K.

Kadlec: Measurement and Control

ICT Prague

PRESSURE MAESUREMENT
Liquid hydrostatic manometers Elastic-element mechanical pressure gauges Electric manometers
Strain gage Capacitive pressure sensor Piezoelectric pressure sensor

Hydrostatic manometers
Measurement of the hydrostatic pressure p = h..g The measure of the pressure is the height of liquid column h Indication of the manometer depends on the density of the liquid and on the temperature Hydrostatic manometers serve as standard for calibrating other pressure instruments

Types of hydrostatic manometers

p = hg
h1 h2

U-tube manometer
p = h2 g ( S2 + 1) S1
h2

Well manometer

S1,2 are cross sections

h1

Inclined-tube manometer
p = gl ( S2 + sin ) S1 l

3-M&C08_Pressure.doc

Pressure Measurement

K. Kadlec: Measurement and Control

ICT Prague

Elastic-element mechanical pressure gauges

These sensors uses some form of elastic element whose geometry is altered by changes in pressure Elastic elements: Bourdon tube Diaphragm Bellow Capsule

Bourdon tube
It is a tube closed at one end An internal cross section is elliptical With internal pressure variation the tube bends or unbends An internal pressure increase causes the cross section to become more circular and the shape to straighten, resulting in motion of the closed end of the tube A wide range of alloys can be used for making Bourdon elements For measuring over-pressure as well as under-pressure Measuring ranges: from (0 to 0,5) MPa to 2 000 MPa

p
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Animation of the Bourdon tube

Internal cross section changes with deformation

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3-M&C08_Pressure.doc

Pressure Measurement

K. Kadlec: Measurement and Control

ICT Prague

Diaphragm
A flexible disk, usually with concentric corrugation Diaphragm converts pressure to deflection
Concentric corrugation
The membrane can be protected with plastic material or rubber or enamel against corrosive medium attack. For measuring over-pressure as well as under-pressure and difference Measuring ranges:

to 4 MPa
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Bellows
Bellow
This is a thin-wall metal tube with deeply convoluted sidewalls which permit axial expansion and contraction The spring serves for conditioning of the measuring range Bellows are well suited for input elements for pneumatic recorders and indicators and for pneumatic controllers Measuring ranges: to 0,4 MPa
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Bellow

Spring

Electrical manometers
The output signal is electric signal Modern and prospective sensors which are integrated with modern microprocessor electronic circuits

Strain gauge pressure transducers Capacitive pressure sensors Piezoelectric pressure sensors

3-M&C08_Pressure.doc

Pressure Measurement

K. Kadlec: Measurement and Control

ICT Prague

Strain gauge
Principle of strain gauge a cylindrical conductor, one end is fixed coupling relation for resistance:

l d

l F

R=

l S

F is pull tension l is extension of the conductor

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Strain gauge
Strain gauges transducers are used in pressure and weighting load cells Strain gauges usually are mounted directly by sensing diaphragms or bonded to cantilever springs which act as a restoring force

Wire strain gauge

Foil strain gauge

Metallic strain gauge:

R = k R

k gauge factor - relative strain R gauge resistance

Strain gauge changes resistance in accordance with deformations of the surface to which it is bonded Silicon

Semiconductor strain gauge:

Leadwires

R = k1 + k2 2 R

Higher sensitivity; gauge factor is approx. 50 times higher Higher temperature effect (Temperature is the undesirable variable)

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Pressure transducers with strain gauges

Bonded strain-gage systems
Strain gauges are bonded to the metal cantilever The first strain gauge is subjected to tension and the second one is subjected to compression 4 strain gauges are connected in the Wheatstone bridge Increase of the measurement sensitivity Minimize influence on temperature changes p
Force Tension

Compression

Cantilever with strain gauges

Pressure transducer with strain gauges:

Below Wheatstone bridge circuit with four strain gauges Amplifier
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3-M&C08_Pressure.doc

Pressure Measurement

K. Kadlec: Measurement and Control

ICT Prague

Diffused semiconductor strain gauges

The strain gauges are diffused directly into the surface of the diaphragm, utilizing photolithographic masking techniques and solid-state diffusion of an impurity element (e.g. boron) Two strain gauges are placed on the periphery of the diaphragm and two other are placed in the centre of the diaphragm. The strain gauges on the periphery are strain by compression and the strain gauges in the centre are strain by pull-tension. These four strain gauges are connected to the Wheatstone bridge.
Tension Compression Compression

Diaphragm diameter: approx. 6 mm

Silicon diaphragm
Areas for gold lead wire attachment

Strain sensing 12 areas

Pressure transducer Diaphragm-beam design

Protective diaphragm Silicone oil Measured pressure Diaphragm Strain gauge

Reference pressure

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Design of electrical manometers

Handheld instrument with the strain gauge transducer:
Pressure inputs Display

Process pressure transducers:

Controlling buttons
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3-M&C08_Pressure.doc

Pressure Measurement

K. Kadlec: Measurement and Control

ICT Prague

Capacitive pressure sensor

Principle: A measuring diaphragm and a fixed plate electrode consist a capacitor The measuring diaphragm moves relative to fixed plates Changes in capacitance are detected by an oscillator or bridge circuit For a plate capacitor we can write:

p C

S C = o r d
0 - permittivity of free space r - relative dielectric constant
S - electrode area d - electrode distance

Nonlinear characteristic curve

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Capacitive differential-pressure transducer

Measuring diaphragm moves by pressure difference Two fixed electrodes are mounted on the glass insulation Measured pressure acts through a protective diaphragm and silicone oil on the measuring diaphragm
Protective diaphragm

C1

C2

p1

p2

Silicone oil

Measuring Glass diaphragm insulation 16

Piezoelectric pressure sensors

Principle:
When certain asymmetrical crystal (e.g. quartz) are elastically deformed along specific axes, an electric charge is called Electric charge is called on the crystal surfaces across to the electrical axis On this surfaces are applied metal electrodes Charge value Q is proportional to acting force F

Piezoelectric effect: +

Q = k Fx
x

Fx y

Fx

Crystal axes x electrical axis y mechanical axis z optical axis

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3-M&C08_Pressure.doc

Pressure Measurement

K. Kadlec: Measurement and Control

ICT Prague

Piezoelectric pressure transducer

The charge signal from the piezoelectric pressure transducer is usually converted into voltage-type signal by means of capacitor, according to:

U=

Q k Fx = C C
piezoelectric crystal

U output voltage signal Q charge signal C capacitance of the sensor Piezoelectric pressure sensors offer several advantages for measuring dynamic pressures This sensors are small in size, lightweight, and very rugged

central electrode

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References
McMillan G.K., Considine D.M.: Process/Industrial Instruments and Controls Handbook. McGraw-Hill New York 1999 Dyer A.S.: Survey of Instrumentation and Measurement. John Wiley, Inc. New York, 2001

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Pressure Measurement