Download as pdf or txt
Download as pdf or txt
You are on page 1of 2

4/7/2015

CapacitiveMicromachinedUltrasonicTransducers:TechnologyandApplicationJournalofMedicalUltrasound

RSSFeeds

Mobile

Login |Register

Articles&Issues

ForAuthors

JournalInformation

SocietyInformation

AllContent

Search

MorePeriodicals
AdvancedSearch

March2012Volume20,Issue1,Pages831

<PreviousArticle

NextArticle>

CapacitiveMicromachinedUltrasonicTransducers:Technology
andApplication
MuhammedSabriSalim

,M.F.AbdMalek ,R.B.W.Heng,K.M.Juni,NaseerSabri
Received:July22,2011Accepted:February9,2012PublishedOnline:March29,2012

Accessthisarticleon

ScienceDirect

ArticleTools
PDF(3MB)

DOI:http://dx.doi.org/10.1016/j.jmu.2012.02.001

DownloadImages(.ppt)
AboutImages&Usage

ArticleInfo
EmailArticle
Abstract

FullText

Images

References

AddtoMyReadingList
ExportCitation

Capacitivemicromachinedultrasonictranducers(cMUTs)haverecentlyemergedasanalternativetoconventional
piezoelectrictransducers.Theyoffermanyadvantagesintermsofbandwidth,fabricationoflayerarrays,efficiency,and
sensitivity.Thisresearchpresentstheprinciplesofoperation,fabricationprocesssteps,andapplicationofthe

CreateCitationAlert

capacitivemicromachinedultrasoundtransducer.Thestudyalsodemonstratesindetailthecollapsevoltagedesign
parameterofacMUTmembrane.SeveralimportantapplicationsarepresentedtoshowthefeasibilityofusingcMUTs
whicharedemonstratedbyimagingexamplesinimmersionandairduetothecMUTcapabilityofproducinglarge
bandwidth(123%fractionalbandwidth)andlowerimpedancemismatch.Finally,theadvantagesofthreedimensional

RequestPermissions

CitedbyinScopus(2)

OrderReprints
(100minimumorder)

echographicimagesbasedonmovingultrasoundlineararrayitstechniquearediscussedindetailandcomparedwith
thoseoftwodimensionalopticalhandgeometry.

Keywords:
capacitivemicromachinedultrasonictransducer,fabrication,imagesensor,ultrasonography

2012PublishedbyElsevierInc.

http://www.jmuonline.com/article/S09296441(12)000094/abstract

1/2

4/7/2015
<PreviousArticle

CapacitiveMicromachinedUltrasonicTransducers:TechnologyandApplicationJournalofMedicalUltrasound

March2012Volume20,Issue1,Pages831

NextArticle>

Copyright2015ElsevierInc.Allrightsreserved.|PrivacyPolicy|Terms&Conditions|AboutUs|Help&Contact
Thecontentonthissiteisintendedforhealthprofessionals.
Advertisementsonthissitedonotconstituteaguaranteeorendorsementbythejournal,Association,orpublisherofthequalityorvalueofsuchproductoroftheclaimsmadeforitbyits
manufacturer.

http://www.jmuonline.com/article/S09296441(12)000094/abstract

2/2

You might also like