Professional Documents
Culture Documents
Seminar 1 - Cleanroom & HVAC Design - Karachi
Seminar 1 - Cleanroom & HVAC Design - Karachi
Cleanrooms &
HVAC Systems Design Fundamentals
(Karachi, Pakistan, February 22, 2011)
IEST
Working Group CC012 (Cleanroom Design), Chairman
President
Engsysco, Inc.
Ann Arbor, Michigan, USA
www.engsysco.com
Engsysco
Contents
Definition and classifications
Standards
Nonviable, viable particles (microbiological) and airborne
molecular contamination (AMC)
Particle sources
Airflow quantity and pattern and floor arrangement
Airlock and pressurization
HVAC, plumbing, fire protection, and process systems
Common devices and equipment
Architectural construction materials, cleaning procedures,
testing standards and construction cost
CFD application
2/20/2011
Introduction
Applications
Semiconductor
Microelectronic
Pharmaceutical
Biotechnology
University
Aerospace
Automotive
Hospital
Miscellaneous
Cleanroom Definition
Definition - A specially constructed enclosed
area, its environment has following controlled
parameters:
Temperature
Airflow Pattern
Humidity
Sound and Vibration
Common Requirements
Pressurization
Particle Count
Microbial Contamination
Electrostatic Discharge (ESD)
Gaseous Contamination
Process Specific
2/20/2011
Standards
U.S. Federal
Standard
209E
ISO
Document
ISO-14644-1
ISO-14644-2
ISO-14644-3
ISO-14644-4
ISO-14644-5
Cleanroom Operations
ISO-14644-6
ISO-14644-7
ISO-14644-8
Molecular Contamination
ISO-14698-1
ISO-14698-2
ISO-14698-3
Classifications
Air Cleanliness Class Definition Comparison Between
FS 209 and ISO 14644
ISO
FS 209
14644
Class
Class
1
10
100
1000
10,000
100,000
1
2
3
4
5
6
7
8
9
0.1 m
FS 209
ISO 14644
0.2 m
FS 209
ISO 14644
0.3 m
FS 209
ISO 14644
0.5 m
FS 209
ISO 14644
1 m
FS 209
ISO 14644
5.0 m
FS 209
ISO 14644
Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3
10
2
100
24
10
4
35
1,000
7.5
237
3
102
1
35
8
350
10,000
75
2,370
30
1,020
10
352
83
100,000
750
23,700
300
10,200
100
3,520
832
29
1,000,000
237,000
102,000
1,000
35,200
8,320
7
293
10,000
352,000
83,200
70
2,930
100,000 3,520,000
832,000
700
29,300
35,200,000
8,320,000
293,000
2/20/2011
Classifications
Air Cleanliness Class Definition - FS 209
10,000,000
FS-100,000
1,000,000
FS-10,000
100,000
FS-100
FS-1,000
10,000
FS-10
1,000
FS-1
100
10
1
0.01
0.1
10
PARTICLE SIZE, m
Classifications
Air Cleanliness Class Definition - ISO 14644
10,000,000
ISO-9
1,000,000
ISO-8
100,000
ISO-7
10,000
ISO-6
ISO-4
1,000
ISO-5
ISO-3
100
ISO-2
10
ISO-1
1
0.01
0.1
10
PARTICLE SIZE, m
2/20/2011
Classifications
Air Cleanliness Class Definition Comparison
Between FS 209 and ISO 14644
10,000,000
ISO-9
FS-100,000
1,000,000
FS-1,000
ISO-8
FS-10,000
100,000
FS-100
ISO-7
ISO-5
10,000
FS-10
ISO-6
ISO-4
1,000
FS-1
ISO-3
100
ISO-2
10
ISO-1
1
0.01
0.1
10
PARTICLE SIZE, m
Airborne Particles
Airborne particulates can be:
1.
2.
3.
2/20/2011
Outdoor air
External
People
Work surface
shedding
Process
equipment
Internal
Description
Control Methods
Infiltration through
doors, and cracks at
windows, and walls
Infiltration through
doors, windows, and
wall penetrations for
pipes, ducts, etc.
Largest source of
internal particles: skin
scales, hair, textile
fibers
Rubbing one item
against another
Spray, painting,
welding, grinding
During transport
During preparation,
processing and
packaging
Out-gassing to room
Dust generated from
wall, floor, ceiling,
door, fibrous insulation
Garments, proper
gowning procedures, air
shower before entry
Use cleanroom suitable
or rated furniture
Local filtration and
exhaust
Equipment washing,
cleaning and
sterilization before
entry, use airlock &
pass-through
Local exhaust
Use cleanroom suitable
or rated cleaners
Constructed with
special building
materials
Control Methods
Physical:
Heat
Radiation
Filtration
Chemical:
Sterilization
Disinfection
2/20/2011
Dilution
Isolation
Diluting internally
contaminated air
with clean, filtered
air
Containing or
isolating particle
generations with
barriers
HEPA: 99.97%
(Ef.@0.3m)
ULPA: 99.9997%
(Ef.@0.12m)
Higher air
change
rate, better
dilution.
Process exhaust
Mini-environment
ISO
9
8
7
6
5
4
3
2
1
Ceiling Filter
Coverage
5% - 15%
5% - 15%
15% - 20%
25% - 40%
35% - 70%
60% - 90%
60% - 100%
80% - 100%
80% - 100%
HEPA
or
ULPA
HEPA
ULPA
2/20/2011
ISO Class
FS-209 Class
Air Change
Per Hour
Range
700
100,000
5 48
600
10,000
60 90
1,000
150 240
100
240 480
10
300 540
360 540
Classification
600
540
540
480
500
400
360
300
360
360
240
300
240
200
150
100
360 600
90
48
60
0
0
Airflow Patterns
Non-Unidirectional
(Conventional) Flow
Unidirectional
Flow
Mixed
Flow
Mini-Environment
Flow
2/20/2011
Ballroom
Office and
Support
Areas
Cleanrooms
Service Area
Service Area
Service Chase
Office and
Support
Areas
Cleanrooms
R
Service Area
Service Area
Mini-Environment
Office and
Support
Areas
Cleanrooms
C
Service Area
Fan Tow er
Process Corridor
Waff le Slab
Silencer
Raised Floor
Maint. Corridor
Stair Case
Ceili ng + Filter
Pressurized Plenum
Cleanroom
Return Air
Basement
Make-Up Air
Perforated Slab
Cooling Coil
Pump
Process Exhaust
Submai ns
Gas Cabinets
2/20/2011
3.5m
2.2m
3.6m
Stair Case
Cleanroom
9.6m
4.8m
Basement
0. 0m
Make-Up Air
Gas Cabinets
Submains
Scrubber
Type
Cascading
Bubble
Sink
Dual Compartment
CORRIDOR
AIRFLOW
CORRIDOR
AIRFLOW
AIRLOCK
AIRLOCK
++
++
AIRFLOW
CLEANROOM
AIRFLOW
CLEANROOM
+++
CASCADING AIRLOCK
CORRIDOR
AIRFLOW
AIRLOCK
BUBBLE AIRLOCK
CORRIDOR
AIRFLOW
AIRLOCK
--
++
AIRFLOW
CLEANROOM
SINK AIRLOCK
CLEANROOM
AIRLOCK
--
AIRFLOW
10
2/20/2011
Application
Positive or
Negative
Pressure?
Has Fume or Bio
Contamination?
Containment
Needed?
Personal
Protection
Needed?
Cleanroom
Positive pressure
Selection
of Airlock
Functionality of
Cascading
Prevent cleanroom
being
contaminated
from
surrounding
spaces
through cracks
Negative pressure
Bubble
Negative pressure
Sink
Containment needed
Negative pressure
Containment needed
Personal protecti
needed
Airlock
Dual
Compart ment
Relative
Pressure
Relationship
Cleanroom:
Airlock:
Corridor:
Cleanroom:
Airlock:
Corridor:
Cleanroom:
+++
++
+
++
+
Airlock:
- -
Corridor:
Cleanroom:
Neg. Airlock:
- -
Pos. Airlock:
++
Corridor:
Personal protective
equipment (such as
pressurized suit and
respirat or) is required
Notes:
1.
2.
EXCESSIVE NEGATIVE P
RESSURE IN CLEANROOM
IS NOT RECOMMENDED,
SINCE IF IT IS NOT S
URROUNDED BY OTHER C
LEAN SPACES S, UNTREATED
DIRTY AIR CAN INFILT
RATE THROUGH
CRACKS INTO CLEANROO
M.
COMMONLY A CLEANROOM SERVICE
CORRIDOR NEEDS TO BE
DESIGNED
SLIGHTLY POSITIVE OR
NEUTRAL PRESSURE , DO NOT DESIGN IT I
N NEGATIVE
PRESSURE UNLESS A DU
AL-COMPARTMENT
LOCK IS UTILIZED.
11
2/20/2011
400
1,900
Leakage Area
(Sq. in.)
1,800
1,700
Room pressurization
Room depressurization
Entering (SA) airflow rate is
lower than leaving (EA +
RA) airflow rate in the
room, room net (offset)
flow is negative.
360
340
1,600
320
1,500
380
300
1,400
280
1,300
260
1,200
240
1,100
220
1,000
200
900
180
800
160
700
140
600
120
500
100
400
80
300
60
200
40
20
100
0
0
0.005 0.01 0.015 0.02 0.025 0.03 0.035 0.04 0.045 0.05 0.055 0.06 0.065 0.07 0.075 0.08
12
2/20/2011
FS209 Class
10,000, 100,000
ISO Class
7, 8
13
2/20/2011
FS209 Class
100, 1,000
ISO Class
5, 6
FS209 Class
1, 10
ISO Class
3, 4
14
2/20/2011
OA+RA
FILTER
SA
H
C
OA
Makeup
Air
Efficiency Ea
Co
Efficiency Eb
Supply
Air
HEPA
Space Impurity
Cs
Concentration
SA
RA
Space
Particle Generation
Q
Leakage
Air
Return
Cs
Air
EA
Exhaust
Air
Deposition
D
Cs
Ce
C
C
FILTER
AHU Unit
SA1
H
C
OA+RA
Makeup
Air
Efficiency Ea
SA2+RA
SA2
OA
Co
Efficiency Eb
Supply
Air
Space Impurity
Cs
Concentration
HEPA
SA1
RA
Space
Particle Generation
G
Q
Leakage
Air
Cs
Deposition
D
Return
Cs
Air
EA
Exhaust
Air
Ce
15
2/20/2011
Efficiency Eb
OA+RA1
FILTER
FILTER
SA=OA+RA
H
C
OA
Makeup
Air
Efficiency Ea
RA1
Co
RA2
Efficiency Ec
Space Impurity
Cs
Concentration
HEPA
SA
Supply
Air
RA
Space
Return
Cs
Air
Particle Generation
G
Q
Leakage
Air
EA
Exhaust
Air
Deposition
D
Cs
Ce
Efficiency Eb
C
C
H
C
FILTER
FILTER
SA
Efficiency Ea
OA
Makeup
Air
Co
Efficiency Ec
Supply
Air
Space Impurity
Cs
Concentration
HEPA
SA
RA
Space
Particle Generation
Q
Leakage
Air
Cs
G
Deposition
D
Return
Cs
Air
EA
Exhaust
Air
Ce
16
2/20/2011
Treated
Makeup
Air
C1
Efficiency Eb
H
C
Efficiency Ea
RA1
Efficiency Ec
OA
FILTER
OA+RA2
OA+RA
FILTER
SA
Makeup
Air
Co
RA2
Space Impurity
Cs
Concentration
HEPA
SA
Supply
Air
RA
Space
Return
Cs
Air
Particle Generation
Q
Leakage
Air
EA
Exhaust
Air
Deposition
D
Cs
Ce
FILTER
OA+RA
Treated
Makeup
Air
C1
Efficiency Eb
RA1
Efficiency Ec
Supply
Air
C
C
H
C
Efficiency Ea
Treated
Makeup
Air
C1
C
C
H
C
Efficiency Ea
OA
Makeup
Air
Co
RA2
Space Impurity
Cs
Concentration
HEPA
SA
OA+RA2
FILTER
RA
Space
Particle Generation
Q
Leakage
Air
Cs
G
Deposition
D
Return
Cs
Air
EA
Exhaust
Air
Ce
17
2/20/2011
Cleanroom Process
Make-up system
Recirculation system
Return air system
Temperature &
humidity controls
Room pressure control
Noise and vibration
control
Hydronic heating
Comfort chilled water
Cooling tower water
Particle counting
Gas detection
Static control
RO and DI waters
Process chilled water
Chemical gases and storages
Solvent drain and collection
Solvent gas exhaust
Process vacuum
Scrubbed exhaust
House vacuum
Acid drain and waste
neutralization
Clean dry air
Instrumentation air & control
18
2/20/2011
Air
Filtration
Handhold
Particle
Counter
Air Particle
Sensor
Pharmaceutical cGMP
Particle Monitoring & Validation
Air Valve
Precision
Room
Pressure
Transducer
Soft
Wall
Floor Grate
& Perforated
Panel
Small Mini-Environment
Product
Passthrough
19
2/20/2011
Cleanrooms in Construction
Building Finished
Exterior
Finished Cleanrooms
Window on
Exterior Wall
Small Class 100,000
Cleanroom
Class 10,
Raised Floor
Window on
Interior Wall
Interior Hallway
Gowning Area,
Raised Floor
Service Hallway
Enclosing Cleanrooms
20
2/20/2011
Large DI Water
System
Cleanrooms In Operation
21
2/20/2011
Wall System
FS Class
FS Class
1
10
ISO Class
ISO Class
1, 2 & 3
4
Aluminum Component
FS Class
100
ISO Class
5
FS Class
FS Class
FS Class
1,000
10,000
100,000
ISO Class
ISO Class
ISO Class
6
7
8&9
Aluminum Component or Metal Stud
Wall Panel
Paint
Epoxy
Ceiling Grid
1 Steel Gasketed
Grid Support
Floor
Air Return
Floor
Vinyl or Epoxy
Coated
Drywall
Latex
Purpose
Responsible party
Visual-clean.
Installation engineer.
Visual-clean.
Method
Standard
Cleaning contractor.
Wiper-clean.
Wiper-clean.
Wiper-clean.
Wiper-clean.
Stage 9 Approve
installation.
Wiper-clean. Results
should conform to
22
Visual-clean.
Installation engineer.
Visual-clean.
2/20/2011
Method
Standard
Contractor.
If the construction
Cleaning contractor.
contractor has no relevant
experience in cleanroom cleaning,
itCleanroom
is advisable
to hire
a professional
HVAC
filter
engineer/
cleaning
contractor specializing in
technician.
cleanroom cleaning.
Vacuum
clean
completion.
Wipe down
withupon
moistened
wipers.
Visual-clean.
Wiper-clean.
Wiper-clean.
Removing
contaminants
caused
Removing local
suspended
dust from
the
by
installing
electricity,
gas, water, etc.
airflow
and creating
overpressure
installation, including the filters.
Installation
Cleanroom engineer.
HVAC filter engineer/
technician.
Visual-clean.
Wiper-clean.
Vacuum
clean; wipe-down
Air conditioning
air flushingpiping
and
fixtures with moistened wipers
operation.
upon completion. The use of
vacuum cleaning and/or other
cleaning
materials
is necessary.
Wipe down
with moistened
wipers.
Vacuum clean; wipe-down piping
and fixtures with moistened wipers.
Application of protective floor
sealants
is generally
particle
Monitor airborne
and asurface
generating
If this is
particles, airactivity.
velocities,
necessary,
should
be applied at
temperatureit and
humidity.
this time.
Listed in F.1 to F.8.
Vacuum clean; wipe down with
moistened wipers.
Visual-clean.
Stage
Stage 15
Clean
Clean during
before
demolition
preliminary
mounting allorair
filters
construction
such as
into the system.
framing
wall the
Stage 6 for
Mount
installation.
(HEPA/ULPA) filters into
the air systems
Stage
Stage 27
Clean
Adjust during
the air
utility
installation.
conditioning
equipment.
Preventing
unnecessary
dust dust, or
Removing deposited
or settled
concentration
in places
that
willfloors.
be
both, from ceilings,
walls,
and
difficult to reach during later
construction.
Removing possible contamination
Wiper-clean.
Wiper-clean. Results
should conform to
agreed design criteria.
A tailor-made cleaning
Wiper-clean.
programme for the
cleanroom, accounting
for the specific
demands of the
production process
Stage 5 Clean before Removing deposited or settled dust, or Cleaning contractor.
Wipe down with moistened wipers. Wiper-clean.
and the customer.
mounting all air filters
both, from ceilings, walls, and floors.
Routine testing of
into the system.
critical operation
parameters.
Stage 6 Mount the
Removing possible contamination
Cleanroom HVAC filter engineer/
Clean all surface edges on all
Wiper-clean.
(HEPA/ULPA)
filters
into
caused
by
the
mounting
operation.
technician.
sides.
NOTE 1 During Stages 4 to 10, all high-efficiency and ultra-high-purity components, such as filters, ducts, etc., should arrive on site protected by plastic or foil covers on
the
systems
bothairends.
Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing.
Stage 7 Adjust the air Removing suspended dust from the
Cleanroom HVAC filter engineer/
Air conditioning air flushing
Wiper-clean.
conditioning equipment. airflow and creating overpressure
technician.
operation.
installation, including the filters.
Stage 8 Upgrade the
room into prescribed
classification.
Wiper-clean.
Stage 9 Approve
installation.
Wiper-clean. Results
should conform to
agreed design criteria.
Cleanroom manager/cleaning
contractor.
A tailor-made cleaning
programme for the
cleanroom, accounting
for the specific
demands of the
production process
and the customer.
Routine testing of
critical operation
Required Testing (ISO 14644-2)
parameters.
NOTE 1 During Stages 4 to 10, all high-efficiency and ultra-high-purity components, such as filters, ducts, etc., should arrive on site protected by plastic or foil covers on
both ends. Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing.
Cleanroom Testing
Maximum Time
Interval
6 Months
> ISO 5
12 Months
All Classes
12 Months
Airflow
All Classes
12 Months
Test Parameter
Particle Count Test
Class
Test Procedure
ISO 14644-1 Annex A
Class
All Classes
All Classes
Maximum Time
Interval
24 Months
24 Months
Recovery
All Classes
24 Months
Airflow Visualization
All Classes
24 Months
Test Procedure
ISO 14644-3 Annex B6
ISO 14644-3 Annex B4
23
2/20/2011
CFD Applications
Narrower
Cleanroom with
35% FA Floor
Panels
Cleanroom
with 35% FA
Floor Panels
Cleanroom
with 20% FA
Floor Panels
Floor
Ceiling
FAB
CHASE
SUBFAB
Slab
Cleanroom
with 10% FA
Floor Panels
24
2/20/2011
1,000,000.0
Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space
Condition:
100,000.0
OA/SA=5%
CO=1x106
EU=95%
EH=99.97%
=1.0
10,000.0
1,000.0
Unit:
Particals/FT3/Min.
100.0
G=1
10.0
G=10
G=100
G=1000
1.0
G=10000
0.1
0
100
200
300
400
500
600
ACH Rate
Staged Ventilation
VFD Ventilation
The goal is to stage the ventilation rate to maintain the same room cleanliness
level through particle sensing during all modes (occupied and unoccupied)
25