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1"1".,3. rh~''Three w~h 2' 'tfl [ Mi'c'lfMJiSlffrn: PCfC!w,;g,rn,g ,3'94 113.3 1Jf~.... Lew,1 Pw:h,J,ri'l$g 394 , ,11•.3.4' ,Dt!Vic~ ..l...eve:1 PachJ,:gi~g 3.96 ,/.1..3.5 S}i~tem-Lev.:d ,P:ack.as'i~i 3.9:6
,4"' '''AiA",'L'~i''i"::,!", ••;iii ,·,U.- , ,.kYJl~-~~,_~
'1;n,
,;J4J 10~ .2' ni~,M:Im; Pabncmions 344' 3. 10.1.3' G~",melrySltaping 346
11,.4 miterfaees :in. ,!d1aos,YEiie.i!Q ,Pacj~ml

11:[.5 .
346 ,J'47
,391'
llesi,~ .._~_~~,
~AI":;: ~
JO.4.l 71te~c_~.WnI 1"14:.2Th8~c-bnic;Qi ,1,(J.4:.3 ~ic ~Ji~' 1'(J.4~,4 ,l.~r;!~l P~te
~g ,348' Anai;¥,ds
8JriJ$~ Mab3'j~'
351
10..5'Mretbmical Design U'sing

Fimlite Blmnm,t, Method
'"-..
1] 6,'
,
,Essentilm. Packaging TecbD,o:bgi~s 3~1:8 11.5:.,} Dit ,Prepa.mfi'Ulf 398 11.5:.2 &.r:I~t: ,B(j,ru/iQg 3,99 1'.1..5:.3 M'~ fJmut~n.f 4f}J' 11.5~,4 Seerrri'in,:g 4'05
~-.~.~.
,~,.-.' "
3..53
353' 358'
-. , 11,. 7-'
1 ,':,
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'-if"\;i" ,.........
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""°1·,_ ... ,r,~ ]bo~'Ii'!I1'm··.-'~ 4'010' m...' ~_. !\,J'J~, .£11' ".0
;111
Assemb~y (If Mioros,yslienlS

,1Jj
400 ,.
j,i!f,'
11 1!U ,~~.,.t!I~ 1f"i'''''~t,tnii I,·..
oc.~: ,
,ld5:.J Pmit~ Ekm~ FO:trm;'lalioo 1'1)"5,2' ,SlmuWlion: of Mi'Cfl'(jJftibri'C!WJon, ~~~e-~' P
11.8
11,.9
Seile.cti,n.n of' :Packagm,g Materials 411. _ S'i,ii'HIi"li 1: Mi' ,~. ~Hd:T:'·-'llin~...:1· - iI'~'i""iI!lIAi.1IAI .'.~~ ".J,~p,mie: ulI:i " ,:rA:':J"J'UjUOc.ii,011~, ~
11.9.1 TytJi~I.lilectricul S'fgM~ I"'" iI,I;"",'ft'Ii'"""'~''';';''!I"i';O;. ("1',~
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til, ~I~~ft g, ~ .. I;~.:.I, U
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'fur g, Mi.orupresslWe Sensor 1:0,.'7 :Design. cf :Miaoflufttic~ ~

:Network;, g,ysrte,ms
1,fJ,. Capillary 7:2
,N~T1(
_'
360
366
1.1',•.9~2 M,e,mfn~~ms' "lRes,iSflrm~' 41;)

11'..9;.3 Sig,'lul'l Mappl'lj:g ,~
364
,in ,P;te:$l$ilIi.rt!"
TmnsdJ:tc"ian~
419'
8e;ns'fJ'n!
It),1,;.1FlaM Rtsisl~
~81~'
in· M.i'C~~ls
.I J..9:4 C(JP4e~e 8en!.Or Paclirap,f!;
4J6 ,Memun5m.ents
4f,l9
EJ~c-tmpMli(!s\iiS
Jf8'
,SyS1MllJ
II.U) Design Case:' Pressere

PFcllYlems. 424-
1a.:1.3 "Ql_~fi't,:(d UOdelwg' ofCapilm'ry

,EI,ctnJphuresfl' N"thAJTk
3'0
,~,O.S 'Desl~ Case: Capillary :a~oresjs, ,Nietwmi:, ystem 371 S ·110 ~ roo-' ~ ..Ii, _,.:~ V IDptl m:r... ,,_ ,._ Deg,;U;n :37'6, . ,..~-L.
-C-,
Bii"llli'ollapllt,
[4,1;7
Index 43,1
,10..9.1 '~'
CAl)?'
,3:76
10~Ji:.2'Wlurl'Is ,in.(i CAD' ,P;(Jciage lor Mi.t;roS¥fJ~'? ,j71
T
,,_., ',"
have been mm'~y,wpressi'"1re in 'ooth. p:ac~ of d\e¥c:illo,!:llI.ent and :liumber of :n~,w
b:'.e. Itec.:. '~:n;'o.':'.1.00'i.'.cm. I~
a'.
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'i~ ~1'1.-'-:![!!!;'
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pacu,s~n~ ,tlf :m~,ctuelleetmm:ec'lil~lU]]calsys1toamn; (MHMS) aUld. pe;ri,phemls~ ,A,ppi[CI= gons ~f''Rll[ClOs,ystems, :in, W:e ,fi_e:I:'Cs,pa_ce,., ,au:l,omotk~;,e, bi_i~mc~~olo,IY~onsnmm prodc ucts, !d!e'rensei" e:Hv~r-ni]J:neflu.~'~T!Ol!e:clJ]'oo, ,a\lnd sdetYi hedmhea~i pooif:1l1!a~tIlti,eai~", ,a'tilIdi, p tel~o.mnnlim~catim1:siJb.dJlstries. :plfompted maln, etlpet1! to' ,aCC(;)Uimlt :fior a S!a,II',erl~1 $8\2 billion. in revenue for 'tile; '~ero:Sy$temtS arnd :f-e~aJtedPff)dru{;iI iA ~e~ yeM' '20001~
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iih::ll '1'.iI' ..... -,j!fgn'!j'!jII'~ti">i - ... ~
'te;t~.ood,topiC$~,and tJi.e :~g.y dt8ign ,e~.ples. Plt'~~t,~d :~g, 'book" w.iUusher PU~' this .' ,. ,. '. !Io!M.. t1 111£:1 ()f mtcl'OOJ'Stems eng1noo.nng;. ., . ,. bcmg engmeers f!OO mt[o 'me:=lel~ Pl!'fl...... 1t.......... 1Il.. "" ..<, _--aI '... _... _.... ,1~. ,'1' "" .-..4: ..._....:1 111 , J!-~ , I~~ IS Ulit:en.:;,.eu, ,8tex~~AOI' f' CJla!sesC0veiw It-. ,03£: 'iii ~ as I~~i' ,~,,j~,w~ ,l,cm.g 38-,
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Chapter' 1. helins 'W.1rU~ ·,o\1er'l.~ew :Dcros_Y,Sre4Ps :MId tie, eNo~ulti()'B of ,ain ~f.
miicrQfabdc~tlon. imt :fed, lo rue prooncdon, 'of miicrooyste:ms. It cOIiJ.dludes w~1h a. :pr.,0:viie,w of t~e ,c~_r.re;nlt. :~teDti,~~ markets for' '\ratio-us, ~,pes 3Jud of'
n~clmsy:stem:-5. Cb~reT. 2; presub, wadding p,rlnc~pl],e:5 :~Qr[c~rrmllt~y avmlib~e m~C{~nmfS,-. [actu~I,S ,.d, m.otQf;Sj; ~vah~esj; :pUlU1p5>i M.d. fi:lli~ic-iS used :in, :miQ',o-sysre'rns,.
Chapter ,3 ,otiel"Sl an o~e,w 01' engioomng fi~IDe~oo, lnpies a,pp:nca!bt1e, :mdcms"ysrems, design and fa;bricSJtio~~
to
Cbapter 4,:itmclu~ eogiooeril\l!_g~arDljcs, 'upil~s'I11:u1t, ,Me: r-ete,V,i?Jmil to Het'iDSy:Sten1 desip, and, :p'oolt~g~D,g'~ 'Ib,pies :[~ tJm:s rCib~pmrindillde mechanics of' d~fm:mlble saUds, ,Yd, 'mec.lumicali 'viibmtio~ '~lu~:ories,. Al~,oprese~fted,are ~e, basic r'Ol1lltdati~oos, ,of thermomechanics ,end :'mctUID'e: eehenies ,o,f intedra~s ,of m thin films th__ IN oommOl}, in m~crostmcmreS'h T~oonci~~des,with an ~~'nne of th, finite: ,elememlt 'metilod, :fbr' g,tress mJ,alJiS~s,. Cliwapter' 5' dealls 'Mth,
miCF.OSJitems ~gfIJj, au, the 'C';3mll~tr'Ve:fiF-ci :~nMii~#jIwid,'-I '~o;'!irw:~.,A'I~11~ preseJ]j~eu .IS IUJ.e me, ~Uto.n rt.,-, n "-'-f;"~" :' _ _"""r'"'--""'"'" - __ ~''''Vu _, ,u ..... , ~_ _ , J,O
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Blicroma_nu'facturimg.,
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includ-e::simply ,8 s~Uoon dJjjaplml,glU only a. few mitFOmD.etem 'lIiek ,~, flu5tmted, ira :Plg:" ~~, 1...22c:and 2,,7,. 11te detle(;ttifio m' 'IDe dJ;aphIagm, iodNl,edj, by ~e ap,plitd pr--essO'f:e
is oon'venoo ]'otO ,OJ, change of ,elootdcal res_i-'tmoe 'by Ulli_k,mpie~esistom 'dlait ,are i'm,p'imted, in 'me l~a_giJ_}l. Th~ piezoresisto.rs coostitlue a part: of 'me~ tfamdlwtj,on unit, 'n.e~ cha:nge ,of ei.eeltricaim, resisfance :rnn Owe~esist:ors ,io.du.ced ":by the r tlf' the, ~s'taJ StlEcl1.lfie; ,1-· -_.'~'}' eM be f1U1be1" converted :i:nlto (}'aI:fe_~sTitn-diIn;-' volmtr.e _._.'''''''''',~ - ._ '.~ ~!eCinll.et"FU -..-- .. ~... --..~ .. ~. ~.~.~ -_.-- -. -::~- r·",.(Ili- -,g . '~'b'changes 'tty a,'miac, 'W~emton:e brid,ge,c;ircwrrdm ,:dta:ched '~~ ,se~sbig; lement as e ,mothelf part of' fue 'Dnsduction 'untc I(see~ Fig, '2.,B)~The OUtpIllE, ;sign__a} ,of '~ 'ty,pe~ (WI'
'.e~
clla~oe
microsensor 1",S 'MU1S, in the vol'm.De'C'h~iIIjiJ(tle--~'--.t" ....., W~,"vil!i!!.1~"'-~I:"_ 1:i-Wltt; ,I[....,.,!.'!!~"P, ';r't.~~'" ,coue.~~1l';::~nn,1[!f ~I.'",ii4.,:5I, .;I!'J',!t<.l leal mi'CD') :p!e~ssum :SC9JSO:rS. are shows ;H paeJmged prOOucts :. ,Rpre: I ~1,. '~.ere_ are m~.n~' <orn~"- 1~·S:~ilf'OJ mi"'ro~~'-s~.',-- 'l''''':-:''+: '~'" ,~:ir~:-" a _wm lL~ ,WI. lU~ ,~!!i_ _ _= _ '""~,7 _. ~--« 1"""-:-J! ~-""-" - ~D ...o£'S eL!I!llef :~""~'~""lb~11~: ~1:;r:;~, :m.tiotp:laoe: O[ helD:! de¥'eiLoped .. Th~y im.c~l!d!e~helnjc-a11 ;se.nso.n;, fO-I deteebg ~hem, .., ic-ats or- t~:dc ,Ga~es, rS~ as,C():~;,CO,~,N:O~,O~~,MId INH:~~ I , etc, ,eiJ~ nom. e:xhi;Dt &om. 3, ,combu-sti:an 'OF a f1!bricatlon ~ess" 01" &om, the~ e-r.rv1follimeJlt: -for. CJjll:31ltty'
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:Biomooical, sensors and b[~~ 'Win :b:arve :id~iofi.ca~share r, ~'t.~ '1('--:.---:, iiJe;m, ~~iI.\W~ m 1iIiIl~ sor m3!l'ket :m, 'the, :lileM :flil!bDfe. Mlc-r-ob~~, .... __.__ ~'~,,,,, :~n;;> ml·arililDlhl ~Iil,::~-d:;''f.~'''-IA:!i:-,,-- ::-;.. .J.~.call!l-~t,"iI~ ' ILYJj!!!~ l!I!!~e. ,~}Q.F,Yllagnos de. ,~,yse~\, Because of thejr 'mimr~amei~," ~~se ,K~f1S0n;'t,pi~ly mquJR; a :nUDute, s
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: .. _:,'" can, .~..I;' IlJ'rdlUI.>l!leS, " " i ' l-t-, :I;.'._' sensors ,,; I!J'e ,p~,U\lI'uC~, m [L......... ,re8U , :iDg; in low unlit ,cost. ADothe.f.,COS!, savmg ls tbai: most 'af 'ires-e sensers ,are d_isposab]e;;, 'lillrmuaJ, labor im!.Y1olvtA(I clewflig: and :pr.oper treatment for reuse ,can be ;a/,v,oided. :1,iQ~~", are: ,extelsi''WeJ[y used :m. ;1ll!!Ii~yb.cal,c,he-Jl1is!try'and 'lbiOIQedic~l.eM we'll as, ,lcnetilC engineeri~g" Wor_: prinm,pl~ 'WI' 'Hlany of' these, rm,Cfi)S~, '\\,.01be, ,presented, in S;ec-' 'tion, 2.2., 'Cha~teft 4 ,.d, .5 'will 'nmSie~t 'bbe desi 1t;J methooolo,,~ies for the-se s-euolS:, (till !llf' r~ Flgure '],:3,'illustrates d\~ functionaJ ,r-e~.mionsbip''between the~,acmating e'~eme:RE ,
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by ii,
idiel\ectrie :.atelia1J, such as ,0;, The ,m:rmgemeIiME :~s,sllllularr tn, thait of 'Capac~OOB~ The
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mesoscale tie in the SJ)ze :ram;ge ,g,f :miUimeG tIl' D, OOl1itim.eter.;,) In a 8QilIre!WOOt: :m~trlcted, view Maduu [1.997] defi'Q,~1a :nUerosyStml. [C, iilmcl'Ud!e'tMoOO. major ICO~J1enU, of' micro ;9~Ii1Samt ,~IUa!_OO~j< ,mil, a pFOC~8iD1; unit..
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Fuucltiollal, I!tdatiaJilc8iiip of th~Slei 't5vee components ~s Ullustmle-d in. Pigurre, l.,=k Pigure, 1,,5 m.C!lYs, that~S;j,gDOO:S :meejjv1oo bY' a, sensor ,in a micms,ystf;,m Ire: eon'qnOO, mID fOt,ll'llS oom'l~jib~e 'W;~~'dle ,acblal 0f 'dm s~pmI, arnmu'c:tioD, and U ptocoe-Siiing: umt One eMmm';!:e:uf' tms, operation is the: alirlba,g ifb~plDy~t: ~y~tem am :10, ,autom.Ob~:fe~in wbich tj)e l:1'B1"actof the car ~n,a ~nJo1ils ooIlis.i.OIii, is ~lfe]t:-i'by a .iC1"O' ' ~nema. se-nsor 'bfmn~o:n the; pw.i:m.cJ1Jpl~ m~c~leJro:m,eml ofa as d~ibed :in Cban.~
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-alrbaJ 10 protect the, dri,ver Ii.nd t~ pa~se;mpTS, from, 'serious; iilijur1es.,

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is!ijl~d,I~SrilOC£iOfi ,arnil, ~~s.inl: IU}Hjt~L he entire icih~p'has an, appfl'oxiMaw ,s:ile of' T 3 x 2 'moll wi!fh the lDwcJr.-oaccelerome~taking Ibol~:10 'I!)eKeni of the oveif,alIl chip areal., The w();rkiq: 'princ;i:p:~e of'tlbis 'type Q1f roi'iCroacceletto~e~ will 'be ex-pil~~lled in SecitiOIJ, '2.S., :Mosn DCFos,yste:ms, ,m: dJ~sigJled. ,and.eenstructed ~o pedonn, single mR'CooDS ~ucb, ,~SUIQb:ated; ,aJbow, There :is,,~ clear b'elld In tile ind!usmy to illOotpOrare :~igna1.
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:p~s:s:~n,1 and 'Clll~OO,~loopl feedhac-k: ,co~troJ,~yMems :~n, mie,(!Il)SI,s.tem, 1\1 lIWre 'lie! a ~!IlJte~ioocl, -,if - ----- ~1nteJU~'aleBik. The,- ~FIJmP!nilie~t L Fj"e--~ - '],'- ,"''[1- - :;:trr:a~;iUS _t , a c-il- ---~'..,-- SVstem --~,----- u -"~ --~-~"""-..'" ~ rn, aure ,,,] L,gS , ,:po8sib~U~y~
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,R-.e-seat'iC'h msti.tufdo~$ and, inrliUlstty :~avle ade re;~e~ltless, m ~ffon: io~ ,past::2 decades, die 'i~, -e.vekipmg and ,PrOOoc~lll:1L1lailer od 'OOttermicf:OOlj~trom~trumi\cal, '(MEM) ,~ d vice! iand oompO!ltOU" :M:~y ,or 'theR 'mjn~~mr:izoode-'Ilioes-, sw:b as Si~OOfl ,gear ~;l,jrns 'mJJlIU'S\, Wf!*'Fd; :Fe:fil1'ifl~; b-w .P'.l~I!IIe,g...,.,~J' "'"'~ al. [lI~O'~,]" ,i;'WW'~'Jin:g is i~l, '~:',-;t" w~~(U;o ..:~1 ..... _,t.. ,I!. ;;;!!IQlO_ , 'ro'"f'1rni .... r-l- - ('- I ,1IiLS!1;~ __ J!w.J lI""--~!!l.II~ -J 'M;Jf~"'I--:-:~"~Ii'1f'!Lt brief d-escriptions~ (a!f' lLe~ :MBM dcvice-s. ,and ,components tUa!t we£: pllOOuced in FOOcnl veal'S. Th,e;Us~. !0.1' course is beeomine ~~n:~e~'.. 'I the t~--'-~es, m~~O:""(3--'-""-Yf~;--:'Ti'i~"'-: ,. ~ 1---, --- ,- -~ ~ -- ~ - - !!l~~:l__~l ~,:L Wi a m_nUJ!J~C~Y.I,U__4g
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teeJlmo].ogy ad,v,u-oes" :1l~ ,II/Jcrogit!;art:. Flgll1iO, 1.,9,31, gb~s, ,I, 'lear mad\e '10 a size t'hil~ :~ssi!~IfUlemtl.y smaUm- rtbarn an, ant's head, whereas P.jj,l.e 1.9b :s:ho,wij, a lwo..lev:eJl gear made- from o~lamiics" The p.iOCJh~f' dte ,leaFS, is :in,dt~ IQM_er. Qt' H)() flL~,. Both, !lltte.seS--;e-m were 'pr~
dJ'r~;'!\..,.~, bvJ il<'l!"'CYJ ..
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'un,~g)proeess, as w,iU 'be dlescribed in detail
:mD, Ohapter
'9~
de;p,loym€l!l1l sY·5,teillS: (1']1 IIi"ihertia s~n SlOFon c~llP. ~b) Pa(;:';kag,ed sersor
Flilure t. II Inrte lilir gent ~fl;ertra.sensors use din
i3U1[ormQbi~@ alii" bag
on clh~p.
Copyrigh ed rn ale rial
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'I 19 I 1M rcrog~ars. produced Iby the II GA preeess: (II) Micrcgear al: til€: 'tip af' an ~rnrs leg. I'b!) Two-level c,eramic gear,
Copyriqhicd m ato rial
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F:igure 1.] I) shows an elecrrostatlc-ddven mlercmoier predneed l~y tile LIG,A process US: ~ey 1'~i9'.3. AU ~Mee'Co~llp'om11ent~~~ttb! J iO'IDotI the !cente~glear)i~, ,~,II!.';i]; 'i:'!'["'i'~''''''i''. nd ,j,lIl:-", 'i',,,,Mi"I"I"::;; "'ii"'iiiiIT'i'!i:'O'ii'i"il'~~o['I~''''(no,Ii:!i''''''f=,'Ji'r,\i.''i; made .... ...."f' 'i'!i'~i [Il.:,iilii~ ~~,~ ~J""ff'lit,iIf.'.m'd;' ... tv"" "'":II'!<!I!"'" .il!IilJJi U""'. ~t;""'r,
1;" ,tpJicroJ',~ol.'{Jrs"
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The ,~am:IDer'wh;ee~transmits tilile't0R:lliuie ~wQdJUo~dby the motor, 'Tbe la,p bet,w,gen the 00,."
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,J~Mic,rrJtU':rb,j::~:es, A, 111icroturbine was P([OOllCOOto generate power' I~Iney1~93].. As shown m,' ·igtmre,1.1'~~ ~'heturbine is :n:lIJ~dle nickel, The r-ot,or.has a diameter of of '~10 IJ.m" A, 5~~ rID ,gap is [providied! 'between rhe axle and 'the, :robJ(f;, The tw:b.mne:hIS a 'herughm, ,[)if '],5lJ 1~1'['ru., The entire unit is made of luckf:l. The :~l1a::dmru,nI:l ro:ta!ttmla!~, s;~
reaches ,rn,~~:roj.OOO revolutions per mlnute ,[:rprn)~ wIth a lifetime I!!P' to 100 mnuo:n
:ro®~t~on:s,.
'These ~O'mpo~eQII!;~a:[-e e~tensrnveJ'y used :!for hffigb,.... speed signal 't~ansmlssien ill, tile i~'e~eCum!illiiLln:i,c,~rio~ indlustty" Here, we sho:w It.~ ;,:v '-'+·'I ~I '~2' ",I, '~ 1113 11" -- IE"~'O--- - 1 17 ,"'I"" micro ,aU- 11-., mi ....['!;.l!~'Ib1,p.IL~ a,'I If''.Fom'n'''''.r ... .:;;,·-~'''' ,',- F'· n-' IJII, l ,i"'U,I ..... .rhkl! lD. ,. ,~.1" 'i!'!In!lJj Ji.n ,i['.l~Ut1"e' _'. _~, ~._"C~r;,,~,'Y'~' op[:lc~, s.'wrul~c:b made by ,a, sllieoa-based :milrniiJufac'I1I[,j,fliJ,S process., These sWrnJllcliltes, He used ~,..... resulate '"u! .... ,U~,U,UIL lu,l ,M., f~m ..... al fl-1i ..... ,,··'r~1{~'I'f'.iii"""'1 ,·j,""''"''·...;IIII'i;ii"i,... ~1:!!D.'ll'" il'fIl~'~,... ..... 'U]-tiiffi,.JiIiJj;~ '" '~'iii'fil 1~1:..,iJi;~'IO'I'~i~')'1 ,- "",f:,tlI, V,fj'1<lII aiw ~ '!;.,I',t" a; i\,:5llliu'n':u ,~~ '''''';/'' .L~~,!l;lI:Gi.l11' ,Wwlll UIL ... 1.1~~'~, ti
=
ifioliN"!;, ... li,.'1l,l'1 '.' h'\CiIi:'i_ ,~,~'WI.U,.'i;], 0:1,-IU '!',~,-_ '" ,~@
oi,lj, !~, ,II,
4., !1tI'~'C'J"lJ o,p,t:l't;t1J~ ,comp'O'IUt1.i:t:S.
,J:U.
,[,
Il,Wr;"oit_Q"
, ,1,l..J!C\l
~~m'iI
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...
to app:['o:~ria,t~ r~ce.i,'l/,fiW:lJg optical fibers, Figure 1.13, shows :l1illcro:ieIDlses :maiie ,o:f triOSI'"' :pan~~t PO~Y:l:tD}eB" P:MMA. E~.ch lens g;h.WW~1:~n ®he h~fm,af'the fIgure has a diameter of 1,:50 IIJ1'm.• These milliS ,~f'menses are combmed b:llto :mh;;ro-objecti.'Vles ,~n!',emld05co\p~y
'wrnl[h ~D 0iP~ic~] ,res(],lutio[l, d{[jwn ilLo.3 IftL1tilJ., These
~ens-e.scan also be used for oopie:n,~ ,
G opy ng h Ied male nal
IFllgUN 11 t ,2 II luce'FiIt. MEMS '1 x: ,2 optical ,s;witch.

iii
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O·". V~I' RlA f .. ' ~!€W0_'
roA G::M' S' ' ,alld- IMi""' ~ini.:~, ',' ,~_tOJ'GSryS'~ ......
~'~s.
lasew: ,SCamn01'8jja~, pdoters. Al the ,If.ig~c is :3. rDornbill::3JUomfOj, of one ,~ltIDche~_! w,ruth a l ~iil"t;'V'i_rO!II--;i',~ .......'fI!!l\a, ,~ i ('j!I~iii'iar;il;fiI' Im,illul\I ] 9'~~] u;~J~l--_.I,~'!ir,l ,I,v.~ ,iIl!lowUiLUa'~',bW",J' ~,II..II,W,lli,r.lJ.· ,,7:;
IIL1LL..... l;U I 'ii\'ri il;1'i' .......
,Il
bas been deClteruing' r~onttI!ThUJousl:y~j with ··f·~~'~~M···'S' rC-':-:' e't,l"" ID made e HI Sr_ ~,,- ·uit..mier'rom --eoorn" nZLe·5"<;__Dca!y,Qn --i,G'~ ~_lOO ~,. 'F,a'I,.',·;-,-III.j: .. ;V·,-'sOille 0 , Yle ,~,.:u;:." ._(nll,pon_n~ u UI, rcOm,rn;JOfttlltl5, Cf'~iSr :mJntillre s~ze is c'Jiem:ly be:r~!l_d t[adi,ti~([Ia1liledlaDic',~d means sueh ;IS :mac'~injD.g-driUilimg milli DIg', fOlging, casHng" ~ID1dl, welding, The t~ch~o],ollGS used: to produce these minute componeats are called ,nl;ic¥';olabricaUtln i:(!ehlw,lvgie'!i:~ or mi,·, c,ro,~kfNin,g'., For. example, ~he Weewdim,en~lonl'~ nwcrostmc~u:rie8 can be 'produced ~ by remD'f~n;gp,m of t~e base :mlterial by a ,physic:3Jl fir chem:k~aJlret~chi~:g' rocess" p "w:lue.rea;.s: ·thin\-'ru~n de'fIDS~Uo.L1 OOChW,qJUiG:iSare used to btiUd :I,alyre:rs. materials Q.1iDl rthe o:f' 'base :m;~l'r.e_ri31~~ wUI '~eam these microfabrk:a1dow p'~ocesse8,and mmufacturi'ng 'We tec'bllo:~ID,gies il t(ltetaH in [fespecti~elYt Cha,p~rs :8 and :9., C'llITe~tnHcromaJD'u:facmrin,g processes involve significeat emount ;of'mi,cmfaib-,
The 8izeJ of eempenents of mleresystems
",:'1 '.'
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iI'!i~~t',io:!';in,1llI' n·""G~"I'O'H.,r·.w,~'I;.;':I!lIJ!!IIIi;l"c' ""!I;!I~, .. manufaensre and nacbninO!' \EI 10. .II',:",.I"i"II,i-i ....iL ' J;YJlJJ....L,ulrQJ!i.!! ,
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,,.'/Il.;.,e;t' W~~' A """V.:i!ollnnA..:I: oi':"n....' j,'b,~, lIIri'I~~~le';f;;ii'Ti.i!""!iiI]'i,i"'!l!' U~_~. 1 .~~IU:w· __ ..l~WU,rrIlP.iU 1~"'1 Ilt[b.~ IIllWIU,~,I;!~W ~'U-Vl::IJ~"
\L~ ilCl, ,;j,~~iIllO Oli;iI:1il ,Ill>!! ILJlJ)~r.l! ;tIiJlli~ , IlllU ..I:'''"'
,lIioIlIU.
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ero c,'\.!'~I...jq;ii:'Ift~, i.JI1A! on, '.'OJ.,' IIIi• u....

.:!I'I! ......
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cnC) fabric,arion teclb.... "d" ,,' .. '. .,:1 ,.... ,', .. ~JJ. ne.. ''[.r"ll ICOilcelP~drs,.~,. 'l-,~I u'oll . .' .... ',' 'Ii! ,c-,1ltl~,()1Y UJ,all, II!!I:S~, {O pro 'lice ,mlcrooi,eClilJ,ODl.rtS" 1'$ ~ eN(t vea ~ the proollcrio:n, ~f' a mo.nonUl~c: cmcuit at :R.CA in, :1.955,alter ilh,e :~n,ve~ti[oll tnmlis-, (If tor'S., The 'first, 'Ire. '\\ras. "fffdjuced, 3, '~e~r ,~arer b~" J'aJc.ikK]jlb~' of 'texas, In,~ . - , It ,1;""''''''- -- J'-------.! . ----, - ·-1 -~ ------ 5tmmenlts~ ,
:fa.lturiC.atio~~echnolom Js ,inB~pambb~; [rom flle :~n'.tegm:a1ted ircuit ' c
,-' ·-·,111.· ., ,,/II.. Iii," , ' -""..1 t '
,r-
. ~'Jtr' , Illlrms~.sl:o.rn,;L.,. ·'W""'.' liIiy
-]dM,il1iImi,,, W'O.lliI,
'-(-''fit
C, ':-'0,
,'i>~....i.1if. C
II~\ , lill!.iU"IIIIUill.!l!d!~ U,lIie, r '...., "': r 'L,.'iII.
,.'Ir-, , "an,gl.u '. 'f~'- .~...;I " ',' ". 0 " If.il!lUU,el1'!!! ,,' -,. miero
""'~IJIliOClli"Jlley:" ,',. ,
'J' D" ""1
"'f.~ IJI.. .... ', ~;-, 'iii'.... '~ .' - t'.,· ,~b,!rJ,u~a'!J,lo.~ ,(i:..... mvenuoa ~I , ne
,]n ":~
'iM'!UCC(ll!
,d............
',- .":1 '.: 'M :1]1,,-. ,;jr.~\.... ,i ,,atiu Wi..··.,. '"". nf,luliiI.LfiII,
:~-'-'
'I iI!\.;"ii:..., '[,-fli!U'OCu, '-,' ;al"""""di ,{• Im1cro~,

i. -.' .
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was ill, the ,!Ime year that Roben Nl~y(e,ef FaimhHd, S;emjcoJ~riI!J,c~.o[':prOOuced~e fRst planar SilirCOD=IbMed I'C~'lbdIY~,'the mext ,ge,n,.eFalliOl},of' IC~ i.'e~~ U]h, la(ge seai~e;
ilDmgtilitioo
smaUer
1IllJll ,I, fing:ematl.
fULts])
CM,
conlltai~ :U) 'miUio;n.wm'Sis~'S ami capacitors on a chip th~, is
. ,'. _. ,.,_, .. '.. ...IS-,.' t I.·.4'-'· -II M:" IIC~;:R:O'~:S'~<y··":S-'''IIE,IM''' '.'.

It .. ,: IS, a W.e." ..:reco-gmu~
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AJ··
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IIICIIO:I!ELE'CT' ,OINlies
"
·~- - . "D'l ,.- .. - "~,", Ai :il:aC~ ,",t;.... "" :mJ.lC'roeilie,cl'I,IUmcs, rs one - 0.111: 1!I.Ue :m,OS1;. JlW.I!OOn~Ji, I~J11II.'" .... ", - ..Jt..~IIn, .... ,-. ~! •. , ~,;;,;~ wli:fi_ ".~. ,_ -jll- ~,.~'-. D.Oilogi~s.of Ow.·tw'enuetb ,oe_uiY,'. TOO boo•. ,of tb.:e, :micrOOlectn.l.nn~c!lanical S~SteDtS, , iIOOui&try 'in,moent yean; wouM. not have: 'been possillle~ 'withooti 'dle 1imltUrlty ,of :miuo--, eleclJmDiics, IeCJ'm:o:lo:au~ 1iIldee.d· t- =~- .~,r1 ,enoinee:'fSl and, ~~,enl,dtm tOOai.!{lIi'S; l'dEMS, jlGl'" mWllU - .-,~-.~ ~~~ .~~ - ~ --- ~ -~ :hrt -- ~ -~,r1 ~ -~ -~"m' iIII!l\.-.I;~ -.:c~---:-"C-' 1"" -'--!~.,;!,!'~ U .,'L., 'MO ","i~ ---'--:--'0' to· ..WUi 'SlliSMe .. _!'L ;--~hi"U ~.- ~ ",.,:_: ~_'..:at.....1k . 'meg _:___.,' di~Y.1 ,7',--- ,¥'P-tlii:L~nlli"'" ofI,-=_,,:- ~- '--:--.~~ ~,OOu:'I!.I'JllIlJS ,. du ;are. -~""":-'r--'-' ._,_~._,._., mg~[4 ,ccmmnu'fa!briGmoo ·~OOW:OaWs,. HOlw~v;~or~V\~rem()~_s, on 'me siwBMiW'Qf ~ b [It"' I~;J" ;iI'.t..,.-. '1:.., ~i. ,.. ~! • "t. ' ., •• :~. ., .1\ L~; ~ .t.~ 't.. .... two 'te:cI!~nOdl:gIe.S :~s·not on_lilY ~_o_ac--OJuraU!.:" U can ,M_S:O iiO'ti Sefi()Us~y iciiDucr 'ILm;wC-l" ,adrv~ ol'Dliaos,ysl'G'W, devdop-BleBI,. 'We willI notice: tBat I[jlla-e am si,IDWfteant dW.. f~N1iIc-es, tb~ design Md. packagi:ng of' m_i~ros,ystems, Dam th,3C ,of ii*gramd. ·cirenits. :in. ,Ind 'mi~l\edmmcs" 'It '~s, ~eriLtia1'f:wI'MPf~, e ~pl!llii7~ ·these. dilffmierroes md deve:iop itel nooess~ .methooDlu,gies, and ~tmolo,pes actordii~gly~ Table I,.I ;Slllmma~ rims 'the: sin'Ulariti.e..s,Md, dHferenees, between 'lI,e:,two 'te-chmolo;'les.,
-;11 ~ ....
",,,,.,.'1);.,
t::...
..
~ ..
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...
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,__
,,
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~i"'lfiik'-""'n~""'I[ ·";;"II........ FrI!..:I;;"'" ""~ U ro_~ 1."!Ii[t:!:_ _~II!.!'!_ U!f!W ~rrli'a~I sooh ~s:'G~$~ ~I~
C'>~' ~:Q ~~~.'!Yi!J
I~ "-J
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.", ... ~
""'1'"",,1,:~
'I ;~,,,,,",,~1l_cS
[~~~i
iPerfQff'n91 ,a, lieat valil'e:(y d ~~~ecr~: b~lc~'~' Q [ ...."~i ...F,,i DR..:.~~Jk,;:"ji-j;!..;;.,i:lii [)~J.~ ""'".,~ ,"'f:rii;'",,"i , !\ii!~ ~ !IZII~~~.~~" !LillI]~
~II_~I! ~!i.!Il~ ~1iiii~.i.I u."1P'~~~~
l~'I!m~tlnSJ
·Statio:n,Glry ~~rllmhnes, P-nmaofy .2.. . S<t.~~lU!iEl$· 0 'CPmpnexpatt~m$ 'wtth [high ·de~lY over
IMIa,~;li"l!VlDlve i
riI,g C,~PO__OOlllt3,
C~m:r;dax 3-D ·~!ruC:~u~

:S~lar ~li' pa~t~n~.o:ve:r :~i;lI~t~~te~
~p;niIileRi~,
subS1rat:es
~r
eQnlmPO!il:en1~.I~ '~M~fiifib&~ ftC die' is ,00000pjaJetv ~1TOt€!med flroliil1 !DOl1!Rcting l"II1ied~' M;<:>,~' _, ,,,,,,~.u!'"el l'li;i"il,,'U!:I~~11 """ ....., - 'n
C
to Ib~1 ,afSs~,mb~d
:Se.-n.sm die is Inmrfa~d ~Ih ,~tarnt!l'ilglll1"i9dii9l.
_,
rrm~i;;....Alo;& c' c, ,J:m ru~I"P\J\!JQ¥
Uif~ :Fti.umOOf C'~:@ie~.~ajl tood:th.ro~9'hs; and

i@ilOG :Iiln...... !;;i';,~ ~~, 'II :Eli-lj;;e, •• iH·jI~-rA " ,V:I;.!!~bI! ~Ig!! ~1!.i!8!'I;.!!~
-,' - "1.-.!i..Ji-, a\i',ai!, ~S
Ma~s, md~:tlonl p
Fabu.tc-a1m
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No iio~:h.mr:l\ai 'SlaMaros to 10'iJovv D-!I';i"o(nf1n ....... ,..,."- - -- - - -, -~- ,- -, - - -A'- lii-.- -",.,.... ~~~-""I'~nW~!;;.I~JOOer 00 c!!J&L'l_")rne[;.-ngeh~~ ""'~S'
Man!: rnilCfri"i'~I;i!i;r":tif!"''''i''''~ !...-4JI.II,...!! ![~h'."';ii"!l' ,----"If,., ,~,,~~, .... 1.'\...... iIi",lo;.~;r;; ... iIi:~1 ~~ .!,,!.'!"tI,U8S ~ ~~~ een be, used fOl" pr@d!iJO\~i'olri D.istj'n~t.malrtlufacturing '!;ecl'nn[qlUlss
.
teohllilnQjil.lleeJ.~mprowd eM '~~I
,
....rI ....... i'i;;i'i"i'.arili~
IP,aiCkagin~1~'EIDhli1t~~
~smblr$ned
-,
is ireBathf~lywell
..
I...
iIi!ii'T' lEI C· 'M'A''F E '.,

J..,
.iii II
113
We may' observe 'fronl thee table that there ru-e indeed su:ffi(:~el~ dif~e[mlces be" 'tweeLl t~~'~WIO'reQlbm,)~,o'gieis,. Some aU rthe D),Ollie s~g~[fi:~(-'JI]I[ differences between these
t.wo toobno:ruo.gju, axe::
I,", Mi¢rosy~mams~nvolve~ more different maJtreri~l~ than microelectronics ..'Oth,~r than. ~he Clom_mcJlilJma®erial of silwcoml, there ,nre other 'mat-erials sut=h ss 'Qluartlz
Md.'(}:aJ\s ·u~ed.aJSs~aib~tt~tes, ra®ilic1:io,s:yst.ent.~•. Polym.er's ,~-ndmetallic llta'redals in are comMon run microsystems produced. by_ Ll(JA, processes, Packaging mnlerials, for rnjcw~s.:~gtem;s:inc~ude glasses, p~as,tic.! and. m~ta'~~ih, tie whwch
excluded in miereeleetrenies .. 1., ldicrosysEtUS are: designed :tQ perform a ,g,rea!l-er' 'vaT~~t,y' fU8CtlO]l,S tb.a~ of mi~l~im~C5. Tile maJl1er. are limlred ~ospecific electrical :fu:nctb)~s ,only:. 3"" .Many :m..i.C,ro~'y8t~~n;[i]S ]l'Volve~ :mo"!.d,mwg ~ parts such as :micrCfV,i1Jhre8" pumps, and
.. ,ill "' .. ~I ..ciII 'Al .d' :jf-II"JO') m~.J!ll]c '" s,YS$e:ms,. Ji,v.,I,J,ero~opn!Ca~ S.ysl~emsneeU. tD jlft}'vl'u;e Wn,;I~'OUtm?ftWt :~.!u. .' ·mn~i.1' :~fiit1'i 0''';-1': _'5f-:fI;q,m~,_AJ-i ereelectronics. on. ~I~;:.',n;l!l;;,,,,,,r [h"!Jind.: UV~~ ".;:'Wt· L:.,.MP: .an,\!, ~~!W", U!!r\~~~~ ~ '~ =~~ morving c-~mponenlt ,or ·aooess for Hgllilt.~ or '~lu:id5.,
,f' •
ru
{tii!!<?-' ~.,,_.itI:.AI.l\!I'.
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I"'Ji£Lu';J
reoui .. ~ .... 111.,;,.,-,U l'
,f;'I'l'~'l' AI ,~1. -j,U
,.t1iiCiLlJi.'I_r ·t~~....... "~o!l!.,, ~ lUJu""" l!l!.I!L i!;J.I'~'~;c;.II!J
.,[11:11·;z;V"'I',;Dom'." II;J ,~ ~'';; I .!O

r,J. , ....
such
r,J;UIIo.,
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u
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4... klJte~.a'ted,'CiJ:iC~ ,Bire rimsrilv[J a ·~o~d!lnle:l.lslol'ffiaJ~ n silmcture t~at is confined ,~~, '~1,ji]'i'i!'!\.rIi'lIjiIi ,.:IljiQ. mFjliIF~a,~~ _ 'w'~'e-MI'I~08, most mi.... ~J ~ rcsvstems involve nnlj1V"'iTii']- ~lj'>oI:Jl,~·'?'..;i ltv ~l:l~ .leOn1elby :~n.~ ' dimensions, :M:eocihanl,c:Jll ngineedng e design is dUllS! ian essential part in, Ute product d~v~l')pjll,e:f.lJtt of mic.!rosystle~nu,; 5~ The iRl:e;~tramdl,c,~lreu1t:s, 111:tW,cme:l~ctt('Jin:ie8 ere :i,S:O'~:ai~OO;:from tke ~l1I"O'l1ndjng'S once 'tboeyere piilck"age(t Tine sensing elements aF~d:nuu],)' core eJe:rn.el'US :~f!ti. '1Ij1I101'' ~~~iI!i~\i1!!,'Hfi'I'?' . .lh.!1 n' '" ........ ·lr",":N.'I!~'""'\I\~;oilj' '~~{iliPI~'~-""'fi t:~ 'L..... costact 'I!!i!~I··t_~ '1~~FJI!Il"~'"':i'"]ili1fmedi u-r.:,; ~.~WJ.,,_, '!I'''' 'which creates many techll!rucal problems 1[]] design. aJnil p3ckaglng;. 6'!, M'al1factl1ri~g' ,md pacik;a_ghl1g of nliCf'oe~ectton~clS, re :malture 't~c~~o~ogie~ a ··til' [ 1 _. ~:::!~:i-'-~titei . ~__ dl _ __ """'.J ~ _~L ...IIi ... .,.] __ · L. _ If'ro All· ~C _",OIl ~ wr __ 'n~......''~_111doc !lj,:!OmW,_.__ d".~~: hl!S~1P!IJ!' ;~t!':i;li'[i<uatif'u~.'T~,,_._ ·n--·,~~i'i'~-I:l;-;ili;0,f .--- '" .-~-<!;-":-'t.:il-[K "-, .~",;-i _.... " ~ ~ __ 11:!Lf:: __ mru.aoZYy.sI..~••\UJ:1!]1$ :mr.· fro., ·tlJat.~,ev,'el f :IDaltur.ity .. There are g\e~eraUy three d~s!tiBc~ mmlufacturi~,g o 'tec!h.aiques" as 'will be descdbed in Chapter 9." Be~:a'Use ,of·th.e'great. ·v.• iety ,of sKUC'tiWm Mld fb.n(;tional aspects i.'ll rnj~r~s:y'temfS;;, l~e :pa(;·taJg~Dgof these '1i\,",,:.4lti\~h"" ~'fl' ,jjnJi",,:~:~, ~IT:" irs i'n,~"lint ;to,;fj"-gOe at the eresent ~-:~i;!;_ ,r""t1UU_ u_lL~lI~~U !i'li~~O' U~I_ if!'1! __
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M:tni.amrriza~ton, is :tbe Qn~y \\r,~y to have ml.ewMd, c\Qmpetiti;ve e41gtBeermg' 8Y.s'1te1F\1~., '~mft1i1i"wiI;lnD '1ifiIRi1ll~J~tt;fu':: .'l'lip:*~irt1o;m; S. W'~'''1b ~~::IMe1~U..~:riIi'l'li;!:ll;,PlP-.!iIik,]e si zes tIlU11 The· prooefi 'o,f :mi1Dlja.t~rizh](g ,engineeMI 'sysfems is M on.gologr e(ftlol1 by !engi.,.· 'ne.ers,.We· have w~,nle.s~ed, tnMlY 1(If." IIhe results ti~ con.s~mer 'p.rod1ll.'Cts, with, mUfti bet. ref' petfUfllItMlOO but. mU.cb,'reduced size" 'Sum prooucts .wB.clludebait 'drr(}r~!, ea..era,!, -.<I,:, ~.'. - ~I ~~. - L - .... '\"n· -- -~'1'11 - -. ,8"-· 'I'll:. .."' . ". II., L ..... , 'raWO!!!!,! ,MJ,\il.ii 1~~ecp.u,Qne: .sel!,b:8i.,,,,.,,e W,~_~ '~ee ,w.rom e lUJ.~ow,~n;g·.. e:XHlIiR!p'.les uuW. IlJ!,'ese eil~' f'Orts. ha(V!e 'produced, even more s!t~ggerinl: res!ults in o~er, mndaroel1!taUy .importanlt: ecngineeri"n,g proo{u::~ts, .~n,It!e :~~t~ O l/'e3f,$l., Th~ '~s,:a,Qdou'bt tbat 'whil tbe n&IPW (jte~ ' S velopmellt ,of'nuc:ros,ys(e:m teclhnobligies~; ,~fich proce.ss willil. be aecelemtted ~,t,an.eve:ml ,
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'WliiLne, :m,Ost :s.en.sors and ,acc:t0l3tirlg' !oo:mpone:n.t's use sllko:n as Ute, prim3Ll)}!lnat.eriaill'I' ,otbe~ ,mare.rlm~suclh U ,DJ.ck,el and ce.rfijmics ~a,vebeen used, mgb-:a;s:pect-:irat~'ol,m1CIrO-
structLlRs I(~pect milo ~ tallio 0[' tb.e dime:Mio:ns of 'ihe hezlght. m '~o8e of'the sm:dac.e) have been su:ooossfuUy m.an!ufact1!IDred'by tb,e, LI'~]Aproeeas, as, sbaw:n in Fl,gu;res, ~.,,9; 1, O~ ,~Ddl 1'(~ Thls speciaJ 'milc;wm.llIW[factmruri~g pJ:looeosswill be descri'bed, :~Dd~mitlin CIl1ilref '~.t he, broader use: of materrum'i along 'w~(b -{h,e,,poss'ibiUty' ,of ,pttOOucmg T ,MEM! 'wi'til, higb ,as,,ect :fat~ol y 'tJj}e. 'LI(;'A process 'bill.vle pJ)ompredth~ producltiio\l, of b mirlhuurized 'machines" Macbio,e lttOO1s~ such as 'MiicmJ:~atb~and, a]lnt~t:elr;.s:ize drills. have lOeen ,prodrumoed.•
'N:' ·:t;; ; .. ,;.,;1 -~raJlIJU.l.~e.s,. Thi",e".' !clive[['4'Lm srze a~. e ve~~mce: IS . . ','J ;'.'.,',;r;,~~. ,.'If'"' :,] ., '1#'1 iliOOllllJta,- au,ODm, 'L,-.li; •""".,.,.~ III, m
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trolvsts ,oiekel :platimll'.,The :nric'~el :fUm, is 30 1Jtn1, th~c'1k"These two CH,S· were fa:bn.c3ted by mier:o, :prec:isioo :machlniDlg wit]h, ~emi'c'Onductnm:' precesses. The 'el,ecmcal motor'dlaJi .L..:: jim.. d ." '. h 1\ £. ,. di . "D' "m'..al ...:I WItV'CS 'UIC cars uses :m_2!gn~tlic:m uenen, 'W~m: a,rotor ue 'runt m' UIDlcte.!r:. ··etalI.6u uesi,p :medJod~logy oor:~ cam ean be found in an article by1tesb4gabarn, rt all., n995].
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MeMS and m..icn::ui.ysJte:W, products have beeerae irl,creasillgly dominarf:lrt in eveiry' aspeet nf coenuerelal :mHketp:~aceas. the illec'liilluolo.gwes, er ,micr.I-o:f~bric.adol1l,Md miniaf rtluizaliol, contwD!I.1e 'to be de,e:lloped. ,A~:the pre~ellt timet two, nt2rjOf' ~Qlllm1ereiaiW,
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:mam:ketts, :~b:Fthese T:lf(n:ll~cmare cementer storage g,y~'temsand. :au:tnmobU~. We wJh, Ir~ [Ii __ It' , '" f' ,p:Jo=ucts necanse Q~-'. ' 'L.,. d "'1.., ... ,,... C' f. tocas eur 3JtentiOD. on 1!!J;I,'e _Iuer type or us. ,L~ru~!Ili C1~ntenm: 0:',: :.l~
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:nll~S'y8rems :iJI au:tomdibUes :iSi tOI ,mm ,®Jnoomo'biillt}s!sa:tief ad m~ ooM'Oftable 'for' the riders Md, to moot dle, higb ftJ.eIJ effioiencies and ,Iorw emtilssions s:tfm;dMds, l!eq.~kei1 by gOYe_Ilml,enm.:hI,,11." 'fhe 'widespread THW.se of'these prod.uow can :~ndeed,mBle. the au ... tom,@lbilJe"smarter" :£0([ 'OOIlilJS~IIillu:s'i' ~8,. The tenn. Smtl'rl' Cilrs 'W'aS:first, mttodu.ced :~n'tiie,cover story of a special issae of at made ma_gu~m1e;1[51OON' CQ1S 19(88]., Many of 'U1e;:seem±ng'~y :(iCtimiOIS poodict!l»ns: of tie i~te]jUge~t m~-ctio~s,of a. :SDlru1 car aM, in :
l:dace in :todla.~'~S, vehld.es,.
Smart: vf!!mLf;::les. bMOO IOn'Ilhe e:lJte~si:ve use of sensors '~:""''''i ,alt""'~~ -,-, '\l~'-', ,~ ________ _ 'I;!~!1!I<~UU ~.i!b:,vr:S'¥lmOU-5 :kind, lof soosors are used, tOI deteet the en,YiJloDime~~ rGld conditiens, and &e aetna01' iI tDIS ,armused til, execute _ wha'tever ;aat~~-- are re(Jjfo:iImd to cile... 'Wl·'th ""~,:c-~ C-::-,-A~tt::' ns. _ -~ _ _ _ --__ _ --- _ _ -~ -- y _ _ -- ";11_ = - - -- - _i!:Q --:lJ!Jf::S,,-,,_'C]lWiYl,OD£.. M~cKtS!msom aemators ,a'l,ow IlImmDbUe m2l!k:ets to 'm!S~:smaller devi,008~,,and ~ms; ad '81ore of' tbe-m to loqpe: wilhl tlh.e s~ihUltiCiJl; iMDl much more e:ff'Gctive, 'W,!lY8., CaD1prehen,-, sive sumsnaries 0([1, the use of sensors ,aod, actjWl_aion,He avallabIe .in,,aD, e~:dyrepert
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199IJ,'J~ Table 1.2 :preseuts, some aj" the· ,endUfm!We,kstiDl: concUJtio)1S ['Of pressure elt~, ' ,SOlS [Clllou 1,1999],. 'De" pttlSSH-t range :fol' ,am:om'Obiles ex,t~DdlS,:&om, 10.0 kPa 'fo.r ,3 m,a.ni'fbld amaluh:, '~ms~1Ure(MAP) sensorto ~,OJidPa,fw 'brmi 'n"~~Ul'~ ;S~~~O~. ,F A'nrd I in :a:~~-()mO'b-ile-s 31~'be. 'C3!tej",ori~ed,-- - - !the fol, I"'P "'-amoH oil' 'DllanslfslC'ms , U!. _. . ~- --- ,it" - - -- - - intol - -- - - - ,r""
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Suspensicn systems
,(dJjisplacement~ pns.iim;ionand pressum
SeMOfS,
Md,
,[IDl~lcItO'v,~m,ves)" O'fujoct avoidanee (pressure ,~nd, d~~plac~m~BE§OI'-S}i ~
'.
:Na;vi.ga.don, (w~~ogrmscc;pe:).
jn, the ,cnpn'C8,
,of modern au:tonlob~es~'s Ulu8ua,~ed in :f~l,ore 1~20 ![Piwl1il.se:n ,and, Glacmno I989,),. a A iff:ew' o:F these sensors are:
"gln,e a.ad PoW,.I .•• I'nl Vario~s, sensors llia,ve, been. tilled,
I.
I.
I.
:M3IIlllUmld ,~.x';,~1ijtlojl w,hb pre~:5'u[re sensors,

,Airf],,[.lW 'COtimtto~.
:. '.'
B.JJnau~it,gaJ~, .ruySrus and conJtrol, (~e :Pru,g~re 1 ,.2.1)1 M OE~:t1k~bmrft PJi".5ib,omimg Fnel ,pUl~nppmS'su:re and, filel.~njectioo, c'ODJlro:t T'ran:,!~l_N~!Si,ol 'force alid press~re c:Qn'InJl Bnliu~ knock &tsot~O,liIl.'fof. hlglmir :p:>we.f'OU.t.pUll: I[Kuey,asu ,et at D.'!l9,5]
.,I,'I'~-) - -'~jL'I!.l'_ " ~~noi;5o ...... ~ _~ ....
The manifold ab(!'IfiI,~u~t--:r-e~S!He(•'~AJ.~'P~, ~enS~t· \V,M,,.... 0; ",'idw;t>, :F-,:~,-,-il.C-OsefaiS ....es , _~ , ~ n. - - - -'--- . !Illl"$_00 _f, """JI,~ adopted. by fbe; SJ\lJ~omodve mdustty~ilo.'tile: ,eady 1'80s., It measures :MAP' ,along:wiilih ~be~ leng~I},e speed 'im:rpm,tn d\etenBill1le '~he:ipitio]l, ,a(I.'V,B!HOOi' Thjjs,:ipitioo 'flm.i'OCl' 'w]m o,ptim,liull airfme1 ratio can, o.pti"~[tilize, powe1f' :pediomtWl'Ce of 'Ole Ie.lmgin~wJiJtll tow (be, emissicns, '1Ei'lir.:~~rdl~s~'Uri!iS - =,...., sensers w-:: -~ ':-'altd SC.M ""an 3r-e' ~~v~;ati;-'-~(f':~ili ... if-'-, ':Ibi'b _Jlj , OJili0: S I,I - - --It:I''''.- of'MAP' s_ -. ,15 __ ere (;:: ... _ .. , IOQ~ capacitive aibsroililJle pressure) sensors, A typlca1 SeAP is, ~bofwll.in .P'".mg;me. l'i12
____ __ ~ ~_~_ = _,_
[pawsel and Gi;achino m"S~]:., The ,mrull'~o:ld.gas emers the sensor atthe ~ubiI!Di1a[' intake sh'O:w,tI, at, the '~op 0:[' :Filgme 1.•21.a and b., The m[llmK.e gas exerts a pre&sUJre 011, a silicon
di~phn!m~1 whi,oh acts, as me ofthe two e1eclmoo~ In ulie (;·halJDn:be.t as shown ,~iI'Fig.,;; , _". "'i!""II,.... 1 ,..:I... ,n 41;::,' '" . rs ure , ,!,~~" ~" ne ~.!lecYf!n "f0 U~eW!~,[LrnlIm 1)1"'0,01, lllJ:Ile.arp'p,'Jre'd ,-,,'.-. .', rasu 'It! ,.HI '['I.., , pressure u~~ , :h;~'I'Ij.jI!'ll\, ~ "Th' e lap,pJJlleU, pressure - can -, b e '" ,., -.'I:: ,..:1" ~,'" "" - cO'J":re:~;a!O'll;!I!.l!!, .m,-;.,,,,,,.rII11 e.l:u.~'e . m - ,~,L, ' g,lp L ....'l.,-·" -,,jI;!t.. - 't,WO f!iIlOC,u,vUf:S,. we , " luew"ee:n u.lfl,. .-,', .;'.Jj, "t~" ~!... . ,'I.,;, ,," ,1:';,' " ,.,1Il., ,",
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c~tirc'Ldts e used 'bJI CO'DVm.1 tae, ehange of the eapa cita1lce: sWgmal 'Output: to electric H vOlt_\~.·u~~-s. FiwlJl'ie l.:22ld :s:l'tows;Il'IDe, relative size of' the SCAP uorut. i
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Copyriqlu
ed material
CandDd ,and Gcmvanlen ce'
•
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Seal OOD!ttO]()rUsplaaMDUit seMors and microvai}ves)

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Sensors fiGr OOifol,gim,g: .of w.~lds'~elt!s
•
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Sare1!Jite :n3v,igado~,~~lU-Or.8
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Vehicl. DJ'agnos6e. ,and H__ Hh IManllHing
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il.18 Ii ,AIPP!L,IICa_ -IIO,RiS,OF' IIClSY,' liN: OTI,HIEIR 1--DIU:SITIII:aS

'Other ooMliRercld a,plJieatians, ~f":MmdS -Sl!Jc'il, s biomedieal and gamic engwrneH" a 'till ,am emerging: at am. :asoonmjirn_g' :rate'o 'W~,will. C\ff~t- i3(ppiea!tiiamtS, of' MEld'S _, 'miWros,tr-sie:ms, -, Jn the-. f;b.Il~Wf~o' five ~~'h"cred irtdUs~''''111,, - ,. --J -., .. _I.!!i,~, :sec~"~,,
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27
'PI.URI' 1[!!1'3, [I Sensors fur 'ruhJre.! '\Jrahic~e:5 ..
:MQj~.r-Semar.s, 'IDr ru~ Vebi~1es
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is[ iMide die blOod ves&e'i~current m.alii:[e~ is ,~dlloU!tSOo.OOOunits per' year.,
pre8Sulie se.nsor~ To ID,o:Ditor tbe ,pre88ure :wnscidehe, balleon once it t
Copyrighted m aterial
1.1 ~pac:e en~,im~nlt'

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es
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'Ileerin,g
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sensors: ,process pri}ssure IInm_smjttem(2-OO1~()(Ij njw u
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Hdrar II te :~y;s-tems, .'""e ,-Paint ;spray
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:5-
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1~4 OpticaJJ '~Di_som

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113 Actuatilnn. tjs-s Piezoelectric; Crysta1s, Z3A A~WadOB 'UisingEl~trostatLc Pbr~, 2A· MEMS w.ith Mi-croacmattors lA;1. :Miao!rippeD 14,,:2; :Mi£lnm.otors· 2.A.3 .MicpoY,alve.8 ,25 Micwaccellerometem 1~6 Mic:rotltl!ldia
Zic4A :ivtIicroP1J!mpS. ".

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gooom0.s., 'Operad~j], IDI1i'these 8JstmlS :~lW,¥QI,ve8 t~~ passaJ-e !~lf.m1mrnt:e:iSlamp:~es in 'iJe Older' ,0['"nano'iitem,', '~n,elf~nl~Jnw '~LlIOO8nf' 'mIcrochmme:k, drrii'V'eill 'bw ,eLecttn'Ii1J~~,.;i!~dv~, '_'_' _ ,_. ", ----' ... -r ._'L'I,;,Ii..;f ., '_"_'" '·IJ. ... _ -·-\-'-,l·~~·--,J· ~ 'I!.,~' ,. ~I r ;nl. . ~m 'i!.. ,.:II~~liwn ., " :nwruc; 'meMS, S~,CIl~ ,elf.'ectro.~,t)sm(j5fS ,ao'u e~,ec,tro~~'O'rettiS. as 6~ec"tJl)t~)'I'uilWJi~;am_j,cs, :ru!l,"'· v1olVies, ~h-e dli,ving of';oo :ionize:d :llLIlid 'by rthe .app:~ic-atlon, f e:tecmc· flc1m. 'This :fanD o ,of :f1uid:flow w,in roe de.seriibed iu Cbapler:l )'oobJdon and separation, of species ia me ,capillary' tmJ.be-s, 'micmc.hanllelJ ,~e ,a~b.jeVled, t'e· blihe1ie.~t diffeJie-ooe of ,e~ or !by ,osmotic: :nilt:;'br~ty o,f 'mbese Spet~i'es\.IOllticid means are used 't.'O :id.efl1tify' 'these· spec~e~
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in 'ii "7' '[-:&";ili il',_~,jrli1ln 1·~ n\'IJ made i!'itJ'S!' .,'L.'::·1iffio E"a~~-.:II!'a I~. if,~,' _~I~'~~~~~ :~-ll~dJlj~~~" ~~ ~~~!~~:I" ~~· _ _ :_JkJ.~·~ g'ur~~,~~B U-I)-~ vDnI'inla' '~D.size.. ftom. ,a, 'few miemmeteH,'. bl a "..... 'few mil'~~,~'''"'leB '1UI1Hrt'e; A ca.'Y:"ru'is, ~,." "'"'C1' .. . . .,' .,.,' ... .. .. .... _oW~~"'" .. ''"''''I_ ..~_ .._~ ~'_ .... - ,.. ,IJ~:J ,__ .ed from 'o;mleside of the die, by means of' ,a, nUol-ufa'bri,c'a1lns 'toobmqoo. The top surIn_~1aLlu'''''·llIi.
;i\;o
,~;L,n.'1i'l:rim1O
intercOM_ech.,
......'if
,:.
'-F:"~O!illiW!'i3 I ,r.,li~~,11W'
;jfiJ1........... ,.... I;'IjI ..
"'rii:'~IIi ....
~IY!\~.
_I
""'''1;'","
face_ of_ dIe ca.'V,~tiU' 't1!i!,I~ ,~~,~T\ W"""'l:"JlU;~>'lIU, u1o..... U_!lif,M;,.fi~i~ii"i'~i'\frj,G'ip,ift t'Il'-":"'ffl'~'j_'j --- -;, ~~"",,,.fI""'~' 'iI['·~i:'~:-; -::;1 ~--.;jI -i _ ___ _ _~ __ _ ~-'J :!f~~ -~~'~ IlllM ~JI.iomlB ~I !IUe appl~U pre8_su.me On ·.-'11 ;d..,............"'" r~' ·'iIi'·AI~; ... ,... 1:.._ ....1;"·' fro- oio''L.."" m~uranu ..,3, :['J)ulUl., !FI'!1..... 'UI1d.O~-5S ICC iU~ Si!lliaOn YJlan,tu,a,~m,US:Uiu.~v' aries ~ lilli, me -,J),1J:m; v U;"\I,m ,r. G.I 131 .' -1-'
~--->-
• .~, -.'I·~ • apa-CEtars, ,Me comm.oo tt-MSuUcers, ,as, 'Wtiu. D· ,~.ctuatols 11,:milimusysle-m_s., 'Tl.. 'me C1 capQc.;i:ruee vaDmon in ,I, 'CQtwltm can be Im1~g'uted 'by ~;i'm,p,]e ,~jreUi~m ~~cb, s 'th:at a Wu;stmm~ :in,:fiiglim 2.l 0 ~,Bmdleyet. alL :~i9'9 ,. I]
iu
==_ _
u:re
,2'~;t,OI',1\ 'l¥\pii'call bridge '(or
.... ~Ii"i,e;;; ../I\Ii'"~Hi'II... \e. m.a,~.e;~ "r.e.mBRlij.,e; .... ~'!ii.!IJ;,.;'~1i'i'IJ1~""" ... i' ~'!;;!I_Q,"-,!_'~ __ """'I' ~I~~.
'ii~ifA __ I!!!!i!l:,"'"
The ellecmcca1. bridG,e, iw, Fjgu1e, 2~.lO ~~mibt[' the \VihMtskin~ 'brid,ls in, ,Figis ~@ :2~~:~"'~l-es~'~bu1ce'meiBr~UIID~fiiiJef!ilit}i!\ The V;i:iHr-';~~lec~.a--:;aeita'Oeearn 'be :rnlie-'.a,f!ulfed b~ 0' '!'Y'!, _ '__~ ~,~L . --1#'-"- _.- - - - --- - - --,.1
~~~!"i __--~~~g1!,1!'-"_.!i!1 __ -
'IIjFi;AfflIif! 1 'ii ..
1~~ll!:I_~t;
rnP' It''''jiI; n'-u-iIlTiI,ntt unllt"',o.p 'iiI ''iI''''!l.';!;J; ,iI!';",,'111'''"'iL'iiriiln,!li!'' r,-,;;o!~QtI'::nlilj,1jjjll.'.:n UJL~ v I !~~~L, ·"'''!.i I~b.~' :tijj~ tlliJl~ J!.'UUU·~llll~~.=,!tl~JI.~UVJl;~~lln-F! i
!~~
il'!''!lI(Iii'i,
be used ... , ;tD~ -..:IeJ"'~n:n]·:njil; -'., I~ ~.!iJ!~ ILL·· y-. ;,IJ~y - - Il~~
'me variable t:apaci'miiu~e in the, c.~rcuj;t:

'1.1
.dC'
'''iI;;ii'Ii'iiit'''!
l~~~
!(!) ~:
.+
A. n ~!br}/
,.].
!Wi!;!
l
[2;1]
'press'IIlr.e sensor' ,Ed
'tOI
w:lleE'e,11,C ];sthe capacitbce OOllstmt
'C' is, me clp-a'C~tmce clf me o~el' cap'a.c.i'torsin ~be 'brid,ge., The luid,ge is Siubjiecmd.
~ge
in. the C~'piie.~torin.the Dem :
sup,ply 'V'OltaK,e 'ViIJ~

i
:lP1pre 2..:1'1. Urulll~trartes,,aJ :mmifotdl aJb:S()rnwiIDe :preSSKe QdAP) ~i1JSO[ :for ,3D. autoDilfib.iiie [Chiou 1999] 'Thjj81 uses, a. c8pac:Hnm: as ;s~gnrutnmsdllcm., ne d~ arrqpmeoi of' Ih~ ~~ll,am, me, ill tile p'reBS!finX~ Icbtmtber Is ,SiuM!. k'! that sbowm In Fi.gure l..:22c"
~m~r
FIIIUM'
:& t t II cA manufold alb:sohiJ1.epr,e'Sst!llfie

'~at
,S~f'iSO~ w~1Jh capacitor
1ulnad~oer"
We'~ se;a~~JJlI~
(\CooIteS!i ,~!' otwa CQrpi(l~alioo.} M
Copyrigh ed material
II o,vefaU dime:ru~i.oml. of' The sUtco.n
3,,6 mm x 20 Jl;'m, t~lck!, ,A.tfP~cal Olil~pu:t 8jgnal of' :1.00 mV' w,a~· obtained. ftnm ,a SOO K, b~ackbody' :railiSimoD, !ilo:roe of gjn :~ 0:29 m W Icm2 widJ a response time, ,of
aoouil
chip on. 'wm,ch the tilientl.o.pUe was 17Uiilt. is, :3.16mm, x
:5'0 00,.
"IliUM :Lt S I Scheimratiic oi: a rmic-~othermQpii'le
_
I.
3,.6
mm
Cold j'W1C~il1J
KglOO,
'1Ii"io;-!il ... lJ;;,nI;Oiiritio"

lLf'kL"L~.,.IiLL~
.. l"_'_'
'~I if ...... !I.ILit!I:!II --, ...... ,~.tII 1I_1..l..IUiU .'1" ...
v 'I ~
1111ii;TIi,.1.~;...:ii'.. ,J,II-,!-1 .~ ... !Ii.IJJi'!!lrA,
,~~j]lncligm
re,gion
lC!!il'"OOIii 1Pi m
;;;!lIlLy __ ~.~~_n
W~'b· !i!lit-D-P~~",,:,.,-.iit]·,O'i]IIQr-v [M" ;:;!!~'o'.iill!in '_' _:~ .. ~~J. U1[~~ .. .. ·

~I
lIJhi~.lli1
.,
~JJlIi~_lillhl
.,
,1I~7J
t\('i~]
,;I1 .... ~llJ
fines
~!IJ
o:Jin ~
'1ZIi ... Q\r IJ!WJI! AIL·
+',~.."j-o:·r ,.
aID
~l
'liIlQI
1!IfIj.
'.'l1'lll1a....
,~1b1LLllIJ~W,
L·..'...ii;ii"',... l. ,.;IIIII!'U~_ U!W'·'l,lL~
fo,r movmg: or ioO,attoIlling som~!th_rng:.~~, The

:microo,stem, that [n'v-olve-s, motiiQ!!Dj,.:P:OIlir
ls a ·y,er.y .li:rnpadaDI part of ,a :pri~~-ip,9Jj. meaas are oommon1!y 'used for

acttrIaJljor
Copyrlqhrcd matenal
'I,IP'I!'
IIIL.,
Jr'M"lI. '~~
,i,j·EI;. ~~, ""'n.di a ,1"",~""".. !IJ't!IM<-.,;,."

101111
i¥Ii~II'\J.!.ijIi'IW~~
II
~~'11
l10:-iln"""
ilJfE~J.~1I
~I! IE:lI
gll'fi',;;i
IIU ~~VI!iJI U~-'I:EILti!tYl
""""n:-'II,!I!'"",,,,,h
c;r-'.... ;0'1
, . _ -.-, ...' -W!" .·-,L<Q'f"i'Il~1 re,pJresenu t __ 0 C-U_~~ :plate-s 'SefM\lt'ed, by ,~, ieleotri~Mltedial O.e,.~an electric iins!!Ilarfin,g ,m8!t.edal) wi.t:h, Ie d
IliUKlu-V."IIi~G' FG,ll'Ge.. n
'i;o."," ia..,,,,",,,_,-, -- , .
ili!!iI,
'-
..__.-.~
~-
.'
-I -
,Ft.".,•
I'Ii -, -
1111 -
JillIH-
U 'l"'!I!ilRN!II'I~,~,gllj_re
:11.__
'1C'~i'" - ...
"' ... "!l;;,,,1Il.
f} ''''1;1 . ',.
.- -'....~''-Th' "11pl~lll_~ I:.

I~. ,I,e.
l~m0
·'ilit-r4. -'i'ij _'iI.'(lI~! ''Ii:' 'iii.. - '. . ,'il . c-<&. .-' '. !If.i, ,. ,~. '(''I'l11ItF\ e.1~CII!.L,iII.cau.y C.lilLw,~!roA.lI! ,lY,lII~ei]l ~{lLecIli<Lo:.,aIllJ.V~, an ,iII,'Ui'Gee-.LI.ILII.}I"
-, or
yoltage",
,r
js,
,Qptietli, to' t'e' p~ates,.'TM's action 'win induce capacn.an,ce; :En, 'tile clw.g~,
-'
'~[ate8~ ' _wbidl ~an be e~~s,ed as 1·'''IIt'.&!'KI'

C
~, E\r'~ij' 'd- ,: _
A
_
Et€!j).
==.:r ,t'~,
'lI~l'L:'· n,.-,
FIgure :2.:21 IIE~ee~~ic po~enr1iaiin tw"O [paraJh~11I\aj~s" l ~ :-I:

I,
(:j3p,d'1 '
j'
One m_~y'~mqUIDethat tb~ d.irfferenoo ~!lie1ecltric clbar.ge 'Ht\Vee\i 'the top and batt.. wm, plues in Pi,g,IHe 22,1 can, '00,mmi)m,fLli:ned,as lQll:g &.5 a 'vd._ge g appUed, to the ~iYS~ .... h '. -.... ~,'IIIo, ,",,",,"~I '" • "'!&.. .A.~.; ,'~, Ai ,. ",,'Ii te-m. H OIW'e'ver~IY;~ ,c~ru:ge-s,IUJ!)ltare Slt'Oi,w, III eJ!~1.eI" _ate cm ~: WfSCJlI~g.eU, mstaniliIY p'I' by :Lhon ~krOui'ting: 'th,e,'pl~~~, iltb a ,c(J~ducw.r~One· ~y Urn~s,~ize 'tna;t, .~ ,electric w poten:tid does exist, m 'the·s_i'tumolJ llllslmted m,'Figure 2."21.'The energy- Hsociated 'witlll '~'s electric p&re-iirtii;W] 'cmoo ex~!oo u::
1i.,.,.
l',' _, [U' ..;;;......;;

r~"';;1
l V':'2; ,_, ;/;.,

c··_-.i_.~ ~.' ,~,
,~l
,E:r'E\o'WLV2. 2d
'~;.
I~
A, negative sJ~~ :is;,~tta£'tt0dIn ,Bq;Wl!tlon (2 ..7) because there is a :loss ~f' th~. o~ntiaJ. p e:ll~rgy w,iln :inerea;.;~~JmI, ~ ~ ,flr,'PlO:ieid,'v~~lq;e. ~"', ,~;C;Oo1"Iij"!l'J':l'f;Irt;~A ,,g;'Jl,q ......... IIf"""~ltillllt-l" .... '~-£;,,-~](;!i. ili-h! ... '~~, lIIi'i~m" l"':~'in: iii-l-.~ plliZi1i1i'~f!l .(-'~iI!II,1if.L~;I, A~~""'ii,nIll'l1), lit 11lJ~ ~~U~ "~~U' ~'.I}~~U~~1ti ~ ,1I,Vil:llillI!i.I ~UiU.1 LllLI~1II, . __ M. ~ IU,~ ,1_~~8I ,._ .• IIJ.iIl~ G. !Llll~LlU.i~: .
_.
. _.
IILi]
UUII
C~ 'IilNj~ 'be" ded'ved :&om tbe 'oowntlil.l '~mle-rgy'-IItT .... '~'Y'nms~oolin'l~ _ 'Ci"'uamon ~'2-7)'e: .. -, .. \1.
_ _=__ . . .. _.J _.. • ..• ~.~. ~ J ••• '.: ••
,FitJ
--
~~,
tfJ:u-'
~.Ji
I~
~"-2!' ElrEo'_, ~~f

,
.".
,t.-
'W· '.'7' li'1,2, "d ..,
.y.
· Ull'an 'The raq lLfire'Ci trave~ingdistan C B 'of the mavingl electrodes is ij = 10 x , O-e, m, which ~seCi.luivale.nt to a spring 'force F~ kti = CUJ5,(Nfm) x 1[) x 10-~ (m) = 0.5 X 10-6 N. Th ere ara two ee ts of el,ectmdes· ~nthe, system; each "Sel needs to generate C15F, or 0.25 )( 11)=if5N. By lIsing IEQuat100 (2~ 11} with ~ ~ to. lEg -= ,9.85 'x '10-'~ C1N-m~: W = 5 X 10-& m and d '= 2 x 10-0 ,m.we obtaln lIle followflng e~prsS!sioo 'jor 'the mq t.J Ired voltage SLJ p ply~
1
,.,.25'
~".
'1i,,=!J
~~
=! 1~' :x£t85 .2 10K x 101"'2){5 x 2 101

fo .1I'.-,~,~
,'[~""fi) in
'If-
vdifchl !lla,v~s wequjrsd voltage to be V = 150.33 V~ the

.;i.!L." .... ~~,111'i·a U~ ~I.U".;!I:LU.~
~I Ji'li'ri:'!iljii g&,lLIIllIIlll '~II!!'
,1,W.l1W' ~W~IUV-il!ta
~'iiiQ;I"! ••
,n!l!!'Pi'lit~ii"",: ~"-'
IIV"!",",
l~~U_I!i.?~Ij"!Al~
,~~IIj1IiPIl"fii't ... .dI:
~fV' I!JJJ'
'fIoj'b;i:!!;fo,p.
w~~~
n'.lii;;IFi!~ ;fiiiYl" 1RlI~~~~1'-~ 'n:l'i!it~s, ,r~~ vI] i!I-~-~W~i5-Jt~ ril.g, _
iaUp them. C3iUcS_mS ib"e. drive arms to 'bel1d~ whiJab in tum c:lose8, 'dle: e:JC!t~Di'" Si!OlO~m8 ~hr'gd,ppmg. These micro·pippers em 'be: adialpmd '~D':ncromDliiipulalors, 'DE. :tobol1's in ,m;icmmmU:lacrurmg:'proces~~ O~'MiccOSD:F.lary:, wm(gth. of the ,wi:ppar -, ....... ...:1 I .'- 4 ''U''~_, ·,t,.,.l .. ,A,fini· ~ if,~,Il.. [..:II. ' 'f' u " , ,p,njul~lCeu l!Jy <NJJJ~, et ~1l. ['ii ,001'1] w~a~ ,Ib '7iJ.', . ~ f,lm. ,IlL ,U~LW,,8 ,..·il··· - ~,",': 0:. m ~m., ~ opellmi@:
'tU
'n~
'1;...,
!_
,'-_
.1 cram, DI,S IA 2· M~-'i DI ~

! " ] ,'"J" . ] .
111'
,~' ". Th ~re,~. two typesi 100i 'H.cmmo:to6

~,a;'I" ~ [LIIHltvUiJ.lIl.~ ~
'1,:1).,
"',.. are useu,:tnJmc.romac~ A •• 'JI..~,.,..........A . ~l· ally, uev.u:es:: ,,:: ... , m'i1,""
,ail'jl!!o
~1,ilW" ,', 1"
'RfII,nit":,,,~' "'fr"iI"..,..
,,,,,,.,.A '~]~'~~'J ~.~inJ
IIfiFIInili' .....F~, ' ,~"U;1Jl~U-&~~
ILIIJ.C
"lli,,",bi~~';;;rrio"l'li t'~~Qe, ..· ,4t,_.", 'Fn"i,II""'i'I"'I'Iifi1n'I,or:c, O!!i.i-L'Ii.IUUUtLl J-,UII:!Ii.!'~ ,1,u'IIl. UJlJJIIr..L,IU.~LWU "l'W!
j. '. -
iii' ,"'·t,~..:I1 ~ IDg ,1,OIGe ,gel;'le!lil!!'QUI ,":. pus Jl
'"
"
'p..:i....-. ...,.:'Iiy." ;iI!i;'I,~.;r;-.1I_j,j"" '~~~,~, 'Tk",,; ,..:i',::A,_ lll1il1lJiU_U, ~_J~YJU".~ JJ:~J~ •. .IL[Lte ~U ,.;if' '~ .... ~,,'~I'I: r , ,- ~--,~:",~, ':',~,,,"Hi~: ~1"-.4" ,'f".... , tlllJ, .ll,eC'IlJ,,~C:llILI_,y e.nergll,~ ,mtS;UIIl,~~ e p.l1a~, ,5U~u,~, 'ilJ~ [i-,UiS U5
-e ..
rmied. 'in, Fi,gure, :t'2];, 'pmm:pm Ihe 'r:eq~ired re1ati,v'e Motion. 11n, :lineaf' :motnr;, :Fi,pme a :2 .'2'1.iJJmilstr.amsdte wurking; prin'Cip~e o["lle linear :.otio;m, betWeen 'Mo ,sets, oi',parallern, 'base 'm'I']a~. E~cll 0'1 the two sets[of 'base,'~ates CO'I1WnS ,I, numlbef of leiletb'ooes, made ,r ~,~ ~f !e~ecm,C'[:l[!1ud.ucD,g :~');ateB 'dilese eleetrodes have ,I,:1u:g,1h 'm: The ;oolD)m base ..,AI, :pl~,tehas an. el~c~ p,w~h of w., 'W:be:~£, the i~p Ibllse; pl91l.e has a, sl;sJItt:y diffemlilit piw'b, 'saJj W' + 'WI]" Th~ '(;W"O sets of base plOJWS, ,are :ilmlth~Uy misllipd, by 'W/,3'j' as, :sbo'WB :irm, Ibe fignr-e. We may_ set 'f:Je lOOlom IF~ '~'~ams, s :smti011l9~' S() the '~:on,r,r a _ ~,,~It-"" 'n'~at:esr can. rS:~ide '~leF'dle bettom :prn~s in 'fue~orimJlgl plane. TbJ~~ on eile~q me :pWr.' of o '~'~'~"ctt-oo~"-e!' --. CIA,' A'~ tb·L··_··,-~-ti··--- Iinif""trlbf'_'_"bI)_ "Jr'.PL'~~"_~~. .:. ~ t·- 'lb"~- ~l~ft·· -tmI."' A.~ '~'( . I Hi m' oi!1ioV'l'llD 10 . v,,~,. ;and.A}:1l'e ,fu]lJI,l/ alisned, At~ mlI1M,:ifiIllifi1l1tetii~: dite ,e~lec~At: -.B ,i!:Q!I,!.Y I... '--'II:'"n1~" .d, .y ~~ ~ . -. ~ ~~iJ -,€,v..~,~u. - - -- ~ --- -'"'--~,V\lLes: ... .:i:,B-::;~, ,ml~gn~_ b'-i' ~Lri' ~ ,same amOOOE"WI.]', OlU' can ene[tizethe misaligned ,pair ~B/' ;Mld] prompt '&e 'klp p],t,:es 'to, m.'Q~e by aotller WIl, di&tJnoo torwam. de, le:1LWe may i9JVisl(ge 'mat, '~Y'th~n 'the C-...iC poor is 'psaligned by Wt3 ana, 'me: sJmbs~uent e]]_e,rgmDllg, ,af'that :p"m would ptOdtJ,ce a, silnffi.1:u'Illtoliol, of me top plates: tu' ,th~l~ft, '~y ,moiler d'SbitnOO, 'Of 'WI]" The :!lhlottioo 'w,iU be co"mp]e'trOO 'try yet am01D~r' eq,l~noo 'Of' 6llletgmng: 'the las~ :pair~,D-lJ' . s , We~ l1la~ ,,7 ith,IIllS, conclude~ 'itl:a;t~ \l,l'~i1-.~ _J!l.u.~ 1V ,~ ·-·,-I,':' .....:I~'IL:. :c..,....... ojI.-:" m~ ,~jL,.• 'LOP ;":'I .:I! ~:ff~' ~ , :·~~~'e'~:·~rl, ... _. ~.- ~ - ~ .. ~-. ~~ -_-~ .. -, lw J ~QJ. CJ~CI.lUU.es ., we ,-:':: id'tW 1]!UI,_UJm base p:lates and prllpeli pl,t(Jhes~ ole lean create 'the, !Iooess~ eJooI!rOO,tatic 'fj'o~ '1l~M:me ~lli:JDe.d to ~ pr«".Imc d1.e~:rel~ti,ve:mo:tilio~ 'oo~eeD the two R'm, 'Of base p1~ ,ams..lit is read'iJ:V' seeuml,.. '~e; smaller t~e. ,FA ._. :~8ru.tctnmen!t. of the eioollDdl- iP-~~~ ~,- - :sm~ duwt nrese;l ~*1;'I""''''' .J ,it' -- ~ -~ _e i]a.1teS (he - .~~
P
:~
iPi
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'1
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. jC> IIIlnIl"ll . nT"II l~, ,1II.lJ:&Y : [~
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ULIJ
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'C
the
Dl:ounD '~rnus~ 'lio't:fmymicmm.amn, ,C3!i100 :made to, 'work, bY',iJj, sinBlar n""i.... ~'I!;Ciod U'w(.J,!Ci- ,nf: ~...~,~~ 'm~'il"lit,..,,~ lI~.... .., :~]. .:I~!il'~I'tlJ!1ilIi lW~, lk ib~~,... r,:~t~U_~ n,~~nil" ....:I1 'Iiil!!lo !lI11I[N1 1iI!!o,",..ilh\1' "'j,,+,;""lli!!i; ~LiI;U~. ~ _ULUItI.ZlI .1!.W_lI, III.!Jl '~aJJJIJ I QlI;IIJI,ti.!"; ~
pt~ipte,
.Il.;Jj.
~~.I;-
f"lf'!Pi'I!Ir'iIo~"ii!i,''''
'm'~91].. ,A 'lll.ajior. ,mille. :~n,:mjc,roR[O,tmd~s~gn ~lId, construction
is the bearings :foI'
u
Figure &31 IISohematic d~agF.amof a.lmitn]purmp,.,
~foml~b'I_e:
~~l0JllJ 0
dia:~.
~----...
\
Jj"'i.-,' .. ·11 ..... 'lki' !Jh_~,"",
, e-Mclr v,8i,'f,C
~nm-I
Ib~
ww~~sute,
flUlid i~~:
'2~1'SI.•.I'IM'" . IC' ··'RI·a·.... 'C' C". B'ILER"O'M' 'E'T,'ER"S' " I~:.'~ ,':__:_-~'
",.,.~,I,:__:_>__:~' -.·I.~.· _-I .. ~_
.,.'
A ..... ,oP.fi'@'iil;l;l!,..,,,,....,.;,:oi(t,'oI'!;:r" .I.~ !!li~ ,jlll1'lD''l-~~'"'',...If, ~~, ,AJ.1 ~~Ji~.I~IJ~~~ A,;lILI:'.I111D.a u.L11~aIIlJL
,Q
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the ,(Ijj""''''''~'Ii;Q_~"Q'';n~ !(.0"'" U~~,~~~, .~.,."'''''',1~liIi'i\ ~.lW'lIiJw/..

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,10 ~ ~J·!tl~J.I_1IIl
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mlml,6oceleoolliiW'B' ,in a r~r- - _ .... _.. became tll~ ,~,~~~,t UI. '~Eaim 'SleCtmn .'. - .. ._ .' .1 ,.,. ~Jllr~ d e. tee IS onen CJ;as;§b~L!.I as 3D _tile,I'i~~a,se~so~y~!.b. OODYiIlII.D.S lili'~ "r . ,-e '1-'·' '·~'e~>·, i: "'~~" :,;' ",.' ',{t""'~; '., ,.,...,...e, t'f' .:...;v~-·;- '" .. ,"-"LOnon ,e'IiB,m,~. .',' 1"10 ":"iL":""l QlS -,',! _ ., ;<.,fli" Mest at_ e]!e'rom~teJ'S.~ b!J..i11~-.l. QD.11-e pnnc~p,,es 0:r- moc"'00".nrt'Cil 1 VlmuOIl1~, r:'- Wl·'~l .., " .... _ be;~00d • detaWl ,in,Cb.apttt ,4-~Prin~,ipal !comJpo~,e,n1tsf an ,aooeleromelter ,afe~ o a ,~~' supported by spring~'"The. :mas~, ,is o1\emJ aUlacbed,'ID ,fl, dtul,tpol t~~.rprovide! rth~ necessarv dlMtlMni09 ef"fool·1he snnn'p' ,and 'f.le; dai8hnnt are ,in.'tmm :attac'~--d h) ,I Cas~lIIiQ' ,r' ',t:i . ".~ .• , r""·'··''- .. '- -.. -.----~~-,-., - ' .(I~i!:!t ac l',i· IlUiI:l+........ ,jia F'iinl;lr~'2 "l''i
, !II. [
, .. ,,', ,,~' "tu' ,'ii' .. ' .. .;iiii~,:', " 'if :41'; '~, ,· .; ,pas~,er , . , _1I.e..]' ,~.n, -,vent0,1[ OO.wuS,I,OO,'. ,;".'Iii., ,3illuU!~M. 'V~u!IC!l.e.'or . ,'.... ~_.;,'II..... ~'.,ne ,~OOJ , e Wlu!I, OI!JS~rC-\I!¥S", ,11" g' re:pre8e1lls, tbe, :gra',vltatiol1lal accelemti(),A; wimh a, ,niUllnedcal 'v,alu.e of 31 i'tils,i or
If" . ,'~', .1 ,· ...... I ,: ••
\i'j'.' ,-
Doo~tirve iimdus.frlr:W' H d~ribed .in ChJa;mt'j;l!f' 1- For Ie:x:amll)l;l;l!'- acoelmtinn sens:on, m 'i!.he, ,;,t"1Ir.'!i.I; +'l""" .-. .- useu, ,': a... e.• . ;5, :suspenSlom.,S(y;stem ,On m1mlG,oc.lI!J..lU!ru..oi..lllJ~syste.,(.,;!"-'u>i;;1,'"" .'.' -AI ..iI' ,,~ [L' 'Q,Wil:'!i,ir . '.. ~c=:~. mmJ_ge~ m. . A nif'L') wh~s +5018' rang0 ,acee:i~.radon sensors am used to actuate air 'ba,ls 'fol' ddver ,and.
L
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Ii] me case of ncro acoo'teroD1Jl~rers"igllunclfibUfy dJjjfferent m1nl~,ememJts are s necessary- 'because of' tft~, 've:ry Uull,red space available 1~, :mlQi'Odevices~ ,A mriR~ue
s:iHcoa, ooaim w~tb -- ." ." '. _ .., .,
.
an attached ~SS, t, loften called . ,seL, .IC -; .• .. . a "-:~~~~7.

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'1!l'l1ill"!i'lij'lill'llft,.i~'IjI,![J 'i!"n<:!i';"'OilII 1~~IUII,~Y..IJ.-u.LIJI,C;. li!lircu.w~' _. '_
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mrucroaooe]eromeret is illuS'tta!ood, in A'lJure ,'2>~3~in ,-,.l·. 'dle ma'S8, is'. attacbed to a e~ '~I:.!t:i]-_ .. .• _ [_ ~ _ - __ .'. __ _ - __ ' tile1Ve.f 'beam 'OF. pla1re~j whJcoh :~s'~~ed. as a, spri~;g~ prie2j(u:e:s;mmr' Is irjiwpiantOO ,on. tbe· ,A
_
Copy ri ghted m ateri I
:MEMS, aoo M~Crooy,5te.flflS:De>~.gn and MMi!.daotu~leJ
.1 ,con s .-",.
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es
1 Most, ftuidic ,sy;stemtS 'iur bjD;rechn1C®J~ma],ys.es can 00 com'.bined, 'witl1 u:adlwQfttaii ,eloobD~ ~y$;t,~tmS00 a single piece of' sUrco:o ,M ,ijJ, ~I~b"'-mlll a.,ctljp (LOC} [Lipm3Jn 11009]. 4~ Since many of t'bese systcems ,~ 'produced :bl b8itdles, t~ley,~, disposl!ble after use, whiclt!i eI1!81lre~,safety ,b~, appUc.atioo, ud !jarv,ings ,bl 'the costs of' cleanml,
and
maimitelU1RQC,-
A 'Hero flIuiidic ~y:8tem,(101]JllSm of ilo~de:h ,pUImps~hannels fd~oi_rsl' m1!teR, c o~ci1JlaJto;rs~nd, valves m, micro or' mesoscales, Hen~jf.ll [1998] defines dle ;S(!ope ,of a m&crotlmildics, systems in. ,a,slig'l1rtl" d~ffeien!t, ay:, By his oofiniti()u~ a fluidic s,ysltem w C'9mprBes, the folio,\v,wng ,wJajor romponelliV's::
It, Mlcros:eu.,Jor.s used
00
measure 'nlUid propeme-'S, (pressur.e, tempemt.e" and,
'Dow). .. Meo;y ot:"lbese sensors are bui~~on, die wnrtmg prllldples descdbed in
S«lloo 2.2; L ,A;e,tuato'1's used to alter the slam of fluids. Microvah,~ ,arIE 'bUli.lt. ,on the 'principles desrirlibed ,m Section, 2.,.4. ,. lditCroflll]~ps aad eompmsSOFS, o~mtm,1 3
011,
sim!il:al"
princ~pl:~e ,described in SectiJon 2.4,,4.. ,tule

)iliCl'OChannels
l~ ,Distrib~~jo~,cha~~~e.b regulaJting: flows, in vadous branches in 'rh"es,ysoom., eapjjUM'Y :~twO:lk;5t 'stith ;9,S,wUusu9.t>ed, :ih_~,F.ig~e 2.3 are Q~OQ :~n
miao,ftui'(iicl, of' 'DJlUci~tular' cr.-os.s ;SI~COOJ1i, suclJ ,as '&ose UblS'trm.OO in Fi,gme :2.31 ~ used in :matny rnilcro(flu'~~~cs, sy'SJrenu~ TIu:y
i~~
typic!dly have, ~pen ,cro6s(~;sectiOjl_ru ;(r.f sq,~ate, ~me~., Th~ diacnnels dJ.tiecttlo~ds, flows, of a few :hundred mtooliit'ern 'to'a ti~w'micmUten. As will 'be:
described, ,in,Cllapter 10',

...... ,&'3," I MicwoohaJ'iif1~I~ th ooncircM~e;r''cro~s,~€c1lio~s" ~
GlaM ~bs~1l'ati.e
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Engiineer'i,ng Sciience ["or MI:,c'ros,"",s't:, :/_ , -:,"',si andl Fallrl!cat;·o

[
--:
,.,Ill :_ 3~
'I - 'I< - ~ AI- - -t;: - IjDI~ro'!.WU)cycn
3..l 3i!3 34A
A'~Qmic Stru~c~ of' M~ttef

lUlls and lGlliz~ltiQn
Mo,]ec:lillar Theory of' Matte~ and In~e:rmo1~ulu' FCK~ 3,.5: D6pi~g; of .s~.~.ool1duc®o,n, :L," ·1'~iiIliCJ'· on 3~....-U Thi"li~, -D':"
_':'II;(;ll'!P.III!lll.IJVM
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3,.. 7
:PlMrna Phy,sics
'Ii~
3...8 Electrochemistry ~ ~-_.3 0'1 ~~_ ......... c_e:{;IY.'u!lys~s
3,!&2 B~ectrohydrodlYnwnic.s
~l,' QUl8rdu[[11 Pb,YSllICS Probllems
'
....
'41" 'Vi
74
'-Y:-I1" eJ,ec,rons· , -11-" ~~ llmmJ ~h' !c;aIL-lllJuue. .....are .. gUlY-cYd ..b'~ ·e.miL _'L·- t . ,., _~ .re~ea:s~ e .-1I;/t..,-~"...lIi.- - " "' ..ct.... of electrodes to an aocelerSiI-Oit.in, 'whicb me: 'h~gb~voltage eleeme fie~Jd,slIpprnics, tthe ne-ce5sar,:y" :t~lle1~ce-n:@qt~l aecelerase the flaw of :pf.lls:sln,g electrons, TIlle. electron k!t beam cnniudn~Dg hlgb, kiaette e,1lefg~",collid.es '\;lfillh the ~noleclJ~e8.of the .m,ediu!w, '~n l... !i..,.., .tII.., .~.,if'\ .~[.,~~... I tne ~O!1Umtruo,wIC~~aI.~r ed 'sJLiiere~~y M ~lll.., II!.. iomzes 'Ullt0 m.euUlm arter 1L. Jii.DOCulg out ,e~e,e'1:ro~s :[tom ifhe '~~dj:um ,ItemS. Hydrogen .~ndh.e'~~um ,ga~~ are pop~~~ :~onsOUiroe~~ fnas. dieated in. the t'igurf.e,;'O:ther ,Iase~ 'may be used; 'for [example;~ B,:PJ is often, used 'tGI extract positi ~'eboren ions. /oniztU'io'n ,e,~IJY is de;fim~edi,msthe eTI,e,rgy ~~ood~d! :~:enj'w.a~tOO ciuiWImos!U. elee'EO ilk "' .. !A -,' .Ai'·,·, - TL... ·.A ron rrem an awflil, {)I, LIIhllB OiDIZ0U1inMeu~.um. ,1II,U.eneq_y req,Wfeu ,~"" 'remove " . ,.,1-.... , c.; ·.t e W' . Ute nrsr ~'~ecttoil 'from the outermost omit, j~, much less i!:han lU"ilfaJ'l: req,~.dIedJ :remo'Vi-~g :€ilf adlditional e~ectt~n;s from th,e same m'bwt A'llJoptll(u.al ,io~ilMi,~n of a gas, r-equWe-S, QPro'x.... ...,1.-. .... -' . ~ ',. -I' oae ;~n an. ,e:aOOlmg)
W' -:e rerereaee to. 'F' L_........ ..<1 h",,,, ilk • .1.. ':~'_'lt~ ngure 3 ~.~.il •..iIIl e~l~c~mn beams sre gtl:u,e;t,aJmu. I~i~e.(n.gtne
gilD"
.. .,i.'; ._. !IO -
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~m:Mely,:s'O' ID 100 ~~ect:ro;m volts (leV) of :inrpu:r.ener;IY (:~ ,eV ~ ~,IOO22 IO~'!.'9 X jou~es).,
3.4 II
OiLECIULA,R, T1H, lEO' -.'Y 01 ~_. Mil TIER A[ -D -NTIEIR,-~-[DL,Ii,CULA,R. FORCIES
/~'.;·~1"<·· ... ~As'":li'" ;~<.~

't
Jh;tra e!ec~n,
Si"
"<,
r.
Si
'1Y'
~'
8~
'f3/
(:b). !llilooi~~ dopirllig
Thf 1U:~U'y~J·' p~- ocess ,. - me '~I!IIIU,W ienon- .t'!;.£ 3 CO:Jl;uO'li 0 _ iimlO:~i!l, '0' ·f.·" ,jj!"- - - s ; - m~na~ -'1 A!·'"""~>ti'·OIi1'i' --~ tiJ..- ·'or.uh< .... duefi - - - --t..., - t11"dl - -- - "'~ - if =' ne ~~ ~~i QW :WiOfe~gn - ".iII.,. -" '~n.to'se'leci<~1~,g-o--:s of' i\i'-'!t'~"'-.- in]ii;h"!J1~!!I,, ]1- 'is a P",""_,,,'iJimeDOO- bi~ :-,,-' ,!f'.-~_-: :-_ - -':iI~_:, ,-_-. - :;-'" -~~:-'i H;','_' mlO_Ii~r :--,-i.~o.. ..,.~i~l_ ~ _'" ,~,~,b""';1] ,,--- -,-, -;'i;.,~'t, tS liU::queJlitill)' ,pres ~ ___ __, -__ ~
elWt iD our da,y~,t~d8/.y life,. The spEead, of ,8J, Idro,il' of dmt. ~nk in a, ,pOl af',c'leu' 'W3it~r is one examole of dle dliffus;!'(ln. 1njE"OC~-SS. _Q ."m~,U!a ease not o·.,ul' 1,~,~1i[il w:-: ~._ _ !tj '!'iI,I"'~--=--'-I'~ ,""'1,,,..''''1 __ ~_, '\'If ____ -eA-----ril.l---L __ - -~ -- 1'--,11;'e 1-:-e:adi'iIIlJi' vu."Jrve .. the fapid spread. of me d!mt:, Ink in t'lmle,pot, bti~aIIS() 9~J!iSe the di]Ja!tilo~,,of d1e datk;, :ink, ~n 'the; :MixedJ liiquld wUb, ern.apSieldt~me., The ,oxidation ,of :Dlet~il,in a :naulral, elv,k-o,n~ men:t is anomher e-iXiam,ple ,f<nf'a ,gaSrtro'~idIdJi"ffot~()~proeess, I'd ,ge[f!i~f!~'~~ift"u~iOficaa d mke piace whi liquids 'll) :si():~ids~, ,gase-s, to' oo:~~ds., Uquids, to nql(l~dsas inus~,a!ted, IMUd 'by the mOlve, er.tampiJes .. 'D'·"'·' 1S a COmm(ltli, p:rotess, h~atlS· bSe(i.l, tliID .uop~ng, :S~:iiOonwa'We. 'wiuiI ,~.('re~go, . ~," . .-iII· ..:1 '" .']. ,_'lJi~US~OH ie:FS,
e ,M! _'~ ,; (:;1UJ!! __ '.",'j),. J,." ,.
SUJb tanees__ as ... _ IV:~ ~~ _ _

_-It!
~S!cri:"'_ftA,in '~ibe~' e~'~!l'~= section ~~y g~. '~Dm'e:a~\ir~D _~~v.~~i!! 111_;y.~

_¥;~ __ ~~!!
1!'iJiIi,
~J!I
~;iI"'!~:i"lir"",~'Il'i~J'!Q;"~~'~ .. A'~iff'''l'ii!'inln- '~~, ~!iJ~ .. 1I!Io."!

1l'~~,'\\I-'"I.J~.!lILau"j_ll~~IQI~~Y~I1i ~~
II ~l 1
used 'to OX'tdli~ ,2 w,arer suriaceo!, de,posi.tinl: desiJOO th~mlfi];ms, ~f' diffeJen!t :mateni"lJ, on, Ithe base srujM'~S ,and, bDUdl!~g~p ,epitg;~a1.layer'S O~f $w_g1le"'CiY~ta~s~bstra!te-s , ilm] lC~ fabricntion. It :p~ay& a major' roWe ,~ll, popl!Jlar ,c.he'nj'ioQ,J' 'mpo,,. d(tpf}~it'io,~ 'the te'"' V' DJ pFOce.ss .. 'M'" PltCF.OlD'lxe:rs ,~IU 1·ml'CfOr fl °'",,1'· I~vu::e-'S :re:q,!Utfe ...L. pse: 0 f ......., ........... ,. ~,c ,;, a'llry ,_illIW~lC ..ill"" '" lUte Ui~' fusion, :Pli:OCe8&e.S. Heee, 'Wi.. wn~,pra~nt, 'die Ibasic :maB.te-,m3Jriica;~ model til. is used. t~
,,: ..... , -: 'I
1
re:n1i!l'S'eDE tb~s.,v-ery' im-~anlt. r-.&l -..... _
--
It stD'm.~i'that 'the, COl1_ceftln'~l.(:;.n,o_f! a li:(iilutd L A····.··· ,iii] li;nllfhl, 13, w:iJiD'k.,~].!ii:i'--;C't_ ,C0;~_C:,oi!i~~a-~~-: in _ _ . __ _. _ _ _ __ _ ___ __ ____ _ _ __ ~"11~ ~ ---- -, --- --~,I W! OJ _ _ ..,J:u;II;;,iniy __ ~Jl
,Pict) ,ta.w
[~~~!!II
lV'
'nhi!lir'Siical,'·'ichel'Qjc-all [t;. n:roce-ss" J.'

I
--
is used as the basis fur mathem.ati'ca), 'nlode'Ung; lof'dtffusioo processes" 1000er'w,l1dcn the d~:r:fbrslon.effect 'takes
ru
but is Iml,verse:m,.ypmp:)jnolilJ~] 'm! 'ilhe~distance
(Pi,gure .]..9) is propertional to tllm didfefence~of d1e~ conoe~~atj,ons.of 1ille,'~WOUquids~

Thus, wi,th re~eFellce.~ to Figule 3.9 Md, with 'lllle HSU1l1!P'Il,on '~batC t~,w'coo, be le,xp.re~$sed im ,3, :nlruhemati.ca;1 fU-Ull ,3!~:
place,
> C~,if~cllt":s;
ai'
(3.3]
.J :~ :atoH1S, or :uro'~ec~]!(ts~ r i().nJl'u~oft~e foreign tnateria]s ~o 'be dJii'lJIsed o

into the s;ubstr.aill_e ,rumli'JJU~ri,a1 (::I~ollnsJm,~-sl
,D
c ;;;:;:: ,conre~t[atio;n, of the 1\Qrel P, 11late.daJil in the ~sub,$tmte'(,a'IDllls/m3)

I
= dif[~swn ~mcie;n'[~ 't¥Ii~iI1'i;!!n- i~I [('iIifn~:,'I'~) ·' 1 li ~~ J

,Ill"'~~ Y:, . 1Il~11
(jf
d~:fflJ~sivity~Qt." the fure~gn:rI~t'ertlaJI, h1J 'U1U~" s~'!il~nle
1:h~,Sq)Ulatreroot of th~dilft~sioucoe'\md}~nls~ 1J~'fO[ :Himected :materials ,ca, be V obm~Ded,'(roM Figuee 3.,:~., 2 The .d~f(QS:i();n. a fa.reign :m_~Wfir~)'iote- a silbstmte mai[,~riai is :iiUUIStlrated,'~n Fig:'" of
'[Ire
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=+======I===~+=-----====I!
O.ID1.
.~ ~[~""""'~~'"""""'I"""""'~~~~"ii-----..-r--~~=~====~===~~==~=~ 900
123'0
S:inoe e~lf;cQions, are 'lie: sources ijlf :~olliz~tiO:iil that sustain t!u~~ lasma, oO:il1.tilliuO'n~ p :sYIPl'l¥of ,e-lecLf.(I~S,m~s~ 'be mru:mitai:ne~, 'CQllS~,uently., ~ner;g:y' :~OlllfCe-'S, :S'u~has, bigb 'I' '!Id..... frD"~\ 'v~l~mgt,,..,1 .;;:: 'de,l,:,at ~,iiU~:~urdi,~en~'y sources 'HUlSt. [........app,I" A '('0 *L :gel1er.,I" get'tltO '\~x) ee le,\,!I, me
,Aj'" ~
tar 3.Jt ,~Utimes, Su:c:~ leli1~

'[lease eleeaens
:~s,I,~C~\S~3!I:j{ '{'O, aUow tIl1!eIca~,ooe: in :tbe: g.~:me.r8!lo:r'ID rel
on a condllMl!J:ou'8 basis
,an lelectric ,curr"C~~~, an important subject ,in nli,cro:g;J:ste~m, is, design and :fajbricat~o\l"
:Hlectt:och'em:k::al :reactiollS; ,fIFeused inl m,IUlJ' eml,gWD.ee:-1,run:g, p1'OC'~S8es. :PdnC:~'31,ap,pi)i:ca!t:Lon:5,of e:~eCtn1C~m.e,m~itr.y b:11mic:ro,fahrmcation and :m~,c:r()syskm d~s\lgn ,He in the'
'. ifj- , OWIng ,[:0 II
"-, '1: . "-. '.. _. , -,
'le.tecttccheI11ISltry~ whic'h
I,ST'RY' ,is the s~m~yf ichem1.'C31ffi reactionscau~ '~~'he pas:8-~ge -of ~ t
are3JS,.
:', .",. I' .. iJ~
polYlmu mo:tds 'with, '~in uffie'tal1lflj,y'eD, by ,electrolysis, {ta,e:LIO'A pT'Oce8:lj,~ '3& will 'be described :~ndetail ,wn,Ch~pte.r ~t 2. In ~~eclt-;fih:yd.riod!)lnMnj,c;pump~~,g!;'w,hleh, ine~~U)d\e-s odl. ,~le'Ct,()pho"t?$;is and b e.lf,ict,m... '~sis;' :"hr ddv,h~g ,capiUary' tloW' of flll1I~ds,in nl'~croflumdic SYS~~L a
iIH",~ :~'IIO'!;""~'ir!i.i">b<i;!!ililj1li~ti"I'lIi .I, ~w ~~~,~1,1~llu~~H:l
1,~ In t~e ,~lect.roplatil'lg of
iOI
'Ii
,1I.~,_I~,VtI!I~
~l'l'~~O~~
jill[ll1 i""'b.~ ,u'''tli~T;!'Tiellt~A,nil1>d,~,1'~t~ UII. IYJr\r.l Y!l;WIll.~~j;Ipr.;·~ . -lllfI!i.!'UJ~:.~" I ~~Y:l.u.\1J _
1Iy.,.,:t;!>;~, r~l Ui~~~ ~~ 'n1'I~-eC;c;,
'Q-'lil!!!! iI"!Iif···.~ R 'Ir.- v
,partioular :iLmparmnL'"e in 'mictofiabrieatioll. BJ)ecbUh,drod,ynanD~ IHl!lmpjD,~, ~xten~' hi, sb/~:~y used :m, t~~ analysru~ 'of various, species :ifl, b~,~mOOl~(!al :SQl¥~IIJts~ {l[ arU!alyk.rs~,,Will 'biotOChroo:IDo.g,and ,p~umareU!tiClWJ .dustries,. The wDrkio,g prlUJc;~p,le' of these mal:yt,~ ic~fd, ~~J;ftmm!S deseribed ill a.;apl~['2., 'We was highruigm:ut :~ere; elewr("rn.ysis and
'.... - !!i.-:","'
ii:iiJ
-1eetro
'fu'\A "1 .... ,". ·~:U, ' ';, .. '._ ".' _",~
clrod- \ll¥iiiDlm"l~ p' '''"''''"''''''aa ...... • ''.

~~.Q ," "'", "1';Ir"II~a._~~~:~ ,: ., ..
win
'oolb,
A, S(J 1 ,. Uti,Q1W that eonduets eilectri,e ,curre~~ 'is, ICaJned, an ete'C'tmtyte and title vessel that hold~ llh~ ···, ,,,", d I'll ~' I· Ji'.~ '!E'I 'l b lI!i.cllU~ '~! ,. e ]eetro 1yte ts eanec ,fMA t?,J,e'Ct,ro~yt;,c C'e'i~",Co,I,ecoo,yle-s ma.Yce ~I~ ..->11m~IiIit1!lns Oil' £. ~~1 ,~llseu salts, Of' :i'j)lliicaUy 'Qond'ucrnng selids, :P,ftssi:llg e~~ecmc Cllff1en~ Uwo~gil tme, Outd, 'in 'tIlIe eb:ctml:)1:ic cell can produce ,elw.rircall:y' chqoo :~O\li~8,1:0 tile. e~teclr01yr'e,. S~nce e.teckic mJJa-emlt:s the; i of' eleeUtolliS, th,e eitecb:o[ts in the C-DH-ent.cam alter 'til"e,a'tomic stJRU!cwre-s illJ the flJiWid mol .. eeules, ll:d;~carp :~ead,WI alQ~S, with UnJba1M,-Oed etecoons,. ,md free ions witb. electric ,ebargi,e-ll are thus p,roduoed 'IP, the :SlO:~~lioD. I:~ ood~tj,,?~,to tibe~eile~tt~~ytic'QeJjj~~tpair of :Sllhllllia£!l~d,eleetmdes Is reqllt~d :im order to provide, an, electric :pot:emfia~ iUI an eliec~ojysb~ prl~SS," ,A ~imp:~e 'exalinp,leof' ,el~tro'lysis, is, the d.ooomposidon, ,of' u:ilio]Jmo. sodiu'I]]J dllm,me: (NaCO in ,an el"ecil;m:~ym.~ cell, ,as nrnusua&ed in ,Fi,gurre J~ l$., El~wod\e~ He :pIDaced,.ail:. the (W'o'ends, ,of' tbe eJ:e.ctro~y~iceel], ,An ,e1ect.d,c: :pot~f1lii_w; i;s 9mld:bdit~d,,IJftel" t1111~, eleetsodes He connected, to' a, de 'sowroe .. Tlbi;s ,SOtlfroe, W'btCD ~suUy 18 a ba~, acts ,ati ,Oin e~[ec;tro~ o,mp ~t pushes ~tR;Uil!S :~ID on'e ~L\ectro~ p making it a, cat1wti/e,!, and, pUUhll,g e"lecLITCi~ from, 1he othel eleC11JOd0l Ito, :make, it ,8 __
f, _or-e,B('ln:g
iu
chRli-cal ,cofDpou~d, or :Slc"l~tion 'by 'o:ppos~tely clhti-g~d Ct)llUltiW-OliltS (or ioos) :movmg in opposite dtrectians 'lllHI\e1 an, e~fecmc :pooonilial d!ifIet1ence~ ,As we bJsrve I.eanm;ed, 'fram. ~h~
An'el~tro~y~i8,
ptOOf-S:S
iOjvQlv,e5;'fie :prOO,vu~don,of' ~~i;aJ

11.... _ •
clul'ng~-s
111 a
1 ,. seenon, a so'unen
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aterl
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., .... ~"
....
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...
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The .rare ~jf Row' In both ~leckQ",os~,(Jnc and e~retrophomticp~piftl: Is linearly p:ropomomJa'llito Ith~ .ap,Ued ,filBcmc fiield. These P~mpinl: metho& in'v;QI'~e, mov!ing: :~{) m~cb.ui~ p.ms., It ,WS, ,es,peciIU:y ~ujjmble·for _brlarwriced, :~,.stemsOldy ,I ;~unall .. :sllDple of' ~Ilalyte: ~8,eqlill~md :in. l1i~D8~ r CalES 'w,iw 1l..1:U, ~ 'af pumpiln,g itl! f11it«)flwd]l.c: :s:y:stem9" 'The ve~ocity of tf;u;~;.it\(IIving free ,o:h~.s bill~;deC,1n)phme-ucllU.lnpwng: can be de.. , • ...·.....'11 b.' ,s: '1111" "I~'!t\"'~ l' :t;!!'O:= ~ef'[_rl_hiW, "'Y' i~....... ,1J.~,liLOWmD,g e'JtpreSSi(}U, l,I)I~Jn~V:ac'sgno] ,..
~J, ~
,F:
'i = radius @'Ji':tUIl1 i

.t]' ~. -
!:;
've::ioc~tyof an ion ~of charge q in a h..omo'I~B~OUS :ftuJi.d applied e~eotric fie~d in. volts
n.
p '=-: the 'V:iscasl,~~' Ole flnid of

,;,!!'LoI3;lI:".l!l'.A. Ii'W1i t·'i,.;·~ ~1II_~IiP.u.u,J.i n,. ·IOIij~~i"""';', l.·:i'i ~1_~!llYI~~ Luul .I~
~
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110,!· 'C( _ 1_ -1'~.. , I~
:It Is 'Obv.~(JU,lS UCifmE(1J,!1ii~,OIl; 1(.3,.,12.) tnlt Ore 'Veloc·ity of the :Uee; ionsi and dL1l_SJ 'the. fluid 'flow lBl Uflteady propom»nal ~ 'tOe, applied e;tecmc: :tie:ld,i'D 'ooth, el\et~y~,
Copy ri g hted mater 3.1
.'...
'..1~
P :Io.w .., ..' 'Di":gi":"c~ ..-. '.-.,ilV>fI\-, ~-" i""'jj~~"',Afi (,'~) ~Aii~~~~~,l.r,}iW1(2'), ~ck'~':~ , , IlIU~noo,iW'!'uJ ,,;]51 IS 1!lJ'~~~:!' "iI. (3)1 Hookels, law" .,~ '",II!.:-,'ila~H"'j,(1i1~ie,a ~g,il'!, 'ifL"'.li~, 1('1"\, 1..;I7:~;S, ,(''1;')."A~_iIi;, '~nii, (~),. 'I'r,ib~,1if i'>~i!T\r ,~t~~ ip' , WKI. ._ J ~ "' ... ,:. Uu~~ ~ '\J~ ~l.L~Ull'ii.P.
1;"'I;,I''!i.Y,;I,-'IWo ~ ~ ,~ ", ~_~ _ ~~I "'.l.Id~r,"~,.Il.-:J _ 1 ,~,Y_.:JI JlllIiUI-jj. ll._IJUrll;).1 11!ir."~"'ljf.·
~ __ , , ~,
....
21of) To maintain a, ,]as~,

lL
'Blecib1OOhemmtry':blVOilv,es ch~ccaJ, ~dO~8, (2.) [on~tio~ (I) (3,)d~sjm.m of' 1rl1iY' lubstalloe clucsed by an eleetde current.
,{,-"]i,Clio ,';.,
:needs t~,')I:kee" s.u,ppI,ymg (.1.) Ngb, tt.mlWramm~ (.2.) ~Ib pressme~ (3) bi,gll deciric~l, 'tie:id 'Eo die pla.sma, chsmber,
'ODe
i'y,.:.IV es iU.K;i -~:.fIc~ :ti.Oifll!, ~ .,_. ~~~ __ ~,' ,m, _Oil, ;'.;-, ~'In.,..... P,M.!I!'U:l.K1_~ ~ ~~ ,of~ (' 1)1 C:"''''Ul.~C'''ll''', (2).' ,chemica1, ebMrliiYe8,. . -v-. __ , .... ,_,..,~.
.,~ '-',
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.,J"'(Rmp~,.
'~,'.'.,~. 'lW'iI.:,ii~'it,'-"" ,sii7'~ D:I.eeU'U,i(YSJ;S ,"

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,\,;;",1iOiI1U:zaUQO ,ill'll,
,30~ Blootrol,l§J-:~U~ , .' an ae \~,.I" a, de 1Il,.-" either:m.ac --, or a, de: now-er sUilitn:I:v., ~2\ ~- -~'1' ~r3:~~-~--~ -... . ,~,;r~IS '~~'--:-s,·ifl): I!IIse -- lr-, '1:1 rn~, e~ectro,l.yleis '.,~:m, ,e~W!:w~ .• '. .oiL."", COliltaUI1,'W''j' t'l') +'~, ,S(lmIUUo:n, 'iii,.....'.... 11 '~ .. (t) ,........ ~ ('iii') Iti.:l~ -;. ,oJJ'"t ~ ,:j~U~.e II' ..• .!.:mll,at,
---J' ,f,"1;" ,'/
a Stait)S~ce_y
,'Ii..~iIi"!"",ri',-.~
Ib-~·:',6..... ~'~·:-lic!'>1~nnl"~';M) 1I;iI,,~----~,-:PO, . tentiili · ~u;; -,pp~-~;...~-, ~--~~ .. :f~cmc.'·· ' __'~ __,'.
t">iIi"t~4"'~;t'!M' ~'lle,i"!'f~;ii'!' ,~~i~r:r.~.:;0, ,~H, e'~etJtti()i.""si~ nt ~nUi!l.!!""H 1I!io\1.. ,..~.~,m!; ~~~ ~~- ~-- - , .jJ ~ ~ - ~.P:S:S. ~~ Jt""',.,.,...,,,", ,":I. ~"I nJilli mluue IS~.',,:,k.~ (;"'1' po5nl, , e l;-.. :ftiii;(jr(ilt'v-e;~! ""_'.' ~, _ _ 'U'iQ4 elec~~_e;. _ , '.~. ;It 'n - f"i'~'.-:o • IIioilte . J. < c -~i~,v~,~2): 'I. ' ~3·.,·')' neU!~'~ _ '_ ' U.U\1I IJIIM~ _I , t ,13. A, ,c~e is the (1)1 ,positi,ve" (2) OOgaJti,v'~ (3)1 neukaj, :eJieettrOOe .. ,34 Electroh:',drod,\::'--' -',:' ":~: dea]s, >'~:1Jh(1)". disso~,Uti:OJl (2'). :motitm (,3;\ ,soUdification .... . ..... ,. ,?j ., .y,nmm~ ... W') "...... . . ~~'--, ,J - ~ ~-,---~ ~--- ~-'!o;~,!,."" ~~,~Q!
=c=c= . ''"''~'.
35~ The p.r.im!lpBJl use of el\elctr~h,dnldynamics :im., ,mic.rosy,sreJDs is 'to (I." ,eontiacl: ,elec11nI,8is, of minute, Ichemicals, (l) meve m~DU.te, amoonts
!ilf' :fJuid, (3) dee.ot nti!nu{e, amaU10:t.s, ,of 'fluid .. 36~, ~Weccr-O-Omlom(: pu'mpin,g: :ws used ro Dl1)V'C m1nIi1i1:e: mIlOlilD6 of
(1)1 ,homo£!:-~noo1!ls~~) betem,geneQU8~ (3) ,my fluid in capiIbIy pa!Ssa,p.s~ ( 37~, :mleck-uphere~ic pump.g is,'used, '10 mO'Ye mirFllil!E, ,amounts of' I( i.) hemo,pnoous. (2,).he-teItJ,ge!il~us~ .Y :Ruid in capiUlaf,Y' :PWiSag'e8,. (,3) 3&, 'Quantum, :ph,:Sfcs, j:~ '~ to' Id'eQit!d~ (l,) :ph--ys;~ca1l: W'O''Iri'~t af' ~kJroSI' (2,) energy ~s~, (3,) oolision~,of a.toms :io, ,~S' , rand, :nan'O~,smms., 39~ A quanlUiJl :n::presents, Ihe smm~t ,lmOUn.t 'o.f (1) mB5S~ (l) volume,,j,
of' a, fluid under an applied, eloctdc: 'ne!ld,
41 ~ ...
(3) energy ~t: ,any :~y,stemcan g;ain orlese, Photc.-- s 'h-:ve 'Llb~; IlI§ MiUiOlIJ 'm 11) an el~trolil '\:~2.): D.e-noun, ~\,,7 zero, t,3.\ , .. ~- ,la, __ I -le ...'1i----~ -~ "t-, --- - -, - ."a - , ,
:Pad,1 Descripti.v'6: P.ndliems L Express the ~riae 'w,eijht af a hydro,gen and, a sili.coo, ,Imm ~n ud,
H'i.'liifill....iIi'H;i;I!,t~~
lLI.Q!.Ii",~.lJ..~IJ.kiI,i:l1
;(HHili:\
\U:.l:IUJ .
_, '~' ..J, 'llilih'·e. _!II,~ ,I. n. .
IIIlIlIil.r1..
n~
=' l' U ~1-9'
,lilli_".~~.
'lfI'1II~iIt-.i;!i~:
:2~ What do the 'i~tomi~ numbers" ,Wid,jiilgrroUp D!u!wioor.s.'tI'liD. a _m,odic tmle ~? l~ What. :15,the d.es:mable wvellof ,e~,ootric mSi($i1i,vi~ ro' N_Rte;,I semieonduetor
elocmrica1J1y oond1!l.c<1]li,g?'
4~ :Elplmn
:the, phymcaJ1 lnea'U!W.Iii,!of' 'lhe ne,§B,tlve si,g" ,arttacbed
to Fiek's
law In
l!quaticnl'~ '(3;:2) ,alfiidJ(3;,3)., 1
,SI De,tepnint ite optimum temperatures

J
6. Plot dIe distrihutlons of the oone:e<ntratiionl of' phMphams dD,m,s, as a 'fhRct.t'OD of d~tD :in. 'ire siUoon ~u~tmre in Example :3,.,1. t. the, time-s, lO'~60~ $lOt 120~ lSO,~, a
,of silicon, tJ(ii(lstt2tes,fol" w:hllic:h,doping: ,of iane-ftjc~!, pfrioslihONS~ ,• .Ii 00r0n W'e 'to '00 emied rnli. by' a diffucs.iofjj, :pmcess,. Also, what is the 8o ]JI'bUity of these, dop,arnts ,at these opdmal t'Wlperature:.s:?
,and t80 minu.1Is" '71 :Detennhte the time requrired to dope 'bofU~ :iRWi tthe siti'tOs 'SU~ so 'liat the, Rc~d!tihd;ty (If the doped silicon, ,at the of' 2 jtm is U)~9' Q-,cm~
_th
Copyrighted materiel
In. :Chapter.~ we learned mali mDry :mivro pressilre sensors work OD dre~ .pri.rn:o,iple of' conrvernng fl~ft :in ,3. &:fOrnled 'tmn silicon Idia,:q~. :kidu-ood !by .ap,pJied.prelStlIe~ 'U) the: d_e&1i'redOOrm. t'el~c8 ~ ooqIut. For' 'most eases, these dlii~~plS~, either in. c.ire:ulat[t :sqUHe ·or:~ctall'g,u'[ar':!!itiape;; can. be ·tr1C'a!t-ed. as thin p~ s!!lbjected 'to lateral oond~n.g Wli.iOnnl, aip'Plied. :pRs&ure. by Sevel,aII, Idoea..·form :so:~.uno·ns ,of plJ3Jte.tle'tuii:i1J,gcan 'be :iuond. in. a, useful .ref·, erenee and. WQinow_· ..:Kri~ger 19'59',. The govemi_DB dljjff:er.entilBll ] ·eq~ation fo·r-'~.e 4enec,tiol of-a mctanpimar.' :plate siubject.·w 'Iateral oom:ln,g' CaB00. exPFes~OOU:: ', a'2· + ,82_.):._- a'2w .... ,iZW.')·.··- = L .. (. 1[41]
j
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b~"
or
~iapt:n.aQm'Ilitikness h ;;;: 1,3.88'1'IJRV. ma;Kiimum def1eQtion of the d,Ea.~hragm~ w~~ c~n be ffet'ermined by using Eg;tlatioo (4"7):
too mJnimum
me
\Nitti m = '1/':"
....
:.&... :
w.'
=-,~.
:16 x 3.14 x ~190,.'00J
=- 1/(.1.25 = ~-Oil a x 5. 652(16, ~

1
-X
1} x _(,300 x _1[rc6f ~ 1()6) ~, 16 x (13.007 x: 10-5)~

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4" . ...n...L- Ul ·.I1J6'" -~g,~~'.!) IS ilVi:iUi.UJle, " T! [1;9S'9]l~ simp~iums.olu11(m. ,cm, be :found 'in. ,A,
iiiL:l:,
(P'.AI in '~u.s ease (see
[~8]1
Copyr igh.ed rn are rial
ill"
one ~y r,adi y see{ram the computsa results lhal.tile m~imul'll1 strl8~in ~fHaphragm 'i,smuch mil ow ~hB-'liel d s:trG8ng~h ('if the mamr~ whiCh is 1000 MPa. The al. m~imum aef~e~t[o~ D. t01'5 fJIffl' ~!3,'Sffl·aJIbecause ot-the 'srnall ,arBlB. that 'is &ubof leered to tifi e i~reSs.~~.
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v~LI"a-I"::ili'IiIFIi ,ii~ .'Il.@. u~, _ :.lUIL _lJ!IUI\I::ll ~jJ Ullw
basis ,~:.,.-, ft"Iil';)""lIj"I"'"_",""';i'lia'!lail!'~~D'iiiaij!' lUI

iZI! II.UJ!ii.;;.Il,ua.IIiJIIi.I~J~-JJU ..JJILlI_IWIl~I; I J. .., . ..
.....~j,~
1~jJj;Di,~:&,n.., U_lWi:lLI~L •.• ,,~
p&atddilS ,of 'flese dle~ces, sueh u,··d!e ,mmerda, sensors used In. 'tb_eailr. na,g d_e,p~o"nmnl S,vs,teJHl.!S In. 31JWltomobi]e:s are 'I'ilm~mited,i[1 Chllnmr' '- and dle wo:ddi,n,p; 'Il'fnllc:~n'Je8 ,are '~ .. :1:"" .. . ~J' ~ ~ - ~~ -~ ~-~.. ~-~ = 1If"'_1. .. d-e-scriibedJiLnChapter' 2-. We win [-e-v~~eW' fundam,OOmIJ pri.nciples (!RJI'meclumL\CaI. 'v,i,'fie ltfatiion, ,ad :i~ apPU.oaU'Q:trij ,~~ :micttla~W.~dtF -design. in tms sec~lall"
-~r_
-tI!
c••
,~
..•
_.
'The Silmlple:st mecil!ui~a[ iJb.ra'tjon, :~y,stemis v '~~prin,g FiglUlre ~.'J'a. 'The mass 'tillt-lit 'is,hUlIlg::00., tile 5'n-rin~:w~d:l,a _ rr ~
-me
sJs'~~ttI, :~UU8.a:ted. n as i snrill:J!Il' oo:n~t_t It "ildiliu:ares ,r 0
Copyrlqhted material
,X(.ij, '
I!-----===~=.',.t, ,
I
,I
:Fig.ore 4,.1.], UiusUales 'l,l1mldtmianl;phn;g o:f' a s.ySitem. We :realb.e ffiun tli1ie ,g[~pb;~cal :l\ie~~~latiol1. :In,Figme: ~. ~1. marti,,aJlfhough the ampU!tud\ei of 'v~btltion decays con'tlnuouslJ" me· mils ,remains, in ,o5ciUattOry :mouQu :mr. a l!Jn,S; tl!me. This ;Si,[lWtiDll, eb'V,tOl!llsly is 'tbt: l~t desiltablle as ,raw' as maCbiine, desig~,:hs concerned.
AI-3'-~ iiIIi ~. _..•
IR'e-s·'.,"na'ft-:1 '~V1"~i·'r.-'I':'''I'.'11-' ' .' .. _.. _.-, _ . . .. U . . ••
In, -"~
iiiOli
,~~!Jj
d~,X{t')
tk
-'
+- ,t'X(t) = ,F"o, ~sJnal' '"

,,,",,&' '*11.;;iJI; ~'U'lii"'~l'· ~A~ "",..;il 'iJ.,ii UJ"-r ~·,r.l ~ -1J,'U....
I~rll
"lII~J:.:::""b- ~'r[Ii!La n ~u~ :If', i,j!l,
~'~.--., IU~
'm~Y~-II'1m" I~_~.'T-'Ul~~' - "liimili"lii'll~,t-IIIiI~" ,

I. I D.AU.L!IIY· .I ,
Sol,vhlg 'BrJtmdoll. (4,.21)1 for- ,1'(:0 ,gi,vle~,

,(I;.~,t,: -:=~wj,
11"(')
!:'ia
-= al-):,~',a sm tel' + ~ SID, ,ea

(' '. .,
[Ul]
:]1 is, seen Dum ,Eqnation (4,~'2i)' that' X(t) '4'

t
is; m-d~oorml1mte: 'wb~ul Q';' ~ (d., Howeiy,er Uipoo1 app1:yi!n,g :L' Ho,imJ,~s Ml~j' &e, f'allowing SQ]lWtlG,n ~s ,clbml~M!d 'for' mils, S'iK~(ia1 cue::
om; Le., ,X(t)

I
Mt:MS aoo: t!ifcrO€'f' s;tem~' [;Qsi~1ll and Manutadum, " ,'",' "~,,,,)II, "', ","-~, '" - -, "-"
and
and _. s.o;
. fin !Ii..J."-iII-lI11l ---
=,b(,')" ~ c,t(,,).'.
-, a-
='
m,~I!(,O =: 0
~.
I!!'
[4.27J
Substituting: the relation ;1(1') ;~ ~(I') ,+ X{l') :w~tro Bqu3L~nn (~.l;') leads 'W:
,nI£:(,O + c.i(t") + bet) :~,-,nl(O
SirliCe, &e auac!bed, machine viJb.l':a!tes, wid}, an, alDpUmde ,x(,o := ,X' :swn, ml-, as in
,BqU8,-
tlon (4L.25)~'Bq,uat~on(4-,.28) tailms 'tim,e; fttrm~

'Goi"iiltaoon bAJ
(~4,.29') is a :&eQond~or(J.er nenhomegenceus dUimll,uaJ], ~num.i'M;ami ~ts, 0--' 8 ~ lUtbO~ICQwsi~ts,of t~ part!h i.e., 'me; ,ccf~np:re~en!tUJ 'so~~itlon (eS,) [amldthe :pMticli]il.'
~'~I
solution (,PS). 1'he CS of Bqlu~ttio~ (4,,2,9') ~c~ be :oihtained :from tk, :~,OMQg~,neotiSi pomotlj of' '. · ba Hft11~t'iO'
it, .~~~ lL
ii'iI .~~ ':
,m:~(t),+ cf 0')
+ k~(t') = 0
'111 " III. ill
whtcb ~s;s~m~l_ar to BQ'Ula!tiOO (4" :~,9) :Uth, the :f(lrm of :m,lutku'll presml,f'd :~n, w JEqUl'tltm.S (ll~.:2Oat b, ,a~.d, ), :1'0 anY' 'of these ttuu; eases 'for the CS't '!he amp:l~tude of 'yjhra1ion e
,,/:14<),, ~\J,1l :.
~'il:'J
1Ir.:J ,iii
,~]-il!IU1'''''''''r~""A1·'1~IJ P-l\l1"""'lBiC ,.!i (li,A, 1[0" , U_~I'U~. ' I!1i1 o:!iiiljli'.fii Ai .IIlU~U'DIi.cu ,i5UJ.1-IW~J ~III:~' ~I. , .....
The; pm1 tnil't ,is cri,d,cit~;i'i~ the aeeeleremetee deslglilJ is :in the FS 'of Eql!l!ation, (4.29)., ThiiB part of the ,so.'JUUOJl1, [can be ,obm.irnedl by asSIlIlm!ins thatt
1[43,181
, (': t. ft..
J
'~
im
..-
,=,
'~I
':"1
"),,]; ("" ", ,
"
I":
'-!IF'
I~
,m[,
,,' __
---
"):2
II
:."
'
"co
_",
Other ty~1 laf 'beam, ,spriD;!fS ICM, be: uSled, for micreaceeleremeter d\es~p.,The rceade-I'wiU readUy de:dve the equivalent spriwl: constants, 'fuf' We centndJ_,y' lcaded beams Uhl&trartedl i;~,:FiJI~f.e:,4,.:~a 00 be It; ,(48E1)Jl. s :~tIl~ $(~~--pilySi~'ppomd beam S me : Ipring and.lt: = (l92E1J!L]' f6r' the 'fixoo~end,'beam spring;.
:=;
FI'I,UM 4..18 l~ li3esml spr~~g:s, ImilCf(laCcele:r:Qme~,e:r,8. lOf

f-~
"
L
I~ Iii"li;
:ot "~I ·R
11,.,- ,".,.,.__,1'Rl ,,",";'"
~~~~--,~~~t;;FJr.,~a~D
,~.:,.m ":;'.'(0'
'"''If " ..'" ,,.,.

r:,,~. ~~,~!I,
A,
£AfII, ! I""'" '~'F:.oul
=~ ".""S~,!i!'
1..
'''_.,jl
1!Il~Jle
..... ,ilIi1
••
,."
II'~ .'-,- k'· ·;1:'11" t, ..II '-" '1I.:.;;d~OmeI!FlC,~ilJInCLIOO t,... ... II '. ':.". ii:-III"m UlampU1:gl ~'Of sq!JJIee'2e-i
,r..
0 CUI
'I,J[))
o.e
Cfr
(lIJ~1
O~9.21
russ
CL60
0.2
~13 0..4 115
~lOO
(11.18 072 ..
[J..50
(];,,45
0,,91
(tOO
'1..0
O'A'~
EXAMP'l.E
'
4.1110 E.:st~mate U1e· dampingl COBlWhJ~B:nt df spri rig as, illIUJlStll'a~Edn Fig,u ra 4" 22. i
a. rnlc r,oaL::c9Ier-om~it'€r
IUlE:i.ng 8. can~UeiV8:1l' b €'8!m
Flilare 14.:.-1: II .A. imiClt(I:aCc@h~Jom!.'3reT with I~quiddamping! flu i d.

I
ti ,
DaITIj;t-~nl l!Ji~: n smic:ooe I@il,
The damping! coefficLenl foil' ih8 case in FJgu(J!1 4.22 caM be determined by usl'ng E:quation (4.~a) with l 2:: 5DO x , 0 -e m and W.= 5 y 10-6 m. Tn e ~unoUen ',W J L)
is (t992 by inwrpoiatfon 'from Table 4.2 w~tn WIL ~ Ci01. The nom';naJ tUm ~nc.kn-ess ~ CBn tle determine-a by the eve rage max~rnum i deflect:loo of Ih~ beam along ths length. or simpjy by setting th~ gap J-{, :;;;;;. ~ 10 as shown in Rgure 4,.22. Th 63: sa optl on of the latter va,~e Ieads to a. 'iJsrv small u value at c -- '9 x 1a~33 Nmslm.
For ,~Qjti~ :film nlittle. of cump·res8~ble ,BlIlalwds, as,air; a i!u1.ueexe [U!lmber S sneh is wnbioo:u,coo. 'T.IDs '~UIfmbe,takes 'Ule ftJl1awl.ng: for.m I[Starr :~.!'OO]I;:
I~
s~
..~21-Mi~1.~ "/;
fl~ ~ ,
:[4,.39]
Copyrigh
ed rn ale rial
Figure 4,;,Z!I
Dampln g of a foro~-oalaflcen 'mr~roacnele rorneter;

L = 700 iJ-i'd
TnpView
,n
,!quiltlon (4,,32a.).. C-OIl;~Ile:lltJy one :may e'X.ped, a ];~ $i,gnBJ OUJlput ~fmmmj~ro an". eeleremeter wiilh, :rnaw'v~rue of h as ean be. obs-e.~ed .ffOro 'P~p--re4·.1.5.. :~o,w The, d~
illg
tfu e ,·ampl",! etic.,ret III ,mIeFOd .. 'f . '. , aceeleremeters :is indeed, Vl~ry small, This s.itmm.amoDJ.leads i~O '"e:ry 'S'maU va'~ue O'J: h "in a
'.' _',,'" 'I . " . "'" ", -' I " .. I .'. ", " , _. '[ .
',<' • [-
A.;s w,~·" V~0'b·5e:[V,e,. 00"" m II~, last t.wo e:xa:D1Ipl~ - "ha' - d .. '00 .. . ~".
I'
t','
_ .•
'"
..
...
coefficl.ents 'enhuc,e m;be s~glal lJJtpll'IS In mricroacceIe:romelets .. C
'Two,veh~c~es wI1th roo,pectyve masses tnt ,and n\ are' 'lrave'l i'n{~ in oppas:iite d ireoIDions at velocities 'V~and \12. as ilius,~ratedl ;1 Figure ,~t26. ee~l vehiid,e, is BQ,tliip ped wUh ,an n E ~new~lasensor (,or mi~roaeQe~eromJeter) builffi: wi~h 8. coof1i I~v,er~;€am as e[)n~igurs{t 'jin IExample 4. 7'. EstimaI~e the ,ch~:mlecWi'Qril of tihe proof: mass iitrnthe; ~\n50r in v,e~icle'" wirth mass ~ end ,aiso U16' strain in the M'O piezOliS51!stors embedded underne:3lth ~hte top and bottom surfaces, ;ar niS bealm fH:~'arthe :sUI",:port arfl,errthe MO 'vehioles ca~ I!:de" 'We have, the kd~()wrn.9lrri'~nrmaltjon on the 'mitc:::roacoelerome't:ef from Examp~ec 4'-7:
I'
3vailiifule fur 'th"edmJign ,of D'"ao'bridlges [Bollw,stm, mod OeijseEae-r8 19~1ll]..The oo~u-' tioS),of ,8 ,S,pecml ease 'with, tile :foUuw,mg immal ud,ooundary c0'l1I.ditignfi,~ pre8e!l~d below' I[Trim :1ggo~" The.! :siDmon '~:sJ lor ,R, simnlllMzy 11!J!n,~~A~I, bemn vibrruinfo' :in the :rtrst l'Dnde~ as --In,J.' . ,r.",~~ .~. ~~l:I . -~ ~ -~ ~-:illlum'aled, IlllJFlmg~M 4,.29 11'm~foli~lli~g Illi:tlaiI, and end ~omdjuJGns EIi.Fe used, 'in :soiY:'" :i~_g :Bq;nanoo (4,.,46)'~
:11.~ •••• _ .• 1, • 1, •.•••
--,r.
--~
"
~
=-r!
'
....,~:
~
lL--
,:{
,J''I:,,'-1'-)
'lL'ffO_
t\ ~ 0 ','
10'" :.
'
_''IJ..~,
''IIri!-,'l'
:i!i)'" ,....:....
!Ii-.,
.-.
j'l"
'!il! .I,~,
t-wo .
:tio !Ii.J.~
~IO'-'
.'"
1M
'Figure 4",3,1., These lieb'cuofts, are mOR d~3fstic.'wiith p:&\lgJtiC~8 laIRd lltil.ymers,. rOH9'" Date~y~ l]1!ar~rills,!iJJsed, .~y cure ,e~m11ts, ,of miao~e~sQ~ and ,~~llat6f.Sj~ .., for ~I~d. i'il~g &iilicolJ, q)Uai1Z.!, and 'Py,re-x. ,I'~US~ lire, re-ll~ive~J' msensi.'tive to, tile~ 'tem,pef8ltnJre-\,
'· ,,~. f' ~ "",,1' "".. A'~ S.~g.mlJjcat c~ia.Di~ ~),'m~t'~niil, piO'perth~s ate O.ot, ~M.~LW ]'0 iUilU]ise A ,• oom,!.l~vj~, ponOOJEs,at e4e~ated temperamre~ ..,Ai'S!G from Flgure, 4.. I ~'we cibs.~e dlait 'tlllei£J1iao", 3 ";e'.. ~ '~I .. '.•~ UJW·'t&ll!_p€lnlmte,. ,i'\gmtm, .'&" 'Ml.".... l\ • pi-It . al pr.rti~ ~,~,' :liIDaiwtja~SI:runcmaLS'e 'WillUll ... 'YS1JC- ... mest u~Me
)1;;. *'1;;.,
~-.:iI_,"" Jt,~lIle Ai .,iii p:reS~Dy 'Ii~m,pela.NlK.... '::-:1-' UJle-lnll.~~EI. m.ail>P1l.WS u~ ,m:,m'OSIrmlcros,,i s~ •. , TI ir.:k:iII-. ''1'\fI''t ," . ~.~.dependeD! s~lfic: beat and coofficin£ of tEwrmal eMpm:lStDmJof silicon.,
_" ._."_
~-hanges,am :mcme:'~. Pl'QR{[)Unced. ,in,packagbli ,nmt~dals sueh as ,adhesive:.\i' sea1in,ij and

-
...;1,:, . , . ·:,-b..rut.="",
'
. - ",.,.,":
... 1,-"
,"",....,,4' ,','
,,' ',-
--t"
. ""'"
:'~""U-
':'IIi,.:;, ~,- --c'
C -.
1---'
V.E.GENID,
Itf,. ,_,
~l
'=.
l:::
Y~~,g~'~ ]1_ij;Q(h~.~us,
:plas,tiicY,f~l~~'l!:mn~ i]:l~umatete:!1:si:Be ;iiJ~mgt~ tn.mnitill ,co.nti\(IDti,Ytily
Lk
,=
'Cl:
Ie
a;
speeii~
~:a,t
~~m~i~nt '~I ~emlaJJ e~~..si~J~
'~~~
SDeclfic h~t~
CQe'lfl'C'.l1t 01 t~t
~ 1<3
~"K
Od557' Od~W'
e~f1~
'1,..400
see
i2ZOI
"U-,K
~o
'1,7'1'e5,
0.1332
(]l,65151
200 200
300
O,;i6~l1
01::7113 O:i'6S,
ij,S32
Q,MQ
'1.~m3· 2',,22.31 2:,4.32:
2J5;111O
~~,,25'3 ~"e,11,4,
4.00
~oo
600
~lS42
44····,JiII!Iii,
_ ~ J'~I~
f _ . •.. _II"!" .,. 0__ Cree"t, D_'o'~ali~-.

1!I!i1!!l~~ __
O~Silicon
(1) :EI~c: f;tsiJ5,W1~' !leiter ('2:) SiJic~ (iioxideeoatiug
(a] ~,mU .;time-n...~oM
• Balut1tm
W'e -rfiay IU:S~'EQUla~rQnS(4.49) and l,4J5D) KJ 011oU late tlie inlerfacim fuN)eand ~he fa.d~us of Cuni\Blure· of the nested: strip with fa = '10 X" 10- ~ m "and b = 5 x 10-6) m, Ttu.li.S, by substituting, the ~e mal€1:na~ p rope l1igg. Mel th~ d irT1efn;iicfrn'S into Eqllattions (4.·49,) and (4·.50). ·we·tHl\f.e the ~a~ues 'for llfle interfacfa[ for-ee, F and the 'ra'd~ug,of a'!JNa!ure', pas t'oIIC\IV9,:
F~
{2,l1 x 1O~~ -
cs ~ '1J)~~)10
-
{10
10-6)(5
1 ~-____:__~~
385,000
x 10t
+- '
1 s 190~DCC x 10
P' =
2(1fr:!( 10-~) 3(2.33
x 10-8
,' 1 = 0.3&43 0. 5 x '~0.-5) I]
,_
W'e q~aUZle' mal' the interfac~al fCfCB is S8 small that ~ ca~ be en Hrely miglected. The Il'adius of G~,.nva]lUfleof the bent stri p, howeve~~ne-eds 1.0 be, used to assess the con:8spondili1lQ ImoVlsment ~f 'the, free arid. whlch can Ibe approx'fmaled from ·the s ~tuatlon i'll ~strated in F1gur-e 4
i
.se.
[4tS?'a,]
,a;io.:nq 'l1irue x dffie-cUon.. a1nd

I~
w(~ z) = -
~:r
.r
r- ~ Z +.~(bMr)] ["
:T
«(
V) ~
m) tk
,a~ong the ,z:direction. The :normal :fQl\'QeaJnd ttD;ebendirD(g mDmen~ dne 00, ilenlH1lj, force, ,NT ,and ,M~, are 'expressed, in. E'.U!a!tioo~ (4,54a) ,aM I(4,54[b),~, ires:~fivelj',
, _, D,lfiI'
TIle,,c~rvimre of '{be,'bemrtbeam can 00 demoolned by the mUowing e.t:pre.ssl.oo.:

U,i1~ ~.". _., m
[4.!8~
in wbruch ,/1 W3, the :r,adlwus of
C'Uw'vMu:[re
,of [)be 'be lit [beam.
Det,etJIntllml€! ttherma~ rs,~lresses alii!d :s;trailf1s,as weill as, the: ej,Ellr'Owmation o,f ,is! ~hin the! beam
1 1~5aM~'r '~hJe! surfa-,c8' ,of ~he beam is, :subtec:t,ed 'to a, sudden 'hea't~nglby ~he rerop sistance heating o:i:t~le! at~aohed thin (i-oppe.r 'film",Tha te:mper,a'ttJ,r8 ,at: the top su r[ace, res'U!IUrug ~r.Qm~h1te' e~lIJtjng is ,4Q~. Th,e geometry' ,8Jlniddimensions, 01: the be'am ,are, h iUU$ltf8!t'9d in Figlure, ,4.. 0. The, beam' ~:Smooe of sij'l:poon and I~'as;the, 'f cdloW1ing mate'riai 4
1
nl~,~ trll~~I!;i"
n;n .ro!i"li('jj~~;·
~I ~~IE
IMass dewH~~ilY.p= ,2.,3 Ig/cw' Sp8\c:iifrc: ~'H~att = 0.'7 J{lg-C,C c

Thermal oonf(]ucti\l'ity k~: 'il.57 'wfem-'QG (or
Ooei1nd'ent: of' '~her'mal e,~pan8ion~' ~: 2.33 x 1(r""~v~c Y~~;;m.~t~B, modulus ,r =, '1190'1.000 x '10,~N/m~ Pt]~SSCHt~s; Ir'a;tio, p = 0.,20
,Jllcm·'~C-6)
Ell- -,., "I' IIw!I!.1U8 ·4-'
4"..... '0'
I-I n .;i'I;.
T-:~uJi!::on, learn ·1 b
111""1"-' ""Iii"'; slJ,!Jlb!j.ec.~, !JU
L>t .. - J~'i .. 1IIIeaungi:·II'~". su rrace. a:, 'LO\P " ..,
,1
'2,~m.
Ccpyrlqhtcd malarial
t_
['~5
:_
1
~I
1B'iQ'{z) ,= 1'90 000 'J< 1Q6
x 10.;: -~1127.§
5 >t 10-11
z·tS x H)-a
n-4,125· x '1,04J" :4,,167 >t 10,..22:

X
~ 191.1 i ){ B (1 to 0 ..1:3 10-
11)5 z)
:!C 1~ z)
~a('z) ~ (1.25(-07 ..t );: 8)(1 + 0,73 '10+i9~.~g·;'m'
1(2.33)( 1O-i)(2.1 )( 11lQz + :18.1!) 1.23z)
= ('~1Ia.78 X "O~a -
+ ,(~3-22X
1{)~'1'1 ,Z
+ 44.15)(
'0-;7)
Th~ maximum stll'ajn~ occur ~t ~hB ~~p ·aoB. Numar] Gall Vcalues cf these s12rains ~lJlr can be obtai l1Ied by r~lting,z = 5 ')( 10-e rn In the above ~J(press~cms:
e~, ~
,B~ ~
= ;S1~(5~ l C=t!) = 91.61 X 1Q-~ ='
CJ]C92%
i~
US, 1< 10-ifJ) = - ,22.93 x 1O~, ....;; 0, 0023% -
The dl&p~a.cements,at the lop fr'aa cornsrs with ~ =. -:!:,~O X 1a-a 5, X 11 m can 'ce o~m~ ~Jre from lEe,Ua'tions C~ r:I B1a" ,enid (4. !J'] tJ):
'4.
m and
l -=
';;;:
500 ~ , 01"'9 [(5 X 10-".12:7.5 + (5 )( 1 a-e)(5 x 1(1 - 6)(71 .47' x 1C-iJ,] '190,000 x 10S 5 x 10-'1'1' 4.161 X 0-22
=. 0, lJ4!J
R .. "
fJJlI
22)
x 10'''6)(500 X 1D-~)2 W~=-~----~--------~--~--~ , 2(190,000 x U)6)(4,.' 61 x 10(5 x 10-18)(71.41 0.25

1'90 000 X 106
1
f5 X 1 C.,--fl)1,27 .5,
. " I,O-~
(5 X 1)
'"F
(5 X
10- e.)it.S x 1 O-tiH 71.47 x 1: 0

,2(4.167 x '10-:?2.)
Z'
Ii)]
X '10-'11
',ri6
+ ' .~ _~,25
1
19u Ouv x io
(2.33 ~ 1Q~~_) 1(J~ >(2,1 x loa J~:':
2,B.8)z
ox
=. -C,tH2~
The 'Clirva.'Wll"B ~h~ Ibent bMm ~6 ElSrfm!3Jted ~fom Eql()!tion (4JS8) to De: of
U· FIR'A" ",C···.:.::- ..&

_ ". ..' ,'..
-I
II
IE'C'···'HA-N··' >
I,
. f,
-lie-Jill!!! ' . :__: .•
,A~'!iii:('\ii"'~ M-QfM'1iV M~',-~,..f~ ~"JI,~ U","",

~~,of
!I'}lj'.........
,iI!I.~
~."""
'1[I[iIi~~,,": W~ .. ,1Il~~aul!!;i' ,,_u,1!

"'! . ,"',
,~i .',
'l:-,,,,,'[~.:t~A !.iIU,",~~
A,i'e~hnnnoll,lI;" 'rm-'1'i~\r,!!,..;::."il,S iY.MJ ~ _=_~ =.y_!l'Ij~lIIiilt.
,,1"T:wJI"" .ij'!·'V,Q!il'ijrlJJjill,iJiI!;_ iij-l..r,IO \1'u~. '!i.?-~' ....... 7\1.'""J 1Illl1 ...
preBSUOO ~
c·
.....
,.
",
'1--"':11 allu "fL."", ,-" ~.", .",.',' ...-.1", ~.~
'.', nd pumps, micmvarves "anc '..

".C ',' ,
,se;!misaf.,S ,~.ftll .!£"".~gUifiJ.S .J:..," ~1il.!lJi

" .. ' ......
;'.
",'I"
lii'.:i:,
',fli ''''Ii' '0 lii-'L,,- ',.:".,', '''-. 'em" ',>t, '._ :~,.- ';::;";"" ~;, "!Ii 1- ~ ".:I '':ii ]' '9!' ,~.'O\I' u:~i!iWlCf08'C.I., alllOl~' It]] .11:-'~.gl~res •. !til! mlu ,£. ,.l 'I' ,;:i. 'F'" . I.·," ,&;.;7,!" .,.:JU ~ ,..il ~"_ " .. -'-.~D. ,1\gtl1ie8,,........ n '2~' ~. , ,iliFltu .., 3"'iIi ['11"(.'-. ,-,,~,.uere ,many ,~',~n,,,,
I
r.
,~re
ted~,ce~, etwe,e{(l. dissinlUat' :mat'eriab in t~.e~e~evices, As many (if.f· these de"r~ceS!,alFe b d 11.>;iri'ii'il!1' 11'"1iJ\if';],e~. t~_6 ;shr-e-iiJl'CrIi:h ~;;jltl;r:i;r~~~1 I~'D--:,' t'ii,~_f~'.i!i: w~,~ m-,-!I~ilill,i,o,··'~~~,~'w,:""''CI--::~]~eJ ~,rJ! ~ _ t. __~~ _ u. _~~= ,fif' ,4,r.i,L'!;;::' 1I..:~:n,~~d;, 'l·AiIj~r'=, ~~u. fiti~, U~I _ It!l~~ u~
~l'Iil.lt~ ~~III!~ ~. VY--'!I!"ll!
~!6P ..
IUUtHiU-:¥.
_l
'r"!io~'JrJ::' iL,""lI"" i-.'~~1I"ii0jiiffll£i. .!ILu.Ih;r~~ ~.I.iJ{.j]l ~I!.J.UIUILJ"-'
,;0:;;
~1iM';~'IIili1.t'l ~.I.,LIJ,U;u..~
....'rf1II \r."U, . ;1ir.~
n,,,..'!I);iI'jIilIo 'iii,,::": ~l:u.."-;I ~aW~}I;I, ~L~ :.fil-;'i~~'~1i"'II ~HI !IkU
~fi,@i''i1i,a.rJj;'"
~-JlJ~.I.II,;!~1I1
d !t!t.. ~ua't.,~' • ~ ...IIi ,-' . :pitst,e::_, 'uiMl ",'"", ~or ~un,D~·e~:mo~e'_~rrt'CI1lIDre :p~enle~ .. ill·'~lI,...II!., L as tae i~;r-egoJ!n:gU b g :seot~O;Jj" ,A 'mAiJOF c-ompHc~.ti(.1 1~ 'lllil\tt, mo~t ,of 'i:h,ese iD:mr[.~c,e;su-e s,ulbjieclt, to s,imultllneo~~, Mode: ]' ,~nd, II ifand 'm in some cases) '~oadi'i'llilt., Mi :rwdlmodie [1t,iCWre anam'9:gjs,. '~IS, .. Ji . 8~gllm'Cant~y di:ff~l'e'llt 'rron.~w:b~twas ,e~!r~b~:i$hed 5':n~ :mooie fracture ,ainfdy'&~s,. :K;i1i f-Eere againl"we 'w~illOlrtiy' outline the gme[ai~ aiPjlIoa~h to tb.e;oo~~tLo.nof this ~ype'ill
11'"
a,
.•. _ . . I __ I'\._ =< _ _ . _. _. '. l'!!!
Th,~ ;arnla;~,yti;caiassessment of -f'r.li,cture sue:mJ,gtJl of i:nt,edaees is, muC:~ more,
CUDl,"
.!!!.::..!i~~_
=r.
. __
1!!!!J .•
_.
--
:prob~,~4m" Let us refer to, d~emn~fare olf a. bQnded ~,j:ma,teIhtl ~tm~tU(feas :illu;:!itriljt,~d, 'fig,,, :i~ ure 4.4,j:., 'T~e,two ibonded malter.ials ha~e distirtct prrGpertje~ :such as YO'U!Qg~s, m,oouH,_
ICr,~
:r:",
'~" '4r' ,-," .", ~-r-'<--t'AIr It'I!.,,._ nor.,m.aJ!i.ii ,ainu. 1~'r~'" lILO~i.!I~]lI.:!In. lImllillE. ~liiLe, ,', " 'I '. 'i . r"f&1 mu;;;.a
",111 '., . ',' e,t'.'0lj,1)' ,aJRIlJI! 19';I,)" Y-If.,ese !II, , ..n
"I
",,;n.:lr;', ;:'.0.;;;.41 nr.,~ "'''';'lin ~'", i"",;;;'1Ii'1~,""'ii" ·;u """"i',-4i ~u. ~ru
l~
~IBIi!li~'
r.V,U~~lU£lr.I,
,jJ!
!1.[F.Ii~
,U~
RiII!IlU,
!I"~.
:u,.,
T'I,.. ..., in t".~,;"~.,,. is .o.~, ,~~~~~ ""'''''b-I~'<=>'';''''''".J' "l~~, ..

1 ~b~:.~'B.~
.... "~
W .,.~'miIt... II;j,"""f", !lJ..V '~M~~!YI~I~~~~~!y!g~ ......... f.IO
._
=1 \.II.T.I.~ ,fltilutll_C ' ~i!I'f1".fiI"",
'0' ,',' ....I~.uesl!!le.milITii,iti' ,m.L'lUe,.. <(, 1"',111,~ .;11.,. .!l..I!.1 'f'" :Pil':," 'il-r",: ','_...-iI,' iJt ... ',...... rm ,iI!.lLac,.;UOO," , _. :aIlu
,,;,'1,.;"': . ";0" , I'
.[ S(JI.I,c:anung,·d: ',LIiieCU!Q:U W~IIi!U ";.' ·,iIi.".' . ,11.. " , •... ,,'. ', 'I' "~~ -' ': . "iiih'-'1 ji'"'j-"" '," .respeClIl,lve '.. Su.,~--s~, ,ii::: ,'iiA . ~,~~U!liS: ~ iii' " .. ;ii,"';:: '~14 . .....:tk~ ,j.iI+ '·'-it. ~: ... , ,,'~', " - 1t..,'1 . ~,_ .'. r· :~' ..-•.!j ;; --:---,,-., . $ILJ',e.il,JiS, ,~le.llltl1S, ,1i1l~. me Iffi]J~ecl.!l,a£;e· v UiLne;r-ai,1lleI!!U !jpo~p.~eu ~pe-:'UIill,B,
IJilgtlN' 4.:45 II An iinl\E!rf.i108'

Y'~
,O'~:
a binuttreff]a~ s,tiUCWr"e.
,~tateriaJ:~,
E~.,"Iii'~
II!'
Tlle s~s~es\! u~wIth i.j - '~i' J" near the .mt~r,lf~da] crack. can be expressed b'y idle 'foUowmg 1e.qjlllllwJl~, 'WhlC-h, is Sil]lUOli [() :EcJ.aaJtIDon (4-.6!1):'
consist ~f mu.l1j'~a,ylm,of' dis~~miJ];armin films 'bol'IDfiled to,S:e:th'0[ b(y ~imiheor' :p:hry:~~cal or

,t, - r"' -~"" 'i CW]e-J'W;cw
viable 'WGV rt,r'il ,a!itt(!ll~in fMi~,'-b:!Ii;i;!; i:.1\O'~!II~lt~TIii .. I~. p.01.1 Q'~ :,:'",,..:'"", ,ai" b net 1I1iili1liJ,uru1.!lC)",m'1l OJl. ,!OiL:', " ,poi_'_ ~,l U .memoc. ~~u.~HOE.l~Saou romm ','I: ~u"iDll -'~l-"" ,~DI,is ' ;'"J;,' ,;j;-...;..;I, '- :if". ,- " ",it' 1!J!Jl.lt$; ' "',, w~~~'1 '- "lL1I .1:. "-- , ',41 P I~:.i" , ,.,,:i:'lfrt.. ' --.~ 'Tt:."" '-I 'I..,,,, ,:ilt-." I d " '" .,.,~,L~_ ,,-'f' -- '11-'. '~""'d~' ,Jr-', " -.".t. :a.re iIJJ:e,l!w)ll,I!~r.e;~.,., ",,'itii<=":I' Onn!.ll'w'. ,I n>e:y C~U ~ .w.'uUtu, , ,M a imVm!W.lelli, 0 :SIe,~.6Cw:,' r.eJli,'e.reillOU, rSUC-JI ~Q"", 'iL1]'~!Ii'll ['~ '~CJJ~'I ' Hsu I[ ~ 9',~iII_''!II'n'';! 'It)'''''iL'I'<IZIol'' Irl'~ _ 7-_-]1_ Th'~ ,4"~!~nd,11 n'll"j.II:1Ip.jitn,]'.,..ill' of deriv.lf1L.3~l& ~,~ 70. ~J' 0;.3. 1, . ;"~J, ,U~i.'J.g ~ II "11' ing the k,ey tdieme,JWJ e,uat,~()~ wUl be preseated in Cl1lu~pt;er'Ut Wham t~e re-'ader wUl learn fInm rdte foUowing :~s.~~ e-'Ssen.twal~n'!ltrVIl:lpu:t :ip!$ormatioml tbat is 'requl:fied in. ' ushw,g iCufi't~ef.-cial :fiwdte- e'~eme~t.oodJe~ rSIJ~~. as ~he pOp'I~ar' ,ANISY,s,®code '!il:s~d.by the ,Mmd:S indru.sltry.,
",:~..~lit'5't~lI_j"
IWIIL.I!O,r!l.lk..!lJJ..
Ichi.,ev'lBd
-Th-'-1i11' flnite. I. ,w,~, ,I, ..

= ~~ = •
b:y
- ': ,' meaDS,.
mese ooll,V'~l1,tioiOa:~ :me.tbuds with closed-Iorm

.i:lJl!"'iIl1II"II""'iI:'iIl~' 'I'!ifii'07t:l..A,-(i1 ~ll~lIJw ..u...;lIII~ ,UJll..IIL:lIIJrVU
,n I '~I~iii..'l: '1'.-'.'1""';,' ,a:Ii'H~lty~Ui I'·e. 'I 1('I~i',: ,': " 1!;,...-r~iJillJR}, e :Su.I!o;-'-SS Oil "I'~ ,~'....~ l:1!~
[;(:J
'tit.'~ .."
,'"
pi I '~~;' Ci®.m,p~.e::K.
I
,,;', .-. It,
, " cmn.o,I,. ltlle· s,y~rue:mllli, ",,', i' iiT f'-~
:~gluJtion~, H, ,p~Jlted
IV !W~'I4!UJJII~ F'IP·..... ~J.lJeuJl - ~/~
in tms,
Ii<I!\
;i"i~Iij''\J'
u~~JIl,.J·
_.Jtt:j
r ~I!P.
"_._!IiI.J)'
l!:li ..
~li'Jk.l\I:.I.!IJii
'I
ga
nl_I/~l
'tl'~
III
-'j'
'~J11~{ljli/
..
1IJj1~1;!i,'n'''i':
~;LL~1I!.nW
..
r~IUjj~~~
.~.i!II
~llll_
47
.. ,Ii':
In ,elSs~~,oe~ principle of t'e :ijlrlJi~~e the: ,ernem.en~:metllod.(F£M) :~~ "~dj:~ideD]d conqtleli~~., The ~ery fmilt step ~n,a finite ,e~ement analySi~s, ,~sto di:vj,(ile die 'whole: soUd 8!lruc~ur-e_ 'mad,e, of ccn)t~!Jllwa 'inio e,/bd'te 'WlitlIm,bel' ,of ,8ubdii\fisions, ,of s:peerual shapes (c9!Jled the e.le'ments) iillite'reonnectedl fIli die: comers or ,s:~ci'fk: ~h]its on t'lm;e edges 61' the el~ :mem!m,(,calJoo 'the nodes). ,A'v,w~;~t ,geometry of' elements is usuaUy a'~a.'ila~l,e of froml '~e element 1l:br,m-y oNered 'by :m.ositcc0nmiliereial cedes, Once flIwe :sUuc.~re is sulbdlv,rud..ed inte a gyeait mml.y e1e:m,~n~s (a process cuUed df'9c,tr!:I.i~{1tio.n)!,e-nlin~1lI an,dy:si:s is :perfonmed, on da;es-e ,ele!tille~lj[J8; instead of 'wl!1.o~e; sttu.c~'tmie.SoIhltlonB, obbMDed. at the eLe:meDt :te:~r,e~. a~f16'~'lLlrned.to pt. mel' cor ' are
'"
~e:
:res1Po~~dl~nl sO~.Um:~OUfS f'Orthe 'whD,~e.structure, Qed"lb1e regnUs; 'f-roID:a fl~i!e e~tem~Wim: :afta],:y~ds (FEIA) are~aJtr~:n.able:'W~)t'h:l~r-elU,~· ,pl1rt ,dl~-cife'tim~in~ Ite :swcture, 'Iwo ;pri~lci.J-mlIU'rnes R~~d,o. be 'toU~wedh .of' t
I. Place OO!llBU' and sma'~ler'ie(ffiemen,t8:i~tile. p3!m of the ,slruc1ulie e!il,.~iIiii>O\ii;;,. u . ~~o'!f.. or ~~"',"li(;:iIj1iJ eeneensratiens ..rJJ_...... "'.i;i .... ,""f'~ -,;]o;i'!i;iIjliI"li1O~' ,,'",U~III'.,... IIli!i'S~:II, ,..";-;JI,IJUililiJl,
~I!O;IVlII!U)!;i'
'i!f,'
'~~hJl,a'nabrupt
~.I'!t;,Jt"'"'-""'""""
....
'!I[~,",,,,"~
!Dt¥ll!;t;~iC ""U,~iJI
U\
<l!iIi&QJ.llwl.I;;,''''''
,i'Jj;i:!;';!i; V.I.IiiJO q;l~
d"'~rJ;Cid,
e'
'2., A~oid U~dl,! e~.emen!ts 'wi.th bi,~h ,31S1pett:rat~o!,w:hwch, ~s'defl;ned us 'tile :ratio o~' me :~O:mJ,ge:stdJlmen'S:~op to die shone-st one :iiw the same eJeme.rruL The user' is ad,vi:~ to keep Imi~ as~-c~ ~a!rlobelow 10. F~~ue; 4.,41:8, shcrws th,'e discmdmtjjon
,ne 8. Y~l __
of the sUb:ornl. dteJdiap:tlrm,galcollsa,miiTht: base

Q Q
Tnlt~r-4fi"n~~s:Iil'~!~~ '~"',Ii!'.;n;","
~~~_._~ !I~=¥_~g~~
~~~;Ij
1"i?r.jk~'iI_1'''''~ tt~~JJJJ}!:d!~
11~i'\ti!:]; 'O.',fll:,]'~ _ :~;:?"OJ,~1 . 1_ llJ'
nuarter
, ..
QI, ..~.
~£' U,S].
the JI.Jw
~,iiill" ~",,~, ~lllll ~U':1l1
,;i)~<D' utllt~
1·e Q.
~nw.~
eluded in, rhe: 'fitl!~Jte eb~'ment: moo~il 'OOcIUIS~ of the q,uSlrter. :phlue: syuIlli.etty of Ute di,e#cUlpbnlgm/collsttaiinlt base uS'embl.y,.
,4.7.218n., - - _ i'nea" ,_ - - _,_ Anrpli:c"a.' "I_ns "II'·~---- - - "'-ri'ng,- - _p) __

~
fOM:'
is used in ~dmositI~V~iiY ~~~,g~lleerlng (U~,fdp'li~e., ,P,arth;~lady weiH,..dev,e]ope4

~'t'Ii leU
,CO:lirfIliIiITilcn 3ii'U"I~k:at~n;itiII~, "'" __ !'I~~"!~ ~ ;!ill -r-,r.!!i~ ""~~'(\I "lI:~. ~IJ
~t];i;!;: .i"'rj.Uln,w ,_Ll\~, a !y, """ 1'v\Ulu _"
in fIi':I,_,;'i'~~
I~, 011.1.'"""",,
'''It'!Jili;o!Ji,i!'!
4W.""'iiiliilli,
1~"I,!,~;jj'lilll., iI '~I~I~T'i; n-I!IIlIi.... n,t'II,t''',li"..,.oJI,l. ~
~';;
II;.Q I~
fII......'
ini!l#QeiSSa:r,
~;!i_-~ --~,
'~":
mtcro'5ys!ems dle~wg,n•.
(flu~I.)~s,i'S' ,of
1..; SI:reasl-sl,r-ai1J:
s()'#d $.tm'Ct,l{:res, fiRM will provide ,SOm,H~'I,o:ns ~n str;eS8et~,

(U} fot each eilemmt. in
8,
discrle~b;ed :1ltIDd:el, The d~sp~ace~m,et'iits the pdllM_Y ~Mm.-gw~ qju;tntitiJes to, 00 50 [yed, ~n this 00"e
{a)I!. sj~mins,(~), and di;~p~~cemoo~
ty~ of ~naly~~s"
11,18
cedes tbius carrmot be :indl~scrimiOlllely used. for :M~S, and. mic~os,yS!fe:IJ1l!j,
4,., 'n~, madel' ma, ba;,~come

~'I'Ii~l'·D" A~ ~h!t DIIi, ouil
'Rj'iI<~,t,~ril"lll'~;c:
"'JllaLilil_u;..r,IL,l,;l:.IIlII~.
destp ~y~e-s, ,at,suJbmicr-c~rel' scales,
,4,;,ll til3!t it is drUfic[Jy1m: to pmdlict, the me.dll.DJ]&tic 'OOmlUll¥~OTof MBJod'S and O;litcms,yst'tId10S'i' 'whtrih, o:[[en.
to 'the maHzath'lA '[[om SeotiOIll,
,nr
y", iQc~, ~
o:"iOit"lFlliOO, :,;T'Ii;;!;'nilf:iii:
""""-!!II.LIII.!::"'~J'I,'!i.r.ul~;o!!! ,llliIlUl,
'n<II~;d,1Fi; ,Ait! ']-JIlI;" .,..,J, til! It'rriit' '~iL;i'll- ~!1'':""''''e, ,;ji:'~\i;!!. :"''r,~ .. '" uJ1 , " "",iii, I))IJ... ,~,lIill.WlIIhJ,
~~;.,.,~ U~
Q'Il"'" IIIJI'!;;jID.u~U!
'fL. ', ..
n1IlI;4~A, :
'~'q
IIl.U WIIlJI':U,UIII:IJ
. ".1-:i"'iL";;!'~.'R'Ni~i]-''1i.·'[ !liI:
''("11.i:1O f~;b-'r4;i"!1:"li~t,iiili"ll,n; ,i!"iif" ,L~ .!llli;..IL ,L.lI,'w.R: lI,U.lUI, U,
~ifiii~r'Ii,···;Qi!I1J"'~ lIIJlJJU1lJUl. ~.~~ '1:1'1'!i'9i'll~."...i'-iia;b"~~; ~!ft'"-F..:iIU'i"!'~~e !tIlLIlU 1'! u'L~UIl.J.:.II_ .llLI!i;r. W,'Ii;r.-,3JILU!l!Jl-tU, ~i:'i~..!Iiir~:",,:I "-r.,u,L":"':F!I;.I!·,I,J.,'L?, • lILA!
and intrinsic su'esse:s, in t~"e, s-lrruc1:awoo.A,s 'W~, wUl FeM~lfrom :~a~erch.~precI;S, , 'Vinu:aUy all '!miero:ft'ibri~dIDn, ~hnkIDues :res~dt,'~nswc'h ,ad,,,~er.s,efiiocts, e
,II:' l'lUll,Ii' 'M":··.,. ' ·C!VJ!iIli
r";"" '"~ 'I!IIn4 'ift'li .:'"...,.,..~'lI''''j<C;i'),'m~ Th';

!U.i.lJI'u,
,~J,uJ,,",\L.'unIJl'
ap~'!t.m. _I .IJ!I.., "
'Q.
~..
m~'JTi\f,'!lil"nfi!f!'\ii;.~£Wii ~~ ~_~ r·~""'ii.:.IiU'U,LI; vi,
~'~''''''$'l.;:li, ,iliii~'ia ~i~) ,in ~,1.Ii!Ii, 'UimiJ!~ ~l_l~~~a. ,~ . , !llJJ._~
deSl,gn wWysis r:eqrl!i"re~ 1&e rcatllp:~lh];G:of the :finh.e 1e)]em~TIlt,a~al],ys,is,~mld t~e;

m.~c"rofabricatlon, processes, Some de~'ellOpem i~,,comp:mmf- aitled, desii...gn(CJ\'D) ,~'tw:are 'pacb.ges b~ve :mooe· slclil, ,m cHod :r!l! i('.O~P~lf1I,g1 s ~I'M'~ described a be in Olapter Ul'The readet is ICll\IIUoned"Kl be aw,a.re,,of this 'foot 'wken,'Ising a cmnme:rej,8J'~ fmi~ e:le:ment, code io ,I, dei~,gn,.a'~ysj;8;,
Des,p~J\e 'ite; dnreme..f.lJtioood, shoRCOm~ngs, of tile

:mer~\~al11:y ,Y,~naib~l,~~,elem"eQ'~ ~ :f~fiite codes, 'rlhe,y'are ~un
'CUCft'eDt.
,g~neefi'iO' acq,'uire: ,I, good, insighil, on. w'bate'Vler: :M8M:S ,wtldl'mitrosysf:e:1DS the·y are
i[i,v.()"~,ed with, :wn, res~I~' $im~~atiog" &ghleetS wd
t
clbe,only
smie of Ithe W1, 9'[' com-
'V~~ible e-ans 'fo~ en" m
'm~li.!,eDCe;of the user, The, user- needs to' h!o.rve:~(llllnd kn~~'dedge of' 'tile; ,too~ ,Md be, aware ,of'ilts Umitltio:us beftwe, Ire or slhie,cm, mrudmilze me: lilenefitls of'the tool,
mere.l,y rembl~ ~)f f~(~~ a '~t Ile; power ~f'fEM: lite mans otheF too~s, for. c:rafismel1l and, p~(jIFeS!s"~onid~hi_Q, 'l~e in" :i~,
ate
:Ill.. The micro~cltuaJtor oo5:C.ribed in ExooliiUpme 4".,~,4f'is,,c;x,~ted,
wltb, a, t~Jnper.at~[e .rl~efrom 1[)QC 'to 5n~C. Plot 'llbe m_o,Ye«.ieulls of rth.efiiee, end ~f die acruatoc 'wiw :lWlpeCil ro '~e .ma,geof' tenlPeiat~· rise, Use ,OJ tem.p.em;wre i~cr~llt ,of :tOo,C,.
tOI o'per,~oo:
'C,'.'.-I~~lp~ii:l,tt<F> ,tb,p; iJfftii'!ili"it'1.1fti'i'ifm; '~~"p!ltl¥!If!ii;~1 .~tIi~'1II UII!r- ~~!lM~~_~I~JII~~.~!! Utl!\;l~~;.&~91
i~l~
indIl1Jced,W$l. 'beM'l, by ,3, t~peratNalre Y,arj;atio~in, ~be a thie~neudirecID.on,!, '11z) =: 2, X l06,~+ 30 'i~, e,gree-s cellsius,. The geometry ,~nd djntell:~~O~S'QJU' beam d Ibe are given in Figure 4.4{t The beam is :m~d)eof :8UiOQtl. "!Ii' 1 For the: same Cf(lndid,oos, and rQhe, ,r.eCJ.~redanswer d\eSlai!bed. ~n,EX3imp:~e 4..lS: w.M~hIrbe wmdi~h:Qf the '00anJ~,beLfalt;l b =, 1 00 i~. {Hin.t:, USCi the f-nrmlldaLoloDs for tbhl. 'p~;a~ ..) :Pind the :maximum the:Ol1& stress" s;train! ,aJr:I!d,dlisp)a.ce nte-iriJt5A :id a 'beuw, ,~1Jbje~red to he-atiIfi1Jl,g :~a tDP surface at Wnei t -- 0.1 p18~ 0.5 ,iJl.s~ :II, ,and 1.5 I~S., Tbe g'cometzy and loading and. oller c'Ond.it~olil$ identicail ~oilat ooKriJ'bed. ,are i~, l:amp~e 4.,1$, P101,tile :resrtJl.tsversus time during lh,e·:periOO of b,emng. E 14<; C;QWPUlte me 'f~ilut-e tou,gb:ne&s :~ot~, j1iooa ;irubsttate using a ~~:pohn .s bendi~g ;spec:imoo as, i1lmmsttar.ted, n.Ag.lre 4Mb. D~mensim1s, of the 'beam ~ $pe:c~m,enare ;shGwo :iml! IP:iBUif:ie P4.2 witih, S .;...;. 'C~ b ~ ,:5. :~ I ,f' ~ I 00 ~'m. 'The w"'dtb- of rh.e rerun _. B ~ -"40 _ ~_ m The ,.f_ force &~"1ILL[--,. 'lIt),- break 'rile, seecimeno reouired " __ - .. m ._ .",_. .• , -----' -- -- -\t."'" ~
.-,~-~
1
1
l~!III
1M!_,
~~Ii!'~;Ci~ ~IY~~~1!
,~,'J.',"'rFi'if'iI,g;~1~ttgr~n!i!' ~~~~,~PJ_j !iI=~~~~-~~
m~
(io(.,.~
di:~n'~~,oem, --=~,r-@-_ : _P3i111i1nS ~~-~_~
is MS!IlOl.ed to be 40 :MN",
Figure ~I
IMea.sl!!reme!i'ifts O'f 'f'~a;cturetot!!ghfi!€,~ o~ ~SmCQriI in ~ tI!ir,ee·pDir,ll~

belrltUng test.
,~
P ,=4QMN' -."
---+I If+= B' ~ :2400
_t"
,~m
SOOI)}OO
'l,S~ What :frac~u{-et,.ougllness clf 'the silieen specimea 'wa~lIiid,you I~t. jif th.~ 'width Ii' o:f'·t..I¥, ~reclm:tte( t:._ 100-:'." iII[m - ,- .-. " l!IJ!;___!llue~, - -",.:L . ·~:b.. u;seU. Ul n...~~]"em'lA' . '~,_, e ~.P_," __ n. ~s Y grea;ter Ulan ull1.!l! r.w Uu " ,.""t.ri .li3J[, WQuid .l!'Ol], have obse!iVed, ~rom comparison of 'the:results obtained tbe from ffbes;e two. ,cases'~'~'
~~_::c
ii;
".,:ji
;',.
'\1ijl'i",.
,-.
AIUN'
5",1 ~ :S~ear
'now of ~Iurid by a, IffiOVi!ng
P~aJl\e.
T~ p:Date,
M,ov:ing, top :p[a~
1"'0: _,
"
,~~
__,89
VJ/
'De, :propcntiornrud, CO!lSJtawmt fl' :is,called tile ,lynartdC' '~is'"l}~,['~;GJ" '~,i8co,f,i't:)!!, of ifhe :Ruid., It is a v,elY :imporntlllD!£ property 01' a fluid,. We notice 'the linear' :fei~ano:lshi:1l et,woon b the, sbem stress Md, '~e she. mun, tIm ~X:hib[ted:~WM, Eq,lIait~oiil (,~",'),' FliU1Ws'bat: exhlbit, sueh :I,inem- :rel8JtiO:IlJSibii;pIre dasmued as ,~e.wj'OJd{J,nfl'~idg'i after' C:~as!SlifiCalti(),AS o:f:' :f],uiOJ UbJstr.tted ,tn, :F,ru!nIire S.3. ,am
F_' lire ,1!!3 II CI~HlSe!S;cd 'flu.aldls;-
~'~'''''U,(I··i, .., ...t", J,~~ ...' U._._lIlQl1_;1l
(iMTlil~'[1'~H
'whit]] we, perceive a :~inem'variMiol) of' me \reloc~~y in. 'Il_e" mret!UQI., One :.a,. read'·'S .... -,- - - ----Vi' --.¥I in -ilv IP ,oJ 'mY':C 'rDaJ! dfJIdl:' - ---,-- -- -- --- ~fi:1C'>i"lu~t~fin, ~----,- - -- It,S.,~,), L eeual itJiD d/u~~'"'}la'~-- Wllicliru, 1I1'~})"if~ ---se~.m 'lite Il,,"'J:.... --- -- "v' ~~'- ----- ---c,
-r,
The \'1eJooitY'ptofile Qf the :~uLdl:ntj!W m F:ig~ S~l,'~sillus'w3}lJed, jj~, Figure 5..4 in :

i,
v1elocity
of. '~e, flllWd, at ,3j, d~sh~iIill:J)e, DroOl, the ,s~;a)UO\llm'Y y :s.t~te ,31.the; butJ:om t fOUOIW:i!fIIj,l{J express.ion, ,fhar the ~IIm:,em: S~g;gl' 'f' is, ()bhiwted~
p~are.,The
Copynghloo m aterlal
t70
~Igu_
La • !Flu id SLJlppl~1'0 a mio~(}fluldr'c system.
ICD
I, i;
®
II
'V'"
. ' ill
I ~,
I~
:: lkduw' ~
:,i'
I: ~
.'
~lOOlerer ill '_ ':IOOlI,IIIImI,

• ~ ~_~l!ll!~
'l11"li.
• laU.dlon
It. is saf'e te assume a laminar 'flow ,~UUiaUorubecau~~;of' the low flow ,mite. We 'fur= ther O$l.J me th8t a 8t~~y ..St8~8'flow Is mal ri1tai [1ed, Th u~ ,from the' ,opntinuity eq,uaifor'l ~ ,EquatioC'] (5 .S)~ the, Irate of fluid now' 'throUQh -U;;eCGfb~OJ] n1 '8uriao9 1-1 i n
I
Figure, 5.6 should be the same as' Ulat 'lh ~ougn ,surface 2·-:2, Ffom Equation (,6.6), the,'vo~umetr~c 'mass 'fIO\tiI rate rs~
.0 = ,~V~
A1V1
in WhfC~, Q ;:;;:, x 1a-fi cnr1fmin ~ ".f.M x 'iO-14 mfJ'Isand 'the ,entll'an09 and the exM 1 ,cross~ect1orrm areas O'f ttl e' reci ucer 8I'1El':
A1 :;::;~100C x 10-8)214 ~ 0..7B5 x 10=6 m~ Ai!! ~ '11"(20 x 1 D-~:!/4, = ,314 X 10-12 m~ We' can thus compute the velocffies
V
of the flliJjd at: both Brrtlf'.mroe, ,and e,:<11 f the o
reaucer ,IJV [using ~h8,continuity l'i'el'ation as 'folr~s,:

l':!J"j' ,",,' 1-0-~.il1 Q = -, =, 1.0,11'..... " = [)J)213 . mls A, O~185X 1(J~a. - I.L '
V2 """" ~= ~
1.,61 x to-14, , 314 X 'O-1~ = 53,.~ ~s,
The manlemrum, eqw_amw,on, used to I~o:mpute,ml1,e:fluid,-i"ndiuoed, forces 00 the solid ls

'O~,
whic'b the fllmdd,:t1ow,s, This ,equation, Js d,erived en the bases ,of conservation, of .. mome,fllmm and, Newmn ',8 la'w of dyn~micequ:ilib.rium.
Copyrlqhrcd matenal
"'4
~'.
." .
'
'"
":"
"
"
....
,fj'
'~"
{lVJ~';0 ,
-
ujffi _'
lU
-- - "~,
Tt'
,_ 1i"lf",i;I ;t)1Jii!!li ,-,-_-,-_

r~.LI'j;
'Y
ID,
1[5.8b]
be de,dv~d, :ftom th~ eq.uatID1li; ,of ,m~thnl ,in, :Bquaitions (~L8),~Ij1;~, (.5;,'9:) l~"USlI9,1 a ,
cylEWica'~ polar cm:nrJinIJte :~}r~telrllas [Wllu;tE; 1'994]::

on ~
= '81~'
Wtt[
~'dx{"
d tp+ p;gy, )]'

I
'w~~mi 1i:s tb~ ~~e,ValJt1o\n th~'m'be :from a r.t1ji~r'~ffilce, of ,plane,. ''II1e pre8SIiN, drop' ,in, '®be:fl!'Ulrd, lover 'tlbe ~]jJbe: le:n.b L is;
,p~:~'
Ri,,11l
"11'
,itt"",_"i' _,
,
'~i"'li(j!,,~~, Q'::--" =, ,11,'""'0', ':,,'~' ," ' ~,
".,~
':i!'jf'-g" d""l' "'", '!in'-" 1,"I:iF'.':
One strikirHlg phenomenon that one may o'bseJf\'e: uonl ,Bq;uatruo1l8 (5,.17} and. (,5.1:8) Is
,j,l.. iii, !-:o"fl'.+'1:..1 '~i~, ' " -~" UJ~" lru-UW
'J '~" " ',' -:
,,', "r,,rII';'~, "I -," :'- - ,"'; ,,:'iII " -, me pressure ,~,A'"" Ulf'OP ,a::HIj,_W u.!»0 &"l-C;,'" mcaon t.", 'd- 1"'" ~ , t.: - 1-aUUl1.ar,!I!.iII,OW'rS sre lnVelr:s:e.!I,:Y nea OBS J.Of , I: ,', proportional m. dw :fiJt].iI~:h. pl!!w'eI' ,O'f 'U:I~ coudru.dt~dl~3merer:.This :me.ans, that a :1,,6 times b~gbe:I' [p:um:pi!og:p:iJweiliwould] !be; required to pump the fsarme ,3im'o1MJ~m ,of v,o'~,u.mettic
,~l'1i11)JliL!' ,ntif ~jlltV ~~' vW
,ll
fl"
'w-r.'·,dl '~~'l·'t~·'~lk,!:!;, IJ~ H,L~

_ I. _ _
t!~''IliI''~!!i'~~'fI'i!l'!I;ml~~IIIWU.UIW~ U.lU_
;;!\iIi'';;;;r-.L''''' .~~JI!..IU l - .I1i.FtW~ '~d'!I!,~~Ai

I
'b'::'Il.J!,1 , .
I~
half'
."
,III
'Th-cCi';--go·,-~.u~n,g'_~ __!!Uion-I _", ::_ ~¥em'ni",- el~'~';" a
~,-
,LiOr fl'-"'''I''''d': '""w-".,_-':"""su:..; '" uW" d_,nam .. .
.u ,;I;jb,"'''' we, '1"11 ;iipi"""' __ '.-' Ji;,!', '''''''' ,it"'i'_-.J~. ""-'. !lS, II;!UC ,~-'J'ilJo-wn~'T~,lltr~II!!Ql!liiel , BqU,Q,:,g,
d.Ymliam:iJCs(CfU) codes ,~re bll~U;.,DerivattOI of 'Navier~t(lbs, equations. is, beYlond the scope of thls book. They ean 00 :f(uWlIld in :I:m)lny O~id meehanles boo:ks ~n~c'h I[Whi.te ,~,'994l. ere we WU~, p{eseot. only tile es H ,-"' __II''''/''''''~'~''-,P:I ."_" ,-" ,'-, :"",,.al-,,-,',[i,·:,-,,,,,,,.~'b-','I,--,:,,;,_,,,:,:t'i--:,', ',.' '," eq_ru~aEllo.ns,10.r. ':&rl'.",-,I-"'-;', h~,e UllOO,S, ,~:(U·'.'1-'-""-""""1",'-'''-'' ~ec,to.irS, ,~l~,v, atll,W iii' ,il!liOn~,1~l,e,re-s,pec.~,veX~,.Y, 00, ve oc.lt.y and,,~:coounm~~s, Hl a lI;l'.1OVlng :nwld, in :a tbme-dimewsi,mlru space:: '
.. =
tiQn~~' 'w~_bib 00 modem, ,c-Q~up~mJrio~am, fluid
'82
RliUJItii
5'10
t.,~
F~~~dl volume
...
iln a ,s:m~ll'tilJlb:e., tube wall ." (' 'I.......... . - .... _,- __ .
.-
~.I
...
-.I
..
"_·'T
:-..-
_- ....... ..:.~
:.I~I.~
..
/L
~,
I E,XAMPlE
5 ..5,
IDel,efliml~B the pressure requ~red to <Ntercome 'he' surfac@. te:~JSI:Qnof wa'~e'rin ,3, 'smalll ~u'be',~f' O.S mml ~,msr:de!diameter. Assume that the Wat'elr' is a~:20DlC"
l
.: SGIul'l.., We nr:st deterrrfl ne· 'Ui.B surf'Ba~ tension coeffbc18f1it of w:~rter a.t 2Q~C from E~ 1:.1 at~rli
(5.23) to be ')' = 0.07:9 N;m. The tube has a radius of a = 250 IJ.m = .250 :( 1lQ 0m. Fallowing 'th~ expresslcns in Equations (5.. ,4a, 'b)" we have the PFOOSUlrS' re2 3.., =, 3 x CJJ73 = a 250 X 1O-~
'i[l] ....
quired to overcome the surface ta nslon as:

1.1
,j'p-:
,
QIQ
[li
N',1m2 or 00, P a '07'~ ,

I
I!U
5~B~2Till. Capilli:.., ERect: •

Th.e;e'ap1UIt) effect of O~dd is re]alted tOI the :su.dace temsWn of tlte fIIuld and the si2le of the: luoo;d!Uiit[0, 'w'hicli. the fIf~id f[,O'w~,.An !(1Fbvi~us_capllUI1)' phenemenen is 'dle rise of' fluid. ill a :mmum, open~eIlGled,tu'be when lone, ,of :tm landis is inserted :.w a vDlluow 01' ,~([n~dJ~ illlmwsnt:ed in Figure ,S.,~,16. ;15 _ 'The tap.iU3IfY ,tieru!:hc of a fluid, in, a, small tul!1e Cd be com,plUmed :fro91,the folclw:~ngeMptessi'OIl [tI,fm~re 1994]:,
, " 'beJ~' ,,' ", 'il' w '~ p,g 1S "S,peCI"'ifj'""",w,:, __ .. lb~'I"",' th" ,",e ,.U];',~ fJ~' 'II,.e"',' ,~g, "f e,~twee.\n ", [I,e,",00' g;e n,'f~ · .. ''C 'f) "d '" "b'l ~lg,' I,of' ,',,'15 I" ',', ' ,,' the' :([00 O~j.dsurface and, the moo wll!in~and ~:Is the: radius o:f:'ttu~cap'U~myt~beJ..
'W' ,,~re ", "
'=
','
'me'
"
FJnd the' height: of' 'water; hi! IrI1s~nglin 'trH9j :5mal ~tube' ii"n If;i gure 5. '18. The 'w1bs' has a dlams'mr of 1 mrn,
Salullon
We. may' assu me tha-r the' ang Ie f) of' the, water

I
SIJ rface
is very
'S mall!
The radi us lof 1ti e tu D6 is 0.51 mm Of SOC X '10-'& m. The ~unac8, cient of water at: 2.0 C is 'f = 0.073 Nfm an d 'the mass ~en'S.lrtyOl'~ water ls 1000 kg/fliP. whlon Is'ods to the spec~nc :gravl11f''10 be saiu k~h"
ril
so thar I~ ~ O~. t'ens i Orr1JoeH1c

{J ~
1188,
in 'wbi~'hc,. ,ad c~, e 'Ole ms,pecllive s,peoific heatsof 'dle~ at [conSt'lUlm::peslDre and, H :g8 COJilstant ¥o:tume~,,R ils the su OOMtmt, $lid, T is the mlsolute leID_pe-t'atI:l!1le, ,(if the ps., " ,-,. ,.....,. ~ .:11 .... ,~!" o:::I!,~1' .....,.;i; ~urt For air at room, 'b~mpe_mturn,l[ (he [co.uesponchng s~, ....ot :SOO~iU,IS ....L....,-:~' 3' 'w.,:s., A, ,gas is coasidered as ~ooompre.,_.iib~e, 'if'tm Ma -c 0\.3~ W'e tbuS! oonsider a me-fi:ed, S~ ~ftO'W at, ex;~mt~ly ~()iW' pressure 'W :00 mcofi];.,; pressibie because, m' ~ts,mgll Kn!uds1en, illU!mbe~ (KJI~> III i) and :~aw' M~, BumJber (Ma -c O~3)[,.C[oUi-sjon, Qf' gg 'm~Je~o'~es!, w,ru~,l;s ,cbaracmd~dl, 'by tbe, m~i11n,free path ,4 i's ~xpeellro,'to 'be: dOllMlnant, in, th,e, 'behavior. 1(1[' [gacS:fllow"
,-&,_[~8,
[
--
".
Madeling ,aI Micro Gas Filow'

'L
-'11...... -'I, ,.... "·"6"'~oi:1..'V'_,-A _'iiI..."" v ....... .......... ,~u~'"· ... 'nn'lii ,~ ;t:i-,-,,-.~,--'L, i appLk;:u ...............:Il .... '1 gas ,_J)W,Si, W,1!liUI! W[ ,I;~tQY-~, ,nnUuse.n, .. num~, ... fill!! ---.."., uur, ,i,[1I!Ilkli D:l~~~On em ue... &........'.... ..._..,11~;i:!h..,. n iiil.l '0<: :ri.~" <: ~.1-.,'_" - v· - t!i; """.Jc,'l;~ ~ ,!S,!i!J,Il,~___iGT mnro:~' 'wwll 'tl:m~r :m:muiig.I£:l1JoeS, '1lO' a~,It'-" ,f,'" ,r,r.--"
........ 'I ~ue:D'UW ..:it",.",1If -" ~ .' - 11 -..... 0411 0 ""'!!. 6 -,., ,i"iI!"" • ..t~", - ,.,.'IIA '" 'L, :fnrvo~vw m, 'Y~,... [Ues~gn ~\~, 'ml1t1'('llnUlwlt8, 'W1).;n,u, as!JL A ~~-.:wicail. "..,,:,: iUilliul ~~n, is, hJliW far coo, the,v' '"stretC:lii 'die ~.se of 'ite clMMeal~v~;ry'I:;111IDN:avitr~mms, [pao., ,~ C'~. ~'l.~ ~~, 'lions, ,Bqll3!OOl1, (S;.20)~In tb_e,:mi,Cro or nmo m,gifme. 'Ike speotnlm of gIS, :l'low :ia F.i.g(;o" ';:'In "..:1 .-, ", ~ D 'IJ!re~ .,J".,'~,;,: may' 'provJi,~,e ~ llsefill,,- eluIC i~I' 1le1 ,iWnswm'~ ,~,·,rom 4;:t..," S,~;tmDl.., we l!E~,ts en',v,iu_p Ullli '~he loonmml~1lBIm.iDoodes, ,and. di,rus the, N avier S:[i(lkes, e<Jjua!tiQns ~ be; '
,AI ,,'. ,.... j1 '
:modam the, 8<lilp[ 'bolmt1Jarie.s" Beyond thee, :~.ge:. i,e,~, K.~'> 0..1
~, ~~,
[mb_~ ~W1ttiu_n_:s s~cll, ,as B!Ltnl~hr ,and, ,m,OOifiOOj, :BottmurMO P~U8Jt~,OD5, wil be '~,fIuired [Patwmow, 1.91'7'[ Beskek and :Kamiadlalds, 1.999],.[The:-se,eq,~atinns ,are beyvnd, the :90Dpe ,of tis book. C1)(R8~Qeu,tl1lf~[ 'wi! not, 'be lllclud.ed in, this 'i.1b~~or;, The :re-adef' is :I-eferroo '00 'S~i'" dL~~ 'IIII!, II~':J ~!~ lr~ esal 'boob 00 (fa d~mnic.s (jiu:chas PaitreBon 1[19[1 1t '~ordew~ed J deminiJijoFIJ~ o[f .e~se .'IIi;' ~ -~~ .. ~ ~
!l
OM'
r
me:!L~ '~ '~~
uu
a,
IIUI
..
~1 _
..
_ I~
. ~ ..
~,""·IiIi-'II_.
""
-,.
. __
~.
..
,_
[_IJ
•.•.
_.
~~
_.
eQWIUons"
i
j
..;0;_
,-
""'",,,
'"'
I~ ~~~~,,~~~~II.~~~~'!~~--~I~
0.0:1.
CQnf,i"rrmm
-o,,~
C~~bJ~ t~ri't~' will! slip ,bo:Und4rit,j'
l..o
,1tNr:'ier
'_,
fi;ifi;.. • • -
,1It"'~ ,:J!f' ~~ ~J~ 1i"~I'''Y:#.Mf. w'~,.:.;~ 'nll!'ffi,~rtriifi'iii'I!i;~!1"'t:'U' ~'iiiii!f.,""njt-' [ft;. ,i;ifl' ,""1..~ :~-t.\D~ ....,:J' ~J!'1i!.,.,~'.\j~t'::'1JI!,~'h Inf; 4:1~;R~:1i1'A'I'IL~~1 ~-~'r'~~'iL ,~!II~~~ 1IkYe. ,r,liVr-~~VJtWJ! ~J' ~~~~. ~11~ llIyJUU1I! ,",J_I:~~J" has Ui(lji(s DE:' BtWin"8,,,'~F'1m,th.e; :im~daJj, ,s,~,steDt10[ W/m,- °C th~,s,r: ,s,v:swm., ~~ J •
1r.,~~II!~M,!Ii~~~¥-Il~J
'Themlid, 'CQlildBcti(vi",~ is =-~--~- -- --~- =_=!l-1J'

'Q',lIlilj
m",",I,I!Ii!~
~ri"'_~O:;~IS'
'ltbe n1ii"""'~tt'i,'~ ,;;~ it_ heat, 1!T!I..1i'i'~ ,iCif~IU~ ,~nl'HQ;'" n.n-]1,~r' RLl.:U ItllJIJI:JI,1!"!! pnl',41 0,",..1: '''';~~iii ~ J..:11I~JiJl~W, ~~~Y.· ,J.I·~!LIt!l! mMD1:1D.ka¥e hut ICM.mlcul ,capability iin, 'l1at ,ard«~ These.:materia1is, :have biglier : Jf.' vailuti 'dIJaD, m~,,' other' rnaterla]s~, ,md they are mue'h, better :bem oondoofi:n,g':nm,,f;.,;;,,-..ii~'~:",j;'Ii...~,-"----.,-_-,, ': -, :,,--,'J\;.-IIL!\"n~ I' --oIi,11 0·'~~Jiam lUi_, cermJl!ICS SIlC'H as iiJ'.iE.'V;2i1i OJ:1.'U'~ ... ;3:"
'~irni~"'~'
9.WI~ ~
~ng
~i""
r ",,.
II :mateJili, D~~:. 'ne: ,;altue, ,of It fur soIlids :~,n~o".' - --~ .. -- ---,!to~-~'''''.:r~- -- -~ -- --- ~--- !t:!1."~~ ;,}' ~'I(o-... , ~h'l-1'P" i!\ll(i" ,i1i,~.liL~Uv 'Ul~ ~'!Ii"oII~f!'''''-~'!I.'II~!IioII<I.'''''''''~'~'W"~'1f~ .lIi;J,U _ ""''If",",Il", '~~' m·ii"fI'_@~ P1fIIMiIffi;pa~lfrlili!!' m-J-:"'ii:&~:~;!I~, '~IlIi;!I~;fI:+iiry ,~IVJl, . '!J.;)iIl; ""''''I\!;J,"IIiIl","W,.lii'OiI\!;!I . _ iQip",.'j,~';J !III'"
:m
~i
'~m,pera;turm, ge1J ~
;r,'~.
1;;' 'C-Ifl
00, mgaRied as constant, The v,wue olf ,leis a :m~

1;1'-' ~
1l.n,'n::r iii'fi,...-.:I~'i~'ii~~ J!fu ~,i.lLU~n
_"_,
1.,_Ul",l~·~t
1~~,r,r;!W"JlllJ
'~:li,f"!lJ (I",""ji,
w'un, ,I, 'WaIYto ,a;,ccoulilit ,fm tB,e: ·total heat :flow' .in, a p:hmar ~slaJb, mere reali'snie Irj,umtity to, account :[01" m, a hgl~ conductio ~_,ysu is, ,;zeQ1" A ,fl'ra' 'f~dWmed ,M, the; ~at flow' per unit I~~a a!nd, 'tifme., hus:_ ft-om Eqntinn (5,,33)t T 'we may express, 'the. heat :f}m iin, 'Ilhe s1Jab, ,as:~
EquadoD, (!t33)1 pr-ovfd-e8, us
'[Ill1'~ti;t, ,rm!.'i'~'
I£I..~~L '~~JIi~l~,
JI_.Il~~
~iitj,Q II,~ ~
'u",g,;f!j+n'ii' irn!ijH::ii~l!H;m
T~!"U.JI,
~,U.W~l~UIP.Ii7·i!!.R:O
:tii~,
;i'Ijj~~~~.rn.J+
.... A +.:!i''i'Ii'Ii,~lil':I:ittllii~
~_lJI.iP~l~I'~J~
'0::\,:,,1.., ~~
,""lJw il~JI}ermlce
Jilt
-- . -
'111:0.
i!' -
P' - .- ;';"I.~ "I' '1"'II.J.Li::i! n~L, Jj,1~X, n~, .1,:S'O~!LuSlUi.l.a~ ""I,] .... '""~""'"..,. ,a;I!i;'
b"V' 'r t~, ~t

;;. 11:. [!I
,,,Me,
lun,Af .... ...,.t' ~M~t.
~niiliiif!;+-pr.i+,~1 BI,'y~'''_]j!Q''~U.
,~iPi 1hlll
'~i m'~ '~!h~JL~11 '[:1Ii ,~;~n ,~....,~'I;Qittl ... Ai r,I.a~'~' ~;.., I~ .:i~IMI'~
I ~,~~.
' 1-..... ~
''''''r..a, U_Ii!IiP.I
k,v
.j";o!i, ,It(!niPiI!n--I.O''''~''';;l1i' UI~tUI~ ,I!IIV.;M ..~tI· _,~_.'
,r... "'"if, ..... l,...,,;J:j\ii\ .... ~.'ti',..:MI I!UiBuH'I'-l!l, r ,g,f!' 'lif'h'il1:ni"!i;~ ~J "ICUIi' '~"1u-~'"'H~~I~~#~, ~ ,,~ - - - ~I"A ~ '+i",,~ 111·... _..11 '. -- - - - . ..,:1,.~..11
,if11i~
ma
spa.ce'Il,te\ fi'B~, ..
'\J
,,,,\
~J 1 ·
ii"U"'i'..._.j~""'-""+'Ai,
lIU'U.iIl,U1llJJit!IJL'.!I;i,
ov~+-;c;m- ... ["-UlI.1 'IL"", P''''.iiil'li ii;!IlJ.' ~:w. I l~
;i.!jiV'n~-~""-~
~,r-J.~.i!f.CU,
B~"
Ig:.o.li
q-(F~ t) ,
.
", '. ~.' '~
~I_.'-
. k- V T{r~,~j ..
..
'
..
.•••
-".
'I
'.'[
'3·5~ [5. _ 'i.-_: . ill.

.J_
'1
--_,',;f,
The :ne,gM~,ve ;sign :m. :Bqlla!tiOll, f~L3,5]bulc-ates 'bt the, heart fllux 'vecOOJ;!"q(r:!1 0 is,
:o;i:~O'~P'w~ ~IL .II:JI=. ·'iI;-a
l;n,ili1'l'";;;",GF_..:I
~~t'¥.r!lrl!ll"LI;
BY
1iiI'n:m;-
1ll!WlI
'11",'11
'IUJ.I! '1II-:t..:J; """~+'~Qi"!o~ ,"t1..~ !i:I'0"lf~'d-, Por>: w..~ ~WJlj,1A,~~ u). !LU.~ G~Jl~ .•
1
'C-:Ii":..,,-;.m11,..-:r~~~J-j,::~ftP! .r.I.Y _ ~lt~~.U,~~
,~;
~I~.I!~~"'
,~,1Ji;)'-", .qjJiIfIi'd'- I
[~~ __
(,S.. 4)~ we ma, ItSSlgjl, the unit WI" heiBit 'flux t,o be W/m.'l or J/~8, 3
-O~' ,N/m..s,.
:BqrlmtiJo'O(5 ..:3S) is the :m.ath,~matrem, expresd.on, of the :Fo~~ l~,w' 'of he.ait oo~ .., du,otion, B'lpMdiJog: the, eq~tian, in cmeslan, 'coordiin_3Jtes, wUlI :iead 'lu tibe :foUlc~iw,WRg: ex,'tesswn for :bat flux. :tn. a solid: [5.36J
-
Flgure 5i1Z1I
I
H~eJit'f~Qw beWieen ~lQli'dand f1uh:t.

:II~~'
Plurid
~
III il!Li" ...... \",-.,.. IJI ~~~~J.l . -, ..... iii ",""' resL~~~,
'1""'Ii""r- ~I, ..... '-~)i~ , ~;I_mW

....... ,
~oiih ~. _
Bomuillary sudfm~
nnm_lLtioo!: :1':r 1""-
N'~ 1i1ne 'la' '. ilbe S'tllfa:oe;. ill
'Thus 'because' of this msmstace 'the surface tlemnera'br.u'e of' me solid is 'not ,etrl~al'to L "',,-.----,,:__ Jl"'-"=-'C~"'!'~ the 'bulk fl'lJiijd. wmperamm" 1J. S'u~h lhermaI :ms:~stance'may- 00 numeric~al1,y evail!~ated tfJ be 'l.11L in, whicib, h is h.est b7usfeJ' coeim,Clellit ,of 'the Ooid. By equaug: 'iJe :hgat flux "cotor. q~entering 'dle :m.te:rface 'from, the '8oHd side and
,,, ·iii __ '__'---' '. ., ~-._
<-' -~-~
"1'
--
.~.
1-- ---'-
.:__,__I_
-:__~--
-'----
_,.c,
.-
c__~_-_"
'--'";1,---'
--
me
iW~ -n
,",'11..·6'Il.,"""!iij;, !illiV ,~iPJ1l. _! !~-!i,

IW'
fl-
'nr\~,
,n'~m:i:nd..,iP ullJ.. _ . Ul~
'lI '~-",""'i~~'IMl;O Jl~a,

~'1!
,;i;!L.li:li,
I1IJ~
l';llIiii"""'....IL?~'''''~1I_1 I_U ;m-\I!'1I; 1i_1J~:ll..lJlIiJl.J!W'

~
,j,'LIiJII L.lr~~fI.,. t'i~,i,;illd Q!D ..Ull_~, llJu_lIJ& 1.ILlYiw : ::, iJh'31lli·
l··~l-u-~."i '~D 'c.:'1L1i1111'_ c '2''-'''l ...;11 I. ~.lle-1...~ . _ iSufQJl~, .JI'~I

,;I
IJ.1···· :.
,~n:Dni'iii:r-:lliffiiv '~"'!i~Aft I~v ,~W.IILYilll,Ci lli,IC\lM-UtVU.

,=ir.; (lJi
:!I."T;f
!I;,::.--
'\,11:, ~
111"'_ '~)j!; "
:::::::;,I,..I[\H'II'r _ ,(II)"
If'
,f~ "~~
~!, ,il
![!!"g
I { .....
I!!'...
"P.1I
,,t
f" ~
~
I[SAl]
.
-, .. . .' -. .' - 0 f' .mres~, aee, TIle-...e: vecltor ,0 !: 'Il"- e normat- vroto[ al m~'e ,po,mlt .,r .'.' --, . 0'.0 :lS_ ·'smP.cmc bo1l1nd!!ll~' betw,e~D.lhe &'Old and. 'IDe 'tluid. r(~'J..: -"i ,II, lh.
,...;. .' ..... it ,~n ,
Ielf" --
- , .. ~;. _
I.. 1·.. _._ ~;.:' :.
••• ~.
f-
"
';
.-..; .[.:
_,
'.
."
I .. ~:. 1-
:. ~
fl·
...
1..' J
..
~I·.'
lb- e . ,.
1 •••
S~8~1 Ii.", •• 'lIn,d • .., Candlfllons,

'Hquaroon. (5;,.3,8,) is used ta detennine tllt~, u,pamb.lm di.s.tribunon.IfC:I', Q a MEMS m dev.ice eam,oKIJ1C, The 'temperature dismJb~.tiotl ,g, tim:o,'lied], WI ide:uUfy the, looatioo, ood,'lthe, 'maplimde Oil' the, muim~m, t:emper.atmre :m, 'ilie romponent as, 'weU, as, '00, de .. Etu:miiu,e'~be asseeiate tb,~rmal s,~se8 ,35 d~moD3tFatred, i.m, SectloD ,4,.".3,. :B,oth. the ,mWmum, rem.peratu.re ,ad, ,the' iem:tpetabiuie,.,indua-d durrmal stresses are primary de-
:iJnrolvin,S 'tfuemliaJ~,effects., The SO~OUO:I1lJ, Equ-atioll, (5,.38] :reqiaiIies 'propel' mrmulatioJll,lof 'bo~ndary' OOlJfi!"'" IO:€' 'DOllS,.There a:Ri thme types ~f 'bo;u(ndlllY oon4itio~nl; tIliIat e am,'be 'lW~edl,la, tlteooal analj':S~S~
cmum, ~m,he desi,gn, Inf :microsys~, t
a;i,gmJ ons:~deratiom, of these' ~o:mpam;emlts;. The,. are thius ,an im,pm1aut o
:pmt 01' 'the pro-
n~
Me, ,ftS :~u,:eseDJt~dl, 'beJow;,
10.f e - --, ,iliit.. . fu1lC uOD: ·····.~~-,oms~~ l' I. . it:i UJe

i
F(-
',~1,lID,,~u;au'on,
--I "No.,
R ..... .-'. ,
flj.J,.,"'f..JI
'I.";:"JiI"l")'
...
-.' ra.."", .- " - ,"-, ,., - .~",,1 -, , ean- '1JIiI:i a COMraDI -. tli.1I,;...~pec~~ cases.
Ccpyrlqhtcd material
188
So,IIII_D ~. We, may oOfisider tlnal 'the ~"duced temperature. Ma'id ~n tlhe bsam predominan'~ly v.arrJ!~·s in tnB "th~ckrlUg~S'f ~B be.ami U is; thu areasen ac~e' to assume II temperature. O krnetUon T(x. In the beam, wUth x be if1g the coon:Unate in Uie th~ckn6OOdirac.t1 on as illus~r.'a;t~dl ~nFigure 5.28.
Still] 3ir
.s,
riI'
II = (lI
==-I!O
I:;i"
Mm,'~ au' rnl n,g: f[;; 2lfC and h ~. ]~. W Iml...!D('
"][bp
x;;o
fn'Cc
The govl~rnlng diffeFenliBJ eQLJB'hon. from, the general form in EQuation (5.38), 'for the press Mt naS-!l3 is:
=~~
~~r{x~n
dX~
1 af(x, = -.." ~~
II
t)
lMf
The. the~maJ di'ffusivity 0; ~n EQuaUsn (fL46} 'for sHieon beam ean be obt.aJned by ·the ·thermplPhysl·oaJ propertije\S listed in 'Tabre 'lJ3 in Chapter 7'1 wi,th the 'thermal QQnch,J01Iv~lyk ~ '1.0'1 W/cm-QC ~he mass demcSity (J ~ 2.3 gJcrn-3~and. 'tthe speoWc he~t e= 0.7 J1/g=~[;1whnch gi~,~!!!!!! '0..9752 cm2/~. Th a lnit~aJoand ['1ton ~s
i
[a]j Fer the bOlUlnda'1l "Condition at the t,op .surfaee. cencllilicn; ~T(Xl t)
,j(' ~
0 we have the hoot ~IL.:IXinput

1 .;
ax
~...J (
_,
..........
'I'
wh ere I'll =. heat fllljiI generated DY the cop per film 8.nd k is the ~'he rmal co n due1iivlityOr· the silicon beam. The mag nitude ,0' the heat 'flUK ge ne rated by the capper film is, Q = 1;2 RIA, in wh~ch l is the eleotrio ourrent. :~a:$:sJng throL!lgh 'the' itllm (,a.mperes) and R is th e !eJs,Otric reSistance of '(n e film (O)! The ~cp surface Mea of the be'lm A is
llIi_
I ~ __ •• ~
.:
' ....
1....
~'1-' I b:i!e."'~' i!"'"II'ji.ooiI,' I il~~t
~~~IIU~!W'~
I""~J" Il"ilIi"II
!!JII
'-rlr-lI"If'til ItrIU'~~~
ioh. ~
'eil
il<llil....._~a'tI.a!1' Ii..'~"-~~!:i&.l'~~
l.... oF>l"iAon;"ii1lI'lj;O·"IIIo".6e!1I'1ii'iJ !iIBI~! 111~IiJ!.AU·I.u U~!UH III.
,.
_J ~
~~
8iU~
81
_I
liQ
1!Ii
II
~================~======~x
(5·48c1
The compati bHrly oondi~cns at '~he int·erfac:s· are:
f.~ t }I.oc _ (x;

tJl T,(XI k:'1 -X
,S ..
2WP1'
= r~~,)~." t
;;;: ~
- 2:~
t)
N"'I:II-~'
D Tt(x, 8:')
X
..
""'2'~
af'B SlS:V'eraJ wa.)ilS'W sC)~va·ttl a tampB,rmum. dimnl burion functions r~ t) lx, and T~( . t·) from Eq uation (5.. -8)1 w~th'In e co ndi~ians speGrfied in Equation (5.,49). x 4 The "anowin 9 solu'til'c)n is obtained by ys,i'rl.gJ the j ntegr.arl fransro rm method presented in OZiS1k '[19S8]:
fnare
~~ .....) . ~ Jj_ ~ tv'''" t

tm-~
r(if" 'lLlt' ,,,,,,,)[k, J,)!I! ·,·Ii) '~''I.'hl\'''' Q:, O-'r1
i!iI 'lA:
I",)C"
".,Jr-uK JI a«
+ ~ ..~T!rl~X~;\c (,x ) /(2 Jt! ra'

i!LTIi" ~
!I;.;II_A
..-.iI ... ]
'\IIIh; mljH
'1l"
'I, £
[5",601)
wl1are ~he fUnotions F1{X)1 and IFJxl a~;B the respective· :in[ti~dcondli~Qf:1s~n S~02
and $ilicon. Th fa' no rm N'rJls def ned
8LS~
'Th.eo averaee ~ ____ .. __ ..~ '~,P 'In the [aOOVel leX'If\:ve-'5S~ o:n__ . _ a heart C'--~ rier :bl oo:1!iids p_ ySL--UJo\i' . }" __ IL fur' .. . ~ ~ _ __ '-<hf'~--~'C~llU~ means the avua,le, d~stan,ce ~_at results ml the c'.M'['1~"s :~os;in,g,m.b, ,e.xc~~Si:~Irf.ie;Re:~)' .
'while 'tm,YeUn:g: in. a,bulk m_atariaL ,]BXtld: '~a.~w:e~[ roth )dFp and MFr arm ;SCHr~., O'f They Idepend strongly UB, rth~ :m.-olecmilar stmdct.tU~e~ f ihe :l'Ui!te:tim:s ,and, the ~_.aJ o CUJUoume-ntIl_. '~cin~w~ni~' - the ani'im[dmil!~e ,.;a]I1-eS) tllat eIlM'fie:-;B, - m~f~'-l'S'-· fu- g ,Ul ., t, __ ~_ . _ -b 3[:'i: --- -- . _ -ei .='Y l Ie . r,...-q~r. 'tati,v,e ilSSeSSitliltBm 0,0 :beam,ttutsportatioD. in ~otids, :hm Siubmicrnmettt asd nmiLosc~le. The MFP fm ellccilroilli_S, :is[,aboll1t 10-8 '01 at room lempemtu_Jr.'e. Tu ~IF" f:br '-,::L ---- ~ ~·~'~rls:;·,~msca~~n::-;' , Ibe~,--'--c''t:-, :frr;;-::- -:; ~(lF e:1;- -'---:-Ie~ !tbe:e Ji,\!'I!Jr.'JJ" i:- ,jolk-:~'--I dia .., ,P!tl!!nmlo_'[l, Cli:l.JI1!_tQ "~!L g, 10:'-",~ m~_lI!~ __I!ge:-f_ ~p __ _ _ 1t.tj~ m uD _~~ mond 'fibns is :me--lS'u.f~daJt. appmxjjm_at~ly' :~O-'l mi' As, 'meDHrJJ1~, mn~;r '~is,ic;:hI'.P~' i.1l ,S:t1!m~ 'wiIle:~ t'be :rdFP f.or ,I.iqjllirls, tel .., '~beMW' for I,ases is aIp,pMltwmlltely' lequ~~, 6 '~D is aOOUIt. ~.ice ,this ma,!Ij1~ltndle., 'The MW fbI' builb, e:m.ecU(Dl~~, 'phOlmo;ms, :i.~, tliQ]1j,gWf ,arnd ~ clepeJDd_~ilon, ~pe'mklJr'e., li: betontes sh'ort:er as [eJDp~re :incre~~.,
-);",F:- ------------~--,!I,-" _ _ __
'1\r,mc.,,:II, values - '~Q~ ~" .;::.~""',u.",Ii, ... ~'Jr~- --=- - - 1Y,!!,'r;.r ~

-!!j,
:~A'~ ,~~ :illet~\"":~s, :in Ihe t~!e-r: is t .

,I;,Izy,!l, ~ __
]I,L[Y:
of _
10,=.1:2 s, T.!!r':-;v ,.e i[-" '·0~,e _ __ = W!!!e,;if =~ !Alii _
"I· ~arnge [0 f :t1i3:llO$,oc.OO,!JS,
AI ... , . ,:1 '~,.... ,", ,A, '11) pl[~oSe(;om;u~e... o.:im~emc mI~en~JJiS!.,IL-IIl~:magmlmue ,1U.r ,..1,:,.-,:al·
«Jf'ifl"KC'T'" . ' /,l~.llI~J.
:iu. :H1ia£fO 'lm_\e·-'E_ tf"Ii'i!S,~er.'M;,""_. _ ~i"''''~ mi!Y'O COD~I!:S:~'O.··:,./~C<'i;UD"':·I~!I!t '~I~~"!'t"l_I1;'OO ,C'/S ,:-''''''J'"," ___ __ _ ___ ~ _=~~_ = __ _ 'OW~~I: Il't~ 'n~o'-,~y-, _ k~~--. I .. !I!~ '~'i!,""n~ett~~ beeom-:--;--: Jeal 'when tlte size of so id, s:bEiJIib to, ~~blnIDcm~kl' ,i3ln>d, '~aI1oBcaJl~~,. C()~ge,.. IQlm.l1t1.yj! heat 'h'8!M,1D~n s~bmiclnu;u.~-mr.- and n_aQ-s~zed;SiQ:~i"ds,"Ui~ ~~ '00 cousidered i ~n bomb itzt",h ,a~d ,t~";me'seales, The SWll'IiJlary :in, Ta'hfe ,5 .2, :wn,ay- be u~_ef~lill uR:d\e~tmdln;g, UU~, :prWBciV41he-M 'eM-;" riers in rsrlllbs!laflt~e~new ,atm;d Cbf;-[fl, :1'994J: r
~bviouFd,yvaries s~gllifi~al9It:1:JJneases 'with abrupt: cb.ange <crr goom,eby~ ,e.g,.t c4liCb, and interfaces of tbin :filmfL In macro:~f:i[e be;3il tr,an~lilliss,io:n~, exmlpIDe~ bl! the :flb of th~dm~s, :111 :f'OI' ,8 Figure ,S;.,313,~ space h~ d1ie :Iar;ge ellolllliOb, n'O alio'w h!1l!DdredlS ,and 't1il'()DstWds, :pmn!liilion,lcol1i8'~o(Bu;[ take: place, These lon~Uslo,DS, :~mply~jUmctemit1y ]~ns;d:m~,e;'f.ilF the: 'tJau~poF.... tOI 'WiiOiilJ., [The MFP' ,;}R~ MFf are 'not [critjca'~ j!~ ttIe 'ptocecu as these ,effi"ts, [~f''1l~US~aDSJ are a¥etag:ed o~t @ver'the, Size 'dle ~Dlid~ as well [as'tlle ~_iImee th~t is urvoJ:voo ~
J
ll
me
'l!f"""~~!,
_L
Q_
GlllnU,
!
,
H·-. w
..... ~-:" _~,
-= .. .. . ..
:. n. _ • __ ~.~
;;
--
Slubstance! of
dio!l!i1!irra!ilC~
He;a-.t
(roll'lidllJ'c~en
j~
~n !ITIi!!'lt.ais
Va'ISJ!iO@ 'or ,~ti~Bd
'di6;la:-elIr~c and
~efinrCQfld1uetMI mall3rr'a~S Saumces [011' ~neratiCi!11,
ILamiC',;@, 'iAbja~m 1ll!'illrnmdi~

'H]~i
~~eclF!lJi!'liffi'
~ril '\/,aCI!Jjli!f"!iii. orr'
Atom'le OJ nmDte©'~I~J h~"'I;gj!i(J(n
f\rop'aga~m nn~dr:a,
App~o);~~tJij, 'Ij~~frty, nV$
rna-ega
!n ~u~
[QJ Ir.rt~di!a,
'HJil;
~Ofl
Tt.. ,it ueJ1e
,Ilmoscme
,~''''[G'liI:'Ii·,·,iiYP.
JL • 'ill." ,.-1 '" • ~,1.. (i~lM.ge--5,U'D! eat oo:nuu.cncn In 'uje~ l.. ,. u :suuJ~nCJlOnielter ancd demains. These ,a;~-e (l) f'lle change in fuelt1l11n1Jot1nd~ti 1V~ty ;3Jt1dJ2) 't,b,e (
ate ,two sl,gIl1iicant:

~iCI_li'!ii~'
,.
•C
~l~~iJ[~~
___ ~1!:!J
,~iiil!il .o!~.c;"
_
,*!Il.~ ~IU~
~J~-~IJ., ~~_
:.... ~c: ...
V~\ll~.:
i'i,fI:Il.,..~,~ ,.... ,;Ci(lI'I~..,.!It-·l'[""""" ..... ~,~~-~,_U~~ ,v.~~u~~

~_j
14;f:i'i'i:"'lt~"":i'ii 'l.~ i'iinnro':- ,'!j,!" ~ift'i'I,~!~, ,!IlJ.l!~. ~~I!LJ~I4t~U ,:::_.·~~"lO!! ~,L"'~I~r,r'· ':'_ .... ~~~I'-~
,~riT'il
i5··. ~':Ci') 'T,
I(::at~'ifi'.-fi between ~¥
~~
~i'Abl!itiJlili"'rO:f!lJ!I!eili\.,., ... ,i!jI;lI"]Il"j~, ~1.!!t!:B'~t!!YJ~ .,~_~'Y I~t~'Y- ;Oi"'lIm,.-5;n~~n ~!!!H'_~ __ ~_ ~~HIlY lIl¥I"i('!'niifm' [!'lemn' b';::ol!ili~' _ ~!J~~'I!r.r''''~\!:'_''1
,j,lIi:', l'iJi~' ~~ ~~,~
,''!' ,<
,~ F~::i:i~, 11 l,Jlr\ll.lUiiil
u
4gcTFil(~rr:~ U~I.tl~·-
IO~ The nlomentum. equ;auon is 'used to ~vallm!t:e.1)1 YDlmll~tric. flow mte~, ( (2) r~'latio~ship 'iaetwee]J.1he· :motiQ:Aand the dri.v.mg forees, 1(3) 'Ile md'u,ced
.s:
,ames
., ,. R. "Ai :WII, a :mnvlDg ,,,~U!~u ..
lll~
·we. 'wiU use (~)
('ll);lltinJMjtyeq).Ul!lition~ :moDiteSNm equujjolJ~ 1(31) leqtllrution (2)
ef
monon. to aMeSS the :fluid ,iud1!a1oed. :tnn:§ 0]], mic:rosySttml e-ompol1Mifs,. 1%~ Hydr:dluUe IDMD,eter Is used lQ evruuO!te: 'lte proutgsecru.\(mlBJl. ,Miea ,of 'flrUlid, :t1Dw,mg:
·-1 U] ("1)· [~;'~l'ii~-'-;: 1('1), " ,'!;,;I!li~~J.:aI...,~"
"'-;i'!~!"ri'ilml'I:g,~ re""'I~~~I;~,~,
~,):: ~..i!' ,\,J , [;;}iilfi~' ~
shaoe of COl1ujt~~m:s:., ~J:"."". - - - - - - -. - -- -
13,.. CFD SltauuilJ fillit (I) criucal ftluld d,yn3!rfJlcsr (2') oompU![mo:oo~ :[lutd, d~miics." (3) Icmn,p~m.iimd, 'fluid. d~mIlDiiCS'i
:1,4~ N'av,ier-a..S~.ok:e~eq[l1Itions r-ellme (t) :pliCssuml-vlelot·i'~y~ 'il'~~ensiity (2) ctmnge~,(.3) pre-ssurer=viscosilty :in a :moiVin;g: flurdL :1l5't, Surface, 'wnstOD :m ai, 'fluid, 'IS, a form [of' (1)1 3JPfUed, tension at the :sttmface of
'1he tl1J!iid,(2) an mds.ting tensi,on.,at ~he o'wd sumre~ (_3,)l:e'uinn tb.11
~,~'Iil~ii;!;e, ,.,i..@ ,,,,,~~_.fq""Q' ,;i"i'lf- ~.1,.\"", n~,-ri. UliIl& e rilI Ul~ iOUJ.il~ v lUI""". I~;I,U.
fll
I.~, Suriace ten81o~, Is flfL.g ptmclpaJ IC~Ul~e (1) c:apj;HMY~(2) :n'ew~mti;m~ 10['
(3)1
Ii
laminar :ftow ~f',3, ·fJJuid.

'.
I.7 1'l'w IClOOm.c1ent ,of Scud~ tension of' a, Ouid is a • .easm:e ,of the m~p;ihlde (I,t"
,... a L
UI,~
,('11 '~-'~Q!iN1i;nit ,~~,f'tiibl '\
Jj." JI:UJ.lnl_w.~,~·
tl. liZI!!I;.Ll~.lI.5l~IIt!i!
I~
"2,
_I)'"
....
i3ylJ,.l~
iDltillr::,·.i"I'QI;
+-=-nil?'j;Ofi ~1!_:liajJtU''':J_"
'('L":!:), .,n'i"IiifIj,llncnll' ~~'

.
r.J!,
i"'~r·~·,iiuc..J.'
vL
g. lilJj~_W
'QI -iC'!IIn~d,,-
I e~~~QII"'\~
~U1,t~lIh-\ti
c~Dc1mjJt.,It is inve~].y :p~portio~M!'t) th~ >(1), :ottd, (2) tint (3)1 fQ~, ~ poww [of ' mMneter of the co:nd~il'" 20,. The, Idriviro,g; Intee in 11m: :p.ie.zooleetri!C puM"in.@;: ,af t]wds, ~n ml!m:mllllt'2: ,condU!~b :is, of'the, (I) l_~~ (2) sludac~,(3) volumetric -1·1- A- 'r-~ .... '~iL,,:,:, :D!a~[ ;j,,.. '1"~;;I!"""'~'m,;i];'llv '~..,.,~~~,... ~4',\tf~;t''COJ--:-, .. ,.;alii'''''~iI; [Iii ",ij_m~JI~,~ ·A !WiW l:i~ ,1 dtl· r ~~;f J!lji~,illi\\iU~~
I11~ ['film, cap,ruUiBJ':he:l:gb!t of' ,I, :Buid.1in, ,3, small 'tube: ,is [(1) 16q,lWaI, 'Wj[ (2) di!r.ootly' pn>pamolilt:11 to, (3) iuve.r:serny pn}portioDa'M, ~ the, dliJameMr of the tube. 19,t ~llft, dFop[ ,IE,MO JiOmm :~ft, . 'fluid, driw~,h-t low of tim: :Ruid,in.a ciroolat a t
me
."Wi
~' ..
IIf.
[p'Q~
~-&iJi
T1iih~!l;n,1li'
~1;t_~1Q!
£ill!
,iQ'~.
G~l
~,~"..I;~
,~,U'!!!1!'
fiTP~~lrli~.
,-.-.-a.u.IJ.'~!I!
pmss~~,
--__ = ~'-. -.
(3.) 'vacuum,.
~f',~;~,:, oyer- .~'I;;..--;iI;;.~:~,\~_.,:1 -;-'!-:-!ti::r~i:;' v., me G;3", :a.u.e puYSl:Cm, ;Slm of &e [oonitln~B1~, (;2) me mean, free, :rU4Itb, over the pb,ysicaJ'l, sU!e of tile ctmfiif:iemeJl~ (3) tllre ',eloci~Y',of 'me gas over the, !i.peed. o:f so~ndi' Clollv-~n~h)~a!I,1~id d,yn.ami'C$, 'dtwriie-s, He valid. for (:0 '~~ry ,smal~ (2) lar.gleJ t (3),1 v'my :~Mg,e, nudse-n 'llllunJbelS" K ifi.. .Ibn...,,~,~.~. ;~ __:~~j, ,.-, Al...c,- '- " me ,..I " "t· .,oif,',,,'b.' , " ' '''' :IJ~ 1,;, [' ,", " '1 ,~,, _, ,.....;13 "A'''''!!th :nttm'~...- IS: ~mne~-d' as ii'l"), +,1...,;;, 'uen.SLY 10'1. Illue gas iOry·er: .-'11.."",:El[~y;slca. '"' _
The KDwke"n :nrnm'be-If ~ !l;;L.II,il'llLeJ ;;;,~\Ji.,j!! i[il!''''':e~n':.d; ~11\ ________________ . =
gQ
:2:2~ A, ,1000 esdmat~ o:f"tlhe MFP for ,p~s,:~r( m,) 165; Dmi, ,(2)[15 :~ (3) 1]01 'mn. ,2-3"~ A,iOioo(W,[esiiilW.l!te o:f"i.ie~ MFPforr-:-uid'~, ~ ,~s'il'~165:,nm~" 1(2;,), 1.5 .Dm,,)(.]'1130 , om. t:-: II;, ,,/1 -.--:11 ',' "'-,',-~ . " .-..--.' ,uq
--------." ---~.=" -'"
,~,~ ,~~;o!iimi;~'~IiC_Y Ln."," UI!;.;iI~b,:J
~_c _
size o:f.' , 'lbe~ '~~H~,-"II'iI'-' e:iliIIjii,giilif ,.uu~. m ~ainl ~~~, 'n~'i'k.~k;i;!;, ~_Il UID.C ,~w..JJI1 ~I;--'= 'n'1:-.iV-i!',~LffO,,:" 1 [,:";,"""",, , lllllW ~lilJlllra~,..iU ralll.£~ ·ryfU' 'tlbeconfi~t~ (3) fhe ,doo~ of the ,gQ'S. 'o,¥er me speed o'£' :sal!J)ndL 37'., Ii,gas ~Sl ,c,oos1~red, 'to be compressible: if the· :Ma.c~b, 'IUlnllOOr' is, (I) l~.s~, 'than" (2,) equal 'tn~ (,3) ,wel.WT dlm, 0.,,]", 2&. The :IH:D\P~'Ute KDmldften. num-.I5..~r", '~fi'I'oe ...~'ifrii~m·-.,j;O_.n., uw [~-'i L~:"_, :;.', • cn [mJl.~~,,", ':,,"4il"'il"'" :gasI~Dmes ~,..... . _ ~,w w, (1) Imaner;~(2) IMlFt (3-) remains '~e S~,.
____ l!!!! ~
~t_lUl~_\JJJ~JlJ~!r..g~1
~-,!\
\,~}.
",iln~!I!"' ~'f'!!i.r'-L
,~I'"
"'.o.~., A ~..,
,"iI;I~,
~ ~.In~
o'if 1;"'LI.!Ii'lflflii'ii·~[ ·'t'n, ~J..~~~',J ,~, ,~.~,~1l1_~tlI. ....,'I"'il'"'!if'~,i.'tr', ,-,... .... " i(l:""..jI . i~,~_~I~HII~m ~'L~
~I
[iili9>i =~ 1',e
'(']-)1 V:"""I'"I ~' 10"[~II, ilA'i!iI~' 11 " .. A...U ~, "," 1'- lL"',i:RJ
I,'
,,-,
In[ Uri] .'.j! '
3:'~
(2,) :Kn, :> .A" l; :U'a -c 0,.3:;,(3) Kn ;> O. t, M:a. :> 0,.3",
214
,pmpel1ies, :mTn ,e 1.. In 'Cbapw , if neeessary. Heat,florw in, 'dIe normal 3 dD!eCtiiCUI, to tJlm ,~y plue :isn-egngiilble.,
12~ 'Prove that the, ooJ!ll,vedive llcat 'ttmsfer oowdMJ" rCO!iltfttion ,in Equati~n (5,.. 5) 4 Meludes both, rthe~ lKJUD.dary rcoomnons of' pre.soribed rempemtm-e rum :he·atflux .. P{'J{l" ~le,r liet ,n ~ ,0 ~ a '~M1l,y' :u.ulaledl ~d lei, h ,--+ a') :for
~t ",loA
lUlI~ lAJ,·W-L~',7
L,..,... .... \Ii'iI!giIi'U'
~tn'i':dl,
~l!rdJl~-~~'
..... ~)i;;.:i~n
~u.JlW~J~~b
Fllgu,
.~
II ,Ai, mioro mirror.
S~nce the mass of' the mirror is M = pV
= ~ oot)" with p = mass def1lsfty of'lh..ei

(6.2)
m1n"Orrmater[alll the mass moment of' inertia of Ile m[li~or 1'& thus:
The mass moment of" inertia, of 'tf; e m'irra becomes: ,~ .. 1~
wirth at 50 p13fiOent reduction
ill"l the s ize
p[ G ,,)g et(J t)] = 3~ [1~.
pbrfB .~ ~ :3~.
'w
~tIs '~~eaf'f(om he above, snrnple ca~cu~atiDn that a ,red ~ction -of a 'factor of 32 1's achieved in the mass moment of ~ nertia; and rhus 'the requ.fred 'IorQ~6' or rot'ating f the m'rrOf with a 50 percent reduc~on of' U1a dimensioo.
218,
(~~
~-""~,,
Use 'the scaJing II,IWS, 'to est~m~t8 'varidcm~c~U1J€) va;1WI etrru'[Q '~Iow' and p res5!Ufe lltu~' m dloop il:n a c1rculaf' t~be[ jj'f tnel [radius oJ th.e ~lioeis, reduoed DY a '~ootor of 10. Make' an obse'Na~ioo, an ~hijssoolmngl ~wacticB"
J
'FWiomEql:fstion (6.2,4)'1 we !lave [the, vch.n~etrlc [flOW (J ~ a4'1 fn whlth sis the ratUus of tne rube. From tr,~~ scalJnQ taw, we have 'tae volumetric flow redt.JOO{j 'fly 104 = U0.000 tl'mes. Li~ew~s:€'. scali n9 law In E~ u anon (fl.25) Ina [catss a pressure the drop per un f! length tnoreaS-B by 1()2 = 100 tr~s. This i's ,rtbvi.ou si:y a 11i Q h ry LJ n dU[IiM Ie s'itu atlen far fW sealed -C:lown de,vice. Alternative' meGhani~ms wOLiId tlnus be des~raJ]~e m~r,rQ if1uid rlow_ 'for
'bDJ
,£1..,-,(.-
.l:-,-:~,,"- ':-'.--~". :smiillWJ.~n " IlJ:I,e @JlOiuUh, ,~S' v:e.ry -, .-,-"1~1 'e' c
.-
r.egam:-d ®o~ailjti.g o[f filJJtdd flow' in Qlpi.Wl~' WOO~t'for' eases w:bem 'ilhe tadiUlS o;f'
'~'!:.'-, maJc~~e,!, 11,-: Ulle -c-,~,·. -·""....,!.1
r.;. ,--- .... --:-~, Q, J]i!I!!;;I',IJie_
c:.,..~,-;'llfU!e 'sc.aiWlO" e....1'''ll'iillcro flmd . ...... u~PL___ '__~__ ,~ ",y~ ,_._ ___ _ _ -__
'flow would inC1!lrude, capila_ry' el[eclt~'which, occurs '~Oliqllid :Oow' illmiDurte con.", 'the, d~ruts as i~b,~~crlibed S~ti~;m, 50.,6. This ·eff~t :~s,3!lltirtiwced to !lie,donnnamme. of'surface ;in te.f:is:io~,of 'the :Oiuids :ifg, smaJll. :SCa;~e:.
Th~ 'ii'\iijItlI,.'
~ 'i!I!O:~i!ii'Lii; ,rll!,~ai:IHI:.:IlJI,,,",,
';;],I. ,'lI+ . l!I],i,n,
'1'~'ii'tPitIi1'li~r"ili<..:i1 o;!I 1I""''1i~II!I.,,",UI
~..,., [.... 'IIJ'[li1iiijof!i"ii'Ini'Ii,;i'Ii; IUt",", il!I·II..I!I:,ru.iIlII .. ;1..~ il'J~'Ii""'~~;e;" !Ii.'!<,.l!' U T !k>i1 .....'IU!'J..I!IL!k;i .....~
:1tkmUaDon, (5,,241..b), from whic~, we: hl,ve, OR

tl1be~ Tbius'i' 'dle jbUo,mnl'
a: ,a=:1to in wh~ch a
t-;;i!iinl Il'! ',o:.,~ ,J.a .cif!li"nj'Jili; ~oi"'J ..... ~ -'i!;'U~J .m ~~ ~lIt ...",,~;aaJ.
'~TIi ,1I.ll
irs ate., tartlus of 'the

doojp pet unit
'oola;rij,0Il ical']. be 'U~ed.to r&eale ,th~ p~~sure
len,gtil, [of a liq,Mfalid in a nUcloscde ~u:be::
Wile)! U I~Iha:PP8n m iC1r'@sc·aJB'?
to ~8 Dlre~suria drop in the '~uld'in Exa;m,p~e,1';5.4- uf' the ~ube ,radius; ~s
• SGfullGn
The pressuoo' drep per uftiit. length ~f 'the tube from the seal i ng Jaw in 8q uation (EtaS) ~rtc;mases lOOO [U es with a 10 (Ima s r~ductio~ cd' ~hB~ube radii us. 1n8 ~it~ IT! uatio:n is, thus; one order of magnitude mom SBvem ~ar1 the case lin mesg~ or
l
maJorosc-ahG! fn Examllle
6.4.
:MIIJltiple, Ctulioo
phyMes" (3) too, ~ma[ket,dmlimds., ,1, St.Wmg ill geoD!le'bl' ,is ai-ti:cd, in mirdliaJtnr:izing (~.) :mow,in,g ooa,pone;nm" (2) senmns oom,pmenu; {3) ,ov~, di!m.ens,iom of'MEM! p-rodooL~. ,Ai,', "11"1..~ 1J.if-;~, ---~ -'~,s___ ~ .I,lU;:;; __ Jm.m.er _ :r(.-,-~,-"__ .roe s.c~"11iin~' g, ''Ye.Qt(lf ~s ~ ___ :tn, assess, :mit:tJilrf~nrimdon re:lmm(~ ______ _ __ __ ___ ___ __ __ _ _ _ __ _ __ _ ,! _ __ __ '~ t'I'), h",:,":~" '81 iiirli: ~i'ii~"d'-;!:i'I'(?"\I Rn,jid-' "Ilttu .-. ;(-~,), .fi,~Al~"t'~I\i" d'Vii~ -I ~w ,;i1;ol'iJ\V '. '!he t-v \_. ll~'-~ _v ~~u.:,~'J 11~_' . ~J!'
;g!,IL __
_1_ I~~_ll
:l~The ap,plicailfjJD of' the ~: laws, ,in rmniaturiunnn, is to itSimS 'lbe c~nces roD(J.) the: phymicld ,~ffoot~ (2) 'IDe OO~BOmiC.oo~, thee :mM'm, (3) eftioot, on nmdurimd, ]lRldwoU'o 1, Scaling la!Ws, ate eDved], :mom (:1) dHilD engineet'S,'~' ex:peJience!, (2) the :~aw8 gf
.--~tI!
-.':t! ,,:~
L~'~
.-liJ-'----'
- _. '---'
.-~'- --'
de:s,jgn, or! MEMS.,
"'''''~Q ,r'l!n:''Ai"'f'''d i1!;'JI~~n-li'Qi'!IHlI,g;~;1I"Ii ... ~ ,1.u.-'jlU_J,:~ !II_II-\Jilll f'0Ke8 in,:microacmlUon ~s'IJbat ielecoosmti;,c forees seale (1) 'belttt (2) WOfie (J.) about de: ;smDe as. w:ectromagu;etlc forces, ~ ,~l-;.ro;!!iif!, ~_41~'II... I(J= .... ~,~ ... .... )'1 ~l,,,:",1,)1'J~ ~,~ ,4,omer-s ~f' m:aJiifi1~lifltrj_.A",:< W'Or:~,Q; 'Iha, l~ .. ~', ~1'): ... -_~ ,=~~~t1JI.IJ~ 7-'£. ~
"'l"'L,,,,, .I J!6Z
_o:!iiilli"ili'R; ol1!1rH_aUU,
5~ :POIlomer 1 scaHng ;slll'Cn as :sWiface-,to-',vo~.n.e scaulm,g!o the, ,&ooeletartion, Ym~s, (1) lUmur.~J~ b'the square pow~rlJ'(3) to, die, '~Ib~c' (2') :po:wiel~
w:bv 'J
t,
,iIj'~_"!I'm' iI!i!t;;n,t--ii ... ,

~~t~~~l_·, '-, :i'-~UI.'w.'
l,v
11iIIII,1'iiJil'
o:ii_
i"ii,U_ IV .,'~,
"'j.,,g;,
1~)'~IrIj,LYIUR.~j.,IIiiiIU'!IiIii
j,
I!I
,Ii!i;i'!~~~~~~
~lgY,I_I_!l~~¥~
II)~_~~
~:t!
!!!!!l~
__
. __
,eJootrostarti.ic
rome-s,.
:& 'Th~ power'lMs dUe te ~iectr.i,c,msist~,yjt,.is (I} macb more sevm'e~(2:) less s,ev,e-re; (.3) ,about '~ same :~n, malil.-'!i21ed, is:y-ste.mso., s 9~ Pressure dlf-op iill ,i'fluid :8ow,i.,.@,'thro:UI'~ ,a,,smaUer 'Ck~i;IWat'conduril IS, (:1) mllch l'' ' I!_)" IP.!UU~ [P\(ijiltl!"'il, '~~ (:') ~l1tpo'lj<;, :Ip~'f! ~b,~,~, .I!o,"'rr: In ~, ~;~~' ~I'b."!'rut-; "''':aI-~ ~'""~l!i;':t_ it\I'~'!ir'~I"""~'I' \'''", ",v" \;;;1.1 ~!~'!IL"",Jll!! 1"-'_",-, tY:k~L ~ ",,-v.u,y_IJI;o,o
~~J"'~
i~
,....,~"''"'
I.«t 'The, vo]umemc flow' of fl'DlIid in a smaller cu:oular eondult :is I(~.):nmc:~, ,~ater;! (2) aJOOllJ!,~ua1l, 'to..., (3-) much, is.all.er. 'ibm that, :m a :btrg~r- colllllk., il~ 'The ,cHhc11lof :s.lace teMlon, on :t1JUtdf1!owin,gin a, capJUmy t~flbe:make-s, the
'pm88ure· 'Mo,p' (I) mnch ~er~
tlaw' In nmsosJ~ tubes.,
(2) ,a'oou;l: eqnai, to~ (3) mudl less, dum the ;S-iliI1U"
12t The
1111 d*.
'Huid o.o,vrim;g irA, a capiUary 'm-m~: ak'M t_h~ m v,O\'nT'i"!i~trilC :60.w '(:~)I much :~ili1!~:F matt ~'1'~ ,'(~:)I 1-- '1.. 1~,~:,~;, _ .l!1!.LM~ ___ _ __"- __ ,!i., ~_ \=1 ;iI!1.r-"1'!ij~I,~.~-t'I'~' t.... __ eq Ww.;'U, ,"",SiS ,~L...""", ~, the :same; 'flow' in meso-sUe mbes, I::f~;j~''illv.~~ t 1;c~.l!.cirl.'t.]!u.v.~1i ~,)C." ,fo!'I,..,_u,:.,;Mo'_ f"l~)'A1~JIl. IUltw '~~~o: in u """"i".~;liil&'l" rJ.!UdlllU ~ :i-'llntiiior:c, \),! iL. n,"'riif, ..' ~mllIJi.t.& 1:'.\ifiii11:~ ~1.u.~ ,B~~ \~. ,v.n~-.l:JI \~.
effeot. o:f.';smace
1tCAriOI ,00
~;O'''''--
_"""_
~,
~!.!I_
_.aJ,
!!i.U~:,iJi,:
iii'i... .
~-G~_j-"'_
!..
1i.'i!-9,
11!I!~_lI:~
!o:Ji
m'"
i, 'I
a J.W:5,'e'r 'J1~ .ill sana; 1,4~ The mode .af 'hem: tmiilswsswn iim,gaEj :i.n,,ex~rem.elyfllaRiO'W:IJlISS-iil!CS :is (r) oondUCrU,cui, (2) tonv,ectiLoll ,(3) ,mdbdifiu. IS. Heat 'tm~s,lni:ssi,oo in gases :is,dfMticailily' ,~:~t in a ll~ :p~s(\ge,,of s~
l-I'JII"A' -j
...
less, 'lJbm
n,). ,:;:,A
, ,,-
J".J
(2~ 1..\, (,].) '9,A ·w:~e,re;-A- :m:s the- n!lte~ :&00 i'iI!it,h: of '~U ~"- " - - -- - - '- --- - -oIl:!"
~= , , ,iV'Q.'YJ;
:-'~'l~---I-~:-c-: ]]1,'0 :OC!ij!,
es.
.131,
S-ILII'C'--'O-"'N-'~: 'A' 'S-·UIBS-'T'R· ··eM··ER-··IA· AS-' ,,: _ ", __I, ,.',', >_--::, ,~:,_, '_ ,.' 'i',M, II i '':-.M I ~ 7.4.tiThe ldeall Subsl~at., MIEMS fori 74
I!!I_
I-II
=,
c',
L
-
S]]iCQ]l is, dle

"----f-~-:_'-
c_ --,,:Ii,e:. __ CQmpo;un~!:) W"illfl"'ll O'··t~:-:,,_'IIC-:!m eJiJ,__ ~',·'--~"I-,-,"--- ,-,-'Ii'~l~·I:-_-c,--- ',~S'tI''''-~:WfJIIS '_w·:-1:] :';'used "su Ib;.,~U~ __fir eiie __ - -m:.s " ~l~gg_e-=try,~~~ _UlICiOJI. \:- uC nest J!UebY U;~. :- . strrur material for MIlJrwIS: aJlId, mb.~ro&'iI)'}s;tems.The POt" ---= Y (L Sn~C;(!f:-,'fail' ,,,I!t,~b,,'-j= ______ __~ Ie ~_ _ _ ~ "" _ __ _ ~_ -~:;-:fnulmi'r_- :of -~ _iJl =_ !LC __ a~ pliic~&j'OEl:is :J.nrhnarrilly :f.ilr 'm~ folofWi~e :mm;oms::
mo~t ,~bllLnd.DtmaJ~ri~ (.~ ,e"~" Hlow't~,rve(f,it laJbn~~t I~]W~Y.Se.usts in
J~ I~ is 'fned1n~mmcaU.y s~abl,e,md]:i~can. be, integrated. into e~eCb"-nnics, ,O~,~e~same ~l!illbSM:.alfL 'mectt(Ul\C~ fOF s1' naI ~m_S.dUc)tlof1ti SA!Jtcb as ,aJ, ,t:' 'OJ' ,-:;",m:~!.... 'm", . 1m -,J,r' _m -,g -, . ._~_J~_ ,p~e:m:r~:ismI~carn he r.e:~dily :i:nt~gltalw 'w~~htie ~Usu'bstttam,. 1, S'lilico:ml Is almost all, ideal ,strllctl1m1. :rnat-:elLiaJt k has aoout t"bt1;. same 'Yollng~s moomd.lU~ as ~~e~, (aoollit 2, x: 'i ij.'i :MPa}j, tHJlt is as Ug'bit as aluunnom!, ~',ith :u-mSS, a den..!iii,ty o:FIiJoout :2.3 ;81(;m,~',.Matedal8 'wit~ ,al, hig'h 'Yonog~s mod~lu~ ean bette
- -=. - ~-=
c['
• '. '. ,,"t. . 'k,," .' AI '~I A .;il ... ,;, .JI ma.tHitam.n a 1-.' ·'~ml'.eMre;,'l a1tlon~.u]f.ll.iUtw~:l, ap'pi1- '~eiJl,woau, ,almiui.. ID'ld(Woeu, .~.~~ Ai
de!o~ad,QtlJ8,.
l~ It. bas a :nle]iti~g, 'po~nt at '~,4DJPC~ bLcb :b;,ab01J1t~ ~w!ce;as, high as 'Ullt of w
alU;g~~fll~m,. :h~g~, o~l:tiit1l:point :mat,es ,siUton d~men:$h)IMly ~S'tableeven at, Tbi,s r
elevated t.em:pela!ntre~,
,~:~. Its !!!f.. ~~,
i'i'b';:!;"'!'Ifill'[!I;~
11J..1JI~1I1,I'illl!W~E
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~V~'t
j[
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!LiILIU U
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and
is more ~ha'll;10 i['ilines. ~lnBlruler ti:ttU~,'~J;lMof ,WJN~mj_n'U'm";, ,S~ Abo~;e ,a'~~,~ sUicQIQ. shows v~f1lU;aUy no, nlecnulcat :~~;S'te]'eiSis", Is thus, an, t~al It candidate ~nal~e;rL'll soo:sors; ana !8ctnaitQ,~"M:Oreo,~«~ ,S 'Ucom~'waf~ ,are for e;x.t-fiem,eJy'nat and accept iOOlti:I1JY!l' and acldJiJDOmJtd th'i~-'fUlm, btyers, for buUdbll
'i'1i:'iIl~li'·~''''''''''I,"Ii''if.I·I:I!'"~.!I;~,~II.?'U~~[I!;i{~I 'D1~n~';;';iil'I"!II 1,lIllIHI:""'I..IIJr~jlW 1~~~'YlI:,[~~_:Il ;'1
1
or u.,
III.f.UJIIU. ~:';'_~_lIl~
,r.;~I'I..:IU""iI"~in~ I~l~llllj'-"', ""~;i:!;"",\h4;i"/l'tu 'r'.I$-·11l
6\1; There; Is a ,gfe3te:r' ne~ldh~Uty in, design and manufacmre wiiil sU"coo than, ~!itb otlileJ" Sru.dls,tr,lte mateJl'ia]s" Ttealtm~nrm,and, fabricI:9Jti[J(1]processes lb:r silicon substrates are 'wen ut11lb~:i;&hoo and, doc~w~nooted,
FII'IU.
7'!!8 II smear!. e~n{sta~ :Structure and pllafl'i!ei~, and m~enta~i\on:9,. (Y) ,<:010>,
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" oms I' .t.~, iii:"', ,H.... 'Pc -- . . .. __:_. __:_. , -~ a·t,-', >, maAC ",I.l~ , 3j~U,~.c,~~verorees -- 'iii..,""ii'.-WOOTI. ;a,!IIID:MS ,it .-. .~- .,. ~'L,' ,'R! _ iii': '",'II.._:i 'II tj1!.. -, '.' "ICUlaJ S!L:rUllJl,~-I 0(1}, nus _p.illaliF1I;e U!,!anmose Il'I[o.... ··~1..~" ~"""l,-i,--·-A'~'~.,,- , ~.:SO! tms p ,],.,., '-'__:_,' nains rhree nf tbefe ""-I-'I-'I-I"'-:Ii,..·-, -1"';"-:' ane eon :'UIlS tnree 0.11, rue rour at"OD'1l!S 1.'-, -I' ,,ii- ~ ue omer IL,W'O = a:m!S~ p tma:ta:re j~l[u. '= 'l!iiit,ed-! at ,"d(-,,..,;, 1f:"-.I"!!IIl1;t,niP ,i"'IIif·: 'iij\t.~ faces ""',f~1t,:.... ~f~iIj',~i~,cell (in ,a<ilji'll'll.i'), TII-]1JI1e rhe 'Oi~, ..,~~'~ 1'f"'iI\' crvstal , ,m !l!.iI!I~ v ~l.l~ l:iJl iQjJ")'. .. W Utll U,li. ~ .. J 0'''1_ _iLl]
;if'-, '". ~II:. ilt,,._ Q"il!r.l. _ . ~ ~'I!r.IUII~, ~ lllQ,..~ ;Q; 1~IlW~I~ !!r~, . .,
I
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1!I;lILV.
.·I:..,~c nl-~'I'iI;i;II' IU~~!-'iil
il Cha,ters ,8,and 9'"'will, proceed. ~lowes;t.

Becasseot .. ·· L ,-::ecaJu:se 'Oil me
r~~ ,i,s.... C'lD-"W~iIi'~and ~~'L~ ~]~,

~.I.~
._-~l~!ilH~ '!P.CIl.IJI··_
it''''_.... 4t~;-bi~;i'"!!Qiii'-·IO"1'Ii'r\l'~-~-~~I!P!L1II~ t ~L~ W;Ml::lIJII~M'-~}' u ~..i'\..,.~i.':!'s,g,e
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w~ 'w~'-I'~I learn
,~._':~ ·~~·lll.l~ ~~_I-l
1 ,It., 'J.IIl,U:;· _..'JI f" ·'1' ,...~.'~ ~I ll.. _.-.l _.!.Ii • '[ • .r~g,~re, 1'ill ~.... eug'e, g., ,8t:~OOi:l'C,rySI!l,(~J: iuou~e~can s, grouna to prouy;~e ~JI1,g:e pPl~ oe ',.' rn ,R-, ,to . - -AI '., .- -, - - -. :. -;, ." , '~ith' .,.AA"',~·.-, .. '~ .'" ,~II'-. '.. - ., . ,,~r "'--'. fl'; . -Th' - • ~'-, ,m'a,r}J"il'~I:S'~' ,~BY!III some eases, Wh ~ ~.'!.!!IWdX)inli1!l ~Jn;g~e 3-ec,'On~a.r:)',a;~.s. .ne warers Ib!!,!:a_,~
'm'''
I' Iii'" ;i;'1,., ,~
sJlJlbs~ates~ wafers lhal are shipped by suppliers normally indieate in 'wlm~ch directions, i.e., <: 11 0>'", ,<1.00>:t or ..::::: tIle c~t~,h9!ve been made, by "flats" as Hhmstf,ated, in 111::>
..-,·- ....""*'ul -.." 0- UJe,()'rrue~'!,.g!l,~on" en'. dent nn 'I",·~'··'-brn]--'tv {)',.,f' ' , "d; ,r JlWTtiOlil~.OCe: ·:f,-,,,,'b,"··ih·.ti\, CfI1u.CTt :maCI,I!!JI!H~ _,J,!I,.-~ r
·'l-i '.' 3mteon
are s:lioed from, these ,crystal bo~les may thu~ contain one or
I~.......
tW'Q
flats
as, sho'wn.in
'!;.iI, I~ • ,...
,fil'ii:g,lIlre 7.1 ru,. The :primnry' flats sre 11:800, to, :ilffil;d~c~tethe cQ'~S:Ul)]-o:ri,e;n~;a:~~o!iiTh the wafer of seeondarv 1,~,glll.;JJ IIi'iZ" lI''!U'M of ~;h'-~, S!+;r11'!1!,",:iil-u~ whereas ~;h,<Jj;'!;o-'-''IJ,I,liI;.KU,,!' '~I..... are ~I:I~~,-~, tc ,j ndicate the dooant :!l.1 """......'IY[II "IIIH""'II!,'.!Uii!!I 'I:!I'~~I l-.v U!IIUi ... ,",U"",, lJl!h.. Ui'IJ.ru., '.,if ~~' For ,~~oo:!I'iI:'riI'I<l" iIj"m,~"",,- ~O)iIi~~~ ' flat , ~:b'i1IIiItnormal to the <I "w.1 ill:>, n C--u. F.lIIC!~I,~ '1·'I la indicates .1. , _ , ~l ell J.ll,jl iIJ _ iU_'-'l ~IC' ai. y 'tltion with 1)b!l~'frijf"~,O'f'si'ICO(l crvstal -,The 'w~feN with. ad![!iitiolrH:ll second 'filslt at 4,S'fIl ffO'll:~ ' -----. -- ...l-r ·1J.:l""·~··' l~~IJ' .. I.. __= _". =--~-~ :primary fiat in Figor:e' 7,.'~1b ~ndicates,am l1.=type dupi~g in the wafer;, Othew . ;/11' . ..3' ," '" ,Mll~utb:~m.enh.j,)J,eft ,_'~a!ts JJl w,aM,ers e vano~s tle~]g;natruo;ng, ror [cap 't:... e d l~n [ v.~~ ""7 ne ",O"UQ:~ 4~UU
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a,
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fuiffi:I)V ~jI;oF~
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........
1\1 ",:2,1 iQ;!_.ti."
'rlin'd··;IP.I'"
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..t~ ,"1A;O;¥~.....i';;;,nrtp;, ~u~J..ll~l~o,I;'rW;·!~·
m",'
r" 1P""";i'lJij;~f'ltiI:'R' , ~~w.J~-~VJIUIj,
l~'_:1'':)I_'W1A: will·ill:IlI,_ ~ L:"\i'Q, \if.r.

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A.D
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=;''lr. .',cr. -',I~, :J.1 '~<wU~ "W,," '0:..- - "'!""!, ].l;
MX!:,;;:;:J
l.iI.ii\ ~,,,, ' ~ . m'
mal ;siJr-es·s'rompolle~ts!, WMRM,
It:__ is '~1:".u'~,~n~~:-"-~ '"" !!JiH. _ !(o!!~J!'~_e'Jli.
'~]b,..,t, . I!.!!!~-
mhe c.ooffiJi"i<~.ej'jjlt~".1m ,~rnd''7Jf': ',~: ~~ ~ _ -= ~~0!1 __

gj. ~ ..
assooiaired 'wiJtl1, the ,ntH.., Ol.c c~ftlcierif~ ''21riW, is ,related lij 'dte s~b.emin,g: :S1l'95,
~~
,He
~~..
-~_-
----
---
~~-~
----
IO('jm mJnper:mtnre~ are
ctDmpcm.e-ob1, 'Too ,acmd, 'va~nes of'lD.esc: tt1"wee,eoefticlCmlls. depend on, the ,an,s'les. m' ,the pie~ores:~'gmr .~th resoeet '('0 tire S~rOOll cA1stJ'lla;u.ice· , The va'ruoos.. of, '~e . ~oe:ffici9tS,art ,..1. . wI "':f"~ . . .. .1 .... ..~ . -, ,. . _. . ..• , J ",. .. .. .. . ,.. . . _. -
siven in Table '1.,:8,.
p :smcon
n ,si'llCQ!1'I1
''if
,!!li, ~·I.rO
~'fU~ '~:HJ2,.2
~1.11
'-!l-53.4
:GC'D.ew'CaiieS ~f:pi.e~oresmn\tle,C1ry:SltaU, :in ,3 '1llll~,.djmmsinm1.IM.u.~U]t.,]n ~aiI!mosc ,aU '!iliip.n.ilicati~m 'in, U]3IMS, ,and :~~Cf!O~'VSimm" !!l;·UCiOJiiI, .-:-;~~\i\"ii.~"'i~J't~.,-=-,'ii',;.,:t m ,~I..-.,IJ,OIm, 0\ , s g --__ oiif' '""I.r· .' -- . - - ----.. [lll~~~-",:~J,';;,'!i ~"'"~_ ~~e ;:; - -~;:-'f':e' tb~n,SIJr~pS :s!(l~h ~ :iJnu~tfaJt~d, :(~F-e bll 7.141.1g, ~$J.dh, eases, 0Jl1j'~" the; :iJ1i1,'1'lJane 11DS!eiS in the x md y dh~tions need, 'b be, ,1-oooUinted, .Io~, We 'wn~, ealize, from, Tlb~e,7.:8 t'h~lt'tlt.e m~~t'imum'p~emresi.sJti"r;e,cooHiciie1l1: for r Til;,,;NJoos'l:rn.it1Jfi ~~ c7l-.' ~ -t, '1';3.. 8,1 x lO- n Pa -·1 and the maiXilm.lIJ~Jm ;~oofficieoWi'_'_-_' 6];1"" !l.J',~""'" ., ..!\1;4 ''' 1:.__ "_.__ ._ '~hf ,'e.n~'ty~ SilWC((l is, :10Q;... X lo.~u :Pa-l,., Thus 1nanlT ;8dJiCOD, ~iemresi31on,,Be 2 rl 01 rei made of P"l~y,pe mlterial'wi~h boron dllie dopmt, T~bJe ',.9p:resents, the, 0,( r~:"r,r"'''' ..... !r"" , ... .. , ., ~ Ptemresmm.ve. ,ooefficients, fur tb~ n.itu~ siiUc--on nti,e:lJOIesjsto:m'mn..:il.,.;, ~ various ervstaj, p];a;oecs [B,~~-~kt at t991]. e
!!!~M! ~--~ -__ 'L_
J,.
'e... ., 1'"' ,;::, d lL ., • "1'''1 .~,iI1Iat~oD,!il.,~.,IY,J ane ttJt~e;S~JhJiaItiO.OJ i II ,1lSU3!te~, ,. 'D:i: :til ~j:gll[£
, 'il "Oii "~'~,l~~
~ 'Oii loowmejjO :represent
0,
-,.
.,,'
...••...
~'IOlII__
V· __ .__
,~~=!P.P.
11'1'1
~I [~
:-:
vam.~
.... """....,'
--
- --
---
....
--..
lOll'"'.
.,
,;oj,~,
{;:II~
Commerei olJili ~J'fIi'p'-;'L~Ii":OiIi't':ld"'i,'II'lI'(:'! ~U!Y_lIl,I'" crvstals ~n-~lI, !lAIr.' 'ir..1Ij,;;·~_W~ ,tirade 'wri8Itwa'tic&l~s~, electronic filt'6r;s~ and. reso~Uttrus,,,Q~artz is a,desirable mareri,at l1,L '~,..:I,.' ~. ~ 'b"' d"' '~ ..... ,..'I, 'II' • • • d· ,. k :in nDicro'J:'JjIWiiJlCS[ ,Q'ii'irrldCi11tJOns m momec leaJlj anaryses, it, 1~ lA'eJr~n:SJve" a_n- It 'WOI'",:S
'~~~ill1l '!t-r.',i_W, ~~,~l~ti"'")"'~i~.-,;d: ~
~"~lI.,W~..
,.
'IA, " LIfJ
'8" ,cm '4!i,~1" I .~'l

ru
V,L.~I
~'_~ _ _ If. r.·7·~
.V,~ltJ,LL~!w.I!,!!r
,~~"lJ,U,IL_al"
[If";[' IfIIlAr!i'Qori~" 'I.J.!
Ill:
0,
,r"r."
rl
'wen in ~~eClbnp:~'omt_ilc; tra!&lsportation as described, in. QUl,fm 3 and 5 because nlrl!~d ',-"f: ,.,~ mdi;pareu~, to, '!'tt~'",~,,-:,,-.-~:~1,-_-_-,t, e:x,cene-n. ,~·t~,~-~;:-, l"SUe ,SiuOillll '-,- .,~ ues.. ,'I~ IS, '~"'.,- -~'-'~~-'--i. ,,'0 '-lii']+;F'-V· ,~o. li. .]'~I,-Ibtt eJ.~II!-.l.~,C, -I[i]~r~['-'--I pro]pe'l !Mi, .u.a ._ ~[l,,-'f' ,~glU.":!1 e 'whic-h a~ren. is 'used,'~ detect the vsrious species in 'une;nw~d. Q~artz. is a malteria1 ilhaIt is '!laid to maehine. Diamond [CUJ"t1ng is a OOmtnOD, ,. ';' '--,~-,-: ;-;:-. ,-" lh ........ h T-::--;~~n-;o;. ,Cil!J1ll1l1i1l:~' 'L,,," ill.. n ll'iieu ..lll Ii__~~.~~,_ __ ., ,~IW!j lIlJee-~ - - - Of' n:"ry.--r--e ;-;:e(:;-Ise~o:eO:!mf}+F-i,C ~Im, "" memod am ~: ,o:- Jlmru ~nw ,~, [Pif w __ rain o. !IJ'_ '1,..-:-:, ~."",'L;3i,1.... L.;.: ..D~Ii"!:g'Mv, bv 7"H':l Jl."!!,i.~. F~' 'F/~'flH, '~i'b.e-' ,1le·- sire.. _. ,1UW~,l:'"-"""" f'"1i1;11~~·""w,~rp~f!' , tie ~"W~,,",IJI!, g~ll.J . !.iLl,._ !.if ......\ - 'd.,· ,,,:'hl~ilfW'_ I'II:U.",!I.,O]I up 'to,75; 'Q1m :~~,dJ!~OOil" by1 00 pm Itbic't are~a'\"ai~a;ble [colrm:~erci~ly. Quam, ~g even more d1~mensj,mta)ly stable '{fuoo,sUioO!11t spec4aUy ,3Ji high teme
~,'I.O!!'
~,-c -~,,-,...t~'c_-'
r~
JIl,
!Y.
,t\~,
ru
_OO_'!.!I!;l!:,!::;'~_
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----;1:1,
-----,~,!!-
y,!!!-
, ·.l
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'!i.;-,UIw-~'IIIlI:JI,... .
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ilL..!,_~, - S'~ - -- :m_acillw.Ul~,g,.ODID,'~l~ ,pn)lPe"",~~,U:alie, p:rese;ll~e~ - "1i'!- b'll ,~'e.y - - -....!'' - - - - - : -- -- - All',WI rame
It
I
f'"~~~" UtL~~ .. ~
more ':OP1'V,i'b:1'iillf'i'" ';in

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WJ:Jl'LLJ
8.11: ,!O!p~m--'di.-t:Jnui' ~~. ~ ~~.;}
''''i'C;.~n UJ~~~,
silicoa despite ~1,;,e ~~U~v.~J! UIJ']' t,.JIl.',.
'1ii·3
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,2.00
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We w~ll i'i liSt havl8 tn de·t:ermins the: d~ameter 0'1 ~_he ejeotion nozzAe. a correspondI'ng 'tc i nik dots wHn SOOmdp~resD!utiol1 en th~ paper. W~ wUl first d eterm i n e the, d~~ a:memlf: of the det. D, on the paper~With aoo such Idots in a linear spa-,ce of 1 ~ we f1 ,ean r€J'EtcllIV f,l nd fh e correspon[j ring d Fame~,e.r to be D .;;;,..i n/300 _. ,25_4. mmj,3'DO = 1 tl08A666 mm!, or 64Jj,1' #m. 8iince· the dots Sireproduced from spherical droplets of diameter 0, b,y letting ULe vo~uma 0'[ 'the ink droplet 'from the F1QUh~[)€' equal to tha of the ink dOl on ·the pepJE!lF; thElI ~~ojlowing oo~a'Uon can I)~ L1s;eit1';
l i
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; m-J =
~iI1I which
(:
D~)(tl
C}~'
r = [radius crf the s-phslricaJ ink drop let and t is Ih e ·thickness
en t11e paper. We thus find the radius of 'the spherical inj.t droplet, r 1C) ~ rn, \Nitti D .~ 84"t).'1 j.dT1 and t ~ 1 ,~. Ne)(t, we aSilll~me that the voi~me of en Ink d ro plet Isaving '~he,inkwel'l j.S e quhraJent to ~he volume oreated by vertr caJ 16XP ansien oJ the PZT PGezoeJ8'c1r fa cover 'at In B bee k of: the ,In k\lvell. Let the v'Swtic'at expBllsijO n o·r the piewa I ecntc COO8r ~e Wand the' corres ~(]nding volume of 'the dis,placeti ink eEl I( ~l4) tJi'~· ~ in which ,.d/; lis '~h dia.me~er of 'tn e' P~BLoslectrjccover at 2OClO#tm. 8 By eQuBt~ng ~he·~bove di~p~aced iruk volume ~nd the volume of the ~n1<ot, d
the Ink d~t = 1 ~.0-'1·x
VCuifi
we carll com ~Ut8 the ~equked pie'z'celectrk: ~xpan
S,tOIll
W t'C b~;
Tna:
ICO mesponding
I
strain in 'the p re,zQ9leetric cover is: 17g'1.83 X 10- = 179 '83'

10 X 10-1:i ' .'.
12
=W= eL
F'r-affl Equation
x 10-& m 1m .
fTom
(7. 11} and 'Ihe .pls:zoaiectric cosfficient '(Jf PZT crystals Table 7 .14~we have· the· r~quir€ d BJ~pned' voilagre: per me~er as:
V ~ s- ~. 179'.183 ~~10-~
. .rj
400 )( 10-'il
'!!!!!
rL3.79a
1~\llm
"
Sines the 001!lef has, a ~hi~,knB~sD'f 10 pm 'the r8qu~red appllsd vol:t~ge is.
v,:· VI
= {' 0 x
1,0-6)(0.,3133
x.
1(6) ~ 3..733 V
7.110 ~ IPDLY1MIERS
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Copy n ghied m aten 31
he firs,~book written s,pec~'fic~~~yor' senior and early gradua'~e level c,a~~,ege f courses. IMS " ,MlclI" S-':-lems: D.~~l' nand Manllla:clu. also proviles a, (omp'li hensive oVerY,iew of 1"Ii s e'xcilmg n .w area Or' techno~('J,gyfor praclicrnl engine: 'r, nd other interested reader. I ~ustraied wi~b nu _.eJOUS diagrams and
P otographs the book fL en, a survey of PdEMS and its ~ppbcations in man .facWring , ccmmunieaslons. bioengineering, transportation and ot .er areas,
MEAl
,', M1GrDsrs',ms': Design a,n,d ,Manuta'c'w,. previe as, ,an
.. of MEMS techno ,ogy~app,~opria'e for Mechan~cal, Electri _al Manu ~acturing,! :Bi0111 _dieal and Aie ros,.pace' engineers alike, The mecha ics physlcs and materials science lroundations for .',", -S are covered wU.~ syn:e rg ist ic In tegrat! 0.'1 to provide readers W:lt" tne basic pri nciples of iC,lJ'rJsystem5, engineerirq . Strong emph ssis on mlerosysrems desi,gn rum tmough dme book, 'making it ide'a] fo,,~' 1e. needs of students .nd professionals aJ_1ke. d
in-depth look :t tile foundatio
FE'· UIIIES
r•.
ume ~ous,class-tested examples and chapter problems make the bock idea] 'for student's teaming (Z~d l''1ofes.sio'nals' ct"'Tpre./~'e'nsllJrn of this tJ·t:ft}Qnce:tl' rtrru:h"toif)'IY. Pabricatien, m:Uluactunng and packaging
Covera .:.€'lectromech"I1'i,C'at m alee. . 'I'll. boor .'.ideal or res
-
rQ':£
lWBMS devices covered 'morougt'dyo:

. .MS
L
Sp't?cl:J
~ ~
and micTio/abricaliol2 processes of

1 ,----
den from . J1 act, '" unds ..
• Practical coverage lOr:, the desi ,[I proces is ·~ovided.to show ho'w en~jn.eer.s p.l~n and create ne w MEMS devices and 111;f;r:o.syst;~m;j;, CAD techniques 'for micro y ems are also cove ed .
• A web:si~ eont ming resotLr'.:t· for general readers and students and far in structors, Call, be' found .r Wl1rw,mnfu~~C'o~11IeJ'fgc3Im ~'chlhS'£t
Tala M·lcIGra,w·,Hill Publishl ... Company Limited g

7- Wres't Pa JeI.:"ag:rar, New De~Th~_110008
A Div,isitlll vf The McG'mw.Htll C~~"'pan,ies
ISIN-13= 97a~D~D?-C~B7C~-3 IS8N-1~~ C-D7-D4A7D'-X
i.

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