PVD e MOCVD

Manuel Jos Andrade Romero

Dilson Silva dos Santos
UFRJ-HydroQuebec

Figura 7. Esquema de: (a) a estrutura cristalina de '-Fe4N mostrando duas clulas unitrias
[21]; (b) distribuio de fases dentro de um caso nitrided em ao e acompanhado
concentrao profundidade de azoto.

http://www.cimm.com.br/portal/material_didatico/6376-descricao-dos-processos-derevestimento-por-adicao-de-camadas#.VijVE36rSM8

PVD

http://bookos-z1.org/s/?q=Physical+Vapor+Deposition+%28PVD%29+&t=0

http://bookos-z1.org/book/1011213/6d0689
http://bookos-z1.org/book/929091/b97005
http://bookos-z1.org/book/2094533/683982
http://bookos-z1.org/book/2250526/0bfec9
http://bookos-z1.org/book/1004284/be894e
http://bookos-z1.org/book/2094533/683982

CVD

http://bookos-z1.org/s/?q=Chemical+Vapor+Deposition&t=0

Basic principles of the MOCVD process

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

MOCVD reactor components

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

Figure 1.TypicalCVDReactor.

Figure 2.GeneralMOCVDmechanism.
http://www.azonano.com/article.aspx?ArticleID=3427

Figure 12.35Aschematicillustrationofavacuum-depositionapparatus.

Figure 12.36Schematic illustration of a sputtering apparatus The high voltage applied across
thegasresultsinionizationofAratoms.
The Ar+ions are accelerated toward the negatively charged target. Upon impact they knock
atomsofMfromthesurface.TheMatomstravelin
alldirectionswithhighkineticenergy,andsomeofthemstrikethesubstrate,formingacoating.

http://wps.prenhall.com/wps/media/objects/3312/3391650/blb1205.html

Figure 1. CloseCoupledShowerhead55x2inch

http://www.azom.com/article.aspx?ArticleID=11585

Figure 2. PlanetaryReactor56x2inch

http://www.azom.com/article.aspx?ArticleID=11585

Figure1:Flowchartoftheprinciplestepsofthechemicalsolutiondeposition(CSD)met

http://www.emrl.de/r_m_6.html

Figure1:Flowchartoftheprinciplestepsofthechemicalsolutiondeposition(CSD)met

http://www.emrl.de/r_m_6.html

Figure2:MOCVDplanetaryreactorAIX-2600G3fromtheAixtronAGwhichcanhandle

http://www.emrl.de/r_m_6.html

Figure2:MOCVDplanetaryreactorAIX-2600G3fromtheAixtron
AGwhichcanhandlefive6inchwaferssimultaneously

http://www.emrl.de/r_m_6.html

Figure2:Schematicsketchofsputteringtoolandlift-offprocess

http://www.emrl.de/r_m_6.html

Figure2:Schematicsketchofsputteringtoolandlift-offprocess

http://www.emrl.de/r_m_6.html

COATINGS TECHNOLOGY HANDBOOK [Arthur_A._Tracton] (2006) Pag 234

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

COATINGS TECHNOLOGY HANDBOOK [Arthur_A._Tracton] (2006) Pag 239

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

COATINGS TECHNOLOGY HANDBOOK [Arthur_A._Tracton] (2006) Pag 234

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

COATINGS TECHNOLOGY HANDBOOK [Arthur_A._Tracton] (2006) Pag 257

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

COATINGS TECHNOLOGY HANDBOOK [Arthur_A._Tracton] (2006) Pag 259

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

Corrosion and corrosion control. an introduction to corrosion

science and engineering R__Winston (2008) Pag 90

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

Corrosion and corrosion control. an introduction to corrosion

science and engineering R__Winston (2008) Pag 144

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

Corrosion and corrosion control. an introduction to corrosion

science and engineering R__Winston (2008) Pag 194

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

Handbook of chemical vapor depostion [i.e. deposition] (CVD) [

Hugh_O_Pierson] (1999)Pag 89

https://en.wikipedia.org/wiki/Metalorganic_vapour_phase_epitaxy

Figure 2. Three common types of VCSEL diode laser structures: (a) a top-emitting structure
with proton implantation to confine the current, (b) a selectively-oxidized top-emitting structure
to confine the optical modes and/or the current, and (c) a mounted bottom-emitting selectivelyoxidized structure.

http://www.princetonoptronics.com/technology/technology.php

Figure

http://graphene.nus.edu.sg/content/clean-room

Figure

http://www.aplusphysics.com/courses/honors/microe/processing.html