SURFACE FINISH
METROLOGY
TUTORIAL
T. V. Vorburger
Supervisory Physicist
Center for Manufactoring
Engineering
National Institute of
Standards and Technology
J. Raja
Assistant Professor
Mechanical Engineering &
Engineering Mechanics
Department
Michigan Technological
University
U.S. DEPARTMENT OF COMMERCE
National Institute of Standards
‘and Technology
Galthrsburg, MD 20899
U.S. DEPARTMENT OF COMMERCE
Robert A. Mosbacher, Secretary
‘National institute of Standarde
‘and Technology
John W. Lyons, DirectorNOTICE
These notes contain figures reprinted with permission from other sources.
‘The figures obtained from other sources may not be duplicated unless
permission is obtained from the authors and publishers of the original
documents.
TNITSCLATMER
Certain conmercial equipment, instruments, or materials are identified in
this paper in order to specify adequately certain experimental procedures
Such identification does not imply recommendation or endorsement by the
Nacional Insuicuce of standards and Tectmology or Michigan Technological
University nor does it imply that the materials or equipment are
necessarily the best available for the purpose.
ACKNOWLEDGMENTS
unese notes were aevelopea ror a tutorial presentea at tne Uctober 1988
conference of the American Society for Precision Engineering held in
Atlanta, Georgia.
We are grateful to a munber of people who have contributed materials used
in these notes and lectures. They include A. Tabenkin, D.E. Gilsinn,
C.H.W. Giauque, F.E. Scire, E.C. Teague, J. Garbini, J.C. Wyant, R.A.
Snythe, F. Mason, T.C, Bristow, J.M. Bennett, M.J. Downs, E.L. Church, R
Brodmann, R.A. Dragoset, U. Koehler, D.K. Biegelsen, J.A. Detrio, J
Zimmerman, D. Risko, B.J. Griffiths, R.D. Young, J. Bielle, 3.B. Gloss,
and P. Ackroyd, We are also grateful to F.F. Rudder, Jr., and £.?.
Whitenton for suggestions to clarify a number of explanations in the text
V.S. Gagne typed and edited the manuscriptTABLE OF CONTENTS
1, INTRODUCTION
2. GENERAL IDEAS ABOUT SURFACES .
References.
3. THE STYLUS TECHNIQUE .
‘General
Transducers... =. .
Reulces et et te
Key Properties. . . .
Seylus Tips .
Traverse Mechanisms and Reference Lines . |
Pitfalls. ee
Kg and Ry B85 6040
Other Properties.
Drawing Terminology
calibration
Sources of Uncertainty.
3-D Profiling
References. .
4, PARAMETERS, FUNCTIONS, AND FILTERING
Introduction. :
constituents of Surface Texture |
Measurement of Surface Profile
Separation of Waviness and Roughness (Filtering)
Surface Tevture Paranetars
Statistical Functions .
Other Descriptors .
References... . 1.
5. SURVEY OF PROFILING TECHNIQUES . . . .
Fringe-Field Capacitance :
optical sectioning,
Interferometry
Recent Interferoneters.
Focus Detection
STM and AFM
References.
6, AREA TECHNIQUES.
ee
Ultrasonies .
areal Capacitance |
References.
7. FUNCTION. 22.2... ee ee
Optics. . . :
Hydrodynamic Drag .
Aerodynamic Drag.
Metalworking.
A Surface Texture Information System.
References. te
APPENDIX A.
16
16
19
19
26
31
35
35
37
al
45
47
51
31
53
65.
3
78
80
83
83,
03
a5
87
9a
98
106
110
110
122
326
128
132
132
134,
134
437
146
150
153