Micro Machining

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Micro Machining Technologies

1. Tool based micro machining processes a. Micro turning ( Dia. 0.05 mm ) b. Micro milling (Slot width (0.05 mm) c. Micro drilling ( Dia. 0.05 mm) d. Micro Electrical Discharge Machining ( Feature size width of 0.03 mm) e. Micro Wire Electrical Discharge Machining ( Wire dia. 0.035 mm) f. Micro Wire Electrical Discharge Grinding ( Dia. 0.02 mm) 2. Beam based micro machining processes a. Laser Micro Machining b. Focused Ion Beam Machining c. Hard X-ray Beam Machining (Lithography)

Basic requirements of micro machining processes:1. Material removal per unit energy input should be as small as possible (theoretical limit of one atom) 2. Component should be kept at one position and various processing tools travel towards it and perform machining operation.

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