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Mechanical and material characterization of bilayer
microcantilevers for MEMS-based IR detector applications
Acoustic MEMS array embedded in a scalable real-time data
acquisition and signal processing platform
Architecture, design, and analysis of field programmable robot
arrays (FPRA) using micro-electro-mechanical system (MEMS)
scratch drive actuator
A temperature compensation procedure for performance
improvement of mass-produced MEMS gyroscopes based on
direct parameter measurement
Closed loop control of a MEMS floating element to detect shear
stress
CMOS-MEMS probes
Computational electromagnetics for microstrip and MEMS
structures
Design and fabrication of structured roughnesses in
microchannels with integrated MEMS pressure sensors
Design, fabrication and testing of broadband MEMS antennas
Design, fabrication and characterization of a RF MEMS based
reconfigurable antenna
Design 'optimization' of precision MEMS packages through the
'minimization' of package induced stresses
Development of a three-axis MEMS accelerometer
Development of a MEMS-based in-place inclinometeraccelerometer array for monitoring and evaluation of
geotechnical systems
Development of MEMS piezoelectric energy harvesters
Development of a MEMS-based INS/GPS vessel navigation
system for marine applications
Dielectric charging of RF MEMS capacitive switch

microcantilevers bilayer MEMS

MEMS

Electrostatically Actuated 2D MEMS Micro-Mirror

Fabrication and integration of permanent magnet materials into
MEMS transducers
Fabrication processes for MEMS deformable mirrors in the next
generation telescope instruments

Actuated 2D MEMS Electrostatically

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( MEMS)

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MEMS
microchannels roughnesses
MEMS
MEMS

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reconfigurable MEMS
' ' MEMS ' '

MEMS

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- inclinometer MEMS

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MEMS
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MEMS
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High-performance lateral-actuating magnetic MEMS switch
High performance piezoelectric MEMS microphones
III-V materials-based optical-MEMS devices for adaptive optics
and vibration sensing
Instrumentation interfacing for MEMS mechanical test systems
Ion-Sensitive Field Effect Transistor (ISFET) for MEMS
Multisensory Chips at RIT
MEMS-based thermal and mass-transport control for microfluidic
biochemical reagent mixing and two-dimensional gas
chromatography
MEMS enabled tunable photonic crystals
MEMS enhanced metamaterials: Towards filling the terahertz
gap
MEMS fabrication using aluminum films

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MEMS
MEMS

MEMS

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RIT Multisensory MEMS ( ISFET)

MEMS

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terahertz : metamaterials MEMS

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MEMS

MEMS piezoresistive pressure sensor on flexible substrate using

nichrome and CNT/polyimide nanocomposites as piezoresistors

MEMS piezoresistive
piezoresistors polyimide / nichrome CNT

MEMS resonators for communications transceivers

Dynamics of hybrid MEMS sensors and switches for mass and
acceleration detection
Elastic tunable grating powered by MEMS actuators for
fluorescence spectroscopy applications
High linearity 1.5-2.5 GHz RF-MEMS and varactor diodes based
tunable filters for wireless applications
Integrated front-end analog circuits for MEMS sensors in
ultrasound imaging and optical grating based microphone
Integrated circuit implementation of constant-charge biasing for
capacitive RF MEMS switch
Investigation of factors affecting bias stability and scale factor
drifts in Coriolis vibratory MEMS gyroscopes
In vivo cellular imaging with microscopes enabled by MEMS
scanners
Laser microfabrication and testing of silicon carbide diaphragms
for MEMS applications
Long term mechanical performance of MEMS in liquid
environments

resonators MEMS

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MEMS
MEMS

varactor MEMS - 2.5 -1.5

MEMS

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MEMS
Coriolis drifts
MEMS

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MEMS microfabrication
MEMS
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Low-voltage, large-range MEMS optical scanners and their
applications
MEMS bandpass filters based on cyclic coupling architectures
MEMS-based mechanical characterization of micrometer-sized
biomaterials
MEMS mirrors for endoscopic OCT
MEMS sensors and wireless transmission of sensor signals for
phonocardiology applications
MEMS varactors for RF applications: Analysis and design
Microplasma MEMS device: Its design, fabrication and
application in hydrogen generation for fuel cells
Modeling and characterization of RF MEMS resonators
Modeling and fabrication of MEMS actuators, utilizing shape
memory alloy & bimetallic materials
Nanocrystalline diamond for RF MEMS applications
Neural recordings in the brain using novel movable MEMS
microelectrode arrays
Nonlinear and stochastic dynamics of MEMS-based angular rate
sensing and switching systems
Novel MEMS grippers for pick-place of micro and nano objects
Photonic crystal mirrors: Fundamental components for
integrated photonic crystal optical MEMS
Programmable aperture antenna using monolithically integrated
MEMS switches
Reliability of advanced dielectrics in gate oxide and device level
packaging in MEMS
Self-induced power generation for wireless MEMS devices

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MEMS
phonocardiology
: varactors MEMS
: MEMS Microplasma

resonators MEMS
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MEMS
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MEMS
MEMS

grippers MEMS

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MEMS monolithically
dielectrics
MEMS
MEMS

Stochastic modeling of micro-electromechanical systems (MEMS)

(MEMS )

Structural health monitoring for delaminations in glass/epoxy

composite plates with MEMS PMN-PT sensors
Thin film nickel titanium in MEMS valve and membrane wrinkling
control
Vibration isolation and shock protection for MEMS

/ delaminations
- MEMS PMN

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MEMS
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MEMS sample preparation stages for a point-of-care testing
(POCT) device
Micro-electro-mechanical systems (MEMS) and agile lensingbased modules for communications, sensing and signal
processing
Modeling of a RF MEMS switch using CoventorWare
Nanostructured coatings for MEMS chemical sensors
Overcoming urban GPS navigation challenges through the use of
MEMS inertial sensors and proper verification of navigation
system performance
Polymer-ceramic MEMS bimorphs as thermal infrared sensors
Preliminary development of MEMS-based corrosion sensor
SOI-CMOS-MEMS electrothermal micromirror arrays
Stochastic multiphysics modeling of RF MEMS switches
Synthesis and characterization of polyimide cobalt ferrite
nanocomposites for potential applications in MEMS

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( MEMS)

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CoventorWare MEMS
MEMS

MEMS

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MEMS - bimorphs
MEMS

micromirror MEMS - -
MEMS multiphysics
polyimide
MEMS

Temperature dependence of viscoelasticity in thin gold films and

its impact on the restoring force in RF MEMS capacitive switches

viscoelasticity
MEMS

The design and implementation of parametrically amplified

Lorentz force MEMS magnetometers
Vibration analysis of MEMS-based MHz ultrasonic nozzles for
atomization applications
Viscoelastic modeling and simulation of electrostatically actuated
RF MEMS switches
A CMOS-MEMS probe microsystem for nuclear magnetic
resonance force detection
A MEMS sensor for AC electric current
A multi-axis capacitive MEMS sensor system for acoustic
emission sensing
Continuous measurement-while-drilling surveying system
utilizing MEMS inertial sensors
Controlling climate change by Asia-Pacific powers in APP and
MEM

magnetometers parametrically
MEMS
MEMS

Viscoelastic electrostatically actuated
MEMS
MEMS microsystem -

MEMS

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MEMS
-
MEMS

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Design and analysis of a MEMS vibration sensor for automotive
mechanical systems
Design and development of RF CMOS MEMS switches for
configurable RF circuits
Design, fabrication and characterization of MEMS deformable
mirrors for ocular adaptive optics
Design, fabrication, control, and programming of MEMS microrobots
Design of miniaturized coil system using MEMS technology for
eye movement measurement
Development and applications of high fill-factor, small footprint
MEMS micromirrors and micromirror arrays
Development and characterization of a MEMS based carbon
nanotube field emission electron source technology for high
resolution applications
Development of a test methodology to determine dynamic
fracture strength in microfabricated MEMS structures
Diffusion of physisorbed layers and their connection to MEMS
effectiveness
Digital feedback control of MEMS devices: Design challenges and
power efficient design using multi-timescales
Dual-axis MEMS force sensors for gecko adhesion studies
A human airbag system based on MEMS motion sensing
technology
A lateral-drive method to address pull-in failure in MEMS
A MEMS Knudsen pump for high gas flow applications
A new photoresist for MEMS and BioMEMS applications
An optical MEMS sensor for on-chip catechol detection
A novel MEMS-based micro heat engine and operating cycle
A reconfigurable tactile display based on polymer MEMS
technology
Automated pulsed signal reflectometer for time-domain RFMEMS characterization in the UHF band
Carbon MEMS from the nanoscale to the macroscale: Novel
fabrication techniques and applications in electrochemistry

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MEMS
MEMS

micromirrors
micromirror MEMS

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(

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microfabricated
MEMS

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MEMS physisorbed
: MEMS

MEMS

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MEMS
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MEMS
Knudsen MEMS

BioMEMS MEMS photoresist

catechol MEMS

MEMS

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MEMS reconfigurable
MEMS - reflectometer

: macroscale MEMS

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Case-based reasoning for MEMS design synthesis
CMOS-MEMS resonators for mixer-filter applications
Compact in-line DC contact RF-MEMS switch and switched-line
phase shifter

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MEMS
MEMS resonators -

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Compact multi-physics models for large-displacement multilayer

cantilevers in RF MEMS circuits, antennas and sensors

MEMS cantilevers

Computational analysis of nanofluid flow in microchannels with

applications to micro-heat sinks and bio-MEMS
Contact material optimization and contact physics in metalcontact microelectromechanical systems (MEMS) switches
Design and fabrication of piezoelectric micro generator using
laser micromachining and MEMS technique
Design, fabrication and parallel control of distributed systems of
stress-engineered MEMS microrobots for microassembly
Design, modeling, fabrication, and characterization of a MEMS
device for measuring the mechanical compliance of a biological
cell
Design of high accuracy power scalable MEMS sensor interface
Design of a customized test system to examine the effect of
impact force on MEMS switch performance
Design of MEMS-based tunable antennas, organic transistors and
MEMS-based organic control circuits
Development and applications of a multi-user polymer MEMS
technology
Development and characterization of self-assembly using
residual stress in a multi-user polmyer MEMS process
Development of thin film encapsulation process for piezoresistive
MEMS gyroscope with wide gaps
Development of Liquid Crystalline Polymer (LCP) for RF MEMS
packaging
Effects of alloying on mechanical behavior of noble metal thin
films for micro-electronic and MEMS/NEMS applications
Efficient evaluation of damping in resonant MEMS

microchannels nanofluid
MEMS

( microelectromechanical (MEMS
micromachining
MEMS
microrobots
microassembly MEMS

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MEMS

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MEMS

MEMS
MEMS MEMS

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MEMS
polmyer
MEMS
piezoresistive MEMS

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MEMS ( LCP)

MEMS / NEMS
MEMS

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Etude et realisation d'une architecture de communication et de
tests pour reseaux multi-capteurs MEMS dans les applications
avioniques
Failure and fracture of thin film materials for MEMS
Ferroelectric MEMS for acoustic emission detection and
vibrational energy scavenging
High-performance RF-MEMS tunable filters
High power radio frequency-microelectromechanical systems
(RF-MEMS) utilizing high permittivity ferroelectric thin films
High voltage bias waveform generator for an RF MEMS
microswitch
Impact of environmental conditions on the contact physics of
gold contact RF microelectromechanical systems (MEMS)
switches
Implementation of crack arrest properties for reliability
enhancement on MEMS cantilever
Integrated MEMS technologies for adaptive optics
Integrated MEMS-based phase shifters
Integrated CMOS electronic drivers for large scale metal MEMS
mirror arrays using linearization techniques
Investigation and evaluation of a bi-polar membrane based
seawater concentration cell and its suitability as a low power
energy source for energy harvesting/MEMS devices
Investigations of single and two phase heat transfer under
natural and forced flow conditions using an instrumented glass
MEMS device
Liquid RF MEMS high-power switches
Low temperature RF MEMS inductors using porous anodic
alumina
MEMS liquid fuel delivery for small-scale combustion power
systems
MEMS (Micro-Electro-Mechanical-Systems) based microfluidic
platforms for magnetic cell separation
MEMS micro-ribbons for integrated ground plane microstrip
delay line phase shifter

d' une
avioniques MEMS dans capteurs reseaux

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MEMS Ferroelectric
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MEMS -
(MEMS - )microelectromechanical -
ferroelectric
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MEMS

( microelectromechanical (MEMS

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MEMS
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MEMS
MEMS
MEMS

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MEMS /

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MEMS

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anodic MEMS
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MEMS
( ) MEMS

MEMS

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MEMS needle-type multi-analyte microelectrode array sensors
for in situ biological applications
MEMS pressure sensor array for aeroacoustic analysis of the
turbulent boundary layer
MEMS testbed for accelerated testing of nanostructures
MEMS transducer for hearing aids
Micro/nanoscale friction and application of surface wettability in
MEMS
Nano-dispersion strengthened gold films for MEMS electrical
contacts
Nano scale based model development for MEMS to NEMS
migration
Nanoscale deformation and fracture mechanics of polycrystalline
silicon and diamond-like carbon for MEMS by the AFM/DIC
method
Nonlinearities and phase noise in electrostatically-transducedMEMS-resonator based oscillators
Numerical prediction and experimental validation of flip chip
solder joint geometry for MEMS applications
Packing design of MEMS pressure, temperature and other
sensors
Poly-crystalline silicon carbide passivated capacitive MEMS strain
gauge for harsh environments
Polyvinylidene fluoride-based MEMS tactile sensor for minimally
invasive surgery
Process of reliability and repeatability testing and
characterization of a MEMS mirror array
Pulsed laser ablation and micromachining of 4H and 6H silicon
carbide wafers for high-temperature MEMS sensors
Reseaux d'adaptation d'impedance ajustables a base de
composantes MEMS RF pour les applications basses frequences
RF power amplifiers and MEMS varactors
Stress analysis and mechanical characterization of thin films for
microelectronics and MEMS applications
Sub-nanogram mass loading CMOS-MEMS cantilever resonator
oscillators for gas detection

analyte MEMS

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aeroacoustic MEMS
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MEMS testbed
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MEMS
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wettability MEMS /
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MEMS
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NEMS MEMS
MEMS
DIC / AFM

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electrostatically - Nonlinearities
- transduced - MEMS

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MEMS
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MEMS
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passivated MEMS
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MEMS Polyvinylidene
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MEMS
wafers H 4H6 micromachining
MEMS
composantes MEMS d' ajustables ' Reseaux d
basses frequences
varactors MEMS

MEMS
MEMS - nanogram

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The application of model reduction techniques to MEMS
structures
The design and implementation of magnetic microactuators for
MEMS-enabled ventricular catheters for hydrocephalus
The design and verification of a MEMS combustor chamber
The design and application of wireless MEMS inertial
measurement units for the measurement and analysis of golf
swings
The development of an in vivo spinal fusion monitor using
microelectromechanical (MEMS) technology to create
implantable microsensors
The linear MEMS variable reluctance stepper actuator for fuel
metering valves
Tightly coupled MEMS INS/GPS integration with INS aided
receiver tracking loops
Vacuum and hermetic packaging of MEMS using solder
Wafer-level encapsulated high-performance MEMS tunable
passives and bandpass filters
Wireless MEMS accelerometer for real-time small laboratory
animal activity monitoring
Adaptive sliding mode control with application to a MEMS
vibratory gyroscope
A MEMS based Coulter counter for cell sizing
A MEMS non-planar ultrasonic microarray
A MEMS vapor compression refrigeration system: ARCTIC (A
Rotary Compressor Thermally Insulated muCooler)
A multi axial bioimplantable MEMS array bone stress sensor
An integrated position-sensing system for a MEMS-based
cochlear prosthesis
An investigation into the effect of the PCB motion on the
dynamic response of MEMS devices under mechanical shock
loads
A study of parametric excitation applied to a MEMS tuning fork
gyroscope
Automated microassembly of MEMS using vision-based feedback
control

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MEMS
- MEMS microactuators

MEMS

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microsensors ( microelectromechanical (MEMS

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/ MEMS
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bandpass passives MEMS

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MEMS
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sizing MEMS
microarray MEMS
) : MEMS
(muCooler
MEMS bioimplantable

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MEMS
MEMS

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MEMS
MEMS microassembly
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Bio-mechanically driven MEMS power generator for implantable
medical devices
Bulk-titanium for MEMS switches
Characterizing fluoropolymeric materials for microelectronics
and MEMS packaging
Characterization of MEMS devices on the basis of their frequency
response function (FRF)
CMOS systems and circuits for sub-degree per hour MEMS
gyroscopes
CMOS VCO and LNA implemented by air-suspended on-chip RF
MEMS inductors
Conception et fabrication d'un filtre accordable avec la
technologie des MEMS pour les applications micro-ondes
Design and analysis of a MEMS Fabry-Perot pressure sensor
Design, fabrication, and characterization of a MEMS dualbackplate capacitive microphone
Design, fabrication, and characterization of a MEMS thermal
switch and integration with a dynamic micro heat engine
Design, fabrication, test, and evaluation of RF MEMS series
switches using lead zirconate titanate (PZT) thin film actuators
Design, optimization and fabrication of amorphous silicon
tunable RF MEMS inductors and transformers
Development of a MEMS-fabricated SU-8 device for twodimensional separations, and, Molecular diffusion measurements
in saturated solutions
Development of closed-loop interface circuits for capacitive
transducers with application to a MEMS capacitive microphone
Developpement de circuits RF intelligents a base de systemes
micro-electromecaniques (MEMS)
Development of polycrystalline and amorphous silicon carbide
thin films for membrane-based MEMS devices
Development of monolithic silicon-germanium and packages RF
MEMS high-linearity five-bit high-low pass phase shifters for SOC
X-band T/R modules
Development of MEMS-based piezoelectric cantilever arrays for
vibrational energy harvesting

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MEMS fluoropolymeric
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MEMS LNA VCO

technologie d' avec filtre accordable
ondes MEMS
- Fabry MEMS

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backplate MEMS
MEMS

MEMS
( PZT) titanate zirconate
MEMS )

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8 - MEMS

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MEMS
systemes intelligents Developpement
(electromecaniques (MEMS

MEMS

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MEMS
/ SOC

MEMS

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Development of miniature, multilayer, integrated, reconfigurable
RF MEMS communication module on liquid crystal polymer (LCP)
substrate
Development of MEMS device for biological analysis
Devices, structures, and processes for optical MEMS
Diffractive optical MEMS technology for tunable filters and
modulators
Effect of a protective enclosure on the acoustical response of a
MEMS directional microphone
Experimental investigation of MEMS thermal actuator
displacement under shock and vibration
Fatigue and fracture of nickel MEMS thin films
High resolution wavelet de-noising for MEMS-based navigation
systems
High resolution MEMS strain sensors for vibration detection on
hard disk drive instrumented suspensions
Indium phosphide MEMS cantilever waveguides for chemical
sensing with integrated optical readout
Integration of hydrogels and plastics into microfabrication
processes towards a MEMS RF-Interrogated Biosensor
Integrated MEMS microsensors
Integrated piezoresistive sensing for feedback control of
compliant MEMS
Interfacial adhesion for microelectronics and MEMS devices
Low temperature hermetically sealed three-dimensional MEMS
device for wireless optical communication
Material and processing development contributions toward the
development of a MEMS based micro loop heat pipe
Mechanical integrity and behavior of thin films and their
applications in MEMS
Mechanically tunable RF/microwave filters: From a MEMS
perspective
Mechanical characterization of MEMS devices
Mechanical behaviors of PECVD dielectric films for MEMS
applications

MEMS reconfigurable
( LCP)

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MEMS
MEMS

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MEMS Diffractive
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MEMS
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MEMS
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MEMS noising -
MEMS

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MEMS waveguides
- microfabrication MEMS
Biosensor
microsensors MEMS

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MEMS piezoresistive
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MEMS Interfacial
MEMS hermetically

MEMS

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MEMS PECVD
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MEMS-based power disconnect for 42V automotive power
systems
MEMS based true time delay lines for phased antenna array
systems
MEMS microswitch design for high voltage applications and
electrical discharge processes for micrometer-scale gaps in an
atmospheric pressure air environment
MEMS-reconfigurable antennas for low-cost and low-power
adaptive communications in fading MIMO environments
MEMS thermal devices for biomolecular sensing and
characterization
Microstructural and geometric effects on the piezoelectric
performance of PZT MEMS
Miniature MEMS-based adaptive antennas on flexible substrates
Miniaturized electroporation system for gene transfer using bioMEMS technology
Modeling and control of MEMS micromirror arrays with
nonlinearities and parametric uncertainties
Modeling, analysis and testing of an electrostatically actuated
waveguide based optical MEMS device for variable optical
attenuation
Modeling and testing of static and dynamic behavior of MEMS
deformable microstructures with multiple electrodes
Multiaxis force and torque sensing for insect flight research:
Design, fabrication, calibration and testing of MEMS strain gauge
sensor
Multidisciplinary design and optimization in electronics and
MEMS packaging
Nonlinear dynamics of a dual-backplate capacitive MEMS
microphone
Novel processes for modular integration of silicon-germanium
MEMS with CMOS electronics
Numerical simulation and experiments of fatigue crack growth in
multi-layer structures of MEMS and microelectronic devices
Optical MEMS switches: Theory, design, and fabrication of a new
architecture

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MEMS
MEMS

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reconfigurable - MEMS
MIMO

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biomolecular MEMS
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PZT MEMS Microstructural

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MEMS
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MEMS
nonlinearities micromirror MEMS

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electrostatically actuated
MEMS

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MEMS
microstructures

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: Multiaxis
MEMS

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MEMS backplate
MEMS

MEMS

: MEMS

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Partial differential equations of electrostatic MEMS
Performance enhancement of MEMS based INS/GPS integration
for low cost navigation applications
Polymer/ceramic wireless MEMS pressure sensors for harsh
environments: High temperature and biomedical applications
Polymer-based RF MEMS devices
Radio frequency (RF) microelectromechanical systems (MEMS)
switches
RF MEMS technology for millimeter-wave radar sensors
Simulation of a flat MEMS loop heat pipe
Simulation and optimization of MEMS actuators and tunable
capacitors
Stability and performance of wafer-scale thin-film encapsulated
MEMS resonators
System level study of resonant MEMS structure
Thermal analysis and design of a MEMS-based safety and arming
system
Tunable optical microresonators with micro-electro-mechanicalsystem (MEMS) integration
Vapor phase lubrication of microelectromechanical systems
(MEMS) for space applications
VLSI testing and characterization system for micro electromechanical (MEM) sensors
Aluminum nitride thin films for MEMS resonators: Growth and
characterization
A mechanistic approach to tuning of MEMS resonators
A MEMS sonoluminescent ultrasonic sensor
Analysis by meshless local Petrov-Galerkin method of material
discontinuities, pull-in instability in MEMS, vibrations of cracked
beams, and finite deformations of rubberlike materials
Analysis and design of MEMS scan mirrors using periodically
stiffened silicon nitride
An automated substructuring framework with application to
multiphysics and MEMS design problems

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MEMS

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A novel method for testing freestanding nanofilms using a
custom MEMS load cell
Applications of micromachining and MEMS technology in
microfluidics
A radiation reconfigurable magnetic line source antenna:
Modeling, integration with RF MEMS, and applications
A surface micromachining fabrication process for aluminum
MEMS micromirrors
Characterization and modeling of dielectric-charging effects in RF
MEMS capacitive switches
Characterization of diffractive optical lenses for use in MEMS
integrated optical monitoring
CVD polycrystalline diamond (poly-C) thin film technology for
MEMS packaging
Design and modeling of devices for measuring adhesion in micro
electro mechanical systems (MEMS)
Design, fabrication and testing of conformal, localized waferlevel packaging for RF MEMS devices
Design, fabrication and FEM simulation of an optical-MEMS
sensor
Design, fabrication and characterization of RF MEMS inductors
and switches
Design, fabrication and applications of MEMS tunable blazed
gratings
Design of MEMS sensor system to measure spinal fusion
Design of RF circuits with embedded multi-physics models of
MEMS devices
Development of DRIE CMOS-MEMS process and integrated
accelerometers
Development of an acoustic-wave MEMS biosensing device
Development of high performance 6--18 GHz tunable/switchable
RF MEMS filters and their system implications
Directional speech acquisition using a MEMS cubic acoustical
sensor microarray cluster

MEMS freestanding nanofilms

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Dynamic analysis and validation of cantilever MEMS subjected to
electro-thermo-mechanical influences
Electrodeposited metal matrix nanocomposites as thin films and
high aspect ratio microstructures for MEMS
Electrostatic testing of simple MEMS structures
Electrostatic MEMS actuators using gray-scale technology
Electrocapillary and electrowetting actuations of liquid-metal
droplets and their applications in MEMS
Energy dissipation in MEMS-based flexural-mode lateral
resonators made from single crystalline and polycrystalline 3Csilicon carbide films
Energy dissipations in MEMS resonators: Fluid damping of
flexural resonators and thermoelastic damping
Failure mechanisms of MEMS thermal actuators
Femtosecond laser ablation with single and two-photon
excitation for MEMS
Form based control and rate approximation of a Z-axis MEMS
gyroscope
Heat and fluid flow in MEMS-based pin fin heat sinks
Heterogeneous integration of microelectromechanical system
(MEMS) and electro-optical (EO) polymers waveguide modulator
Integrated CMOS MEMS RF tunable filters
Intelligent MEMS INS/GPS integration for land vehicle navigation
Liquid gallium contact RF MEMS switch and VLSI MEMS switch
Low-noise and low-power interface circuits design for integrated
CMOS-MEMS inertial sensors
Low voltage, MEMS-based reflective and refractive optical
scanners for endoscopic biomedical imaging
Magnetic probe tips on MEMS cantilevers for perpendicular
magnetic recording
MEMS-based system for particle exposure assessment using thinfilm bulk acoustic wave resonators and IR/UV optical
discrimination
MEMS design synthesis based on hybrid evolutionary
computation

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Electrodeposited
MEMS microstructures
MEMS

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MEMS packaging: Fluxless soldering and reliability assessment
MEMS-reconfigurable microwave power amplifiers
Micromachined sensor for stress measurement and
micromechanical study of free-standing thin films for MEMS
applications
Microreactor array platform featuring MEMS/microfluidic
components for addressable multiplex synthesis and assays
Microscale phase change of fuels for MEMS power applications
Micro-usinage au laser excimere pour le prototypage de MEMS
Modeling and prediction of stiction in micro electro mechanical
systems (MEMS)
Modularly integrated MEMS technology
Molecular sensors for MEMS
Monolithic MEMS-based wavelength-selective switches and
cross connects
Multi-port RF MEMS switches and switch matrices
Nanometal particle reagents for sensitive, MEMS based fiberoptic, multi-analyte, immuno-biosensing
Nonlinear dynamic analysis of electrostatically actuated MEMS
structures
Nonlinear dynamics of electrostatically and magnetically
actuated MEMS
Nonlinear control of microelectromechanical systems (MEMS)
devices
Performance evaluation of low cost MEMS-based IMU integrated
with GPS for land vehicle navigation application
Piezoelectric aluminum nitride MEMS resonators for RF signal
processing
Piezoelectric MEMS disk resonator and filter based on epitaxial
aluminum gallium arsenide films
Plasmaless automated xenon difluoride MEMS etching system
development and application
RF MEMS and integrated manufacturing for miniaturized
millimeter-wave systems

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MEMS - reconfigurable

micromechanical Micromachined
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RF MEMS switches with novel materials and micromachining
techniques for SOC/SOP RF front ends
Robust track-following control design for dual-stage servo
systems with a MEMS microactuator and an instrumented
suspension
Schottky barrier contact RF MEMS switch
Shock-resistant low-power ferromagnetic MEMS magnetometers
Silicon carbide RF-MEM resonators
Simulated inertial position tracking using MEMS accelerometers
and gyroscopes for use in medical and surgical procedures
Structured and parameter-dependent eigensolvers for
simulation-based design of resonant MEMS
Synthesis of multiple-input, multiple-output compliant
mechanisms for function generation: Application to MEMS
functional design
Systeme electronique de commande d'actionneurs MEMS dedies
a une micropompe a usages biomedicaux
Temperature compensated CMOS and MEMS-CMOS oscillators
for clock generators and frequency references
Temperature regulated nonlinear microvalves for self-adaptive
MEMS cooling
Thermal, residual stress and contact reliability of RF MEMS:
Fundamental physics and improvements
Toward prediction of MEMS performance: A multiscale approach
to understanding friction
Two-axis MEMS gyroscope with electrostatic drive and
piezoelectric pickoff
Two dimensional polar micro-pumping of fluids using MEMS
electrode arrays
Accuracy enhancement of integrated MEMS-IMU/GPS systems
for land vehicular navigation applications
Adaptive control system for a vibrational MEMS gyroscope with
time-varying rotation rates
Advanced MEMS for medium and high power integrated
distribution systems

/ SOC micromachining MEMS

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A high load MEMS sensor for use in scoliosis correction surgery
Analysis and testing of MEMS structures subjected to random
environment
An efficient method for modelling multibody system dynamics
with many unilateral constraints (and its application to
microelectromechanical systems (MEMS))
A novel MEMS design for studying SWCNT ropes
Built-in self-test and self-repair for capacitive MEMS devices
Capacitive MEMS transducers for acoustic emission testing of
materials and structures
MEMS devices for DNA/protein microarray application
MEMS for heterogeneous integration of microsystems
MEMS microfluidic system
MEMS microbial fuel cells and photosynthetic electrochemical
cells
MEMS three-dimensional scan mirror for an endoscopic confocal
microscope
MEMS-tunable vertical-cavity SOAs
Microwave coplanar waveguide tunable filters using RF MEMS
Modeling and feedback control of MEMS devices
Modeling, design and fabrication of MEMS filters for RF
applications
Modeling and simulation of a MEMS-based mass measurement
sensor in viscous environments
Modular multi-scale assembly system for MEMS packaging
Multi-functional reconfigurable antenna using RF-MEMS
switches for communication systems
Novel lateral RF MEMS switch and its application to multi-band
microstrip antenna
Optical detection of multiple faults of a MEMS based linear comb
resonator
Optimized fabrication of ultra-deep reactive ion etched silicon
components for the MEMS rotary engine power system
PDMS-on-silicon microsystems: Integration of polymer
micro/nanostructures for new MEMS device functions

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MEMS

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Piezoelectric aluminum nitride vibrating RF MEMS for radio
front-end technology
Piezoelectrically transduced low-impedance MEMS resonators
Polycrystalline diamond RF MEMS resonator technology and
characterization
Porous thin films for MEMS on-wafer packaging
Proof of feasibility of a free-space optical cross-connect system
using digital MEMS
Resonant circuits for MEMS interfaces
RF MEMS devices and their applications in reconfigurable
RF/microwave circuits
RF-MEMS reconfigurable self-similar antennas: Design, analysis
and measurements. Synthesis using a neural network technique
RF MEMS switches and their applications in antenna systems
Storage and file systems for MEMS-based storage
Surface stress and capacitive MEMS sensor arrays for chemical
and biological sensing
Synthesis and characterization of conducting polymers for use in
protein chromatography on a MEMS fabricated micro open
parallel plate separators (muOPPS)
System identification and dynamic tuning of a tunneling
accelerometer and MEMS vibratory gyroscope
Tunable optical microresonators using micro-electro-mechanicalsystem (MEMS) technology
Characterization and mitigation of charge-induced failure in radio
frequency microelectromechanical (RF MEMS) capacitive
switches
Design and fabrication of two switched superconductivity
microstrip hairpin filters using series micro-electro-mechanical
systems (MEMS) switches
Design and fabrication of surface textured MEMS for infrared gas
sensors
Design and development of a MEMS-based capacitive bending
strain sensor and a biocompatible housing for a telemetric strain
monitoring system

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MEMS transduced resonators Piezoelectrically

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MEMS
MEMS
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Development of microfluidic packaging strategies, with emphasis
on the development of a MEMS based micro loop heat pipe
Development of MEMS-based microneedles for biomedical
applications
Diffraction-based optical filtering: Theory and implementation
with MEMS
Elastic modulus study of gold thin film for use as an actuated
membrane in a superconductive radio frequency (RF)
microelectromechanical (MEM) switch
Environmental contributions to fatigue failure of micron-scale
silicon films used in microelectromechanical system (MEMS)
devices
Experimental study of the residual stress-induced self-assembly
of MEMS structures during deposition
Fabrication of carbon nanotube based MEMS sensors
Fabrication and characterization of polypyrrole/gold bilayer
microactuators for bio-MEMS applications
Fatigue analysis of micro-electro-mechanical systems (MEMS)
resonators
Ferrofluid transport analysis for thermal, biomedical and MEMS
application
Finite element simulation of a MEMS-technology gyroscope
8--50 GHz distributed MEMS tunable matching network using
minimal contact RF-MEMS varactors
High-Q COMS-compatible poly-silicon germanium electrostatic
RF MEMS resonators
Indium phosphide based optical waveguide MEMS for
communications and sensing
Insulator charging in RF MEMS capacitive switches
Integrated electromagnetic/thermal/mechanical analysis and
optimization design of RF-MEMS switches
Ku- to W-band silicon germanium RFIC and RF MEMS subsystems
Lead zirconate titanate thin films for piezoelectric actuation and
sensing of MEMS resonators

MEMS

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MEMS varactors resonators COMS
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Low loss RF/mm-wave MEMS phase shifters
Low power reconfigurable microwave circuits using RF MEMS
switches for wireless systems
Low voltage low stress MEMS variable capacitors for RF
applications
MEMS based SEM testing stages for studying mechanics of
nanostructures
MEMS-based devices for RF applications: Switches and field
probes
MEMS-based silicon nitride thin film materials and devices at
cryogenic temperatures for space applications
MEMS-based wavelength-selective switches

Femtosecond pulsed laser ablation and patterning of 3C-silicon

carbide films on silicon substrates for MEMS fabrication

- C3 Femtosecond
MEMS

Mechanical behavior of LIGA nickel MEMS materials

MEMS angular rate and angular acceleration sensors with CMOS
switched capacitor signal conditioning

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MEMS

: MEMS

MEMS

- MEMS
MEMS
MEMS

MEMS

Inductive links with integrated receiving coils for MEMS and

implantable applications
In-situ DNA synthesis on chip with nozzleless MEMS ejector
Investigation of deposition and annealing temperatures on
stiction in MEMS
Low power CMOS circuit design and reliability analysis for
wireless MEMS sensors
Low temperature wafer scale MEMS packaging and intrapackage
humidity monitoring
Magnetic MEMS and its applications

MEMS

MEMS contact stress sensing

Error analysis and stochastic modeling of MEMS-based inertial
sensors for land vehicle navigation applications
Evolutionary synthesis of MEMS

High aspect ratio microstructures and their applications to MEMS

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MEMS /
MEMS reconfigurable

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MEMS based bead size selection method for the electronic taste
chip
MEMS-based nanomechanical machining system-on-a-chip:
Design, fabrication, and functional testing for feasibility
MEMS based Fabry Perot pressure sensor and non-adhesive
integration on optical fiber by anodic bonding
MEMS parallel-plate electrostatic actuator: Modeling, simulation
and characterization
Metrology of high aspect ratio MEMS
Microassembly of three-dimensional microstructures and microelectromechanical systems (MEMS)
Micro-cross-sectional lithography (muCSL(TM)): Protoyping and
packaging for MEMS
Micro Input Devices System (MIDS) using MEMS sensors
Micro-optical components for a MEMS integrated display
Micro-viscosity effect and characterization of MEMS-based
micropumps with flat and bossed membranes
Modeling and real-time feedback control of MEMS device
Modeling and simulation of MEMS devices
Multi-physics modeling and experimental investigation of lowforce MEMS switch contact behavior
On the feasibility of MEMS micro-mirrors for adaptive alignment
in free-space optical interconnects
Optical MEMS for free-space communication
Optical signal processing with MEMS technology: Applications in
optical communication systems
Packaging of two-dimensional microelectromechanical systems
(MEMS) variable capacitors with liquid crystal polymer
Photonic MEMS-based reconfigurable switch for multicast
communication systems
Qualification of metallized optical fiber connections for chip-level
MEMS packaging
RF MEMS phase shifters with analog tuning
RF MEMS switch compatible with CMOS technology

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MEMS
: nanomechanical MEMS

Fabry MEMS
anodic
: MEMS

MEMS
microstructures Microassembly
(MEMS)

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MEMS
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MEMS

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Solder self-assembled, surface micromachined MEMS for
micromirror applications and atom trapping
Static and electrically actuated shaped MEMS mirrors
Stressed MEMS CPW cantilevers for high-frequency scanning
probe microscopy
Technology development of RF MEMS switches on printed circuit
boards
Temperature considerations for a wireless implantable MEMS
pressure sensor
The development of interdigitated angular-vertical-comb-drive
actuators for microelectromechanical systems (MEMS)
Thin film technologies for hermetic and vacuum packaging of
MEMS
Using MEMS-based storage devices in computer systems
A MEMS acoustical sensor array and associated micropackage
Analysis and optimization of MEMS out-of-plane thermal
actuators
Analysis, fabrication and performance measurement of tunable
optical micromirror switches based on MEMS technology
Characterization of smart MEMs pump by applying quasi-static
model based on simulations of membrane and solid-fluid
interface of microvalves
Design and analysis of a microelectromechanical systems
(MEMS) micro-translation stage with indefinite linear translation
Design and fabrication of a micro parallel mechanism system
using MEMS technologies
Design and optimization for shape tuning of large MEMS flaps for
fluid mixing
Design, fabrication, and characterization of RF MEMS variable
capacitor phase shifters and prestressed-beam switches
Design, modeling, analysis, fabrication, and testing of MEMmirrors for tunable VCSELs
Design of nanocomposite polymer coatings for MEMS
applications

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micromachined MEMS
micromirror
MEMS actuated

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MEMS

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Development of MEMS microwave switches with application to
reconfigurable integrated antennas
Development of processes for vacuum packaging of microelectro-mechanical systems (MEMS)
Efficient mixed-domain analysis of electrostatic
microelectromechanical systems (MEMS)
Electrodeposition of nickel-copper alloys and nickel-copperalumina nanocomposites into deep recesses for MEMS
Fractals, MEMS, and FSS electromagnetic devices:
Miniaturization and multiple resonances
Full-scale field evaluation of MEMS-based biaxial strain
transducer and its applications in rail fatigue analysis
Geometric algorithms and software architecture for
computational prototyping: Applications in vascular surgery and
MEMS
Integrated PNZT film structures for MEMS gyroscopes
Layout verification for mixed-domain integrated MEMS
Linearly tunable RF-MEMS capacitors implemented using an
integrated removable self-masking technique
Materials issues in the integration of magnetic structures on
CMOS-MEMS
MEMS microphone design
MEMS scanning micromirrors with a new electrostatic angular
vertical combdrive
MEMS technology and devices for a microfluid dosing system
Methodologies for MEMS device performance and damage
monitoring
Microrobotic biomanipulation and MEMS-assisted biomembrane
mechanical property characterization
Modeling and simulation of non-idealities in a Z-axis CMOSMEMS gyroscope
Modeling and simulation for design of suspended MEMS
Nonlinear control of an electrostatically actuated MEMS
Optical actuation of MEMS devices

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reconfigurable MEMS
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(MEMS)

(microelectromechanical (MEMS
Electrodeposition
MEMS recesses

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MEMS

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MEMS

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Photo-acoustic measurement of the material properties of thin
film MEMS structures
RF MEMS devices for multifunctional integrated circuits and
antennas
Silicon carbide thin films on insulating substrates for robust
MEMS applications
Surface engineering for MEMS reliability
Temperature-dependent mechanical behavior of silicon dioxide,
gold and gold-vanadium thin films for VLSI integrated circuits and
MicroElectroMechanical systems (MEMs)
The design and implementation of a low-cost GPS-MEMS/INS
precision approach algorithm with health monitoring
Three-dimensional monolithic MEMS coil
Validation and optimization of a MEMS propulsion concept: The
free molecule micro-resistojet
W-band RF-MEMS switches, phase shifters and antennas
Workflow control for the MEMS job shop
An integrated MEMS syringe for advanced drug delivery: Design,
fabrication and fluid mechanics of suspension flow through
microneedle arrays
Applications of resonant ultrasound spectroscopy to
microelectromechanical systems (MEMS)
Characterization of residual stress in microelectromechanical
systems (MEMS) devices using Raman spectroscopy
Computational and experimental analysis of drop formation for
MEMS applications
Design, modeling and fabrication of an infrared thermopile
detector based on MEMS technology
Development, modeling and characterization of flip-chip
assembled silicon MEMS for RF applications
Development of compound semiconductor FET and integrated
low-voltage RF MEMS switch technology for reconfigurable
MMIC applications
Development of a wavelength tunable filter using MEMS
technology

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MEMS
: MEMS
resistojet
MEMS -

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((MEMS
( microelectromechanical (MEMS

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MEMS

MEMS

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MMIC reconfigurable

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Electroplating for lab-on-a-chip electrodes and three-dimensional
MEMS microstructures
Flexible MEMS skin technology for distributed fluidic sensing
Free-space optical communication through atmospheric
turbulence and optical modeling of MEMS corner cube
retroreflectors
Gyroscope and micromirror design using vertical-axis CMOSMEMS actuation and sensing
High-performance RF MEMS circuits and phase shifters
High-performance digital X-band and Ka-band distributed MEMS
phase shifters
Hot-wire anemometry and a novel MEMS device for shear stress
measurement
Integrated multiple device CMOS-MEMS IMU systems and RF
MEMS applications
Integrated multifunctional reprogrammable MEMS deformable
mirror and three-dimensional phase retrieval based adaptive
optic system implementations
Integrated through-wafer optical monitoring of MEMS for closedloop control
Investigation of a switching G mechanism for MEMS applications
Measurement of total hydrocarbon emissions with MEMS using a
portable FID and a novel exhaust flow meter
MEMS and BST technologies for microwave applications
MEMS-enabled microspray chips and the application on
electronic cooling
MEMS metrology and materials characterization using resonant
structures
MEMS packaging by rapid thermal processing
Microelectromechanical systems (MEMS) for radio frequency
applications
Micromachined permanent magnets and their MEMS
applications
Micro-mechanical evaluation of electronic packaging and a
MEMS material

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MEMS
microstructures
fluidic MEMS

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MEMS
retroreflectors

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MEMS

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MEMS
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MEMS anemometry
MEMS -
MEMS

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MEMS reprogrammable

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MEMS -
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MEMS
FID MEMS

MEMS BST

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microspray - MEMS
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MEMS
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MEMS
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MEMS Micromachined
MEMS
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Optical propagation methods for system-level modeling of
optical MEM systems
Parylene for MEMS applications
Parylene MEMS technology for adaptive flow control of flapping
flight
Quasi-optical MEMS switching array technology
RF MEMS switches and phase shifters for three-dimensional
MMIC phased array antenna systems
Sensing and control electronics for low-mass low-capacitance
MEMS accelerometers
Sputtered highly oriented PZT thin films for MEMS applications
Theoretical, experimental, and numerical investigations into laser
repair of adhered MEMS structures
The strength of polycrystalline silicon at the micro- and nanoscales with applications to MEMS
Acoustical problems associated with the design of MEMS-fluidic
devices
A low-power, high-performance MEMS-based switch fabric
A MEMS fabrication technology for on-chip radio-frequency
passive components
A programmable MEMS bandpass filter
Capacitive sensor interface circuits for MEMS transducers with
application to high-temperature data acquisition
Compliant leverage mechanism design for MEMS applications
Control of MEMS electrostatic parallel-plate actuators
Design and characterization of MEMS micromirror devices
Design and analysis of series and shunt MEMS switches
Design and evaluation of the emissions measurement
components for a heavy-duty diesel-powered vehicle mobile
emissions measurement system (MEMS)
Design and development of PVDF-based MEMS hydrophone and
accelerometer
Design optimization of MEMS solder self-assembly
Development of a MEMS based calorimeter for biological and
chemical systems

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Parylene MEMS
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flapping MEMS Parylene

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MMIC MEMS

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MEMS
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MEMS PZT Sputtered

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MEMS

MEMS

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MEMS
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MEMS
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bandpass MEMS
MEMS

MEMS
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MEMS

MEMS micromirror
MEMS

(MEMS )

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MEMS PVDF hydrophone

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MEMS
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Development of micro-diesel injector nozzles via MEMS
technology and effects on spray characteristics
Development of direct ion-implanted gallium arsenide MESFET
and low-actuation-voltage RF MEM switches
Development of a new magnetic interconnection technology for
magnetic MEMS device applications
Dry silver electromigration process for optical glass waveguide
fabrication and fluxless bonding technology for photonics and
MEMS packaging
Exploration of novel silicon devices toward the realization of
MEMS-based microsystem for utilities (water, gas and electrical)
monitoring
Growth and characterization of silicon carbide for MEMS
pressure sensors
Implementing and testing a novel refreshable Braille display
system (RBDS) utilizing micro-electro-mechanical systems
(MEMS) technology
In-plane MEMS thermoelectric microcooler
Investigations into a silicon-based MEMS lab on a chip
Issues in the design, modeling, and manufacture of multiple joint
solder self-assembled micro-electro-mechanical systems (MEMS)
MEMS based microfluidic structure for biological and chemical
sensor array
MEMS high-quality micromirrors for optical interconnect and
optical pick-up heads
MEMS prototypical system integration and packaging for a
generic microfluidic system
MEMS sensors to characterize shear stress on endothelial cell
dynamics
MEMS thin film teflon electret condenser microphones
MEM systems development for positioning, control and optical
applications
Microelectromechanical systems (MEMS) sensors based on lead
zirconate titanate (PZT) films
Microelectromechanical system (MEMS) simulation

MEMS

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MESFET
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MEMS
electromigration
MEMS fluxless

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microsystem MEMS
( )

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MEMS
( RBDS) refreshable
( MEMS)

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MEMS microcooler
MEMS

(MEMS)

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MEMS
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micromirrors MEMS
prototypical MEMS

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MEMS
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electret MEMS
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titanate ( Microelectromechanical (MEMS
( PZT) zirconate
( MEMS) Microelectromechanical

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Micro/nanoscale tribology and mechanics of components and
coatings for MEMS
Novel MEMS pressure and temperature sensors fabricated on
optical fibers
On a MEMS-based parametrically amplified atomic force sensor
Optical phase modulation beam steering using silicon
micromachined and hybrid integrated Micro-Electro-Mechanical
Systems (MEMS)
Robust mask-layout and process synthesis in micro-electromechanical-systems (MEMS) using genetic algorithms
Silicone MEMS for fluidics
Simulation of rarefied flows in MEMS devices by atomistic and
multiscale methods
The enzyme-based electrochemical DNA detector chip using
MEMS technology
Adaptive control strategies for MEMS gyroscopes
A feasibility study: Positioning a lenslet array above a target using
MEMS to specify three or four degrees of freedom
An investigation of MEMS-based transducers for boundary layer
control
A performance evaluation of the MEMS: An on-road emissions
measurement system study
Characterization of polysilicon thin film for MEMS applications
CMOS-based monolithic MEMS technology and its applications in
microwave systems
Code division multiplexing of fiber optic and
microelectromechanical systems (MEMS) sensors
Code division multiplexing of fiber optic and
microelectromechanical systems (MEMS) sensors
Crack growth phenomena in micro-machined single crystal silicon
and design implications for micro electro mechanical systems
(MEMS)
Design and fabrication of high performance RF MEMS devices
Development of MEMS microvalve arrays for fluid flow control

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MEMS tribology /
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MEMS
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parametrically MEMS
micromachined
(MEMS)

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( MEMS )

fluidics MEMS

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multiscale rarefied MEMS

MEMS
MEMS
MEMS lenslet :

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MEMS
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: MEMS
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MEMS polysilicon
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MEMS
(microelectromechanical (MEMS

(microelectromechanical (MEMS

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(MEMS)

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MEMS

microvalve MEMS
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Fabrication and characterization of a pulsed MEMS-based micro
flow sensor for microfluidic application
Fiber-optic beam control systems using microelectromechanical
systems (MEMS)
Integrated Parylene microelectromechanical systems (MEMS)
Integration of III-V compound semiconductors on silicon MEMS
structures
Localized heating and bonding technique for MEMS packaging
Magnetic MEMS-based microstructures and sensors using a new
thick photolithography technique
MEMS-based vibration sensor system
MEMS based micro-capillary pumped loop for chip-level
temperature control

MEMS

microelectromechanical
((MEMS
(Parylene microelectromechanical (MEMS

MEMS electrostatic switching technology for microwave systems

MEMS

Microelectromechanical (MEMS) VLSI structures for hearing

instruments
Micro- to macro- applications of SU8 for MEMS and BMEMS
applications
On designing MEMS: A parameterized approach and threedimensional visual modeling
On the feasibility of integrated optical waveguide-based in situ
monitoring of microelectromechanical systems (MEMS)
Physics of microcontacts for MEMS relays
Research on novel MEMS shear beam strain gauge and PZT
accelerometer based on deep RIE process
RF modeling of flip-chip interconnects and MEMS in
microwave/mm-wave circuits
Suspended thermal oxide isolation for actuation and small
current measurement in MEMS
The development of the MEMS Knudsen compressor as a low
power vacuum pump for portable and in situ instruments
Thermal design, fabrication, and imaging of MEMS and
microelectronic structures
Wavelength-tunable fiber-optic MEMS scanning Fabry-Perot
interferometer

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MEMS
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MEMS
microstructures MEMS
photolithography
MEMS
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MEMS
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VLSI ( MEMS) Microelectromechanical

MEMS SU8 -
BMEMS

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: MEMS

(microelectromechanical (MEMS
MEMS microcontacts
RIE PZT MEMS

/ MEMS

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MEMS
Knudsen MEMS

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- Fabry MEMS -
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A flush-mounted microelectromechanical system (MEMS)
pressure- and flow-sensor-based air data system
All silicon multichip module with integrated thermal
management system for electronics and MEMS applications
Characterization and control of thin film stresses for
microelectronic and MEMS applications
Distributed MEMS transmission lines
EFAB: A novel, high-aspect-ratio true three-dimensional
microfabrication process for rapid, low-cost desktop
micromachining of MEMS
Evolutionary techniques applied to mask-layout synthesis in
micromechanical-electronic systems (MEMS)
Individual embryo transport and positioning using MEMS
technology

( microelectromechanical (MEMS

multichip
MEMS

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MEMS
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MEMS
microfabrication - : EFAB
MEMS micromachining

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micromechanical -
( MEMS)

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MEMS

Laser interferometric methodologies for characterizing static and

dynamic behavior of microelectromechanical systems (MEMS)

(microelectromechanical (MEMS

MEMS deformable mirrors for adaptive optics

Monotonic and cyclic testing of thin film materials for MEMS
applications
Planar microfluidics: Toward large-scale integration of channels,
pumps, valves, and fluid mixers in microelectromechanical
systems (MEMS)
Rapid MEMS PCR instrumentation by surface micromachining of
SU8
Silicon bulk micromachining in MEMS packaging and optical
applications
STEM measurements and MEMS integration of nanometer-scale
lateral silicon tips and filaments
The fracture strength of brittle films for microelectromechanical
systems (MEMS) devices
Through-wafer interrogation of MEMS device motion
A MEMS based liquid microchromatographic system based upon
(110) silicon
A thermodynamic field formulation for anodic bonding of
microelectromechanical systems (MEMS)

MEMS

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MEMS
: microfluidics
(microelectromechanical (MEMS

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SU8 micromachining PCR MEMS

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MEMS micromachining
MEMS

microelectromechanical
(( MEMS
MEMS -

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( 110 ) microchromatographic MEMS

anodic
(microelectromechanical (MEMS
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Determination of the existence of the ferroelectric phase
transition in sol-gel derived barium titanate thin film using microelectromechanical systems (MEMS)
Integrated MEMS tuning fork oscillators for sensor applications

titanate ferroelectric
(MEMS)

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MEMS

MEMS force transducer system for cellular force measurements

MEMS

MEMS free-space fiber optic switches

MEMS microshells for microneedles, microscale fluid
visualization, and vacuum packaging of microdevices
Residual stresses in MEMS thin films
Design, simulation, fabrication and testing of microprobes for a
new MEMS wafer probe card
Exploration and adaptation of silicon MEMS technology for
development of water and liquid metal based micro heat pipes
Mechanical testing of microsamples from weldments and MEMS
materials
Micro/nanotribology and its applications to magnetic media,
heads and MEMS

MEMS
microscale microneedles microshells MEMS
microdevices
MEMS
MEMS microprobes

MEMS

nanotribology /
MEMS

An integrated system for biomedical implants, including novel

power/data fusion and MEMS-based sensor subsystem concepts

/
MEMS

Design, fabrication, and testing of a MEMS-based tangential

tactor
Electrostatic and electromagnetic microactuation technology for
medical and MEMS applications
Stochastic modeling and response prediction of MEMS
Estimation of directional ocean wave spectra by Fourier methods
as enhanced by simulated annealing with a MEM objective
function
MEMS design: The geometry of silicon micromachining
Selective encapsulations of MEMS: Micro channels, needles,
resonators and electromechanical filters
And a thornbush sprang up between them: Studies on "Mem u
Zin", a Kurdish romance. (Volumes I and II)
DESIGN AND CONSTRUCTION OF A MIRROR ELECTRONMICROSCOPE - LOW-ENERGY ELECTRON DIFFRACTION (MEMLEED) APPARATUS FOR APPLICATION IN SURFACE SCIENCE

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MEMS weldments microsamples

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tactor MEMS
microactuation
MEMS
MEMS

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micromachining : MEMS
resonators : MEMS encapsulations

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(LEED - )--

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09126599985

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ELT ) (SARSAT
FFT

:
) (
Processing of ELT signals for search and rescue satellite aided
tracking (SARSAT) using the MEM and FFT