MEMS Based Interferomteric Modulator Display

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EE 701 Presentation MEMS based Interferomteric Modulator Display(IMOD) Screens

Abstract: Use of MEMS Technology to develop Interferometric Modulator Display (IMOD) screens based on the Febry-Perot Interferometric principle is discussed. The interferometric modulators use mechanically coupled mirror actuators for color reproduction. The reflective mirrors are suspended with a suitable spring arrangement linked together with an electrode that eventually provides a switching mechanism to the entire assembly. The air gaps between the electrode and support determines the color production. Hence, d000 spacing for observing Green is characterized. Similar characterization is done for Red (d101) and Blue (d010). A black color response is noticed for d111 spacing. Fabrication of these interferometer devices is discussed; which is primarily a combination of fabricated silicon plates and glass plates. Experimental results show the output displacement of the mirrors driven by 300Hz, 6V square wave Voltage signal. Hence consequently, the principle of Febry-Perot Interferometer is practically discussed in order to develop less power consuming reflective mirrors. Reference: Han W, Cho Y.H, Interfermoteric modulators using mechanically coupled mirror actuators for color reproduction, Transducers11 Beijing,China,June 5-9,2011,pg 2916-2919. Presented By: 1. Pranav Mahadik (Roll Number: 113110001) 2. Ajit Kumar (Roll Number : 113110003) 3. S Venkateshwaralu (Roll Number : 113110021)

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