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EEE 416 Principles of CMOS VLSI design Lecture two

Properties of silicon

Structure and 3D symbol of a silicon atom

Silicon crystal network: mechanically strong, hard and poor conductor. Density 5e22/cc. Ni=1.5e10/CC. WHY IT IS CALLED SEMICONDUCTOR?

N or P type of silicon

N++ > 1018/CC


N++ ~ 1016/CC N- ~ 1014/CC

P++ > 1018/CC


P+ ~ 1016/CC P- ~ 1014/CC

INTERFACE ISSUE OF OXIDES

SILICON

OXIDE

Properties of common materials in integrated ckts

Logic levels

N-channel MOS switch

Ron from 0.1 ohm to hundreds of kilo-ohm Power application = low resistance MOS Analogue low power = high resistance MOS Logic ckt = 1k Off resistance = several Ms

P-channel MOS switch

MOS aspect

MOS LAYOUTS

CROSS SECTION

3D VIEW OF MOS DEVICES

Layout editor MICROWIND

TECHNOLOGY NODE IN MICROWIND

NMOS layout

Basic layers

PMOS layout

PMOS correct polarization

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