HELSINKI UNIVERSITY OF TECHNOLOGY

Energy Transformation Effects

Introduction to Micro System Technology
Lecture 3

Quan Zhou

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Control Engineering Laboratory

Mechanical

Thermal

Piezoelectric

Seebeck effect

Piezoresistive

Pyroelectric effect

Electrostatic

Thermo resistive effect

Electrorheological

Thermo elastic effect

Shape memory effect

Magnetic

Peltier effect

Hall
Magnetoresistive

Radiation

Magnetostrictive

photoemissive

Magnetorheological

photoconductive

Magnetic shape memory

photovoltaic

Table of Contents, Slide 2

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Energy Transformation Effects

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Mechanical Effects
Piezoelectric
Piezoresistive
Electrostatic
Electrorheological

Table of Contents, Slide 3

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Some crystals develop an electrical charge when they undergo a

mechanical stress
Conversely, the application of an electric field to a piezoelectric
crystal leads to a physical deformation

Piezo elements by PI

Table of Contents, Slide 4

Piezoelectric buzzers
in alarm devices

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Piezoelectric effect

First discovered by the Curie brothers in 1880

First applications with natural crystals in 1920s
In the 1950s piezoelectric ceramics (PZT)
Piezoelectric ceramics must undergo a polarizing process for the
piezoelectric phenomenon to occur
Crystal structure must be asymmetric

Table of Contents, Slide 5

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Piezoelectric effect ...

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PbZrO3-PbTiO3

Above Curie temperature

Table of Contents, Slide 6

Below Curie temperature

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Piezoelectric elementary cells

As macroscopic point of view, molecular dipoles align within small

areas forming large dipole moments
The domains are randomly oriented and therefore the net external
electric dipole is zero

Table of Contents, Slide 7

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Piezoelectric ceramics

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Piezoelectric ceramics...
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Table of Contents, Slide 8

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Linear model
S = s ET + dE

S is strain tensor

D = dT + T E

T is stress tensor

Neglects hysteresis

E is the electric field vector

D is electric displacement vector
sE is the elastic compliance matrix
when subjected to a constant electric
field
d is a matrix of piezoelectric constants
eT is the permittivity measured at
constant stress

Table of Contents, Slide 9

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Piezoelectricity models

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In piezoresistive effect the

relative change in resistance is
proportional to the mechanical
stress.

Utilized in many mechanical

microsensors, such as
pressure and acceleration
sensors

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Piezoresistive effect

Pressure sensors
by Sensonor asa
Table of Contents, Slide 10

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Origin lies in the Coulombic force,

i.e. the attractive force between two
conductive plates having opposite
charges
When a voltage is applied between
the plates, the attractive force FN is
exerted on the plates
1 U
FN = eA
2 d

FN

+e

+e

+e

-e

-e

-e

FN

Table of Contents, Slide 11

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Electrostatic effect

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Electrostatic effect...
When a force is applied to a conductive
plate, capacitance between the plates
changes
Applications in microsensors, especially
in force, pressure and acceleration
sensors

Delft university of Tech.

Table of Contents, Slide 12

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Electrostriction refers to deformation of the material when exposed to

an electric field.
Similar to piezoelectric, occurs in ferroelectric materials
Does not need asymmetric crystal structure
Greater hysteresis
Temperature dependent

Table of Contents, Slide 13

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Electrostrictive Effect

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Electrorheological fluids can change state from liquid to solid when

an electric field is applied
Discovered by Willis M. Winslow in the 1940s (Winslow fluids)
Depending on the strength of the electric fluid, the ER fluid acts like
water or honey
ER fluids consist of micro-sized particles suspended in nonconducting liquid

Table of Contents, Slide 14

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Electrorheological effect

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Electrorheological effect ...

Electric field:
1000 v / mm

Table of Contents, Slide 15

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Magnetic Effects
Hall
Magnetoresistive
Magnetostrictive
Magnetorheological
Magnetic shape memory

Table of Contents, Slide 16

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Based on Lorentz force

F = e( v B )

EHy = vxBz

Utilized in Hall sensors

VH = EHyw

Table of Contents, Slide 17

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Hall effect

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Resistance of a semiconductor changes in the presence of magnetic

field
Based on the Lorentz force
The deflection of the current paths leads to an increase in the
resistance of the semiconductor

Table of Contents, Slide 18

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Magnetoresistive effect

Magnetostriction refers to
magnetically induced shape change
in ferromagnetic materials (Joule
Effect)
Villari effect is a change in
magnetization state due to a
mechanical stress

Tohoku University

Table of Contents, Slide 19

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Magnetostrictive Effect

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Magnetorheological effect
The flow rate of magnetorheological fluids may be varied
by the application of a magnetic
field

Table of Contents, Slide 20

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 Efficiency 10 - 20 %

Table of Contents, Slide 21

M
SM

PZ
T

high power density (10 kW/Kg)

ol
-D

fast response (even up to 10 kHz)

fe
n

large strain (4.5%)

Te
r

4.5
4
3.5
3
2.5
Strain (%) 2
1.5
1
0.5
0
st
ric
to
rs

Change of dimension, shape or

stress due to an applied magnetic
field
Finnish innovation (AdaptaMat Oy)
Properties

El
ec
tro

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Magnetic Shape Memory

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Thermal Effects
Seebeck effect
Peltier effect
Pyroelectric effect
Thermoresistive effect
Thermoelastic effect
Shape memory effect

Table of Contents, Slide 22

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A circuit consisting of two different

materials has different temperatures at
sensing and reference junctions
Current flow between the junctions
Discovered in 1822 by an Estonian
physician named Thomas Seebeck

Thermocouple

Table of Contents, Slide 23

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Seebeck effect

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Peltier effect
Reversible to the Seebeck effect
A current applied to an electric
circuit made of two dissimilar
materials, results in either cooling or
heating effect
Utilized in thermoelectric heating
and cooling systems

Table of Contents, Slide 24

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Pyroelectric Effect
Pyroelectricity is the variation
of electric charges on the
surface of a polarized crystal
when it is heated
increase in temperature
increases output voltage
All pytoelectric materials are
piezoelectric, but the converse
is not true

Table of Contents, Slide 25

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Thermoresistivity refers to variation of electrical resistance of metals

and semiconductors with temperature
Thermoelastic effect refers to the thermal expansion of the material
Volume change
Heated
Cooled

MemsPI

Table of Contents, Slide 26

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Thermoresistive and Thermoelastic

Effects

Shape Memory Alloys (SMAs)

are metallic materials that
have an ability to remember
their original shapes

Discovered in 1950s

Widely used Nickel-titanium

(NiTi) alloys were found in the
beginning of 1960s

Eyeglass frames by
Marchon

NiTi spring is trained to open a

valve and release hot water at
the proper temperature, by
Carioca
NiTi surgical tools: Precise
bending of the tool to the
proper shape in open heart
surgery. The original shape
returns upon heating during
sterilization.

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Shape memory effect

by St. Jude Medical

Table of Contents, Slide 27

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Shape memory effect ...

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Table of Contents, Slide 28

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Stress

Austenite

Martensite

Strain

Table of Contents, Slide 29

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Shape memory effect ...

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Photoelectric effects
photoemissive (radiation striking the prepared surface of a metal emits

electrons from the surface into space)

photoconductive (light striking the photoconductive material reduces its
resistance)
photovoltaic (when radiation is applied to a semiconductor sheet, photons
make electrons flow in one direction across a junction, generating a
voltage, used in photodiodes and solar cells)

Table of Contents, Slide 30

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Radiation Effects