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Summary of Heteroepitaxial III-V-on-Si Integration Approaches (75) - Used With Permission From EHS, 2014
Summary of Heteroepitaxial III-V-on-Si Integration Approaches (75) - Used With Permission From EHS, 2014
Summary of Heteroepitaxial III-V-on-Si Integration Approaches [75]. Used with permission from EHS, 2014.
BEST
PATH
MERITS
CHALLENGES
EFFICIENCY
GaAsP
Graded
Buffer
SiGe Graded
Buffer
InGaN-on-Si
GaAsPN-onSi
Direct GaAson-Si
Strainedlayers (SL)
for GaAs-onSi
1J GaAs - 18.1%
(AM1.5g) [13]
&
2J GaAsP/SiGe 18.9% (AM1.5g)
27
[14]
[15]
1J InGaN//Si
heterostructure
7.12% (AM1.5g)
[22]
2J GaAsPN//Si5.2% (AM1.5g)
No ARC
[17]
[41]
&
1J GaAs 21.3%
(AM1.5d, 200-suns)
[43]
1J GaAs 20%
(AM1.5g) &
18.3% (AM0)
[42]