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    Cold Cathodes Presentation

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    t4jpr0
    This document presents two cold cathode measurement gauges: the MPG400/401 inverted magnetron Pirani gauge and the PEG100 Penning gauge. It provides information on their operating principles, pressure measurement ranges, specifications, dimensions, components, spare parts, and electrical connections. The document also discusses controller options for the MPG40x and PEG100 gauges.

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    Cold Cathodes Presentation

    Uploaded by

    t4jpr0
    20 views26 pages
    This document presents two cold cathode measurement gauges: the MPG400/401 inverted magnetron Pirani gauge and the PEG100 Penning gauge. It provides information on their operating principles, pressure measurement ranges, specifications, dimensions, components, spare parts, and electrical connections. The document also discusses controller options for the MPG40x and PEG100 gauges.

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    Vacuum gauge

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    This document presents two cold cathode measurement gauges: the MPG400/401 inverted magnetron Pirani gauge and the PEG100 Penning gauge. It provides information on their operating principles, pressure measurement ranges, specifications, dimensions, components, spare parts, and electrical connections. The document also discusses controller options for the MPG40x and PEG100 gauges.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pdf or txt
    20 views26 pages

    Cold Cathodes Presentation

    Uploaded by

    t4jpr0
    This document presents two cold cathode measurement gauges: the MPG400/401 inverted magnetron Pirani gauge and the PEG100 Penning gauge. It provides information on their operating principles, pressure measurement ranges, specifications, dimensions, components, spare parts, and electrical connections. The document also discusses controller options for the MPG40x and PEG100 gauges.

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    © All Rights Reserved
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    of 26

    Cold Cathode

    MPG400, PEG100 Product Presentation


    by Markus Truniger
    tijc24d1

    Source: MPE Garching D


    2

    Cold Cathode Measurement Gauges

    Two Cold Cathode principles


    (Basic Cross-Field Gauge Geometries)

    Penning vs. Inverted Magnetron

    Plasma of the Cold Cathode Gauges


    The pictures show the plasmas which ignite after applying a high
    voltage of ~ 3kV in different cold cathode gauges.

    Pressure Ranges (mbar) MPG40X PEG100

    MPG40X Inverted Magnetron Pirani Gauge

    MPG40X Inverted Magnetron Pirani Gauge

    Combined Gauge System

    Specification MPG400 / 401

    Specification MPG400 / 401

    Dimensions MPG40X

    MPG40X Build-Up
    Pirani

    Magnet

    Electronics
    Chamber

    Pole Disk

    MPG40X Magnetical Shield

    Spare Parts MPG40X

    PEG100

    PEG100 Penning Gauge

    Specification PEG100

    Specification PEG100 D and -P

    Dimensions PEG100

    Spare Parts PEG100

    Electrical connections

    Controller for MPG40x and PEG100

    VGC401

    VGC402

    FCC / FCC

    VGC403

    Visionary Technology

    inficon.com

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