei eed ae Fm amber sting 009 ait Fy fm forthe fF et Gost be sap of te maton of pominey charged Inpurtes ia a cyst The toms of SE'Shadl frm ass of poten! hil wich fap he moson of Me SigectmpunieTs Codon serene a Fiat 3, The MADD teat we pn de eight hepa baie iste of te order of elem voi Set mates Tin dts tween ozs poet ari 8 ‘tibe oder ef te let spacig woh peal see anton. It eomtat ee fel apd he pots dso asa Tne sw i bow pT wate pote cnged parr lo ie igh ues wl ake Biirfocapetotieitane ate Let ueow ei the fx Fat postu Ths be th average the Best potion (¢~ a2) Ea Gt rtm, toe Aig eps by = Aaa F,~ ra vopatney mee a Figs 3. "ol soporte lb geo he product of () he Aesty pr uta of mpi ote peal vey 0 (= 0)? @) {isa eg phan in emai the acon ef het, ‘he probly ofa jmp of ay of these inp othe wey at #5 hd 5 egueny of stented npr Ths wee we = (octe sh exp = = datl-+ Fem locte = 9: xp = LF 08 an sire oC ~ 0] te densty pera wea paises stated ia the ‘ales (e— oan he exponent faster sth preboy Sf arse {oljmp fom be vay te) heal at Ne he lowering “pe bir et he etre eld Sila Torus eae be ie fot Fy, Fad Fy. When thse are combined to pve formal forte fx Ft polenta cate enrabons Cl) apeosimated by Ce) a 0CI8ey we bain (2) —natewrat BE coun SE + (Reve Cs Fm peter Reon HE aera connttl 02) ‘exer ning frm of equation bao for sheave wie ee ld ey sa Rg, T caso ca expand he th dhs nthe hot Eaton, _ Nein at cob (@)= tod fre—r0 le ou ingore he ax guise a pote rgd ps, ec, @. rove Di apee en se an beweme ov os ” » Te © en hy pnt ay Day : oa os ‘This the walskaown Bul» elas. Ts usar eye cotton’ the x which propor ‘ional the soncnation en he fo ry, eth eet _ tiles orton te conrtnen ned oe "A salar dsivation can be ade fort matin of agate charged specie Such crf eds 1 an egatonsinkaro Eguton 3 = ep hat he sg of te it er sepa. Thee exp. a (eather mpornt foals developed rch, reward Ee i Tua 3 a tendo caperig.22. cuir tear pars sien! Fa22 oiaiy fdnrnpr nen! sperinetly mensrd vaso te divin of eau inp eerie ar soo sigur 93 hough 54, Dif eos SEALER Boome srg 35. Now ithe gat of be Saree or eget the ng fhe wae roo ity Se eter comeens) pote vera tee 2 wnShie neptae ane god sit inno tT ‘Bes tlt seers Sapte fhe iyi sa be repress By te equation pene oo in ageenent nit Egon 8 Toasigns physica meaning the action energy Ene st kno? the price somites urion. Il Woo ata em feodactore dfn of muoalimpuiy Leinpantes wach ‘igy ates inthe acon ln uaaly proceeds by tor mperies Jmpng ito tice canoes a te latice™ Thos th station see) ‘arepnds ote eng egies feem + con aso air hs © Step one epi. Ser natant "Bist be Baken a forma many, me ig expe asap bees tr cergy gap of 2 semzobdodr (oe Chapter &) andthe aconsoup le tnt of bn mpi ate ai Aon enegy for the dies of acceptor tb donc ype ‘epar, sche ston rage beers ud ten tcon sh Section asc tones Tene ete See etn ny apr yO ce eno inlets Sc i npn mn SES n perl nowmch mony ict ‘spate, win sien tom Peek Tecsene ee 24 ii soe npr an 1.25 DAs morph 504% iftwon of godin sion i gute compen it ‘mci gl, bende aby 32 THE TRANSPORT EQUATION Consider now a small element of sé sch a shows a Fig 3.6 {A lnveory ofthe mtr coined wide oe Bove by "We pes poston x and putin as ye {erase th ders of funk ‘Use tine io Fon Poved mates be famed ao conse within hs een,tates of conenations, we ca wie e oo) see rey eta) Lore uhee is the ance contnton wissen, Now, i eet a ban Fe) 2 coco, ag REtAIR FOB, . x. o Soom ich che geet for ofthe tempers eatin sone dimensions 1 ow so orm en ny ed ena ue tay wine SESE Sithon we re veasmflr ofe atypor eno He El-p (eand.D = conn on oro ae Mae sh problems whose 1 mot of chapter we conta cues with problems when knit Can appenmat by teuming tutte ete Fld 6 = ‘Suen ite fin option, HL pZS m0; D=comel G9, sa pE wae, 4 ae ian gon 37 wl be ‘The codaetion of best sole eee by am ential equation sscnt ha ther D's opaeé oy he herman T Sr can se the sluons of est conduction probe i slate Uisaion work 23 DIFFUSED LAYERS Solante diusion mest fequnty employed in seaoonductor technology form fue es of impute Types. se ners tte formed in torep protest. Ine at rp pues eo: ‘Seite demonic arn efaraitencoh rowed the proapnin sep. Ose the patter Soe beet Jatodied ina te semiandactor, dy then dite deer provide ‘Trae consonraton datbaton Without any more impr bag “ded to the eetenndocte TS sand sp 8 called We deere ‘ation sp. 1. The Pradeposition Stop ‘The predepostion sep i pill performed by pacing the seni candecor mpein furnace rough ic howe anise pacman the deed impctes* The func abd Dw eoadons est to ‘ioe ied fo termalexcaen (Caper 2) Tae lompeare ually age ete 60" an 120°C "Fe impure ane ode in the cc a in veer way? Sold Source, In oot srngenest the mpi insodusd inthe car garion 4 sold youre sch evaporta, equiaxed te source, ie paral pane of the smpuriycompouad is Us ab Wea evar peer the rose temperate ‘A soi sore ca be ton te padepontin of ost ipuries. The score mater uly an onde 0 fe npuyeg. POs fr Poe Pons, BO, for boron, AbD, foe asa 50, fo enn.” The Diidels cid othe emote ane by he ura hes eed ke sre, An cep of hr edugraeton might Se OH) + Sita) =P + SO,eo8) ‘Teas am onde yee oad othe icon surface dig predentin, | lguid Source. & iu compound can ao be ed wx sure of ‘he ipaien by ping the carer ue frough wank cotaing he‘gl, The tka he iin are kept at ted temperate, The gi Li cues ae eae fr revert ips, 8, POC fo “ sostatebunaion tad tae {Ge hich buble trough tel acer elu wie hg Sit erent the pt rene of he pany compen the [bs etvig te as wil oul wepor prize mh egret the herpes predeposon, and BB eros pedpontion. Chemis! Transport. A tir etd of ntedscng 8a nip tat he go eam ough neal renebon tig plate tout, Anam fh hee! onan ross et of pal, ‘Thesoureenponedin lsmpredeontion canbe glimenié, Gay. ‘hn ber outa aio nda inte te ear tony the presse of hyérogn, This spelioty iat tat @ ana fatto aie apa te sures One sonable reson mip Se 0408) +38, 2Ga(ape) +3840. For this eatin the put pressure of alin vapor should bgt by rae (2 sep tens tome emt maton sopthintress reeeeanerte Sac caeraaee Fie eae tae Stem oanceiar ma eee ee arene cee iaabimeaaenmane ev om Sigs tt ce Reina sere ana Seema view nears Siete aes Fase Surpameteneiosas Ete eer een pe ES petrauraeemantertaacens Sue anssuemaneeset Seeeesitaauie tara Sear hiirearte each seeiehrris mealies ste Ean 80 Teh TE HRT Tee eX sadn natn ind tat Pit roto ty eran wt er rs fia pur eae pu pec ats Fee ‘epg? Unter ah condone scene = Pendent of the partial presture ofthe impurity and wil scien jg lt Pin pcg? Swe Tes pe ee ae ‘he semiconductor resulting after predepesition, fae eee eae erase ‘et neenecente ts oss peer Ne the difusion equation (3.9) subject the boutsary conditions I= Gy 9)T — cee ste = ton) 38m mitt st ae aeone enn) ood th eit conon cage am “The oan stishing the sin equation at wal se above coo- ies tbe cmplomontary or fiction? = ay e.) = Case cen i wich one of the mos nortan fnctins encountered a isin TESS Sot re pope te ummasad Io Table 3 1 tabor TEE’ tt aa acer wa arin aay ates handbook "She" Gocenton dacioaon ceuting i pledepelion process cig ttre snp bay stow in Figure 99 where we plo, So otthiner and fpertmie vals, te vormaled contain ocala ie suite concretion whch eonsan a fon dace fortes diferent as of te fon engh 2V Bi core ‘Sponiag to the comcetiepeedeposton tines. Note that de ‘etepston ie rose, the impunty pene deepe and dpe Boe nT psn some rapresented bya etl Quay, he Sherer ano ncn ot amd con et the tou umber of input no et es 9 = [cena oy Inepatin of auton 3.13 yet : a= . cus)‘ “ ‘TABLE “enn " nneron 1, Drivedn Ditfuion ‘As ics shove, peteposiions wt ret sre conser cea whe que eed sb ofthe puny. Ts often ees Sato lowe fe pu ements ae. Fathers fs te desble to move fhe inporier crper ino Se secant ‘thou at he sae tin ineaiay he ol umber ftps a ‘Re seniconductor ‘Beth prgoss can be accompa 9 ther hghtemportre heat ‘umes nag wale dom eco impor. In pci, onal est ete, tbe even Sin, sly care SS Sh endig ambien "A simpson of the data shown io Figures 32 an 3.3 wi thane shown in Egure 3.5 nse ht ou Scepter: donor p= ‘erie sch inter st ssn nose sie (Cali & uae exept) Tham he hee eaten seroma a ig se the rauig ele per Wil ten fel thee impr feof eons so move pores wil beaded mor vals iat al ond [ere | weal) et =0 ace) | 3 [fetecerae wserten ee ‘smog of smpurtes egape Because the oxide acts an effective mask +) ~ against tbe diffusion of these impurities. : apart SE ee ein abun ty j | ee we 4 ree by that solution ofthe diffusion equation whic satistes the boundary eee is ooze i sioply ot fons Te quatiy RE. il 9 a S| elon a be ere! SRY Seton enon HE #1... ow at 1) repeat eee EO attr atin fd. os | Sree toc haorscramecbae n= EES aanee a» il OPE ta eds to 0) 2: Bt Ci, Whi reasonably close ro the sich provide for contiant @ beisg maintains inte semisondestor ing te Svein diteson sep. Toe al canon is ge by : a0 = Celeste eam nb apt derbston a the begining ofthe divin sion up the impurity subun reing tthe cecaion of he Pee ion sep. ina dca preblem owe. However st pac eas, fDi jor deve ison i mh larger than VD! for preepziion Tibia eae beet of penta of cl pea Ghee an icenptn sat fb rag se vein ition ep. Accordingly, we en repent he repo Eon pole oalnernealy by i ince, Term sgn 3.5 ee sc frm ete praca Se ers noe pee fe Spy 'm, Dg = 2. Thom the ie el an ng soak Ae efetve doubling ef ion cote “The ec ofthe Stn fll onto cape of he concentration ite ‘ution it iustate im Pir 319 whe he rele of sumer! cae: Tauoa ke go he eguaon fr Blaled itn, ae owe fo furueuar ane, Est comparasy, wes bow » comply rose ‘otion hribom wich dos ht take te Seeding fe Ino ensiestion tad mbih it ie to he core! nina ow cone evans Tt opareat tat the felling eet Bigs boat 2 Sane graien nen he susee The burt ela Bel idk Utero he onto the ret even thereon of gest Ep tecetaton, Tut nth reion tr coneesiion dat or not Set in be 40 sep 10 maitin theme Ba fowl ito the te Conductor Experientaly neared concentric ition: of boron in ‘acon under vous suriacscontrtion conons ae Se 8 Figure 3.30. evident that forthe lest fer conserton the litiston clsty folowy the complemenary eaerfuecion dtr Baton ao apeas tat the dabuton bis to ave rom th tro futon spe she ste corer exces 10° (Note ‘hat mi acon 100, the eson temperate, i approxinataly 10" ci) Terme rfl could acount fy nro ‘daded dition eft 4 shows sn Fire 339, Hovever a the free onceneston of boron mina fare fo ened 10% em the poe begs o deve rom te complet ror Sascon bon tos ssh lpr exe tan ei be seoure onto te filniging ee Its eviert tha We mas conser tbe? cate of Alvan a woh acse tect of Latte Strain (re porn anol tat in biived he thefts concentration cree teat tale ithe commonly Hoown "emit psh ee. ite serpte called th emi et or wonettive on™ et)“ phenomenon nated Figre 2a teams ofthe Shneed denon os isd lee in tepone whar = cond, Bgh onenon ied tyes pega he sen, es often oben fa Trnnstr atures whieh, By ney, mas employ wo consecutiverldeat tat he phosphors uo “pase” the boron “Tisteigs abou be sees non tary slumatons of dhe efet have Yee propos Tk ie taaaig oct yh aeration vale. This propation was spared yan expect i tp rg 321 te boron db sigh consetaion poser| | eeu | igaasrats | 1 t fren 8 | hin Toone” es a din ot 1 9 ans suc 6 the sch apse probe was psd on he i susie duet ie fn hh es ound i tre pes robe he i ied na ar tan in a tH ee En eS ee, ue cw HERE ecco din oat Deviations trom Simp Bitsion Theory « 2 Essar! Rate Limitation of SodState Dison 1 our tetent of the problem of peepee, we Save sumed ‘oath sure oven ofthe prs cone thought ‘be tine of peseostion. al however arena pain a be Semiconductor and terete sac coaceaation ls als Dre ‘Brcute pystly he ure consents sae np sano ‘Eom seo toe Sl canst va, here wih bv © Be 4 Ptiog oF anincat ting woh te rnp Sosndrycoaskion CUD = Ce ‘i ot BolT eration ef ti ani pei determine’ by te ‘eae ates of wasp of parle he Bulk of the ps he ‘avec, and (sss Clon from De sure inte the err ‘esencanductor Thro extra steno eae of tsp! oF ‘Be impure nl iofoece te sl-tare cena reese "we beat connie the ston of te resepoion robe subject ‘uch nese teen. Theil condone fo whch We ve Swe th radepesin pele, ce0)=0 a) wala ofthe bor const . Cte, = 0 as) rein uctanges. Howeer, we nos replace cond bound) dita, te cone reconenatin, wh fe onus nes co.ne-o8e aan 1 win pie a ee sic vier SON ISHn ea esta abla a Pa Sper Wats Seat eae ok | obits ie ae ne eat ED ete 2 ett gu Beret (HE 4 2), pea . (a a " 035) “Tle aletion const of complementary eer ftom fom which & coreun term waco. ha De peace DE Reames Sry te te subeacted tom vane Callao ted on Bgwuse 33 seston in Figure 322. lieve ht sh Dapproscher aPC ‘Sal Th the slain rege iat he compliment er fontsDevons rom Spi Boon Theory « | ‘Thus the dinesioaionparaee /Dt poses a sine exinate | ci hep ine dau ea he penta ce j SUSIE tthe othe eer j Seta: Coca ste he= Sema epee mus ul See shaper eatane a es i Steen ee sid it oe tr ee ofthe Henry's law costa onthe Soon date showe in Figure 38, if we een ate Ty enter / Bu ipo detente petweeiitars nea. tee pe | esl ue chs fens e i dees irene i | haem iiaossy ee corene The compen pton ano edepostion the ape of snpure emt bonds, tend sxe i ‘concern pte i es nfo ion cr Trendy ha cesar Cy a= Ce ox sede bundy xin wb Ge 0= Ce an | ws seo.n= 0%. oan | Se we ae at once of hepsi bl he I fprvanalston st pobm ve omar fio foe ‘ec of pradopstion. ei gen ‘i oe Fegan Titan Bee [ Me 2 , So notgigt onm «(ial \ 39) 1 ow a lion conti singe err non owt i! seman won ren Ev al A an | ‘oosomes Iatge, the additonal term Becomes ver) soll. Caloustions | USeve Eee Spee hence Rome ab orice ae oe | ‘son emer oh sp eo cin ft DF > april mace of impr dost eon as rein vertsponue tot tosh mai Ben Figure sect it a aft real po eB he iene civ corepodig oD = 5. Fore ne an tener tot inoe pele odes bat tn loro hina aes Se tans oy ch cna show ena ot35. REDISTRIBUTION OF IMPURITIES DURING THERMAL OXIDATION. Where the previous conideations dealt with devon from the boundary concen spied during the pedepenton rep nth ton ‘Trcomulera phenomenon hich ean ate deviations fromthe boundary ‘eoditen ppd inortrentnat of he drvevediuson np 9c @ ‘mor impaisesdifne mach slower sicon ethan nam te fide lpr prown during the driven dion ep wil elev ee Impusts ic ie scone the sao othe growing co Seiden marie cenit mores, 8 sear growing thermal aide Th i st seer ators fay 09 | pines rol po gaave brit ine conc an pty cone ‘Sled none of he two pus wl be redubted betwen tet tl ‘iim retied. Ip equilib ao he omens ia {Deo phe wl ea coast Toe no he eqn coe: {ebton thesia that inthe concede ir ene hy he teen ‘pean cofcot a i eid Equiv consetetur non Egil conser of aparsy fs SD, ‘Artis Stott fetes the proces of inpustyrestiston ing thera! eugation i ht the Enpuriy my Save s Weodeny >nme im ee aan li ep ar en sgeatly a pert) a omer “le serene ates <" EFL creme cw & Bl poneny ae na eg 20) 1 rage et on rt ts a funason of ime, These rt of i ant cnhanaimving aon of ie Th re seas Compe oe avon ten of lt ton ccf of af nus m= i al ake pce AS eres han he Pe i onan the sou of mpi 9S Etna es au poe te lcn ace astro 0 pairing Teer Onuton ” Four possible cue of the reditibon poss ae tated fn igre 325. This ae at be ordered in Wo BoUpt: Ia xe, be fie ie eadency oe np impurity, and othe thr he oie as 8 ‘ecacy rf te purty. I ach ae the toon ea Se erent {tsb and orf aon theo InFgue 325 experimentally herved example ited foreach of he our ‘Wienow cone te nary precise ae ea he they of the reson proce Th tery ironed of soliton ae sion ‘ton wits moving Boundary tad dete he otbton of a8 {nt uifrm dpig costo thin. Th bound ot ties apt tote pot ae () te cossraon te mpuyat the gure ines coetnt, , (i A witin de lian 8b Sate the cocaine approaches ibe ilk cotton Cy Le ‘tion, we have oes vo mating contin, Te fat the ‘aceerton ate wo er ofthe olde eras mabe ee {ao preseted by he egepton suet mad the sco i a the one grows, the spurt mast be conserved tthe moving oo seen itera Ie lose tat the ode wth wil proses | blk pres he vets iio, ei eles tha he eae Inthe epee gon aoe! With What he Hold exp ee (hess of terion oa uilrly Sop aloa westate 46 DIFFUSION THROUGH DIOXIDE Lave! A SILICON -R(OXIDE MASKING) seer scrotal eorio ‘io di tee Re aredepewition. The: {ayer remains consians throughout etpectes distribution of the impuets ‘sion i lbwratesslecatay in Roe MPU at pee“Tenia conon or thi iis probe tha the concentration ‘ot th impurity nro bth nthe xe ine ic The Badsry Sei sarae (tthe concentration the outer sue othe onde its conson Cy tooghoat te peceontion sep coresponlg toe nant Cin ees of prespetion atone somennse emp sie ee) an 0) that be epurty ancesttion vas Gey Sane he secondcter In adsnon, we marshy tetra machiog tena once encon() that he ai fcncetations the exten n= fice ermine y the mre coe man ta the sk ‘inp rough hs rice yeni ‘The sion of thir pri ite fry of 2 inte srs ower for lave sma aie of eh ht (DID. a, we 8 pps he ie ess b) he et te alone, Ts ie oan "hp portant qn the depth of neon fered in the eiecn nae prcese ese ayer when te party has ise + ought ayee, The potion of uate dekae y econo Ce which, when substi into Eguton 3.41, es in Se 1B ay where = 2B ara [ete mt EH ompste calelaion™ of the use dp Crop he unos epthe »fncion of he ‘le tikes bs n enters ve onsis gee 391 sett) EAM conprin ean re etd ernment or SS fe tpt of pan we OFC. he canes elated for vrs sed vas fie een eee, mm Note tht shy of these fm al Sve ape ‘rlphtloe ritomp, Egnton 3.4, ral anata ne Sf snipe agmgtte eieaty jt Ta age Saher 2 et ntnship ral ec a sh coe {on with be fey af there eames edit inate Pee sepepien cetciet m Sepegnion creat ciness is so the xen dt on ulinand ceogea ong cide fim ae cade a3 A singel inponset gusty he onium ote tikhnee spite lo pees te formation ofa nsontn he scse the moa tet i Mey cae roms Ein A yssana oston (E REDISTRIBUTION OF 2 YS RENTERS ef cet er restate i am Goal te doping cowcentrtion gracnts a sl ea se ep pow 1 PST Se samara ten bs st erat pes tan tos enpetrs (e= Coup SOUR oe cee ei {SPScteamon gros a he ‘Sescne he tno ‘ata iets “he mpeay ba = ‘semi on denned by Cao {Paty iepertes of oppose OP we omen ar sterect ‘embaione the ction of ‘he aston Impulse etl Groth ” ‘The soldat dion problem contsponding (0 the since pari i lve ajo the ital cseiton C0) = Cy oa) the boundary emotes, Gi. 9 Cun oe) ich eign fa the ial dation othe set x cone un corondig tothe Subst Going contalion ad tal te ‘Spy sintncton dup ie the sutras Undred he ‘pan grovih proceeds "Th esond ound condition i gen by > I. In that ae the slain pen ow vey 00d apwonimeioe by 0 6 te aso Coe EB om repress of he auf ‘aleitions asd on he come slog, forthe ease) Be 91 snc or air aes fhe arte Di ae shown Io Figere 3.3, We ee tate impr dsuTbutin speeches he simple rm ‘pit by Eguaon 350 for aes of Vs Dirge te abe. Sine ‘Spal Spas ln tiknene ac ofthe oxo about 10, whens ‘ppl vile oF /Di ight be fe order fa I pel alee ofthe pow parmter MDF woul be larger than 10h “ie Brie ge fo the proms of thse enon Hey, te spl. Solange get 8 Equation 520 proves n ery ood approxinatn fo acta! eal powth condizns (The se enon ms feted othe bat ofelsadns permed fr Wr of he tee te pane (eho etn 10" a 10) : i way o ahr a ipa 2 ik snp Gt of he exc selon Te Hl grown ate 0 Bh mane fo the ate ahr ‘fom the sate ti inal ete ton pre centred oe fi grows roan “abe” hess simone tnt Tho th enetnative ition wil be very soe to ht Which Bae Be Foti o ian Bec to tose Habe “The afin of he enterel doping ipa eee by # wation oth ifison eatin sotto the tl enation 1 cesoe0 ey ‘and the boundary conditions " ex 6s) “ole GelInthe above treatment ated ta th im tution te pl fn i serine by be process of oat aon stone. “Tse indent the ee proved pecans we an fo eine Co {amine oth fm te seo od fromm te tues of the hey ‘doped subrtee™ Impish Sacks of tessa bv ‘ee shows to be cred bythe gas seam and ecrpraed in te (Goving eps fim oe te Foot resale fe mae more ged Ecsbatin of th abate impor than sola didi oul ‘Thi poenomenon i fas rtrd to audoping” Sst Met ot en, te eM Saree fd ‘Si chm Cy Be, a oil eS, ‘Go Reet ae SE its fn San ge 8 Ra ata Pe, en") Soir daerrereteteereteeetceeny ‘logy the Rear Tangle Itt ASD. TOROS (SSG | Sear cies a aS Machontie, Ed, Baerworths, 1982 "ares ” verona i SESS rete es x0) se ar pen ron 2ABi tn ion a8 1 304 pet ‘por Vap( Bios ft staat #2 ay ogee es CD Gane sree cg ttn SEER cone cpt tion dei in ss oi Poe cf DEERLSUTE RE Src samen some neat oT in & ie) RE Pal Dut Som ta Whi "Deton oN pF ere pont gn su rem of HE pent ee enon tt aunt Taal te ti Si a ie sone As emp ofthe 1 a tit bd need of cnnpnsot Ina 5! Peewee Tet ye Roach sgelantes ASSTOR NE se, ” SGA Baya Ret ita te i Fawn Reon ot “Tet ae Vp” Pp Co a 60Nd-trate Diftston » Seton Eero, 9.38 (dy nt A fT Son 2. dts Clin Linnie ion ® Py nn Ooh wy 2 NS Grea Rote ans 50 apy DESRRA Bete sat 150 tty Datu pal Geowaye 2 MM tala ng Teoma, iy Rett Sitcom hr Oat bene ee % A, me 0 Le tl 7 Sh Ream fap el ene me ra Ba in a a a oe EH. io, an © 7. Si “oor AS Gro, , ao nd CT. Sh “Dun of Suan oh # 2 "tin of niin te a ge Od yer got Cap Cae, Fl ep DaiesSe a 1 San. Steed D4 Tey, itn af opto ‘ode Pa Py Che Se 5: 8p ad) Frc “Bi aon Sly gh One Lope iF a i i 2. aL at Din et Aci Pe 9. Wx. Wknand Lacan, eho of Gol Dai ne Sn” 2p 838, Tr Snes omen “ ey 4 gp Pht Pn nd Ste aig eg 1. Anant nw of cn rn oR Grant De“ Cn sey CG Compe acorn sPpes ety at pate ea Sesto Ede es fd ‘7 T, Kawo and Y. Nios, “Redistition of Dit’: ‘om Thermal Osan,” ap 2. app Pye, 377 96a) ” * Erith anes | Bnei to saan Satie Inston ve 9 Rena Pe: Go uy 39 sR THON on EER tages ve on Soin Pata ec onmm mere Brahe! Seon Laven aig 9 Saco Maka, Foc pri Neg Kine onda 12. Dp Key PC Muy, “Inge Aten Daron Hom Tp ‘Bian Pe eee Gap 2 18 RAL eet FM Se "i tare Mob ‘Borer ne Thin Se en Bei Sm 23 Sp fe a EE Ast to Orman Io 229 Si Mc of tN Fu ot” 1 Ree Deon kee PP cen” ed 8 3 ii ad ‘A phasors pcmastos e ln cig 10° scape mers 18 Cera AS “itn of Che cw en i EPO Peni soe ‘tat ee Caen 2 autor Bs 8 ne ny of ant Sasa Neh et Ey 3nd ty hein te ay nd pap oe Seo] sons oS one ie EE 8 3 " : . 2 Wale i mos: raisese nt ten rs Eee cme cae ae SE cares . geepne oma eae et ‘baton aoe mig eee ‘ie Ege 318 a hain, se a (he ee oe Sipe sty pee eee eerie a cm ft ae ine et ae IPs ed oh eee eS ‘edt pe tn tin ce ees nr ee ese Read aa che cece Gea ae Sacrncmnnimnvaes Se gern — es 6 St aah gin Secon sece Sema, Smee Scams ‘oe eat Smaart rom mm oeeeeeome Sierra MERA Tn ni fd Spm pou: Some aC ion SEE ae ole (© 2 pny Gace ete ie co neat checortue wp jin? Te 8 he be The pa te soipor apyeo ‘eta OMtion [Tie 1 part Ef ome SEMICONDUCTORS AND SEMICONDUCTOR DEVICES atin: Tp | wera . ae aap * Semiconductors under Is Non-Equiliorum Conditions =e * pn Junctions "Junction Transistors » dunction Field-Effece Transistors4 Elements of Semiconductor Physics {ots chap we preent an cus some important rss of the yas ef semiconductors We sone oly tore tpt of sm ‘aco pes tt arsenal or te uetent femoral dees nd sac pewoene ve bein a quniatve dncmion ofthe band theory of sls sd of snc and ernie fomiconsicor. Then we casi the Ferm:-Dise dibtion function and te const of Ew ev, and ‘Prove hoe ingot ola of eniooducor yes which we wl Use Urouphou ns book Fil, we dace he Manor det rad {ition of dzewene and holes semicon 41 THE BAND THEORY OF SOLIDS Te most important rent ofthe apaton of quant means 10 tue dectpion of eon ina ad tat the alowed ey lve ston wl pooped int andr “The bandh a seared by eo whic deste trp ‘hat th eons he Sold canoe poe. ‘Theses ae cule fovider ap. The ogy basa a forbes {pare ueted sche i igre THe ston nthe ov ‘bel ft some compan the vo heer eles, rea tse Semiconductor Poles shown toein th lowen energy ate. The bund of here trialed ‘eel bond “The phenomenon of conto of pispal Sart nthe ty of semsoncutor ply. Consul const of tm mat felons, ‘Tho conduction posible only swe can ge elecro nto maton Ib tem ofenry comune theme at conto pone aly {Fe cos sop Ket egy fo a0 stron. We can gow examine hve deen ser f cles etal nestor sh sericondsctore— Inte ft a somite rpreeaaion and he Cergytand epee ‘Go from the viewpoint of wheter ot bot 8 pogabete enrpe a i | reo et Somme te eran dev th In tafe vale estos ae ret and sont ex feta wae feet ve up te splsatan of een a sol eles Hl. ‘he coreponingeoery-sod repetition mit slarsocn taken 85 ‘eam shown inh lowe orton of Figure 42s. The to Sade ‘crmooding tothe previous pre here oeisp. Toes thee ft ‘Sates gps Au contguensy, i pele To move te topeet cto ‘Shows thi pre to he tee an then ote et de hen fo he ‘bu ip oer worst pose to smpae 8 Kibet energy #0 the Set, Hens conde pele ie so tr othe exe en ineltor such ios dae sown in gue 2, te eed waa diferent ston. The mets Uecoos here form svone bon between cistern ete, Thee Sona a dibeat to Break a Bone of thi there Wl be 0 fe fests at eonld parte la condo. Ip terms of te exe ‘Sead ctu en tat tee ie rg orien gap teste ‘lez bend and he nex higher So, the comin Ba Ar a Te vleace Sad are spied by Aton, a il the onda ‘band ore ‘Because small electric z WS, ae al fl ct ite pe imprecise Shae ros dose wa as me leteciy, ve Te cde ee fs monty, lo ya coin hownin Fie 4a Tabs be mie FH Meee mk 4 een Sent seats e Sess iihe Seioaie Se eer, "Moms ae only mderay rong. Theor, do the them vibaon ‘Be lice sons, sce Gods wl be oka any eagerness ne seo, Whts 0 bondi broken, # fe eon fala ash = ipl of condsing deta. Sach aa econ h cad scapes EE secon, In don theres now a "esc whee ts leas ne ane Shee cet teca tee _ Soceiay i aaa areenee ee setting tar“ ements of Sumleandectr Per this ations conduction tthe ovement of he ontively charge ole {2s oppo deton ‘sa ofthe bane rprenadon the forbids sap of «secon setor i nt af lege ab ttf a fst. Beau of thi some ‘Secons wl be able vo make the jmp fom the ene bad te ‘Stoducton tas, lenving behind a othe vec ban Upon te ‘prlealon ofa deus Sel, the cto a Ue conduction bo wi Pepe to gua toed energy, oes, hey ml ese to ecuduc lee ley. At the same tie the hls ete eos bend wil ao Be to alo on knee eer ad cond ease “The eaeg-band lage, seh at shown in Figs 41 and 42, ingen eargs. ‘Thus when the energy of a elon ne (Sea tie stron il take on + per poo he bad cage. ‘Vion ne ay thet the eeay of oer crane, wate oe 8 at the tray et tes estrone othe lene abd aces. TH ‘lm ofthe vane eases wil take on higher potions i he Sead ‘Siem. Assordngy, th cane ote energy of hole repre tp lc le moving downnord tthe valsose Dane, (Real he “babble aap) ir Tpovat to nea th pe tht he loeb ance tion band dante th energy 04 condo eon whic sat ‘The eur of an sosron nF ny of couse te penal eng of #5 ‘Seco soe les ee ft naan bad gaat te pte fin congy tua cou. Sy, te upper ede of he valence bd 1B, Sesto te poestl energy a tle an eran fat aig ‘ie then h lvel Bora ol ot alower aceon ergy Can the eve 1 nap oh ago daa x an i ou EST Rad rt le | | , thw sosons and oles have tic ene dete by tbe ‘iteeresCetweca the neg andthe ripe and dg, es 42 ELECTRONS AND HOLES IN SEMICONDUCTORS absolutly pure semionductors,“oaducton dctroet and hale rel ony though the renkage of bode Ths the coments Slerons neq the coerttion of hols. These eoeentaoas re ‘le the invite corer concentrations nthe escort We Would enact th icin carer enoeanation to bes futon 9 the iran eourgy ofthe tee (mete operate that espoesile Fert ange of bonds, Theistic ena owes toad ao bea futon oe eoegy egie o be boa, wee era ote Nn cgam comsponds the wi af he orien gap HY Bo. Bots ofthe dependence ce ore out th experinen aa shows fn Figure Hertha carr cote of ee portant ‘Smucendoconpulium sresi son, and prmath—are rn ‘Tisata of tapers Te sen gp of te Seeioudoctas ae ‘go ine i the gre. tibet () a fr any hen sco. ‘etn mien very shay wi eaig temperate: an) at angen taper, ater rey SY i een eT tap. More dete exiting a thse ata Idats hat both eae xno an be smoriae by e exeuetl eaperatre dependence & nce e-A we the aan energy appenatly £2. Tit Unpotnt ears wl eens her a ater age = "atu sow cone th xe ses an py fe isorort ot {we tie ene ocodetor i concntratns wh re much get ‘hin Un pct et cone beau tat res wer We a nity was fe alee cons hae phorpsors ons Wists four Tis ene Miseued in Figure (Phosphorus ‘eps ple athe it alum ofthe prod ble o te neu, Ste sion occupies «pace athe oath colt acorns i ‘etepectve number ofr valneclosrom) Then sono phosphorus atom ansct be sesomiodsed ine Fguar bonding a= apeneat ofthe slo lates a, ice ota a, I eae Co {eur off ‘Thus the fonzaton energy of phosphors in scm i much 1 MA ae zn ey gp Ta a katonaa Ina gen est 00, vert nee aa fe cle peng an eel note of onde To sep ey lave gh (10 sar) conse, THE ets Semeur Pes em wena ‘eadlos i cal comple ozeon. Thus nde te codon of om Pte osation, te can wit that he consents a ectrons n= tbr Ny dno he enone sf fe donor penn (elas ‘port inioon are ed donr inputs tenet oose 0 ‘eton tote Sondvcton tad the scene) Tr agin it Sse i he eergytand resentation of Fg Se where eal acento ef eros and doar ne rented. Toe done oat, fe cenoted by Posie sharps Aight om the condo Bd pe = pees FOE me. oye Woe a 2 _, Ee cateststs£ oonr ne ‘hs telognsstpumant cn be made for se cse when ap impucy wh far he ven slgtons (aclu Il ipuriy) ch a Bra, ‘traced into the ico toe Bocae 2 caum i itp has nee eto ta lion we ea nue tio cary le, Ti bale SS then be removed rately eal, ih a onion ea) of a> Frauiaty 0S 2 Uthe auetions camgle, he conenaton ofthe ols p= Nz wher, devote the soutien of ator imparen (Colum It Tour in stizon ae ae eer prin ean tay ca sept tn lero fom te ance ban te cal, Thi of cour gore lear tosuplings ble tote lence tans). Tis shan seed a Figce 4, tlh in these nd Tp he earyand rere Jon Se we are comiderag the ene ef compete joni, the cnaion of hoes inte vals aud own to beg Uo fe ros of aceon ase inthe cul The npr Son re ee ceca e pa atsean a rminen ® 3 enprtre hte uy oo ais ys aount of eer a “ee i gee ea fone tetn efit ft bore tne cts the conenraton feats math Fan, Because aeutmsach caesar pedo ee ce wen at te condiy peat he selene aang) in ie cond aes concettin fle mu Hoe re ogeetnan of elasrom and cet i pedanay are Fe Tp conduct type inane ace por os) itd by ble Thc conrsype paris may be Pe sinfincuy The concoct spe he sezandocor then te ae sy nc preven te peter eonzenzaen, Toe une By pong mej car wil thea be BEY Leen Ny Nae ansoy p= Na — Nol Na> No 43. FERMLDIRAC DISTRIBUTION FUNCTION othe povios setoos we have dscused various lari SE inna Songun sts nthe cnedaston ag ance bed ad cae eee at te eben up bythe adn of nor oF sa pee tow dias wo eerste probaly ‘Sava gen sory aate i ocuped by an eestor. ie Sn of one ns 0d ae governed bythe of Reenter Tow postal rest tthe uti it Tae aban mci sich ves the pobaiyta a = Eee wis energy sone bya elton a a 10) = Tyee “Tis unto contig parameter, Ep wis eal the Fmd ee ‘Ti emit oe Fe evel Gscibs she chemi pot CU it Howes og ge © ‘ett th er eel ta nergy wc he probe of ocr Bison ener by on cero exif 2 Be atotonfonsou i stated in Figur 468 for ne an meno semisondutr At he eid of tis fi we he as oy of espn of ses betons a fenton of ‘ow te Prt let i goaduton bar there ar are suber se 8 ever tee protubyo ception of se sat 0a Pee ony te elens inte soneoction ban. By <2, ens eo rg rb of ats te vlc and. Mex of oe et dy econ in the probity of ecupation of te i ig Tha tere wil be aly ew wooeepid eres set tolenintbe vane band, ‘The Rem/-Dine dawibuioe fnéions pati around the em ET he uf se etn ‘ton ted sod te Raber lei let bend sche mae, {be Feral level mat be ltd he ile ote egy ga Tle Sow wat hopes nt ocedace he Peat {Sth an iio tenlcnducor ‘sof Peto the re ‘Fo can ected by he sal Er ‘an gps eniconsoor ths concertos a aon iste con- seton and agar tannic Shes wee, te an ee LO sae . ea =i pie Gab Narre et Stef ers cn i of cry nae nthe condotion ban isthe ae aa he os cae, SOR ecto i Fr nw Getie Fens Gaon feocton, wil te ied wpe ‘Sapy und pours i conze i a pgp enone te ra Sevan the Pent Goon con wl oth be shied Soon “Sine igs sence ng ioe rere tt vr Teh shove obo th Fe lave PemiDiae Gherbudon fusion cn be approninates Oy the Sipe frmaa| sonesinas nd seer for E> Ep an (Ee eBOEM BEC ED a tis ol to sega tess tem of enero the prob bike ecopaden of eter loned at eegy Eby aol 1 toed of Femi Die sisi Bakeane Sais ha bea ployed nts devation of he itston ncn, ete expiant10 ‘rants of Samicandeeer Physics ‘woul ern deity, Out famine ats rove pd ypoximuon for FeirDaae ata for neg at set sever PT 4 | 44 mpoRTANT FORMULAS FOR SEMICONDUCTORS IN EQUILIBRIUM [a tere te cee Ir omc ot nonin i | ares Stee —— 1 we nictheoraee as nthe concentration of les pe Netietone wy j ‘We eno regs he exponent fcr in he fest of hese npresions 2S paths Sore Sees Siena | Balaton le Se poet crt es eeion | Pepe cteipaica stat scawhencd tees F RAGereMAaedin etapa pssst cry tipi he ofr 9s {| ESERSea a aly hon sae rn eae cas data of an fo gee, in, sot pon ane te tape ONC oe ea Tae Shots or impeans ropts of eer a ition nie ee pti Sand ¢ ow, a dance wi tenn ' ‘prune Feel Ey mores cs tothe condutio™ onder the soctoteton of ror iar an he snc ow ke deren In Cosas, whe he Fes ee oes se! 0 ' te sleseband ee Zhe elton concerti desea an the Sah coneeton teres | TAS rt el epprents er he conde othe vace ‘nd edge fw Tn, te approximations ote Ferbane ‘ison fenton at 8 mn he above formals wl Deca m= sini Por eva sve adealsessoms, When the Inpay pete Parts Sanicmsutrt y Eatbiem eneenition races shout 10% ey aii Une sch sone wes ee 51m te senior ata ‘An SeIae et of forms wich form wih ae mre wt ey sme {Be thematic erat ELSPA oorion ate nas Bee nenetenine pandionone ge se : a Fonataps tired “ the vn of ae ‘tn Us vy ofthe mile oft gape ree a RY 159 seal. "Conseqenty, fr set purport MH ie Femi eel toe de ee The pa Product in Egurum 2: eviet Bem Equations 64a) 45 et amg li ot een nieces am of the Ferme tre ty SELIM Frome eager fe oP SEE wa ti es gee mnt eyez 5) is very impr i impr rnp a be eed on ett ete ne Ss haiti enc arte ee Enusion 49 aso indety tht their © Smceharge Neutrality A sesicndecse fs wich hy the conan of ap SS sey tm en #7» inany Yohime een of ements va eet(2) >ed 1S pr enon "08 wo = %©nme of Sanson Poles Tigiscion tn ie =| Fewremee eo hay Fr an ‘To otain she at charge Ben, ww up al pve ad sae Supine arden sd sero aka =n, é peep nt No Nas tec coin of paechag sry imple at pone Naa No von of pater psy wih the ve can conto he coe aise te comenaon of quinn roost = 8 ga cn gy eco eg ngs iiNy= Nat VWo= Narra and he cocoate of ols in ape semondtor ete wet VSN eo I inte ofthe ae pai certain aan) wena Sin are er coca serps ee tb iii 1a ale ress a room eet) a reasons 0 eM Na 1g) Ipertan Fortale for Semiconductors ie egitim, is = Pe NaN wa, Ani, combining te shove formu for the concentration of marty cours with te eulibi etonmipytsthe oneseaon fe miso cari m9 fan {nthe above formulas th bape ero be pe fe emo tor or example, n, dots the conrttion af deco la 88 mp ‘emicendsir Te aie Whose cones i he me the tro ‘Steere 0a the majo) carer and oe ber one eee to 2 ‘ry are ‘ning Eaustons 412 an 413 toga ws 66 an 47, we cane ‘alte the poston oth Fereve wat efor gap arses ‘St tempest, for a pee sceplor ot Joser cncnuaton. Ss akundoos are sbownin igure forge. Noe tht a the temper tae incest, he Ferme proach th nl Fea level ty th emoodbeer acme tse uel ets the ight ‘aston af the sic egy pap wits emperors) Convery, we an cose te toentation of majesty cari a ‘uetion of temper Figure shows expersenta essuremen* ‘tbe catoocoscenraion a mp eo va fncoa ef tempera ‘stom ompstre te thm erg inthe era bot ue! 1 ‘Seal fe door hpi rest. Thas he tes comms ‘ie tan the donor cose At the leper erase ‘be canon of compte foanon, whee the etn conentton fie sonar rnin, append he pet te irae, te seca cnceten fein fate coma era coaeretepmatae rng Haver, the epee [Stresl eve farther, we sch the coahon with nn egee feovatatin becomes comparsl tote donor cscesation Defend lis eapertre he seraconccer becomes Ita Thos is evel Shas samondutr sa be nn even tie dped ih a realy igh eceton of cones or asepton thefonpersare fe MDD gh stat the ints samiy gettin tec he ene ot eazetatin. (Tis eve sa rom he easton hows Jn Figure 47) The fepemtue at wich the tenicondoor essinns of couse depends on th cncteton of donors oasis {nthe wemionguctoe “To bove formas erlang semiconduxtrs ithaca egies ssctummarnd a Tbe 2 teen of 4 cape, 45 TRANSPORT OF ELECTRONS AND HOLES Lees comider an naypeseicondctr wih afc dover conte scons tly asese oF spied sess The ssa in he feriencttr wil anergo conta anda thea ton ite ‘opted by calidon, x saad Fgh 4am. The theme! etion ‘sr to no me plement be eras cary spa peed af Tan ect ld aplied tohe semicaedutr sap sn adota elecy component wl be suprised peo be ae eden the caries. Ths adSitonal ocy eamporet cle tea ety, ‘ell hve Grecton oppose to (or eleons) tke cre Rall The ‘iphoane! ofthe aoa dar 1 hp eanpones Is sos op Foe 1150 "Waee we ald tee eo somone we oban ts combed pleas felony as Must is Figure 9. oss rat flo ibe i eo eons, we can {35 We flowing ied pau Tae mugusie each ea My Be ine «afer a eslbon wil be pen by W() m0) ova 0 the ey edna son. We one ee ‘equi 6 asuming a Gy Scone ster oe seh amply andi ttr ms esheets oon. Themagntade of the scien Gene gio Netors mse ee mew pi whee Sie ‘eston in the seicondcr cya The fens ‘ast gua wich ese pe ot eos a haa SE waow alesioos Itesenaty cone ter tinedic oti eee fe senioodctar eh tie oe ee te ie itera tte elon seo toa eee ‘ony othe tetera Stop Gen Ge ee a . on = $8 a aunares of ananer Poe ~ a Is tae moby ofthe Sos retest heii ta oa ee epee bo, Thais econ SP, iy compe a Se me ch abo ie ort 00 TH aera bern eit vent) = a oten) reais ete ‘oe ct wy come compan in Ee Se. cli wig ws on Re es ua he experince SET ei cats ein ern ct A is ge Dey SEN ae ed tyson ee Se Se tage eagh Ses ND | yeetced em eee ta (IMEEM Ncuaty of clon aking plas in it DS ay ae engin, etl a wu a nat pce me a ists ofthe roabities f alson dt the aisha ing mechani ae a ie omapad oe eo apo satig meshes Srey sateng teat hat when a cen aes pst ‘fue aed prt 2 onan cpa ede pth wil be ces be age on ht Seed partie ‘The pean 0 apy ‘Suerng ll pee onthe foal contenu of fonne imparics Cr peel i be ey, ey the un of he conection of mega selfs cr The node apr ster ing hy eo there be noun on pooranal 7" Lise stern ee fo te thre vbain OF the sti of otal ator which eiape the prolly of te Ite and ery lnpeer the moto of eicrens.Thecrial sous stows that he ‘Bob Jomite by atin eters my proportional 0/7 “Expnetyanocsconare alec on oom tempesstare ane shown im Fie 411 verso the oa eed eget Sontenraton Cx ite hat he moby racy anima vale ow spi conecetns conespoadsy oe nee sent “ain, and tht cecton and Ble mab deren 9 ok ‘seangimpariy cca, evenly approaches «min ele high sntennvioae team no esa =o of leone ister han the obit of len “hw te cte ry sed: Tapernestal mesifement of he iafuene of tepertire 09 Joe smobliy af tele zoe are show se Figure 42 fortwo eet Impantycoosstratons We can dinghy fies tf tom Ptr npr eter omits and parte cures tre ore Forte ditt doping contneions At High ieapertrs, er ‘eaenig dormir tb the impart sncentton baste eto themcbiy wx criseeed ty he eta of the cae The mobil Is Seog seseatwihaceaing perce erase. Experimenta, ‘es have be fd to fon n To" drpenence ee tan ‘be ieoecly, prised To dependence fa the lee seen og :! OT nn ea pcos my ten nin eA ater eefeepne on Conduction in Homogeneous Semiconductors Reitivey Let us aow ex the reprsenion ofthe ennditon procs in emote nd dre, ing sn wpe amined S58 cape [Fig slit cows a0 ne semanasutor ple wh £0 ped Figure «130 snot th ine ample ith ate apple oe of the ermiast Ina love a ie Mgure we sow Se eesponding ‘suey Sood wet of pono sans the semiconductor sel zs “The estrone the oducts band wl lt a8 of the apf eld Dusieg assertion they wil oi gue sorlores ge ot arouse total eey a0 Whey wal prose slong ore ot Ise boreal path a the en) bad feprenestion Wie he al sera fhe eles der or hase igen dog Ue acelestion ete thy il ote poten! eoeray, ang wif lnerase ther Knee ergy ath expe of is wasps eas. Titi oiense by ‘he fae tht itn jessy he tbe deren sae doe above ‘be condation Sod edge(cl ht he eaedano band edge epesets the potenleory fhe eo. ‘hen an clewor ser valison, oi some oof ini corp tad lpr tothe emicondvetor ae Te ti anne tbe ‘amie energy st tiecstrons lls conerte tobe. AAer the eeO8 iJon some ol fe Knee ene, ll gl Dg Co sestate “ice or staat tenon aed nad ot csc in wil om ra ancesee mm ements of Seminanaucter Pym snd the sane proce ibe repetnd man inet. TS how the conde ‘Son prosin appear inthe Hane Gigi Condsetos by tle an Be ‘sored y dee but opposite proce in th docusion we be contre 4 homogeneous snicondetor, Lv Semonductor sw the impunity cooeatton is Satay ‘titan Jt ore to ep e deccon semen stall wl sone a to neste the Ferns ein igre 4132 ne tance fiom te conduction bd at lpi "Tas the Fra el ows the conduction eden «paral fies, "The crest loa the semondetr sample wil be gen by Degen bean Am pom Eat e « Anam? oa) where Vite voltage apts th seconde sme whieh bas {Ting Lend cessation aru sod tbe Seton my ‘The resto cf rgh sme le Ben By aaek, a) “Tas by compara of he wo fouls we S08 sche resp of hemp ieaicundoor samples my « Sey te yep ct 4 teeter bier etsnet emtiy ey . arr) ™ “The mobs, tensed above, depend on te oa coneetasin of foazedimpstteg he, o thes fh ceptor and dota ohne {Son Tae eso nhl xssataos, ont tod depend oa Telfer ef tt repr ad deta oucenesone The pte ‘te, the asl mon be cnet ng he mbit data Een Figure 411 aad err concn buted Egunior 414 9418 “Hower nv case nes ol on peo puis eset isthe sz dtr, terest wil come snp uno 5 he coven ‘Sm ft pari “The realy of bot pnd nape sly at room temperate as ‘uetion of aoepor cr dogo soomatig, recive, Ir sown i PSI Resnineyetanan Fig 434, ThisSgue bad on Bistement et tapas tava of arg muds of a ber nei or donor 4 Difuson yeep carte” a ‘pends And the etoes ove user the intence cPon enc ees rane {gE Stanton is st saforn, eeetoes wil so apie sn ne [Also of te conentnion ist Ase cp eae ee 33 addon ennen fo he eapeion fs ae heEE a me of Smee a ‘mpencetemsta ae ne se net erent pope am ag i PH cohscenare hes EG cg i. 9 parangnces ATED 1 roe nn eer hn ome ee eo Gorenaninm,” Prof TRE, My 1 PSE i ent ee pear da mans tet oS oo einewe sean 7G Reem wees ay oso aeae,S te Sear earache lek mt id acon Ea he cot ti ‘oregon 403 eae se ene tes aap corwpeeg he eo i wm ‘np sr an Se Rp ht owe Cie Feds soe tiebghottenm rts wei ‘Na nomi of ul cre ted no agen caterer op Rectan ae sm he SSS oye. exmine sh Sh ly ene anne he Foran don mio ony we, niet in tv os, Fede soto canoes ones Seo poonphons tama aPC ov nue fraction sie neh Te hat ‘ison ke one bk on he csv ap rete erect sy ey mens 12 Dig trian oe he vs an, amie ecg te oa pon ur inenia asic aa ihe ep oemElement of Seeniconductor Pistes IeroxTat FORMULAS ht eEHCONDUETOR Pee Garg aay ‘Epa aon ‘RrmbDine thro facto iri aentce ‘tan depaen wakesiton: Mo Nal om SuneRCH RECOMBINATION ma SF MCOMAINASION 5 Semiconductors under Non-Equilibrium Conditions Mes emlendiior devises opente under noes condos, {Geter seni in wh hearer ono pe cr ts equi ven. The pofrmanee of Sat foes, tier semequivam sinatios i whieh the condition SAL Senet Actorkingy, ne an datgs bwees foe es vata fom egal, In the Sit Spe when ss ns eeT uw umicanbctar ender Hans Cones jc xm cn ah sn, whl oe moat cotits Pe — Pe i fEstes the oe carsine conanntsation distrit oe juctor aie peer peeererere fo0 sy ca A prem of a so se ms A crates nea * peer en POTS all ort gin | ‘otere Vie ® ‘qld the, aifion lengthire ft Race ‘ich i sown in Fg 59a soon tans fr eee These te dtr tog 2, ‘Note nmol angy Teton he sendy baton of cst icy casts dtune, gem Eaton 532 Sed owe igo snd he ne een of ne ‘Sri comansaton, gen by Equa 34st shown Fre 92 {frch se rs atctane of nay era sree. Ia ashe drat seuss pe at npc, te the | vee ponent. Witaoanag Stace or wha psa is, Se easy foeemérat nese ec iat anes wn Selacoeater, ‘the seadystat nrc divin witha tbe bak of the scab sampe us ay tegen pf -BoBe no os) Eo eet he tty ons, oC sit ean Sooty ay pl) = cota, eto of High tenity oe Sateen wd “stun i 0) = Foe 10) = Fa + 860) ~ Pal te (622) FEES tc equitoriam mlooety camer cotton ten uprouced. te sch ase ihe fte of appronh fell ie rele Io the sae raat, the et or equaleey, he cen Bes) of ina previous sain wav tt the rate eu of he ior» ir dbution tg euler sch eur ks ae RE psig ins or with ios inane pens othe rato Sharaseting the recombanton proses ee Ts raed fo sisepise ta thea rate of recondition the bul an rE tn wear rane eric eon sgt umn oh SE Ses scopecesemiondsrs under NwSgiieam Sandon einen epson senienadtr can be eerie by var nts wton we emp to ate te Ket x, 12s ee eset ihe semcendosor by considering the mes Sevens poe a. Bandto-Band Recombination . apn emerns ip the conduction Bad ad bls a th sos Band ee erat ra af bonded combintion pees WHS ath alin Pigu 3:0. Wete we nia pverabon 5 a rip hie Torvtnted union prac acon, wih hat Gu ade tog sudo emt, see marl neem ehrte U, Ja meh eee sea ponsneccon mae on es a ae oH orf frm ot ot eo the bases oe eS ee TRE SET toe coments of ent i Terps Rowse we ete Go maar Ih ene a 2 ge a,b Me™ Yak Gq n= Pod oy lpm ton he may 329) ene, the tine for 1 “peated sombination proce biomes Atthouph some lemurs, giv ride, bandtotand recombi can be ry iprsn, gems 08 alc te Gralea srosure of te eey bands maker ths ron steel ke fact arty monk wi both geen sn sco neat {Gate itinei exrely teste sete oe mate, Ley it ‘Bientive teeth mle in te preparation besemcondcior pie We woud expect the rt of te bndtrsandrecemiaaton rows io be pendent oly on the bud prot te vemscosduter Thus heath the mtd of spe Pepraton Bat an eft oo th ine ates tht the recebinaon proc fveves npeeons opus le the segcomtanr wow coments cul Indeed depend on the abet ehnie “We now eoascer the meombistio-generton frees ple ttsoagh tacos of ch imperets |b Rectmbinaton Generation shroughIneermediate Canter Inperson ihn the semiconductor can iu te pret edie iy ef eta late, ad ar rela ode ney eve the Tord gp meh as dobar a acct pts do These oe) Jey then acts "stepptgstonr"in be wasn of ron od ee ‘tween te cobdurign fod yan bade Beesst te probaly of ‘nse pends on hes of ese, inperesions crn make sh ‘erstoue mere potle ag therfore can tut © Sra abe 09 ‘hell ate scone ‘The Dory of te Fesombmaoogocation proces ang pce tiveugh te seen of sb sserbedate energie! reconOfain: _vrton carters hag bevn worked ct by Ha st by Shi) an ead Tain ery ht ea remark sae a expling © Wise varety of eremena i many semcondctorsanS eine devs, Beware a0 onal tin rome deta "To erou pe teat striate omni and poration poet ‘hvu teredatefevel ene sown in Fg ST parle, ‘este oe sate of te cane lore an sft ech of fo ase Pecos tte pace, “Tae rows nth igure degre he ein of fe ectos ding te para ro The Meson eo ce ‘of carer witht gle energy ee which ena Bar tm eager ‘equa wet ‘Dros (the pe of a aon rom the condo band byte seater ross (nth revere potest io of on deo ee ‘heel no the cotton baad Pron (the ape of Ble =noses ar Noma Contant | Nir of em Reemtnan Prot ™ “ he canter The capt gastaectin ote snes oy & mesure of _ so ow close the deeton has fo come lo the ctr tobe exptud? We + igh expec! tt th capture rte econ woul bef ter sae nein, i fe ere f 10° ot — - "Teen of slateonemaa—proc Ql be prparinnl the ccna snare wish ae onan by deseo, Wf Than, ~ oe nmeig 2) Fe ‘The prporonlty const yale the emiin proba, ste oe ol EMO sp om pd ei lo oar a emit Ec tt deans te dey anced ates in he condos sa enn po and uo onthe lost e he curr wate biden gp. anne ne woul expe that the ect slo, Le i ti oe (Stheenauvinaand we th fpr thas, oul be sen, i rose cn ove tac sf ‘isp ‘ad [ges ice sor We i se I ht te ae ised Pars ot ent as 8 ee {Shuman of ee rm cet fl eas Rd a, 4 Sr oeae tg pen cease Es cee thaw pone) mg ope eicattcciemcmcc” | kee ocreee a “Sa roe ed re ne Sel en ea Ee eae ‘Siw of teenies a ond) econ Ta easly “est es WR acoso cae OS ego 8 OY roe ae SN Shc i Grommet a Bie ene Mee oc Po Be aca ees a fn a eo ean seg cua ee Siac Sean ate tan set mn ly gt hinge tothe at suri eel a encom mee we Soca reer arate 629 ee steepness ny ) Reese crete al c me ec ees cl tly Sn Gana de ne scemcermnomga tt a9 | ee ee ee oge Giimaciv tie B westain oe eng ts i= ST Sn com eaaiNee BBN me egeyQ FEE (532) 1 ti pig ne hl tae hes of td wl oh fee McPhee oe gece ens ange uno ma tem ewe nine ce eosin eo a ‘eatin oo es spn Tae na= Semicanductor ander Ne Bqulhriim Condition, Note tain agent nit prea argument mine fobin Dy of eee «yd nr exponential) the eer Ere) Ibe approaches he ondonton tnd ge Ey ‘Sim, neq the te proses by whieh Hoe ener and leave the ales bod, proes (a (6), mos ave sen! ae, ‘Tate pv re Azan sbi he spproprte eqns and bug, from Chap et the snceos el oe in gui en pene EPbler my Besrir, tee NEB a nage FBO 588) ‘Asin we nee ute emson patel, ote expeeaiy 52 ‘ect eve gph fete of he lees Send Ey oe ‘Me sii Taninag pase nang ants et 90m conser te stonon pining 20 aon agalbieisn co. int no fr las te at a lraly Maine “Tbe {Peotone bog pce sod cy coed fe asad Fire i. aad of Fg $i, eleroes now no leave helene Sada ene oe ate Giccn tune eoagh fe anton ofthe tnmanaten poser Ts) iether by Wish seston ote th copdactnn Bnd nil egal evuctr mi waft peers rut er Ui tla Ce, Sin Nate ate ison othe roses ‘at by Wich eco ave te consi aad That o a Bea nso, Sina, tense the ate by which les eve he aoe tad cl rat by Hoh ols ot he lnc Bands, oy, Boo tonnes Equals 5.6 535, ef sous, ede tthe egies when west Gy =O. Wot thn tay sae dor net imply eel)? oan ba er hr are nga ee on ra ce Stes nonequra ent ‘ore xpos tad we mem alsin G betes the ; ee IE, Am Sr mem aay pein on a "eombioaon thoy Uenmnennn “ae NER cpg NEUTER (839) alone " . Tose AEA aft nn gg fo eat me 5 th a nena yeo ‘Samientcnrt under Man utins Cones fps eomtinain pros ats mi and wi ys ta part ‘ofthe eae il let when term +p) bat so vale "Pe thi erm he nomi sea Ff move ay oo the eof the ees gp and sponser ox cupdctin band ‘rte vleecnod cin sus se one of the enon proces eames nea robbie an tk esses be elena of Be ‘eombunton cei Tut Secu air a= doocoe i apie! BY ‘he cover, le sus be eapared bys next inorder To cmp the rcomblaton poses if Bowee, the cory lel of te er very ear the conestion.ged eget wil be mare Ul fo teen [Be cptre elton ty the conson ban, tee proven empl of te ecombintin proce (A salar Mute So Forces sa he alee eae) “us cation eaters oe eee ihe wo easion probe tae a sb heme, When energy era inn he mie of ‘by enry ppp. Inthe sextape wn tnt rac cent sd ‘Bou oer apa care, We can omar eerie ‘ple tere by alin what we ave sid eal” tht the eters owe "tapi one" twat he conduction tad alte bande Fok {Seppe coat be tut seine shale ave he tal eset Teer the wo Bande ‘Tats na coder sei fren of Equations 3.9 and 4.40 appa oe apc eve Bae sudo a eos part hs capa. SA LIFETIME (N LOW-LEVEL INJECTION tae ou aig nbn eed eet es 1 ey anes ata shee te cloane Ox aes we Esser tects lac Spm inte SADE eh sf Redes ene ‘Sate tee halt a si to Set ere ater ott pany ca tesallte EA aan pak) + Arig ine ni ijn a8 ep fonder . ony 43) ine Ler een “This s0d eter sport frm tomer SER Comal igo wenden, wd sgn tummies in Take Sate ofS 7a rT wee a fey 20 Finesse REED The cue of mip tes Rican alo be san in : ema 0 koh: vay. If he connon ate wi » aes ae, : altho wc et i roa ee ado jie 8 iS neya Serieenducters unétr Mon-tqulorium Conditions Serie ecorination ‘Thus the Hftine of aero n a pp semionditr it gen by » ae we place Cth Nt fees aed (Ni) with Ma “ nb eau of ee (pe Tosi wien tat tne aso vente ‘te : Rembinon sh be eon ain ery tin rio aera sre O78 Hen bed neck ws) Comparten of Equnion £40 oth se ae of even expat roees (ahah tht he obi crpatin often eer 3) fearon i np tealcontaor appre zo, jt me ‘oui expect fot pope maleate igre 19) tem teres 54 SURFACE RECOMBINATION So far we hve covered nt eembination st centers sited ormly win te sicoadnte We ae’ exer whut app sf ste haven ice conetrion of rcxmnnton ert th Sipe of close sear fn soy ofthe sconces at Astle Fgare a. In ich ace ne expel athe ems fate wl te east Sear the sna wih te Yok at te ees vie deity il be mate href ae oe ot te Feeney in eco air concen ot ac Tye nd i The Fev ta vemcondsor, stars mil som oe by he se Sedntr. "Te sf care tat yr oh rpon feared neombiaion | sate spy a he carr that eto yg The tot S 1 Shier et eam in th rc ayer ar a ee Sd wi I em sould pa ow he 0 ts a ty et nt i | ASRS oma ‘her Sins the ox of mary eit ie elo it egal Uy tren th onion wanecasess sorte gai 7310. bee Ws the kas of tesla te pad etry gid wit snorly eae i the soap fk ‘Sobatnnconaponing tid Yooh a at pert {ike devi andi oly gl ar shown arnt ‘Soper is Pe sand 37 rape) “he cxpcrincly cbeved reso Detect fold cone soften og shown fia S18 Hee an ate {Sw nine egeshp nnd Eaton 39" Te cont et popertonaycrkapend a captire cos secon of ~ 8 10 (2h Sovereigns eeprom nt af psi ofthis cou Alp sown ip Ut fire ae the fepeive af seperate ot whch ie sce sample was wat ithaor neq at iin ying ey te id ena Be ne marty ei Fo ence band it CE tT resent gsm ee 1 38 2 = cess unseen CO 2838 q anon se hg eens sp ictus ec ce ans ga na ee ‘oe 1 ean eg, He boca Soy mse ee a coe cnn of ese a anemones ei * ig eign oe way ema aes mee Tiers lone Orin of Resa Cenraton cats ‘@ 1 Radiation Damage Antler messes in wich energy ee ean be ltotace to te forge apy eget igen cation elton, proton, fxm ry or artes. The higher paride an lace stot [Eom thor nora! poron inthe semicndcar ata, rg ft Ss'ihe frmaton of» vacecy sad sets! ator Ths, sn Wh Muir trae een sani tone te sal pity form mre compos atte defects ab beave mh he [puerto ito he seniznedostr, tay willbe ergy ves sho te fares gap und car 4 susp dn aad SOM “The tarodamon of cmbiaien center by ghenary elestton radon lated y the gerne at sow in Fig 517 Hert ien of lr in ot sf scm sageisshown we ion sr thetoul amber of bombarding eactons hess onan ote fac ofthe sample, Ny ts vide! hat se Somborne prod, te tin bene cre fee asin ht the ode cons eat ‘eaatiatng tsar anifrnly iin the aemeontucter, the Tt ‘oss ef combioaton snes wil even by Nem Mt N, es)ai re pag Spree ‘where Ny te contention of erin eran eters before Salton, aid he proba tht an net Seton lest ‘rw seombnaton cnr: Mae of Euston 8.5, he tn TERN N, oo ch pred th te fin sod Sn om ish vale in Senet propo mannr hig rato one P ‘tout ome out byt peel chen shoe It Frei. "Fr eooindod etn tig ht ese emo caver common arr ean ch th ame gd nt i2"Glcon Thon te alse of moda 6 te th iSomnng ton om “Ath ean ote ely empleo satel the feo ef condos Svs ote ih pra {i Ths scan the mdntonatin ene teva rds fo ‘Saou aera pd ie tren 8a hey ow onpero Somer tories ef aion cote te and ey ‘eons importa ee ney psf eerie Sr tne end for option ue Fever ace mount Surface Sater We bse sen tht a esg eet oe ate delet within the senses ersten reds ey lest he fo Bgen pa. Terie be expe ht he dat iepuayeeitesith 9 rae fhe cyt where the semiondotr its soget ene, ‘oul se rstin the inrdton of eg dent of eh ta th Torbidéen gap Sorh Tvl, the euseoce of wich hs ben frat Tereeaty by Tamm ned by Skolt ace Sate esse fee rice utes hav eegy eel eae miele OF {Se fren pape Soul expect em 1 tat eet surface ‘combina ene "Teor eines of he ey of cic aes yl ales of the same oir a the dens of uae fos, IO" cx Boch Sra. ve nee ee bse cn very ean smicenuctor sures band 1 eleing amples under high ecu However, perm td cos spe af tose os fro ew mints Sree exe ses of toe orto oly ~1D" en" nd thermal tng ach dean yr aot nr of agate sar ‘ibon 1 ut es i i een Cag 9 Fe of Mcombzasonenartion Cece Neto ESI Gowuen te rey rent eye ‘ihe ope compondig fa core : Sore atte aan alse of me er {Apogee tes een 2Escaemorateser neessi eee ee : x oie nig ay AM Yl oS SSeS, Wey, 8, Cee tee ta stent Raat fs Goro” aber amen en os "Ma ethan Psa 3.10 eo imnam any. oloeln, and N-B, Grove, Sein Swot Saeed Beside yo Rava emo andr Nami Conon, on eu mate ne Ses coe raion n Senet eee i aan tombs of le ot ont Voy eg ortemnw mms vere onto a es mat Sparta avi ae Se omens prope So a hs 30101 extern trom acannon commmcrtmwmnets te Sree eee Set can vanes tat reece Sa Se each ne epee dea ego 2 emit, i tye ese aimee ee © Det the on oe fi rw rt ois gharmemeyg ets enna 14 ge mem i SESE SANE ey 12 sige eter ne en Senet ecient See antag meres Siceecarecte aterm 7 Seabee ceee Secs reeneet 4 wprhoymeermee torn organs Sanaa 27 naa mn i nin Seren ce tata Senge cteeecemn cette obey ah ety ae anigeatnsirtns {hoe rae Cor recent noe Se See concen a» Cope opee onrg ne en| ‘Serconauctrs onder NemEgulitvium Conditions cpp rote person ears El ptr oes “5 | pean ‘once rc ee eyo = Hea nd | a | JUNCTION BnEaKoOWN 6 pen Junctions E.mdn-yie rainy anette janine ane eee {teats chante A pina tor mp Secon doa i Seniesa ig Fig ‘ich te may be brats by int gos ce ley apd pape epten fm spon hihy soe nasa tees ope: Sol hen tema cdg ie soe oe Wiedow ret ope inte en denne ana de pe Se pri oie it the eon winter onc ey eae ‘Boge Ths nisin he fermion oa nchoe Sans ‘fate. (The eine + ons goer gm impart cotenratom, ripe) Ney wer ee {iodo ena ware ya spn {SS tated oot he Socom tod the ae ee each doe soe nde a ined ona ‘ete nc ee ree is ‘ero. Sgekonln Tone wn cringe mer (lS aess reciers ora ichexin ig computers, However tt ipranse ‘pw eas rose ha be uf eode sone woul nde “Two ofthe most inponastsemicandacor tv scion nd Jen felon aor (wh fom the set of te nek “ 1 onedinenoe! mode ft a re en ol tO “Fon snp, we ay amie nt ue ee om 8 Fe xeRe th imumeet & Fe & ey ra meno vo pn Jone tthe vit of exc the congue ote chr. Figere 62 east and uote tesa of i> Mais of efice pocoomena and of sufi cone! die saa be iets eg ses‘Accor, i hi aps we emir pint net, We ae ho na pe of eat iE pny Me yi foe sy he ptocare ogee Sti fipio ene we Hang form sp ocean ‘aey gc ncn. We en or he pecans on {beards snes fp tn ad nce ows. Ply We ges We! 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