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CP 3
CP 3
Hydrogen
Fuel manifold/
injector plate Fuel manifold/
injector plate
Spacer/
inlet holes Spacer/
inlet holes
Combustion
chamber
Combustion
chamber
Figure 2 : Schematic and SEM cross-section of half of the combustor, showing the fuel manifold, injectors, and air ow path.
Results
Figure 4 : Isotropically etched spacer plate, showing the 24 Atmospheric test results were obtained for premixed
340m combustor inlet holes at r=4.5 mm. and non-premixed hydrogen-air combustion over most of the
ammability range. The combustor operating parameters
under stoichiometric conditions are shown in Table 1. The
1 mm Air mass
ow m_ a (g/sec) :045
Fuel mass
ow m_ f (g/sec) 1:3 10;3
Flow residence time (sec) 1:7 10;3
Average wall temperature (K) 900
Exit temperature (K) 1800
Fluid power (Watts) 70
Combustor eciency 44%
Space heating rate (MW/m3 /atm) 1000
Figure 5 : Isotropically etched, 1 mm high annular combus- Table 1 : Microcombustor operating parameters for stoi-
tion chamber, with an inner and outer diameter of 5 mm and chiometric hydrogen combustion at 1 atm. (premixed).
10 mm respectively.
1900 corrected results for the exit temperatures are also shown in
Figure 7, indicating satisfactory attainment of exit tempera-
1800
tures up to 1800K. As expected, the peak exit temperatures
1700 occurred slightly beyond stoichiometric conditions. For the
95% confidence
premixed case however, the exit temperatures were approx-
static exit temperature (K)
50
800
As shown in Figure 10, post-combustion examination
750 of the silicon microcombustor indicated oxidation patterns
700 around the structure and the combustion inlet holes. A ma-
top plate (non−premixed) terials study was consequently undertaken to further quantify
650 top plate (premixed)
bottom plate (non−premixed)
the eects of silicon oxidation in a combustion environment.
600 bottom plate (premixed)
550
0.4 0.6 0.8 1 1.2 1.4 1.6
Oxidation Tests
equivalence ratio
As part of an oxidation study, a combustor plate con-
Figure 9 : Microcombustor test results, showing wall temper- sisting of \nger-like" structures with sizes between 20m
atures well below the melting point of silicon. 500m 450m and 1600m 2000m 450m was fab-
ricated and tested inside the combustor. Shown in Figure 11,
the plate was fabricated by anisotropically etching through a
single 450m silicon wafer.
20 microns 20 microns
10 mm
the vanes appeared to be minimally damaged; the increase Diana Park for all the help with the graphics.
in throat area resulting in no more than a 2% change in This work was largely supported by the Army Research
mass
ow. This establishes the survivability of a static vane Oce through Grant DAAHO4-95-1-0093, with Dr. Richard
structure in a high pressure and temperature, and high Paur as program manager. All devices were fabricated at the
Mach number
ow environment. MIT Microsystems Technological Laboratories.
SUMMARY AND CONCLUSIONS Nomenclature
As part of an eort to develop a micro gas turbine en- T Temperature (K)
gine using silicon microfabrication technologies, the design, Cp Specic heat at constant pressure (kJ/kg-K)
fabrication and testing of a rst-ever hydrogen combustor hf Fuel heating value (kJ/kg)
micromachined from silicon has been reported. Complete m_ a Mass
ow rate of air (kg/sec)
with a fuel manifold and injector holes, the combustion m_ f Mass
ow rate of fuel (kg/sec)
chamber measuring less than 0.07 cm3 in volume has been comb Combustor eciency
successfully demonstrated to sustain premixed and non-
premixed hydrogen combustion, providing exit temperatures
of up to 1800K. While the performance of silicon was found
to be creep limited at elevated pressures and temperatures References
in excess of 2200K, the combustor has been experimentally [1] Epstein et al., \Micro-Heat Engines, Gas Turbines, and
tested at elevated temperatures for over fteen hours, Rocket Engines", presented at the 28th AIAA Fluid Dy-
thereby demonstrating the satisfactory performance of sili- namics Conference, 1997.
con in such harsh environments. Combined with the results
of an oxidation study which showed that the performance [2] Groshenry, C., \Preliminary Study of a Micro-Gas Tur-
of a silicon microcombustor will not be oxidation limited, bine Engine", S.M. Thesis, Massachusetts Institute of
these results are an important step towards establishing the Technology, 1995.
viability of building a new generation of micro heat engines [3] Waitz, I. A., Gauba, G., Tzeng, Y-S., \Combustors for
using silicon microfabrication technology. Micro-Gas Turbine Engines", Proceedings of the ASME
Aerospace Division, AD-Vol. 52, 1996.
ACKNOWLEDGMENTS
[4] Kerrebrock, J. L., \Aircraft Engines and Gas Turbines",
We would rst like to recognize and thank Professor 2nd ed., MIT Press, 1992.
Alan H. Epstein for his conception and pursuit of the MIT mi-
croengine project, and for being a constant source of encour- [5] Ayon et al., \Characterization of a Time Multiplexed
agement and inspiration. We acknowledge the support of the Inductively Coupled Plasma Etcher, Part 1", submitted
fabrication team comprising Professor Martin A. Schmidt, to the Journal of Vacuum Science and Technology, 1997.
Professor Stephen D. Senturia, Dr. Arturo A. Ayon, Dr. [6] Tzeng., Y-S., \An Investigation of Microcombustion
Reza Ghodissi, and C. C. Lin, for training and provision of Thermal Phenomenon", S.M. Thesis, Massachusetts In-
etch recipes. We are also grateful to all the other members of stitute of Technology, 1997.
the MIT microengine team for support during various stages
of this research, especially Dr. Gautam Gauba and Yang- [7] Deal, B. E., Grove, A. S., \General Relationship for
Sheng Tzeng for their research on temperature diagnostics the Thermal Oxidation of Silicon", Journal of Applied
for microcombustion phenomenon. Finally, special thanks to Physics, Vol. 36., p. 3770., 1965.
Keyword List:
Combustor eciency
Deep Reactive Ion Etching
Fuel injector
Fuel manifold
Fusion bonding
Gas turbine engine
Hydrogen-air combustion
Microcombustor
Micro heat engine
Silicon oxidation
Silicon creep
Turbine inlet temperature