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    Cylindrical Magnetrons Specifications US 11-21-14

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    Meghjit Mazumder
    This document provides specifications for cylindrical magnetrons, including cooling requirements, maximum input temperature, magnetic enhancement, mounting, and source to substrate distance. It lists the maximum sputtering power, cathode voltage, and discharge current for DC and MF operation. Target details such as cooling, diameter, and fixation are also specified. A disclaimer notes that all magnets are encapsulated and protected from water degradation, and that maximum power levels depend on the target material properties. Specifications are subject to change without notice.

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    Cylindrical Magnetrons Specifications US 11-21-14

    Uploaded by

    Meghjit Mazumder
    65 views1 page
    This document provides specifications for cylindrical magnetrons, including cooling requirements, maximum input temperature, magnetic enhancement, mounting, and source to substrate distance. It lists the maximum sputtering power, cathode voltage, and discharge current for DC and MF operation. Target details such as cooling, diameter, and fixation are also specified. A disclaimer notes that all magnets are encapsulated and protected from water degradation, and that maximum power levels depend on the target material properties. Specifications are subject to change without notice.

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    magnetron

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    This document provides specifications for cylindrical magnetrons, including cooling requirements, maximum input temperature, magnetic enhancement, mounting, and source to substrate distance. It lists the maximum sputtering power, cathode voltage, and discharge current for DC and MF operation. Target details such as cooling, diameter, and fixation are also specified. A disclaimer notes that all magnets are encapsulated and protected from water degradation, and that maximum power levels depend on the target material properties. Specifications are subject to change without notice.

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    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pdf or txt
    65 views1 page

    Cylindrical Magnetrons Specifications US 11-21-14

    Uploaded by

    Meghjit Mazumder
    This document provides specifications for cylindrical magnetrons, including cooling requirements, maximum input temperature, magnetic enhancement, mounting, and source to substrate distance. It lists the maximum sputtering power, cathode voltage, and discharge current for DC and MF operation. Target details such as cooling, diameter, and fixation are also specified. A disclaimer notes that all magnets are encapsulated and protected from water degradation, and that maximum power levels depend on the target material properties. Specifications are subject to change without notice.

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    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
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    Cylindrical Magnetrons Specification

    US Specifications
    Cooling Requirements
    Flow Rate
    Maximum Input Temperature
    General
    Magnetic Enhancement
    Maximum Temperature
    Mounting
    Source to Substrate Distance
    Uniformity (Static)

    1 GPS Per 4 kW Power


    86o F
    Permanent (NdFeB) Encapsulated
    284o F
    O-Ring Seal Flange
    2.0 12.0
    Adjustable to better than +/- 2%

    Maximum Sputtering Power*


    Cathode Voltage
    Discharge Current
    DC
    MF

    100 to 1500 Volts Continuous


    3000 Strike
    300 Amps Maximum
    120 Kilowatts
    60 Kilowatts

    Target
    Cooling
    Diameter
    Fixation
    Form

    Direct/Indirect
    3 / 5 / 6
    Quick Clamp
    Cylindrical

    Specifications Disclaimer
    -

    All Angstrom Sciences NdFeB magnets are totally encapsulated and protected
    from degradation by water.
    - * Maximum power for cathode only, a target materials properties, such as,
    thermal and electrical conductivity may limit the maximum process power level.
    - Specifications are subject to change without notice.
    - Typical performance. Results may vary with process parameters such as
    pressure, flow rate, target material, and substrate rotation, etc.
    ____________________________________________________________________

    Please contact us for specifications regarding your application.

    Angstrom Sciences | Call +1-412-469-8466 | www.angstromsciences.com

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