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HFSS Spiral Inductor
HFSS Spiral Inductor
HFSS Spiral Inductor
ANSYS,Inc.
275TechnologyDrive
Canonsburg,PA15317
Tel:(+1)7247463304
Fax:(+1)7245149494
GeneralInformation:AnsoftInfo@ansys.com
TechnicalSupport:AnsoftTechSupport@ansys.com
September2010
Inventory********
D a te
Software
Ve r s io n
Jan 2006
10.0
May 2007
11.0
February 2009
12.0
September 2010
13.0
Alternate methods or
tips are listed in the left
margin in blue italic
text.
iii
Getting Help
Ansys Technical Support
To contact Ansys technical support staff in your geographical area,
please log on to the Ansys corporate website, https://www1.ansys.com.
You can also contact your Ansoft account manager in order to obtain this
information.
All Ansoft software files are ASCII text and can be sent conveniently by email. When reporting difficulties, it is extremely helpful to include very
specific information about what steps were taken or what stages the
simulation reached, including software files as applicable. This allows
more rapid and effective debugging.
Help Menu
To access online help from the HFSS menu bar, click Help and select from
the menu:
Contents - click here to open the contents of the online help.
Seach - click here to open the search function of the online help.
Index - click here to open the index of the online help.
Context-Sensitive Help
To access online help from the HFSS user interface, do one of the following:
To open a help topic about a specific HFSS menu command, press
Shift+F1, and then click the command or toolbar icon.
To open a help topic about a specific HFSS dialog box, open the dialog box, and then press F1.
iv
Table of Contents
1. Introduction
2. Setup Silicon Spiral Inductor Model
Setting Tool Options . . . . . . . . . . . . . . . . . . . . .
Opening a New Project . . . . . . . . . . . . . . . . . . .
Set Solution Type . . . . . . . . . . . . . . . . . . . . . . . .
Creating the 3D Models for Dielectrics . . . . . . .
Set Model Units . . . . . . . . . . . . . . . . . . . . . . . .
Set Default Material for Substrate . . . . . . . . . .
Create Substrate . . . . . . . . . . . . . . . . . . . . . . .
Set Default Material for Oxide Substrate . . . .
Create Oxide . . . . . . . . . . . . . . . . . . . . . . . . . .
Set Default Material for Passivation . . . . . . . .
Create Passivation . . . . . . . . . . . . . . . . . . . . .
Set Default Materialfor Air Box . . . . . . . . . . . .
Create Air . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Create Radiation Boundary . . . . . . . . . . . . . . .
Create Ground . . . . . . . . . . . . . . . . . . . . . . . . .
Assign a Perfect E boundary to the Ground . .
Hide Dielectrics . . . . . . . . . . . . . . . . . . . . . . . .
2-2
2-3
2-4
2-4
2-4
2-5
2-6
2-7
2-8
2-9
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2-10
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2-11
2-12
2-13
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Contents-3
Contents-4
Introduction
Introduction 1-1
Nominal Design:
Spiral: 2.5T, W=15um, S=1.5um, Rad=60um
M6, 2um, V= 2.8e7 S/m
Underpass: M5, 0.5um, V= 2.8e7 S/m
Stackup:
Passivation: 0.7um
Hr = 7.9
Oxide: 9.8um
Hr = 4.0
Substrate: 300um
Hr = 11.9, V= 10 S/m
1-2 Introduction
Introduction 1-3
1-4 Introduction
Create Substrate
To create the substrate:
1 Click Draw>Box
Create Oxide
To create substrate:
1 Click Draw>Box
Create Passivation
To create substrate:
1 Click Draw>Box
Create Air
To create air box:
1 Click Draw>Box
Create Ground
To create ground:
1 Click Draw>Rectangle
Hide Dielectrics
To hide the dielectrics:
1 Click Edit>Select All Visible
point:
point:
point:
point:
point:
Also change:
Width: 15 um
Height: 2 um
To fit the view:
Create Underpass
To create underpass:
1 Click Draw>Box.
Create Via1
To create via:
1 Click Draw>Box
Create Via2
To create via:
1 Click Draw>Box
Create Feed
To create feed:
1 Click Draw>Box
and Underpass
2 Click Modeler>Boolean>Unite
To fit the view:
Click View>Fit All>Active View or press the CTRL+D key
3 Click Edit>Properties
4 Properties dialog Attribute tab:
Setup Silicon Spiral Inductor Model 2-23
2 Subtract Window
Blank Parts: Ring
Tool Parts: Inner
Create Extension 1
To create extension:
1 Click Draw>Box
Create Extension 2
To create extension:
1 Click Draw>Box
Create Source 1
To create source:
1 Click Draw>Rectangle
Create Source 2
To create source:
1 Click Draw>Rectangle
You can also select the object from the Model Tree.
To assign lumped port excitation:
1 Click HFSS>Excitations>Assign>Lumped Port
3 Click OK
2 ISelect Source2.
Show All
To show all object
Click View>Show All>All Views
Boundary Display
To verify the boundary setup:
1 Click HFSS>Boundary Display (Solver View)
boundary.
3 Click View>Active View Visibility to hide all of the geometry objects. This makes it easier to see the boundary.
Analyze Spiral
Conductor
Analysis Setup
Creating an Analysis Setup
To create an analysis setup:
1 Click HFSS>Analysis Setup>Add Solution Setup
Save Project
To save the project:
1 In an Ansoft HFSS window, Click File>Save As.
Model Validation
To validate the model:
1 Click HFSS>Validation Check
Analyze
To start the solution process:
Click HFSS>Analyze All
Solution Data
To view the Solution Data:
1 Click HFSS>Results>Solution Data
Create Reports
Create S-parameter vs. Frequency
To Create a report:
1 Click HFSS>Results>Create Terminal Solution Data
Report>Rectangular Plot
Type: )