Robotics

HELSINKI UNIVERSITY OF TECHNOLOGY
Microrobotics, Microtelemanipulation
and Microassembly
Introduction to Microsystems Technology
Lecture N-1
Quan Zhou
MICRO AND NANO SYSTEMS RESEARCH GROUP
Control Engineering Laboratory
Outline
Microrobotics
Microtelemanipulation
Microassembly
Table of Contents, Slide 2
Robot
Word robot was coined by the Czech playwright Karel Capek in his play
Rossum's Universal Robots in 1920s, robota = forced labor, worker

A reprogrammable, multifunctional manipulator designed to move
material, parts, tools, or specialized devices through various programmed
motions for the performance of a variety of tasks, Robot Institute of
America, 1979
Industrial robots vs. service robots
Definitions
Microrobot
reprogrammable behavior (as in industrial robots) or
adaptivity to unpredicted circumstances (as in advanced robots for
unstructured environments, service robots) or

remote controllability (as in teleoperated robots)
Basically the only difference between a macro and microrobot is the

scale of the application domain
Microbots extend human capabilities to the microscale
Definitions ...
Classification
With regard to size/capabilities
miniature robots
microrobots
nanorobots
Functional classification
fixed / mobile
energy source on-board / not on-board
wires / wireless
Task-specific classification
Classification with regard to size

Miniature robots
size: few cubic centimeters
workspace and forces
comparable to those of fine

human manipulations
fabrication by assembling
conventional miniature
components and micromachines
majority of todays
microrobots belong to this
class
Microrobots
size: few hundred cubic micrometers
fabricated by means of micromachining technologies (such as bulk or
surface micromachining or LIGA technology)

consists of microactuators, sensors and signal processing circuits
scaling effect should be taken into account when designing actuators, for
example
applications: cell manipulation, assembly
Classification with regard to size ...
Nanorobots
size: few hundred nanometers to a
couple of micrometers, i.e. same as

the scale of biological cells
conventional mechanical principles
(for driving and manipulation) are not
applicable here but electrochemical
means could be used (mimicking
biological organisms)
solid-state technology is not currently
suitable for nano-scale fabrication but
polymer chemistry techniques can
provide a solution
Classification with regard to size ...
Classification criteria
CU - control unit
PS - power supply
AP - actuators for
positioning
mobility
autonomy
control
(wires)
AO - actuators for
operation
Functional classification
Task-specific classification
Ratio C between the physical
dimensions of the microrobot and its
workspace
C >> 1: stationary
micromanipulation systems
C << 1: microscopic mobile robots
Applications
Biotechnology
Microsurgery
Microassembly
Testing of microelectronic circuits
Process industry
Actuation principles for microrobots

Actuation principles
Active materials
Piezoelectric actuators
Shape memory alloy
Electrostatic forces
Electromagnetic actuators
Other principles
Drive principles:
Direct actuation
Impact principle
Yamagata et. al., Japan

Steps in nanometer range
Commercially available
Speed 5 mm/s
Positioning accuracy 0.1 m
Transfer force 13 N
Piezoelectric micropositioning device
Codourey et. al., Switzerland

Two legs: inner and outer leg
Electromagnets fix the legs
Operation sequence
fix outer leg
move inner leg using piezos
fix inner leg and free outer leg
move outer leg using piezos
Motion resolution: 10 nm
Maximum step: 5 m
Dimensions: 60 x 60 mm2
Abalone a micro-crawling machine
Fukuda et. al., Japan

Applications: to inspect industrial
pipelines or blood vessels
A 8 m motion of piezoelectric stack
actuators is magnified 250 times to
the motion of 2 mm
Swim motion by 32 mm long fins
Dimensions: 34 mm x 19 mm
One rot and and trans DOF
Speed 30 mm/s
Swimming microrobot
To avoid the problems of friction, different levitation systems have

been proposed
electromagnetic actuation
electrostatic actuation
ultraviolet light
A platform typically levitates on an air cushion generated by small

nozzles
Levitation microrobots
Microknives
Microneedles
Microdosing tools
Microlasers
Microgrippers
grippers with moving parts (piezoelectric, shame memory alloy,
electrostatic )
grippers without moving parts (vacuum, frozen gripper )
non-contact transportation (laser trap, ultrasonic systems )
Tools
With the present technology information transmission from the

microworld is difficult
Visual information is only information that is currently available
Optical stereo microscopes
do not require vacuum
long working distance provides space for the micromanipulator
low resolution
small depth of field
Information transmission
Scanning electron microscope

better resolution
larger depth of view
workspace can be seen from different angles
manipulators must be operable in vacuum and withstand electron radiation
large-chamber SEMs presently available (2 m3)
Force and acoustic information

currently not available
solutions are being sought
Information transmission ...
Some Other examples of Mobile

Microrobots
Microrobot Examples
Nanowalker from MIT
Microrobot Examples
Desno Inpipe wireless mobile microrobot
Examples of Microrobot
Underwater Microrobot (Fukuda)
Microrobots Examples
Flying micro insects (UC Berkerly)

What is telemanipulation?
a way for a human being to extend his operation capability to a remote
location
telemanipulator
a machine which extends a persons sensing and/or manipulating capability to a

remote location.
typically includes
artificial sensors, a vehicle for moving, communication channels
artificial arms and hands to apply forces and perform mechanical work
Telemanipulation
Why telemanipulation?
To overcome the barrier to the
world where direct human

involvement is difficult or
impossible
The traditional application areas of

telemanipulation
nuclear plants
subsurface
space
Application Areas
Why microtelemanipulation?
To overcome the barrier of
dimension and to reach the

microworld
Why tele?
computer assistance
accuracy and performance
human involvement
robustness and intelligence
A micromanipulator is a device that

is capable of manipulating micro
objects.
micro object
an object having dimensions <
1mm
size of micromanipulator
not necessary micro-sized
Micromanipulator?
Concept of Microtelemanipulation
Interaction type
Classification of Micromanipulation
Environment
contact
dry
non-contact
wet
Physical basis
electrical
mechanical
magnetic
optical
The application areas of

micromanipulation
biotechnological operations
microsurgery
assembly of micro systems
testing of micro chips and
components
Application Areas
The applications in biotechnological

operations
injections and aspirations
cell toxicology
gene technology
measurement of electrical
quantities inside a cell
e.g. patch clamp technique

separation of particles
e.g. spores
Applications in Biotechnology
The applications in microsurgery

diagnostic surgery
neurosurgery (brain surgery)
micro vascular anastomosis
blood vessels
nerves
ophthalmology (eye surgery)
intracavity interventions (using
endoscopes and microcatheters)
Applications in Microsurgery
The application areas in

microassembly
optoelectronic devices
wrist watches
micro motors and gears
micro robots
...
Applications in Microassembly
The applications in microchips testing

electrical probing
mechanical testing
Applications in Microchips
Problems in Micromanipulation
The problems in microtelemanipulation
scaling effect
measurement difficulties
external disturbances
actuator non-linearity
Time: I0
van der Waals: I1/4
Diffusion: I1/2
Distance: I1
Velocity: I1
Surface tension: I1
Electrostatic force: I2
Muscle force: I2
Friction: I2
Thermal Losses: I2
Piezo-electricity: I2
Shape memory alloy: I2
Mass: I3
Gravity: I3
Magnetic: I3
Torque: I3
Power: I3
Scaling Laws
Scaling of Some Forces

Other Effects
Other effects became significant in the micro world
surface adhesions
contact electrification
micro/nano friction
break down of continuum assumption
What is scaling effect?

The change of dominant physical quantities between different scales is
called scaling effect
gravitational, inertial forces become less effective

van der Waals forces, electrostatic forces, surface tension forces become more
important
other effects
Summary of Scaling Effect
Properties
Actuator Nonlinearity
Hysteresis, drift and gain-nonlinearity
Preisach model:
x(t): output
m(a,b): weighting function
a, b: up and down switching point
gab[u(t)]: binary hysteresis
operator
Classical Preisach Hysteresis Model for

Piezo Actuator

3 DOF tripod-like parallel
manipulator
Joint-free structure
Piezohydraulic actuation
Workspace: 1.2 x 0.6 x
0.3 mm
Resolution:
submicrometers
The Micromanipulator
Actuation System
Tank diameter: 40 mm, Bellow length: 18.8 mm
Strain gages: deformation of the
piezoelectric actuators
Hall sensors: movement of the
mobile platform
Machine vision: movement of the
tool tip
Measurement


Microassembly
Common definition:
Assembly of micro part with
dimension less than 1 mm
Our definition:
Assembly of miniaturized parts
where micro domain phenomena

affect the performance and
precision
Microassembly
Serial microassembly
Parts are put together one-by-one
Parallel microassembly
multiple parts are assembled
simultaneously
deterministic microassembly
stochastic microassembly
Two Types
Serial microassembly
Traditional pick and place
procedure
Capable of handling complicated
hybrid micro devices
Techniques required
Microscope
Visual servoing
High precision positioning
Parts handling tools
Tweezers
grippers
Serial Microassembly
Deterministic parallel microassembly

Flip-chip wafer to wafer transfer
Micro gripper array
Mechanical
Thermal

Parallel Microassembly I
Stochastic parallel microassembly

Destination unknown
Self-assembly
Techniques
Fluidic agitation and mating shape
Vibratory agitation and electrostatic
forces
Vibratory agitation and mating shape
Mating patterns of self-assembly
monolayer
Parallel Microassembly II
Where microassembly is needed?

MEMS devices become
increasingly complicated
The traditional assembly
technology become less effective
because of the scaling down
Application areas
optoelectronic devices
wrist watches
micro motors and gears
micro robots
...
Applications
University of Karlsruhe, Institute for Real-time Computer System &

Robotics
Micro mobile robot solution
Micro Assembly Examples I
Micro Assembly Examples II
Sandia National Laboratories

Micromanipulation lab
Assembly of MEMS components of size
10 to 100 microns
Micro Assembly Examples III
University Kaiserslautern
Institute for production automation
3 stage assembly line, assembly precision better
than 1 micron
Micro Assembly Examples IV
Technishe Universitat Munchen

Laboratory for Process Control and Real-time Systems
Coarse-fine positioning system and vacuum micro gripper
Micro Assembly Examples V
Institute of Microengineering Production (IPM)

Ecole Polytechnique Federale de Lausanne (EPFL)
Assembly of wrist watch and optical sensor, precision 0.5 micron
Micro Assembly Examples VI

Micro assembly
at Micro
Technology Group,
Table ofstation
Contents,
SlideSystem
64
TUT/HUT
Hollis
Mini Factory
Hollis
Hollios
Hollios
Hollis
Virtual mini factory for microphone assembly
Micro Factory
MEL
Tasks in microassembly
preparation of parts
transportation of parts
positioning and fixing of parts
connecting the parts
testing and measuring the finished
microsystem
Tasks in Micro Assembly
Issues in Microassembly
Coarse-fine approach
A macro robot + a precision robot
(micromanipulator)
A precision robot
(micromanipulator) + coarse multiaxial stage
Micro robots
Precision Positioning I
Microassembly Automation Laboratory, Lawrence Livermore
Newport
MIT
Piezosystem
Nanotechnik
Precision Positioning II: Stages
X-Y stage from Nanotechnik
Ultrasonic motor by
Nanomotion
X-Y-Z stages from Physik Instrumente
X-Z stage from Newport Co.
Precision Positioning III: More Stages and

Actuators
Stepper motor from Newport Co.
Precision Positioning IV: Mobile Micro Robots
University of Karlsruhe, Institute for

Real-time Computer System & Robotics
Micromanipulator
Nanotechnik
Measurement methods
Visual servoing
Linear encoding
Laser sensor
Other sensors
Acceleration meter
Hall sensor

Position Measurement
Visual Servoing
Gripping methods
Grippers with moving part
Various shape
Actuation principle
Piezoelectric, SMA, electrostatic
Grippers without moving part

Vacuum gripper
adhesive gripper
Frozen gripper
Water drop gripper
Non-contact transportation system
Laser trap gripper
Dielectrophoretic transportation
Ultrasonic system
Micro Griping
Micro Grippers
EPFL
Lawrence Livermore National Laboratory
Force Measurement
Sensing methods
Piezoresistive
Optic reflective

Installation
Integrated
Non-contact
Piezolever from Thermomicroscopes
Dispensing and Connection

Micro dispensers
Wire connection
For vibration control, several aspect should be taken into account:

Construction of the building
Location of site
Away from heavy machinery
A cheap solution
Vibration isolation table
There are several isolation principles used in vibration control:

Passive isolation
Elastomeric
Spring
Pneumatic
Active
Electromagnetic
Piezo
Vibration Control I
Passive Isolation
No need for connections
electrical
air preassure
Clean room and vacuum compatible
Passive spring Isolation
Vibration Control II
Elastomeric Isolator from

Newport Co.
Pneumatic Isolation
Consists of a sealed air chamber
Platform floats in a cushion of air
Need for air preassure

Difficult to install in clean room and vacuum environment
VH-isostation from
Newport Co.
Vibration Control III
Active Isolation
Pneumatic with electromegnetic sensors and
actuators
AD500 activator from Newport Co.
Vibration Control IV
Active Isolation
An active vibration isolation system measures the vibrations from the floor
and the table itself, and produces a mechanical force contrary to the
vibration.
Piezo actuators from Newport Co

Elite 3 Workstation from Newport Co.

Vibration Control V
Environmental control takes

care of issues like:
Temperature control
Humidity control
Air flow
Dust participles
Environmental Issues
Double layer polycarbonate wall

Air duct
Air buffer
Diffuse plate
Air inlet (from environmental controller)
Access Orifices
Cable passing point
Bottom thermal isolation layer
Aluminum frame
Air outlet (to environmental controller)
Vibration Isolation table
The Environmental Chamber (Design)
ARCTEST Environmental equipment

Temperature
Range: 10 to +40 C
Accuracy:
+/- 0.1 C
Humidity
Range: 5 to 80 %RH
Accuracy: +/- 0.1 %
The Environmental Chamber: the Controller
Benders Tests
Testing Results
Displacement of the benders
Important influence both of T
and humidity could be noticed.

Apart from temperature and
humidity influence, the
amplitude of the movement was
higher with the lower frequency
(0.2 Hz)
Initial results of
environment effects to microassembly, IV
Displacement and angular error of pick and place operation of a miniaturized gear at
different temperature and humidity settings
Modularization
Scaling effects:
The change of dominant physical quantities between different scales
gravitational, inertial forces become less effective
van der Waals forces, electrostatic forces, surface tension forces become more
important
other effects
Special Phenomena in Microassembly
Assembly planning (high level)

Assembly representation
Work cell planning
Sequence planning
Task planning (low level, planning of handling operations)

Gross motion planning (path planning)
Fine motion planning
Grasp planning
Assembly and Task Planning
The technologies developed for

conventional assembly planning are
largely valid
To be developed in
Grasp planning
Assembly representation
Work cell planning
Sequence planning
Task planning
Gross motion planning (path
Feeding
Assembly planning
planning)
Grasp planning
To take into account of

Micro domain forces
Special uncertainties
Differences Between Macro and Micro

Assembly and Task Planning I
Traditional assembly and task

planning
Geometric model is sufficient in
many cases
No special adhesion forces

Many planning methods are based
on disassembly
Reversible operations
Assembly can be based on
common sense
Can use expert experiences
Assembly and task planning in micro

assembly
Physics-based simulation model is
required
Special adhesion forces

Assembly based on disassembly
does not work
Many operations not reversible

Common senses do not always
work
Many experiences expired
Differences Between Macro and Micro

Assembly and Task Planning II
A potential powerful method in assembly and task planning in micro

assembly is physical model-based virtual reality environment
Benefits
can help task planning: fine motion and grasp planning
can help assembly planning: assembly sequence planning
Model can help design of new tools: model-based design
Drawbacks
computational intensive
require numerical micro domain force models
verification difficulties
Model-based Handling and Planning
Global model: rigid body contact

dynamics + micro domain forces
Contact dynamics
Friction
van der Waals forces
electrostatic forces
Dry environment
Simple-shape objects
unit in micro meter
Fast, real-time simulation capable
Modeling of Micro Operations
Summary
Microrobotics
Microassembly

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HELSINKI UNIVERSITY OF TECHNOLOGY

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Table of Contents, Slide 2

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

Rossum's Universal Robots in 1920s, robota = forced labor, worker

Industrial robots vs. service robots

Table of Contents, Slide 3

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

unstructured environments, service robots) or

Basically the only difference between a macro and microrobot is the

Table of Contents, Slide 4

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Table of Contents, Slide 5

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Classification with regard to size

comparable to those of fine

Table of Contents, Slide 6

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Table of Contents, Slide 7

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

surface micromachining or LIGA technology)

Table of Contents, Slide 8

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Classification with regard to size ...

couple of micrometers, i.e. same as

Table of Contents, Slide 9

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Classification with regard to size ...

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

Table of Contents, Slide 10

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Table of Contents, Slide 11

HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory