This paper reports the first design and experimental results of a z-axis accelerometer that utilizes sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. Measured sensitivity is 0. MV / g with less than -40 dB cross-axis sensitivity, noise floor 6 mglrtHz, and linear range from -27g to 27g
This paper reports the first design and experimental results of a z-axis accelerometer that utilizes sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. Measured sensitivity is 0. MV / g with less than -40 dB cross-axis sensitivity, noise floor 6 mglrtHz, and linear range from -27g to 27g
This paper reports the first design and experimental results of a z-axis accelerometer that utilizes sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. Measured sensitivity is 0. MV / g with less than -40 dB cross-axis sensitivity, noise floor 6 mglrtHz, and linear range from -27g to 27g