Silicon Preparation in

Semiconductor Manufacturing

Sean Liu
PHY 375S
Why is silicon important?

 Silicon makes up 25.7% of the earth's crust

by weight, second only to Oxygen (SiO2).

 High grade (purity) silicon used extensively in

semiconductors.

 Hundreds of times cheaper than Germanium

Silicon vs. Germanium in $/LB

*up to date prices requires membership with LBMA

Step 1: Mine Silicon Dioxide

* Refining process
requires high grade
pure sand.
Step 2: Separate Silicon

Electric Arc Furnace: 1500°C - 2000°C

Silicate Phase Diagram

High temperature polymorph

Metastable below 1470°C

SiO2 Phase Diagram
Metallurgical Silicon

• Metallurgical Silicon –
97% pure Si

• Impurities include Fe, Al, B, Ti,

C

• Requires further refinement

for use in semiconductors.
Step 3: Refining – Siemens Process

Reaction at ~ 300:

Si + 3 HCl → HSiCl3 + H2

Trichlorosilane – Boiling point at 31.8°C

Distilled and recovered using CVD

Module (Chemical Vapor Deposition)

Reverse 1st Reaction:

HSiCl3 + H2 → Si + 3 HCl

Semiconductor Grade Silicon

Semiconductor Grade Silicon

 Polycrystalline

– Can be used for solar cells

and certain semiconductor
applications.

– Need to be refined further

for most chip
manufacturing.
Why do we need mono-crystalline
silicon?

 Carriers recombine (eliminate) at crystal defects and causes a loss in

current output.
 Decreases the life of the semiconductor.

Grain boundaries
Surface Recombination
 Recombination – electrons and holes eliminating
each other.

 Surfaces and interfaces contain a large number of

“recombination centers.”

 Rate of recombination linearly dependent on the

number of “traps” Nst, located primarily at surfaces
and interfaces.
Step 4: Czochralski Method
Crystallization: Battle of Energies

•Bulk energy is energetically more

favorable than surface energy when
G solid < G liquid.

•Initial formation of surfaces is

energetically unfavorable.

•Introduction of seed crystal of

radius above R* creates spontaneous
crystallization.
Finished Products
How important are semiconductors?

 World Wide $300 Billion Industry iPad

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