Jaypee Institute of Information

Technology

Design of MEMS Resonator with

Readout Circuitry
Minor Project Synopsis
January 2015 June 2015

Vishal Pathak
(12102160 ), A1

Mentored By:
Prof. R. C. Jain
ECE Department
JIIT Noida

ABSTRACT:
MEMS resonator can also be integrated together with
their driving circuitry, offering a complete timing solution
in a single package, saving valuable board space. This
project involves design of MEMS resonator with readout
circuit. Coventorware tool is used for simulating MEMS
plus circuit system simulation. Hspice tool is used to
extract threshold voltage of a given technology node. The
readout circuit include the design of instrumental
amplifier.
Objectives:
To design a Microelectromechanical Resonator for a
given specifications.
To learn Coventorware (MEMS structure simulation)
and HSPICE (Readout circuit simulation)
To learn transduction mechanisms.
To design differential amplifier of given specifications.