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IR Tape Test Results 10/25/10: G7 Residue Problem Testing of New Tape Samples
IR Tape Test Results 10/25/10: G7 Residue Problem Testing of New Tape Samples
10/25/10
G7 residue problem
Testing of new tape samples
Tapes Tested
• #1 BUH1025BZ <--performed the WORST, very bad
• #2 USP-1520FX<--performed the BEST, Ok result, however result was only a little
improved over control tape. Result was also same as our competitor's best tape.
Result was not good enough to continue higher volume repeatability testing
• .#3 BUH1030BZ <--performance = or same as Control, no improvement of problem
• #4 BUH1020BZ<-- performance = or same as Control, no improvement of problem.
Control Tape post detape
#1 #2
#3 #4
BUH1025BZ
Wafer # 18
#1 #2 #3 #4
Wafer # 45
#1 #2 #3 #4
#5 #6 #7
USP1520FX
Wafer # 1
#1 #2 #3 #4
Wafer # 15
#1 #2 #3 #4
BUH1030BZ
Wafer # 2
#1 #2 #3
Wafer # 3
#1 #2 #3 #4
BUH1020B1
Wafer # 5
#1 #2 #3 #4
#5