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Chapter ,3 ,otiel"Sl an o~e,w 01' engioomng fi~IDe~oo, lnpies a,pp:nca!bt1e, :mdcms"ysrems, design and fa;bricSJtio~~
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:presSlllw fo.r.w~soun", JigbJtJ J1u'Ci~ rmli~tion~, n~gn~tic 0.'01, and ,ch&miicai oo~PlS.itiOM., )dj;c~som n have 'lIu~:advantage-s IOf' bem_g sensiti,\!\e: ood ;aeellf8lte· wi,th :minimam ,MRQUlDIt of':r.equUOOJ i :smn_p]e~subsmnoo., TIrey CarD also, 00 lfm!SS, pm dMtoe:d, ~n,batches w,llllaqe, 1101'omes,, 'There: ,~ wnan.yd.i'f{~rent: s ~ of.mic,ros:ensc:n deN,eloped ~br a varier, of ,appli .. '....~~~'"I;-,;~!C'. !Q,'ft,~:'1 !Ii."~~~Ii!1i."':~' ~.'i!ml~..:iI~i rl·f'ie,pillii~I"ii!";'i! !C~u. ,i;II,.;Q!V' ,Q~ 'l-u!liA",,'llw ~1II~.-"':.fI:In '~ii~A ..~e:tll'U' r""lI"'killjl'lill-'!iRiil'riOO' U]~J· nll~~JJ,.1· ,IHILI .. U--UIIlI-U.;,oil ~1i1~U.~ cMMiC'-I~.~1Jj80rn\i' ,o:p1iica~,:~>(!i1!SOrn", amnna] and :p:mssu_m sensors. 'WOdting: prine! ... ,and, 'I f' ~ ;l:frlli 'L~ di C'·'liIoopte;r~. r a :pr.essn. :S!8nsor~ :trn:Pllt.s~g\.. '"'iI. '. :p,a;e!,0 (' sensors 'w.uw, ~ :P~'I :m' I1l.. I·ft an .,
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is oon'venoo ]'otO ,OJ, change of ,elootdcal res_i-'tmoe 'by Ulli_k,mpie~esistom 'dlait ,are i'm,p'imted, in 'me l~a_giJ_}l. Th~ piezoresisto.rs coostitlue a part: of 'me~ tfamdlwtj,on unit, 'n.e~ cha:nge ,of ei.eeltricaim, resisfance :rnn Owe~esist:ors ,io.du.ced ":by the r tlf' the, ~s'taJ StlEcl1.lfie; ,1-· -_.'~'}' eM be f1U1be1" converted :i:nlto (}'aI:fe_~sTitn-diIn;-' volmtr.e _._.'''''''''',~ - ._ '.~ ~!eCinll.et"FU -..-- .. ~... --..~ .. ~. ~.~.~ -_.-- -. -::~- r·",.(Ili- -,g . '~'b'changes 'tty a,'miac, 'W~emton:e brid,ge,c;ircwrrdm ,:dta:ched '~~ ,se~sbig; lement as e ,mothelf part of' fue 'Dnsduction 'untc I(see~ Fig, '2.,B)~The OUtpIllE, ;sign__a} ,of '~ 'ty,pe~ (WI'
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,J~Mic,rrJtU':rb,j::~:es, A, 111icroturbine was P([OOllCOOto generate power' I~Iney1~93].. As shown m,' ·igtmre,1.1'~~ ~'heturbine is :n:lIJ~dle nickel, The r-ot,or.has a diameter of of '~10 IJ.m" A, 5~~ rID ,gap is [providied! 'between rhe axle and 'the, :robJ(f;, The tw:b.mne:hIS a 'herughm, ,[)if '],5lJ 1~1'['ru., The entire unit is made of luckf:l. The :~l1a::dmru,nI:l ro:ta!ttmla!~, s;~
reaches ,rn,~~:roj.OOO revolutions per mlnute ,[:rprn)~ wIth a lifetime I!!P' to 100 mnuo:n
:ro®~t~on:s,.
'These ~O'mpo~eQII!;~a:[-e e~tensrnveJ'y used :!for hffigb,.... speed signal 't~ansmlssien ill, tile i~'e~eCum!illiiLln:i,c,~rio~ indlustty" Here, we sho:w It.~ ;,:v '-'+·'I ~I '~2' ",I, '~ 1113 11" -- IE"~'O--- - 1 17 ,"'I"" micro ,aU- 11-., mi ....['!;.l!~'Ib1,p.IL~ a,'I If''.Fom'n'''''.r ... .:;;,·-~'''' ,',- F'· n-' IJII, l ,i"'U,I ..... .rhkl! lD. ,. ,~.1" 'i!'!In!lJj Ji.n ,i['.l~Ut1"e' _'. _~, ~._"C~r;,,~,'Y'~' op[:lc~, s.'wrul~c:b made by ,a, sllieoa-based :milrniiJufac'I1I[,j,fliJ,S process., These sWrnJllcliltes, He used ~,..... resulate '"u! .... ,U~,U,UIL lu,l ,M., f~m ..... al fl-1i ..... ,,··'r~1{~'I'f'.iii"""'1 ,·j,""''"''·...;IIII'i;ii"i,... ~1:!!D.'ll'" il'fIl~'~,... ..... 'U]-tiiffi,.JiIiJj;~ '" '~'iii'fil 1~1:..,iJi;~'IO'I'~i~')'1 ,- "",f:,tlI, V,fj'1<lII aiw ~ '!;.,I',t" a; i\,:5llliu'n':u ,~~ '''''';/'' .L~~,!l;lI:Gi.l11' ,Wwlll UIL ... 1.1~~'~, ti
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to app:['o:~ria,t~ r~ce.i,'l/,fiW:lJg optical fibers, Figure 1.13, shows :l1illcro:ieIDlses :maiie ,o:f triOSI'"' :pan~~t PO~Y:l:tD}eB" P:MMA. E~.ch lens g;h.WW~1:~n ®he h~fm,af'the fIgure has a diameter of 1,:50 IIJ1'm.• These milliS ,~f'menses are combmed b:llto :mh;;ro-objecti.'Vles ,~n!',emld05co\p~y
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bas been deClteruing' r~onttI!ThUJousl:y~j with ··f·~~'~~M···'S' rC-':-:' e't,l"" ID made e HI Sr_ ~,,- ·uit..mier'rom --eoorn" nZLe·5"<;__Dca!y,Qn --i,G'~ ~_lOO ~,. 'F,a'I,.',·;-,-III.j: .. ;V·,-'sOille 0 , Yle ,~,.:u;:." ._(nll,pon_n~ u UI, rcOm,rn;JOfttlltl5, Cf'~iSr :mJntillre s~ze is c'Jiem:ly be:r~!l_d t[adi,ti~([Ia1liledlaDic',~d means sueh ;IS :mac'~injD.g-driUilimg milli DIg', fOlging, casHng" ~ID1dl, welding, The t~ch~o],ollGS used: to produce these minute componeats are called ,nl;ic¥';olabricaUtln i:(!ehlw,lvgie'!i:~ or mi,·, c,ro,~kfNin,g'., For. example, ~he Weewdim,en~lonl'~ nwcrostmc~u:rie8 can be 'produced ~ by remD'f~n;gp,m of t~e base :mlterial by a ,physic:3Jl fir chem:k~aJlret~chi~:g' rocess" p "w:lue.rea;.s: ·thin\-'ru~n de'fIDS~Uo.L1 OOChW,qJUiG:iSare used to btiUd :I,alyre:rs. materials Q.1iDl rthe o:f' 'base :m;~l'r.e_ri31~~ wUI '~eam these microfabrk:a1dow p'~ocesse8,and mmufacturi'ng 'We tec'bllo:~ID,gies il t(ltetaH in [fespecti~elYt Cha,p~rs :8 and :9., C'llITe~tnHcromaJD'u:facmrin,g processes involve significeat emount ;of'mi,cmfaib-,
The 8izeJ of eempenents of mleresystems
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was ill, the ,!Ime year that Roben Nl~y(e,ef FaimhHd, S;emjcoJ~riI!J,c~.o[':prOOuced~e fRst planar SilirCOD=IbMed I'C~'lbdIY~,'the mext ,ge,n,.eFalliOl},of' IC~ i.'e~~ U]h, la(ge seai~e;
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·~- - . "D'l ,.- .. - "~,", Ai :il:aC~ ,",t;.... "" :mJ.lC'roeilie,cl'I,IUmcs, rs one - 0.111: 1!I.Ue :m,OS1;. JlW.I!OOn~Ji, I~J11II.'" .... ", - ..Jt..~IIn, .... ,-. ~! •. , ~,;;,;~ wli:fi_ ".~. ,_ -jll- ~,.~'-. D.Oilogi~s.of Ow.·tw'enuetb ,oe_uiY,'. TOO boo•. ,of tb.:e, :micrOOlectn.l.nn~c!lanical S~SteDtS, , iIOOui&try 'in,moent yean; wouM. not have: 'been possillle~ 'withooti 'dle 1imltUrlty ,of :miuo--, eleclJmDiics, IeCJ'm:o:lo:au~ 1iIldee.d· t- =~- .~,r1 ,enoinee:'fSl and, ~~,enl,dtm tOOai.!{lIi'S; l'dEMS, jlGl'" mWllU - .-,~-.~ ~~~ .~~ - ~ --- ~ -~ :hrt -- ~ -~,r1 ~ -~ -~"m' iIII!l\.-.I;~ -.:c~---:-"C-' 1"" -'--!~.,;!,!'~ U .,'L., 'MO ","i~ ---'--:--'0' to· ..WUi 'SlliSMe .. _!'L ;--~hi"U ~.- ~ ",.,:_: ~_'..:at.....1k . 'meg _:___.,' di~Y.1 ,7',--- ,¥'P-tlii:L~nlli"'" ofI,-=_,,:- ~- '--:--.~~ ~,OOu:'I!.I'JllIlJS ,. du ;are. -~""":-'r--'-' ._,_~._,._., mg~[4 ,ccmmnu'fa!briGmoo ·~OOW:OaWs,. HOlw~v;~or~V\~rem()~_s, on 'me siwBMiW'Qf ~ b [It"' I~;J" ;iI'.t..,.-. '1:.., ~i. ,.. ~! • "t. ' ., •• :~. ., .1\ L~; ~ .t.~ 't.. .... two 'te:cI!~nOdl:gIe.S :~s·not on_lilY ~_o_ac--OJuraU!.:" U can ,M_S:O iiO'ti Sefi()Us~y iciiDucr 'ILm;wC-l" ,adrv~ ol'Dliaos,ysl'G'W, devdop-BleBI,. 'We willI notice: tBat I[jlla-e am si,IDWfteant dW.. f~N1iIc-es, tb~ design Md. packagi:ng of' m_i~ros,ystems, Dam th,3C ,of ii*gramd. ·cirenits. :in. ,Ind 'mi~l\edmmcs" 'It '~s, ~eriLtia1'f:wI'MPf~, e ~pl!llii7~ ·these. dilffmierroes md deve:iop itel nooess~ .methooDlu,gies, and ~tmolo,pes actordii~gly~ Table I,.I ;Slllmma~ rims 'the: sin'Ulariti.e..s,Md, dHferenees, between 'lI,e:,two 'te-chmolo;'les.,
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Man!: rnilCfri"i'~I;i!i;r":tif!"''''i''''~ !...-4JI.II,...!! ![~h'."';ii"!l' ,----"If,., ,~,,~~, .... 1.'\...... iIi",lo;.~;r;; ... iIi:~1 ~~ .!,,!.'!"tI,U8S ~ ~~~ een be, used fOl" pr@d!iJO\~i'olri D.istj'n~t.malrtlufacturing '!;ecl'nn[qlUlss
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113
We may' observe 'fronl thee table that there ru-e indeed su:ffi(:~el~ dif~e[mlces be" 'tweeLl t~~'~WIO'reQlbm,)~,o'gieis,. Some aU rthe D),Ollie s~g~[fi:~(-'JI]I[ differences between these
I,", Mi¢rosy~mams~nvolve~ more different maJtreri~l~ than microelectronics ..'Oth,~r than. ~he Clom_mcJlilJma®erial of silwcoml, there ,nre other 'mat-erials sut=h ss 'Qluartlz
Md.'(}:aJ\s ·u~ed.aJSs~aib~tt~tes, ra®ilic1:io,s:yst.ent.~•. Polym.er's ,~-ndmetallic llta'redals in are comMon run microsystems produced. by_ Ll(JA, processes, Packaging mnlerials, for rnjcw~s.:~gtem;s:inc~ude glasses, p~as,tic.! and. m~ta'~~ih, tie whwch
excluded in miereeleetrenies .. 1., ldicrosysEtUS are: designed :tQ perform a ,g,rea!l-er' 'vaT~~t,y' fU8CtlO]l,S tb.a~ of mi~l~im~C5. Tile maJl1er. are limlred ~ospecific electrical :fu:nctb)~s ,only:. 3"" .Many :m..i.C,ro~'y8t~~n;[i]S ]l'Volve~ :mo"!.d,mwg ~ parts such as :micrCfV,i1Jhre8" pumps, and
.. ,ill "' .. ~I ..ciII 'Al .d' :jf-II"JO') m~.J!ll]c '" s,YS$e:ms,. Ji,v.,I,J,ero~opn!Ca~ S.ysl~emsneeU. tD jlft}'vl'u;e Wn,;I~'OUtm?ftWt :~.!u. .' ·mn~i.1' :~fiit1'i 0''';-1': _'5f-:fI;q,m~,_AJ-i ereelectronics. on. ~I~;:.',n;l!l;;,,,,,,r [h"!Jind.: UV~~ ".;:'Wt· L:.,.MP: .an,\!, ~~!W", U!!r\~~~~ ~ '~ =~~ morving c-~mponenlt ,or ·aooess for Hgllilt.~ or '~lu:id5.,
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4... klJte~.a'ted,'CiJ:iC~ ,Bire rimsrilv[J a ·~o~d!lnle:l.lslol'ffiaJ~ n silmcture t~at is confined ,~~, '~1,ji]'i'i!'!\.rIi'lIjiIi ,.:IljiQ. mFjliIF~a,~~ _ 'w'~'e-MI'I~08, most mi.... ~J ~ rcsvstems involve nnlj1V"'iTii']- ~lj'>oI:Jl,~·'?'..;i ltv ~l:l~ .leOn1elby :~n.~ ' dimensions, :M:eocihanl,c:Jll ngineedng e design is dUllS! ian essential part in, Ute product d~v~l')pjll,e:f.lJtt of mic.!rosystle~nu,; 5~ The iRl:e;~tramdl,c,~lreu1t:s, 111:tW,cme:l~ctt('Jin:ie8 ere :i,S:O'~:ai~OO;:from tke ~l1I"O'l1ndjng'S once 'tboeyere piilck"age(t Tine sensing elements aF~d:nuu],)' core eJe:rn.el'US :~f!ti. '1Ij1I101'' ~~~iI!i~\i1!!,'Hfi'I'?' . .lh.!1 n' '" ........ ·lr",":N.'I!~'""'\I\~;oilj' '~~{iliPI~'~-""'fi t:~ 'L..... costact 'I!!i!~I··t_~ '1~~FJI!Il"~'"':i'"]ili1fmedi u-r.:,; ~.~WJ.,,_, '!I'''' 'which creates many techll!rucal problems 1[]] design. aJnil p3ckaglng;. 6'!, M'al1factl1ri~g' ,md pacik;a_ghl1g of nliCf'oe~ectton~clS, re :malture 't~c~~o~ogie~ a ··til' [ 1 _. ~:::!~:i-'-~titei . ~__ dl _ __ """'.J ~ _~L ...IIi ... .,.] __ · L. _ If'ro All· ~C _",OIl ~ wr __ 'n~......''~_111doc !lj,:!OmW,_.__ d".~~: hl!S~1P!IJ!' ;~t!':i;li'[i<uatif'u~.'T~,,_._ ·n--·,~~i'i'~-I:l;-;ili;0,f .--- '" .-~-<!;-":-'t.:il-[K "-, .~",;-i _.... " ~ ~ __ 11:!Lf:: __ mru.aoZYy.sI..~••\UJ:1!]1$ :mr.· fro., ·tlJat.~,ev,'el f :IDaltur.ity .. There are g\e~eraUy three d~s!tiBc~ mmlufacturi~,g o 'tec!h.aiques" as 'will be descdbed in Chapter 9." Be~:a'Use ,of·th.e'great. ·v.• iety ,of sKUC'tiWm Mld fb.n(;tional aspects i.'ll rnj~r~s:y'temfS;;, l~e :pa(;·taJg~Dgof these '1i\,",,:.4lti\~h"" ~'fl' ,jjnJi",,:~:~, ~IT:" irs i'n,~"lint ;to,;fj"-gOe at the eresent ~-:~i;!;_ ,r""t1UU_ u_lL~lI~~U !i'li~~O' U~I_ if!'1! __
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'med~am~,ca1OO:haVl.M'of ,m~teda&8,1:0nanoscale,
1. ,~~ecbJa;lIi;caill, e![[l,pue~r.i:ntg principles are used p:dmar.,ily in the ~s;~p orf' 'nl.i.~,yS'tem ~ln\Cmms and, '~e p~,w,gm~ '!jile; compo;]j}t}~ts. These wOIl~d 0[' 'iD,vlo:~Vie any ,as,~ls, m of design analyses as ,ilwd.~,caJtool~ the ,cG'Ett't;raJIbox lu ,F'i;;urte L 14" hl,tei~Ji!ent,control orf ml~c.ro~.ys,tems not been W'e-lru deJiI'e~JOped., h~s, bu~,~!tt ,ftD e;Sl~emllia'~part of nd(;ml~~e>C,Mr'r{}inft$'.sy:steifitff;, wbich are defined, is
H :mkfUigent lJiuicroolocbrolJ:let!han!!,cial ~ysmms" ,2~,'Electd~al, Ie.nginee£ing: involves elee tric ail, [po,wer supplies and, the filn.c1i.onatil,
e, 7' .•. ~!ilab(H:;ai~or:·~ -...chin the. n:: M.d, rnic ·~::e.~e:cbUit~C-~-- - -.---~y [that --g-~ -.- ----. -~ =on-a = _,1)" . --. - -----. OOC"rO -- - -- - ------- ,c;!'i\Gi1itr~':' . ----irntepn~es :mwmootOOlirllldcs and mi:cros,ys:tems makes, eloctr.icaj, '~.gineejr.i.g
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'their :Seemin,I~Y sci~lce~:fi,ctmQll, arti,c~e~s bocks" 'The C~llmnlt.m1!cf;'oo,:SItem, teehamd ~o~ogyj!t~olJ,f~b is at a re~atw¥e{~~d:~' it :s:tag)e~ laJ'~wady ~et th.e'fIH1!.e· ·f'Of' tlte ~e:~op .., has
m.oot (If d~vioe syst~m:s, in 11~~1I~scai~~dl~S, ew' ~ntmIry", [A, 'mMlO\nu~'ter<run) is, lO~I~ :filr n me'~e[,]The :m&turl.t:y of' :nanot,ec1h_Qollo,~'y wrnU loer.tm1n'~y result in Ule realization, of l' ,.'k . f'the . II ... I·; -}·'It'··1 ,.... .-f'-'"' ........ ,.4 '!l!I"~' -'.-.'.-' .. ,.4, ]- .-,.~,.'.,.,. tmlUCu o , me s~tpem:n:D!ilinu~! U:nZIj;U, ill;uaA.;..uJ,llB;e:ry !.W,~M1~ engineers M,u, ,SO:reJlUJS:"'" 'Ilk -v e,'f-· !l!J!a: iI!":anjl~,~'
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on eraiions. _ pe:..!. In add~tioml(01 ~be more ,lClCilrilte p.enomtallce of smai~lers,S'Iem~~'their 'mlin!Uite. ' size maites 'dlem pml:cul~rly ~,uilableror ,~pp]Jic3JEions mOOl~W.fie d, ~~g"ery' m d and ~nmicro elootronic: ass'CllJW'bmies :., which m.inj;a,turized. b ,are:neceiS;s~., ~ Mini awdzaJtioll. :is ,a~;s()dm;i:ra'f;l~e :in :s8,rtellJtes ,a_nd:spacoorlft engineering: EO
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trolvsts ,oiekel :platimll'.,The :nric'~el :fUm, is 30 1Jtn1, th~c'1k"These two CH,S· were fa:bn.c3ted by mier:o, :prec:isioo :machlniDlg wit]h, ~emi'c'Onductnm:' precesses. The 'el,ecmcal motor'dlaJi .L..:: jim.. d ." '. h 1\ £. ,. di . "D' "m'..al ...:I WItV'CS 'UIC cars uses :m_2!gn~tlic:m uenen, 'W~m: a,rotor ue 'runt m' UIDlcte.!r:. ··etalI.6u uesi,p :medJod~logy oor:~ cam ean be found in an article by1tesb4gabarn, rt all., n995].
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MeMS and m..icn::ui.ysJte:W, products have beeerae irl,creasillgly dominarf:lrt in eveiry' aspeet nf coenuerelal :mHketp:~aceas. the illec'liilluolo.gwes, er ,micr.I-o:f~bric.adol1l,Md miniaf rtluizaliol, contwD!I.1e 'to be de,e:lloped. ,A~:the pre~ellt timet two, nt2rjOf' ~Qlllm1ereiaiW,
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:mam:ketts, :~b:Fthese T:lf(n:ll~cmare cementer storage g,y~'temsand. :au:tnmobU~. We wJh, Ir~ [Ii __ It' , '" f' ,p:Jo=ucts necanse Q~-'. ' 'L.,. d "'1.., ... ,,... C' f. tocas eur 3JtentiOD. on 1!!J;I,'e _Iuer type or us. ,L~ru~!Ili C1~ntenm: 0:',: :.l~
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'The automotive indusb'y has been the- 'maj'ij),f'Ils:ern- of ,MEMS teetmolo,gy ill 'm'e :~ag~ decade-s, because olf mbe size of Us mar,tel. A, :~."5H :mpcu1 ~ndica;~ed:that the inIW'O dus;1:fy had a 'proou~tioD of :8,mmUk~f:i.vehietes per year; 'w~th.6 .Il1.Wllli.on, th~se in Ih~: of
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:nll~S'y8rems :iJI au:tomdibUes :iSi tOI ,mm ,®Jnoomo'biillt}s!sa:tief ad m~ ooM'Oftable 'for' the riders Md, to moot dle, higb ftJ.eIJ effioiencies and ,Iorw emtilssions s:tfm;dMds, l!eq.~kei1 by gOYe_Ilml,enm.:hI,,11." 'fhe 'widespread THW.se of'these prod.uow can :~ndeed,mBle. the au ... tom,@lbilJe"smarter" :£0([ 'OOIlilJS~IIillu:s'i' ~8,. The tenn. Smtl'rl' Cilrs 'W'aS:first, mttodu.ced :~n'tiie,cover story of a special issae of at made ma_gu~m1e;1[51OON' CQ1S 19(88]., Many of 'U1e;:seem±ng'~y :(iCtimiOIS poodict!l»ns: of tie i~te]jUge~t m~-ctio~s,of a. :SDlru1 car aM, in :
Smart: vf!!mLf;::les. bMOO IOn'Ilhe e:lJte~si:ve use of sensors '~:""''''i ,alt""'~~ -,-, '\l~'-', ,~ ________ _ 'I;!~!1!I<~UU ~.i!b:,vr:S'¥lmOU-5 :kind, lof soosors are used, tOI deteet the en,YiJloDime~~ rGld conditiens, and &e aetna01' iI tDIS ,armused til, execute _ wha'tever ;aat~~-- are re(Jjfo:iImd to cile... 'Wl·'th ""~,:c-~ C-::-,-A~tt::' ns. _ -~ _ _ _ --__ _ --- _ _ -~ -- y _ _ -- ";11_ = - - -- - _i!:Q --:lJ!Jf::S,,-,,_'C]lWiYl,OD£.. M~cKtS!msom aemators ,a'l,ow IlImmDbUe m2l!k:ets to 'm!S~:smaller devi,008~,,and ~ms; ad '81ore of' tbe-m to loqpe: wilhl tlh.e s~ihUltiCiJl; iMDl much more e:ff'Gctive, 'W,!lY8., CaD1prehen,-, sive sumsnaries 0([1, the use of sensors ,aod, actjWl_aion,He avallabIe .in,,aD, e~:dyrepert
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199IJ,'J~ Table 1.2 :preseuts, some aj" the· ,endUfm!We,kstiDl: concUJtio)1S ['Of pressure elt~, ' ,SOlS [Clllou 1,1999],. 'De" pttlSSH-t range :fol' ,am:om'Obiles ex,t~DdlS,:&om, 10.0 kPa 'fo.r ,3 m,a.ni'fbld amaluh:, '~ms~1Ure(MAP) sensorto ~,OJidPa,fw 'brmi 'n"~~Ul'~ ;S~~~O~. ,F A'nrd I in :a:~~-()mO'b-ile-s 31~'be. 'C3!tej",ori~ed,-- - - !the fol, I"'P "'-amoH oil' 'DllanslfslC'ms , U!. _. . ~- --- ,it" - - -- - - intol - -- - - - ,r""
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The manifold ab(!'IfiI,~u~t--:r-e~S!He(•'~AJ.~'P~, ~enS~t· \V,M,,.... 0; ",'idw;t>, :F-,:~,-,-il.C-OsefaiS ....es , _~ , ~ n. - - - -'--- . !Illl"$_00 _f, """JI,~ adopted. by fbe; SJ\lJ~omodve mdustty~ilo.'tile: ,eady 1'80s., It measures :MAP' ,along:wiilih ~be~ leng~I},e speed 'im:rpm,tn d\etenBill1le '~he:ipitio]l, ,a(I.'V,B!HOOi' Thjjs,:ipitioo 'flm.i'OCl' 'w]m o,ptim,liull airfme1 ratio can, o.pti"~[tilize, powe1f' :pediomtWl'Ce of 'Ole Ie.lmgin~wJiJtll tow (be, emissicns, '1Ei'lir.:~~rdl~s~'Uri!iS - =,...., sensers w-:: -~ ':-'altd SC.M ""an 3r-e' ~~v~;ati;-'-~(f':~ili ... if-'-, ':Ibi'b _Jlj , OJili0: S I,I - - --It:I''''.- of'MAP' s_ -. ,15 __ ere (;:: ... _ .. , IOQ~ capacitive aibsroililJle pressure) sensors, A typlca1 SeAP is, ~bofwll.in .P'".mg;me. l'i12
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[pawsel and Gi;achino m"S~]:., The ,mrull'~o:ld.gas emers the sensor atthe ~ubiI!Di1a[' intake sh'O:w,tI, at, the '~op 0:[' :Filgme 1.•21.a and b., The m[llmK.e gas exerts a pre&sUJre 011, a silicon
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· Ull'an 'The raq lLfire'Ci trave~ingdistan C B 'of the mavingl electrodes is ij = 10 x , O-e, m, which ~seCi.luivale.nt to a spring 'force F~ kti = CUJ5,(Nfm) x 1[) x 10-~ (m) = 0.5 X 10-6 N. Th ere ara two ee ts of el,ectmdes· ~nthe, system; each "Sel needs to generate C15F, or 0.25 )( 11)=if5N. By lIsing IEQuat100 (2~ 11} with ~ ~ to. lEg -= ,9.85 'x '10-'~ C1N-m~: W = 5 X 10-& m and d '= 2 x 10-0 ,m.we obtaln lIle followflng e~prsS!sioo 'jor 'the mq t.J Ired voltage SLJ p ply~
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1 Most, ftuidic ,sy;stemtS 'iur bjD;rechn1C®J~ma],ys.es can 00 com'.bined, 'witl1 u:adlwQfttaii ,eloobD~ ~y$;t,~tmS00 a single piece of' sUrco:o ,M ,ijJ, ~I~b"'-mlll a.,ctljp (LOC} [Lipm3Jn 11009]. 4~ Since many of t'bese systcems ,~ 'produced :bl b8itdles, t~ley,~, disposl!ble after use, whiclt!i eI1!81lre~,safety ,b~, appUc.atioo, ud !jarv,ings ,bl 'the costs of' cleanml,
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'-Y:-I1" eJ,ec,rons· , -11-" ~~ llmmJ ~h' !c;aIL-lllJuue. .....are .. gUlY-cYd ..b'~ ·e.miL _'L·- t . ,., _~ .re~ea:s~ e .-1I;/t..,-~"...lIi.- - " "' ..ct.... of electrodes to an aocelerSiI-Oit.in, 'whicb me: 'h~gb~voltage eleeme fie~Jd,slIpprnics, tthe ne-ce5sar,:y" :t~lle1~ce-n:@qt~l aecelerase the flaw of :pf.lls:sln,g electrons, TIlle. electron k!t beam cnniudn~Dg hlgb, kiaette e,1lefg~",collid.es '\;lfillh the ~noleclJ~e8.of the .m,ediu!w, '~n l... !i..,.., .tII.., .~.,if'\ .~[.,~~... I tne ~O!1Umtruo,wIC~~aI.~r ed 'sJLiiere~~y M ~lll.., II!.. iomzes 'Ullt0 m.euUlm arter 1L. Jii.DOCulg out ,e~e,e'1:ro~s :[tom ifhe '~~dj:um ,ItemS. Hydrogen .~ndh.e'~~um ,ga~~ are pop~~~ :~onsOUiroe~~ fnas. dieated in. the t'igurf.e,;'O:ther ,Iase~ 'may be used; 'for [example;~ B,:PJ is often, used 'tGI extract positi ~'eboren ions. /oniztU'io'n ,e,~IJY is de;fim~edi,msthe eTI,e,rgy ~~ood~d! :~:enj'w.a~tOO ciuiWImos!U. elee'EO ilk "' .. !A -,' .Ai'·,·, - TL... ·.A ron rrem an awflil, {)I, LIIhllB OiDIZ0U1inMeu~.um. ,1II,U.eneq_y req,Wfeu ,~"" 'remove " . ,.,1-.... , c.; ·.t e W' . Ute nrsr ~'~ecttoil 'from the outermost omit, j~, much less i!:han lU"ilfaJ'l: req,~.dIedJ :remo'Vi-~g :€ilf adlditional e~ectt~n;s from th,e same m'bwt A'llJoptll(u.al ,io~ilMi,~n of a gas, r-equWe-S, QPro'x.... ...,1.-. .... -' . ~ ',. -I' oae ;~n an. ,e:aOOlmg)
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elWt iD our da,y~,t~d8/.y life,. The spEead, of ,8J, Idro,il' of dmt. ~nk in a, ,pOl af',c'leu' 'W3it~r is one examole of dle dliffus;!'(ln. 1njE"OC~-SS. _Q ."m~,U!a ease not o·.,ul' 1,~,~1i[il w:-: ~._ _ !tj '!'iI,I"'~--=--'-I'~ ,""'1,,,..''''1 __ ~_, '\'If ____ -eA-----ril.l---L __ - -~ -- 1'--,11;'e 1-:-e:adi'iIIlJi' vu."Jrve .. the fapid spread. of me d!mt:, Ink in t'lmle,pot, bti~aIIS() 9~J!iSe the di]Ja!tilo~,,of d1e datk;, :ink, ~n 'the; :MixedJ liiquld wUb, ern.apSieldt~me., The ,oxidation ,of :Dlet~il,in a :naulral, elv,k-o,n~ men:t is anomher e-iXiam,ple ,f<nf'a ,gaSrtro'~idIdJi"ffot~()~proeess, I'd ,ge[f!i~f!~'~~ift"u~iOficaa d mke piace whi liquids 'll) :si():~ids~, ,gase-s, to' oo:~~ds., Uquids, to nql(l~dsas inus~,a!ted, IMUd 'by the mOlve, er.tampiJes .. 'D'·"'·' 1S a COmm(ltli, p:rotess, h~atlS· bSe(i.l, tliID .uop~ng, :S~:iiOonwa'We. 'wiuiI ,~.('re~go, . ~," . .-iII· ..:1 '" .']. ,_'lJi~US~OH ie:FS,
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A, S(J 1 ,. Uti,Q1W that eonduets eilectri,e ,curre~~ 'is, ICaJned, an ete'C'tmtyte and title vessel that hold~ llh~ ···, ,,,", d I'll ~' I· Ji'.~ '!E'I 'l b lI!i.cllU~ '~! ,. e ]eetro 1yte ts eanec ,fMA t?,J,e'Ct,ro~yt;,c C'e'i~",Co,I,ecoo,yle-s ma.Yce ~I~ ..->11m~IiIit1!lns Oil' £. ~~1 ,~llseu salts, Of' :i'j)lliicaUy 'Qond'ucrnng selids, :P,ftssi:llg e~~ecmc Cllff1en~ Uwo~gil tme, Outd, 'in 'tIlIe eb:ctml:)1:ic cell can produce ,elw.rircall:y' chqoo :~O\li~8,1:0 tile. e~teclr01yr'e,. S~nce e.teckic mJJa-emlt:s the; i of' eleeUtolliS, th,e eitecb:o[ts in the C-DH-ent.cam alter 'til"e,a'tomic stJRU!cwre-s illJ the flJiWid mol .. eeules, ll:d;~carp :~ead,WI alQ~S, with UnJba1M,-Oed etecoons,. ,md free ions witb. electric ,ebargi,e-ll are thus p,roduoed 'IP, the :SlO:~~lioD. I:~ ood~tj,,?~,to tibe~eile~tt~~ytic'QeJjj~~tpair of :Sllhllllia£!l~d,eleetmdes Is reqllt~d :im order to provide, an, electric :pot:emfia~ iUI an eliec~ojysb~ prl~SS," ,A ~imp:~e 'exalinp,leof' ,el~tro'lysis, is, the d.ooomposidon, ,of' u:ilio]Jmo. sodiu'I]]J dllm,me: (NaCO in ,an el"ecil;m:~ym.~ cell, ,as nrnusua&ed in ,Fi,gurre J~ l$., El~wod\e~ He :pIDaced,.ail:. the (W'o'ends, ,of' tbe eJ:e.ctro~y~iceel], ,An ,e1ect.d,c: :pot~f1lii_w; i;s 9mld:bdit~d,,IJftel" t1111~, eleetsodes He connected, to' a, de 'sowroe .. Tlbi;s ,SOtlfroe, W'btCD ~suUy 18 a ba~, acts ,ati ,Oin e~[ec;tro~ o,mp ~t pushes ~tR;Uil!S :~ID on'e ~L\ectro~ p making it a, cat1wti/e,!, and, pUUhll,g e"lecLITCi~ from, 1he othel eleC11JOd0l Ito, :make, it ,8 __
f, _or-e,B('ln:g
iu
chRli-cal ,cofDpou~d, or :Slc"l~tion 'by 'o:ppos~tely clhti-g~d Ct)llUltiW-OliltS (or ioos) :movmg in opposite dtrectians 'lllHI\e1 an, e~fecmc :pooonilial d!ifIet1ence~ ,As we bJsrve I.eanm;ed, 'fram. ~h~
An'el~tro~y~i8,
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aterl
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The .rare ~jf Row' In both ~leckQ",os~,(Jnc and e~retrophomticp~piftl: Is linearly p:ropomomJa'llito Ith~ .ap,Ued ,filBcmc fiield. These P~mpinl: metho& in'v;QI'~e, mov!ing: :~{) m~cb.ui~ p.ms., It ,WS, ,es,peciIU:y ~ujjmble·for _brlarwriced, :~,.stemsOldy ,I ;~unall .. :sllDple of' ~Ilalyte: ~8,eqlill~md :in. l1i~D8~ r CalES 'w,iw 1l..1:U, ~ 'af pumpiln,g itl! f11it«)flwd]l.c: :s:y:stem9" 'The ve~ocity of tf;u;~;.it\(IIving free ,o:h~.s bill~;deC,1n)phme-ucllU.lnpwng: can be de.. , • ...·.....'11 b.' ,s: '1111" "I~'!t\"'~ l' :t;!!'O:= ~ef'[_rl_hiW, "'Y' i~....... ,1J.~,liLOWmD,g e'JtpreSSi(}U, l,I)I~Jn~V:ac'sgno] ,..
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've::ioc~tyof an ion ~of charge q in a h..omo'I~B~OUS :ftuJi.d applied e~eotric fie~d in. volts
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:It Is 'Obv.~(JU,lS UCifmE(1J,!1ii~,OIl; 1(.3,.,12.) tnlt Ore 'Veloc·ity of the :Uee; ionsi and dL1l_SJ 'the. fluid 'flow lBl Uflteady propom»nal ~ 'tOe, applied e;tecmc: :tie:ld,i'D 'ooth, el\et~y~,
.'...
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P :Io.w .., ..' 'Di":gi":"c~ ..-. '.-.,ilV>fI\-, ~-" i""'jj~~"',Afi (,'~) ~Aii~~~~~,l.r,}iW1(2'), ~ck'~':~ , , IlIU~noo,iW'!'uJ ,,;]51 IS 1!lJ'~~~:!' "iI. (3)1 Hookels, law" .,~ '",II!.:-,'ila~H"'j,(1i1~ie,a ~g,il'!, 'ifL"'.li~, 1('1"\, 1..;I7:~;S, ,(''1;')."A~_iIi;, '~nii, (~),. 'I'r,ib~,1if i'>~i!T\r ,~t~~ ip' , WKI. ._ J ~ "' ... ,:. Uu~~ ~ '\J~ ~l.L~Ull'ii.P.
1;"'I;,I''!i.Y,;I,-'IWo ~ ~ ,~ ", ~_~ _ ~~I "'.l.Id~r,"~,.Il.-:J _ 1 ,~,Y_.:JI JlllIiUI-jj. ll._IJUrll;).1 11!ir."~"'ljf.·
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....
'Blecib1OOhemmtry':blVOilv,es ch~ccaJ, ~dO~8, (2.) [on~tio~ (I) (3,)d~sjm.m of' 1rl1iY' lubstalloe clucsed by an eleetde current.
,{,-"]i,Clio ,';.,
:needs t~,')I:kee" s.u,ppI,ymg (.1.) Ngb, tt.mlWramm~ (.2.) ~Ib pressme~ (3) bi,gll deciric~l, 'tie:id 'Eo die pla.sma, chsmber,
'ODe
i'y,.:.IV es iU.K;i -~:.fIc~ :ti.Oifll!, ~ .,_. ~~~ __ ~,' ,m, _Oil, ;'.;-, ~'In.,..... P,M.!I!'U:l.K1_~ ~ ~~ ,of~ (' 1)1 C:"''''Ul.~C'''ll''', (2).' ,chemica1, ebMrliiYe8,. . -v-. __ , .... ,_,..,~.
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,30~ Blootrol,l§J-:~U~ , .' an ae \~,.I" a, de 1Il,.-" either:m.ac --, or a, de: now-er sUilitn:I:v., ~2\ ~- -~'1' ~r3:~~-~--~ -... . ,~,;r~IS '~~'--:-s,·ifl): I!IIse -- lr-, '1:1 rn~, e~ectro,l.yleis '.,~:m, ,e~W!:w~ .• '. .oiL."", COliltaUI1,'W''j' t'l') +'~, ,S(lmIUUo:n, 'iii,.....'.... 11 '~ .. (t) ,........ ~ ('iii') Iti.:l~ -;. ,oJJ'"t ~ ,:j~U~.e II' ..• .!.:mll,at,
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Ib-~·:',6..... ~'~·:-lic!'>1~nnl"~';M) 1I;iI,,~----~,-:PO, . tentiili · ~u;; -,pp~-~;...~-, ~--~~ .. :f~cmc.'·· ' __'~ __,'.
t">iIi"t~4"'~;t'!M' ~'lle,i"!'f~;ii'!' ,~~i~r:r.~.:;0, ,~H, e'~etJtti()i.""si~ nt ~nUi!l.!!""H 1I!io\1.. ,..~.~,m!; ~~~ ~~- ~-- - , .jJ ~ ~ - ~.P:S:S. ~~ Jt""',.,.,...,,,", ,":I. ~"I nJilli mluue IS~.',,:,k.~ (;"'1' po5nl, , e l;-.. :ftiii;(jr(ilt'v-e;~! ""_'.' ~, _ _ 'U'iQ4 elec~~_e;. _ , '.~. ;It 'n - f"i'~'.-:o • IIioilte . J. < c -~i~,v~,~2): 'I. ' ~3·.,·')' neU!~'~ _ '_ ' U.U\1I IJIIM~ _I , t ,13. A, ,c~e is the (1)1 ,positi,ve" (2) OOgaJti,v'~ (3)1 neukaj, :eJieettrOOe .. ,34 Electroh:',drod,\::'--' -',:' ":~: dea]s, >'~:1Jh(1)". disso~,Uti:OJl (2'). :motitm (,3;\ ,soUdification .... . ..... ,. ,?j ., .y,nmm~ ... W') "...... . . ~~'--, ,J - ~ ~-,---~ ~--- ~-'!o;~,!,."" ~~,~Q!
=c=c= . ''"''~'.
35~ The p.r.im!lpBJl use of el\elctr~h,dnldynamics :im., ,mic.rosy,sreJDs is 'to (I." ,eontiacl: ,elec11nI,8is, of minute, Ichemicals, (l) meve m~DU.te, amoonts
!ilf' :fJuid, (3) dee.ot nti!nu{e, amaU10:t.s, ,of 'fluid .. 36~, ~Weccr-O-Omlom(: pu'mpin,g: :ws used ro Dl1)V'C m1nIi1i1:e: mIlOlilD6 of
(1)1 ,homo£!:-~noo1!ls~~) betem,geneQU8~ (3) ,my fluid in capiIbIy pa!Ssa,p.s~ ( 37~, :mleck-uphere~ic pump.g is,'used, '10 mO'Ye mirFllil!E, ,amounts of' I( i.) hemo,pnoous. (2,).he-teItJ,ge!il~us~ .Y :Ruid in capiUlaf,Y' :PWiSag'e8,. (,3) 3&, 'Quantum, :ph,:Sfcs, j:~ '~ to' Id'eQit!d~ (l,) :ph--ys;~ca1l: W'O''Iri'~t af' ~kJroSI' (2,) energy ~s~, (3,) oolision~,of a.toms :io, ,~S' , rand, :nan'O~,smms., 39~ A quanlUiJl :n::presents, Ihe smm~t ,lmOUn.t 'o.f (1) mB5S~ (l) volume,,j,
41 ~ ...
(3) energy ~t: ,any :~y,stemcan g;ain orlese, Photc.-- s 'h-:ve 'Llb~; IlI§ MiUiOlIJ 'm 11) an el~trolil '\:~2.): D.e-noun, ~\,,7 zero, t,3.\ , .. ~- ,la, __ I -le ...'1i----~ -~ "t-, --- - -, - ."a - , ,
:Pad,1 Descripti.v'6: P.ndliems L Express the ~riae 'w,eijht af a hydro,gen and, a sili.coo, ,Imm ~n ud,
H'i.'liifill....iIi'H;i;I!,t~~
lLI.Q!.Ii",~.lJ..~IJ.kiI,i:l1
;(HHili:\
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:2~ What do the 'i~tomi~ numbers" ,Wid,jiilgrroUp D!u!wioor.s.'tI'liD. a _m,odic tmle ~? l~ What. :15,the d.es:mable wvellof ,e~,ootric mSi($i1i,vi~ ro' N_Rte;,I semieonduetor
elocmrica1J1y oond1!l.c<1]li,g?'
4~ :Elplmn
to Fiek's
law In
6. Plot dIe distrihutlons of the oone:e<ntratiionl of' phMphams dD,m,s, as a 'fhRct.t'OD of d~tD :in. 'ire siUoon ~u~tmre in Example :3,.,1. t. the, time-s, lO'~60~ $lOt 120~ lSO,~, a
,of silicon, tJ(ii(lstt2tes,fol" w:hllic:h,doping: ,of iane-ftjc~!, pfrioslihONS~ ,• .Ii 00r0n W'e 'to '00 emied rnli. by' a diffucs.iofjj, :pmcess,. Also, what is the 8o ]JI'bUity of these, dop,arnts ,at these opdmal t'Wlperature:.s:?
,and t80 minu.1Is" '71 :Detennhte the time requrired to dope 'bofU~ :iRWi tthe siti'tOs 'SU~ so 'liat the, Rc~d!tihd;ty (If the doped silicon, ,at the of' 2 jtm is U)~9' Q-,cm~
_th
Copyrighted materiel
In. :Chapter.~ we learned mali mDry :mivro pressilre sensors work OD dre~ .pri.rn:o,iple of' conrvernng fl~ft :in ,3. &:fOrnled 'tmn silicon Idia,:q~. :kidu-ood !by .ap,pJied.prelStlIe~ 'U) the: d_e&1i'redOOrm. t'el~c8 ~ ooqIut. For' 'most eases, these dlii~~plS~, either in. c.ire:ulat[t :sqUHe ·or:~ctall'g,u'[ar':!!itiape;; can. be ·tr1C'a!t-ed. as thin p~ s!!lbjected 'to lateral oond~n.g Wli.iOnnl, aip'Plied. :pRs&ure. by Sevel,aII, Idoea..·form :so:~.uno·ns ,of plJ3Jte.tle'tuii:i1J,gcan 'be :iuond. in. a, useful .ref·, erenee and. WQinow_· ..:Kri~ger 19'59',. The govemi_DB dljjff:er.entilBll ] ·eq~ation fo·r-'~.e 4enec,tiol of-a mctanpimar.' :plate siubject.·w 'Iateral oom:ln,g' CaB00. exPFes~OOU:: ', a'2· + ,82_.):._- a'2w .... ,iZW.')·.··- = L .. (. 1[41]
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~iapt:n.aQm'Ilitikness h ;;;: 1,3.88'1'IJRV. ma;Kiimum def1eQtion of the d,Ea.~hragm~ w~~ c~n be ffet'ermined by using Eg;tlatioo (4"7):
too mJnimum
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one ~y r,adi y see{ram the computsa results lhal.tile m~imul'll1 strl8~in ~fHaphragm 'i,smuch mil ow ~hB-'liel d s:trG8ng~h ('if the mamr~ whiCh is 1000 MPa. The al. m~imum aef~e~t[o~ D. t01'5 fJIffl' ~!3,'Sffl·aJIbecause ot-the 'srnall ,arBlB. that 'is &ubof leered to tifi e i~reSs.~~.
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p&atddilS ,of 'flese dle~ces, sueh u,··d!e ,mmerda, sensors used In. 'tb_eailr. na,g d_e,p~o"nmnl S,vs,teJHl.!S In. 31JWltomobi]e:s are 'I'ilm~mited,i[1 Chllnmr' '- and dle wo:ddi,n,p; 'Il'fnllc:~n'Je8 ,are '~ .. :1:"" .. . ~J' ~ ~ - ~~ -~ ~-~.. ~-~ = 1If"'_1. .. d-e-scriibedJiLnChapter' 2-. We win [-e-v~~eW' fundam,OOmIJ pri.nciples (!RJI'meclumL\CaI. 'v,i,'fie ltfatiion, ,ad :i~ apPU.oaU'Q:trij ,~~ :micttla~W.~dtF -design. in tms sec~lall"
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'The Silmlple:st mecil!ui~a[ iJb.ra'tjon, :~y,stemis v '~~prin,g FiglUlre ~.'J'a. 'The mass 'tillt-lit 'is,hUlIlg::00., tile 5'n-rin~:w~d:l,a _ rr ~
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:Fig.ore 4,.1.], UiusUales 'l,l1mldtmianl;phn;g o:f' a s.ySitem. We :realb.e ffiun tli1ie ,g[~pb;~cal :l\ie~~~latiol1. :In,Figme: ~. ~1. marti,,aJlfhough the ampU!tud\ei of 'v~btltion decays con'tlnuouslJ" me· mils ,remains, in ,o5ciUattOry :mouQu :mr. a l!Jn,S; tl!me. This ;Si,[lWtiDll, eb'V,tOl!llsly is 'tbt: l~t desiltablle as ,raw' as maCbiine, desig~,:hs concerned.
In, -"~
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is; m-d~oorml1mte: 'wb~ul Q';' ~ (d., Howeiy,er Uipoo1 app1:yi!n,g :L' Ho,imJ,~s Ml~j' &e, f'allowing SQ]lWtlG,n ~s ,clbml~M!d 'for' mils, S'iK~(ia1 cue::
Mt:MS aoo: t!ifcrO€'f' s;tem~' [;Qsi~1ll and Manutadum, " ,'",' "~,,,,)II, "', ","-~, '" - -, "-"
and
and _. s.o;
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=,b(,')" ~ c,t(,,).'.
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,nI£:(,O + c.i(t") + bet) :~,-,nl(O
SirliCe, &e auac!bed, machine viJb.l':a!tes, wid}, an, alDpUmde ,x(,o := ,X' :swn, ml-, as in
,BqU8,-
(~4,.29') is a :&eQond~or(J.er nenhomegenceus dUimll,uaJ], ~num.i'M;ami ~ts, 0--' 8 ~ lUtbO~ICQwsi~ts,of t~ part!h i.e., 'me; ,ccf~np:re~en!tUJ 'so~~itlon (eS,) [amldthe :pMticli]il.'
~'~I
solution (,PS). 1'he CS of Bqlu~ttio~ (4,,2,9') ~c~ be :oihtained :from tk, :~,OMQg~,neotiSi pomotlj of' '. · ba Hft11~t'iO'
it, .~~~ lL
ii'iI .~~ ':
,m:~(t),+ cf 0')
+ k~(t') = 0
'111 " III. ill
whtcb ~s;s~m~l_ar to BQ'Ula!tiOO (4" :~,9) :Uth, the :f(lrm of :m,lutku'll presml,f'd :~n, w JEqUl'tltm.S (ll~.:2Oat b, ,a~.d, ), :1'0 anY' 'of these ttuu; eases 'for the CS't '!he amp:l~tude of 'yjhra1ion e
,,/:14<),, ~\J,1l :.
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The; pm1 tnil't ,is cri,d,cit~;i'i~ the aeeeleremetee deslglilJ is :in the FS 'of Eql!l!ation, (4.29)., ThiiB part of the ,so.'JUUOJl1, [can be ,obm.irnedl by asSIlIlm!ins thatt
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Other ty~1 laf 'beam, ,spriD;!fS ICM, be: uSled, for micreaceeleremeter d\es~p.,The rceade-I'wiU readUy de:dve the equivalent spriwl: constants, 'fuf' We centndJ_,y' lcaded beams Uhl&trartedl i;~,:FiJI~f.e:,4,.:~a 00 be It; ,(48E1)Jl. s :~tIl~ $(~~--pilySi~'ppomd beam S me : Ipring and.lt: = (l92E1J!L]' f6r' the 'fixoo~end,'beam spring;.
:=;
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4.1110 E.:st~mate U1e· dampingl COBlWhJ~B:nt df spri rig as, illIUJlStll'a~Edn Fig,u ra 4" 22. i
a. rnlc r,oaL::c9Ier-om~it'€r
The damping! coefficLenl foil' ih8 case in FJgu(J!1 4.22 caM be determined by usl'ng E:quation (4.~a) with l 2:: 5DO x , 0 -e m and W.= 5 y 10-6 m. Tn e ~unoUen ',W J L)
is (t992 by inwrpoiatfon 'from Table 4.2 w~tn WIL ~ Ci01. The nom';naJ tUm ~nc.kn-ess ~ CBn tle determine-a by the eve rage max~rnum i deflect:loo of Ih~ beam along ths length. or simpjy by setting th~ gap J-{, :;;;;;. ~ 10 as shown in Rgure 4,.22. Th 63: sa optl on of the latter va,~e Ieads to a. 'iJsrv small u value at c -- '9 x 1a~33 Nmslm.
For ,~Qjti~ :film nlittle. of cump·res8~ble ,BlIlalwds, as,air; a i!u1.ueexe [U!lmber S sneh is wnbioo:u,coo. 'T.IDs '~UIfmbe,takes 'Ule ftJl1awl.ng: for.m I[Starr :~.!'OO]I;:
I~
s~
..~21-Mi~1.~ "/;
fl~ ~ ,
:[4,.39]
Copyrigh
ed rn ale rial
Figure 4,;,Z!I
TnpView
,n
,!quiltlon (4,,32a.).. C-OIl;~Ile:lltJy one :may e'X.ped, a ];~ $i,gnBJ OUJlput ~fmmmj~ro an". eeleremeter wiilh, :rnaw'v~rue of h as ean be. obs-e.~ed .ffOro 'P~p--re4·.1.5.. :~o,w The, d~
illg
tfu e ,·ampl",! etic.,ret III ,mIeFOd .. 'f . '. , aceeleremeters :is indeed, Vl~ry small, This s.itmm.amoDJ.leads i~O '"e:ry 'S'maU va'~ue O'J: h "in a
'.' _',,'" 'I . " . "'" ", -' I " .. I .'. ", " , _. '[ .
',<' • [-
A.;s w,~·" V~0'b·5e:[V,e,. 00"" m II~, last t.wo e:xa:D1Ipl~ - "ha' - d .. '00 .. . ~".
I'
t','
_ .•
'"
..
...
'Two,veh~c~es wI1th roo,pectyve masses tnt ,and n\ are' 'lrave'l i'n{~ in oppas:iite d ireoIDions at velocities 'V~and \12. as ilius,~ratedl ;1 Figure ,~t26. ee~l vehiid,e, is BQ,tliip ped wUh ,an n E ~new~lasensor (,or mi~roaeQe~eromJeter) builffi: wi~h 8. coof1i I~v,er~;€am as e[)n~igurs{t 'jin IExample 4. 7'. EstimaI~e the ,ch~:mlecWi'Qril of tihe proof: mass iitrnthe; ~\n50r in v,e~icle'" wirth mass ~ end ,aiso U16' strain in the M'O piezOliS51!stors embedded underne:3lth ~hte top and bottom surfaces, ;ar niS bealm fH:~'arthe :sUI",:port arfl,errthe MO 'vehioles ca~ I!:de" 'We have, the kd~()wrn.9lrri'~nrmaltjon on the 'mitc:::roacoelerome't:ef from Examp~ec 4'-7:
I'
3vailiifule fur 'th"edmJign ,of D'"ao'bridlges [Bollw,stm, mod OeijseEae-r8 19~1ll]..The oo~u-' tioS),of ,8 ,S,pecml ease 'with, tile :foUuw,mg immal ud,ooundary c0'l1I.ditignfi,~ pre8e!l~d below' I[Trim :1ggo~" The.! :siDmon '~:sJ lor ,R, simnlllMzy 11!J!n,~~A~I, bemn vibrruinfo' :in the :rtrst l'Dnde~ as --In,J.' . ,r.",~~ .~. ~~l:I . -~ ~ -~ ~-:illlum'aled, IlllJFlmg~M 4,.29 11'm~foli~lli~g Illi:tlaiI, and end ~omdjuJGns EIi.Fe used, 'in :soiY:'" :i~_g :Bq;nanoo (4,.,46)'~
:11.~ •••• _ .• 1, • 1, •.•••
--,r.
--~
"
~
=-r!
'
....,~:
~
lL--
,:{
,J''I:,,'-1'-)
'lL'ffO_
t\ ~ 0 ','
10'" :.
'
_''IJ..~,
''IIri!-,'l'
:i!i)'" ,....:....
!Ii-.,
.-.
j'l"
'!il! .I,~,
t-wo .
:tio !Ii.J.~
~IO'-'
.'"
1M
'Figure 4",3,1., These lieb'cuofts, are mOR d~3fstic.'wiith p:&\lgJtiC~8 laIRd lltil.ymers,. rOH9'" Date~y~ l]1!ar~rills,!iJJsed, .~y cure ,e~m11ts, ,of miao~e~sQ~ and ,~~llat6f.Sj~ .., for ~I~d. i'il~g &iilicolJ, q)Uai1Z.!, and 'Py,re-x. ,I'~US~ lire, re-ll~ive~J' msensi.'tive to, tile~ 'tem,pef8ltnJre-\,
'· ,,~. f' ~ "",,1' "".. A'~ S.~g.mlJjcat c~ia.Di~ ~),'m~t'~niil, piO'perth~s ate O.ot, ~M.~LW ]'0 iUilU]ise A ,• oom,!.l~vj~, ponOOJEs,at e4e~ated temperamre~ ..,Ai'S!G from Flgure, 4.. I ~'we cibs.~e dlait 'tlllei£J1iao", 3 ";e'.. ~ '~I .. '.•~ UJW·'t&ll!_p€lnlmte,. ,i'\gmtm, .'&" 'Ml.".... l\ • pi-It . al pr.rti~ ~,~,' :liIDaiwtja~SI:runcmaLS'e 'WillUll ... 'YS1JC- ... mest u~Me
)1;;. *'1;;.,
~-.:iI_,"" Jt,~lIle Ai .,iii p:reS~Dy 'Ii~m,pela.NlK.... '::-:1-' UJle-lnll.~~EI. m.ail>P1l.WS u~ ,m:,m'OSIrmlcros,,i s~ •. , TI ir.:k:iII-. ''1'\fI''t ," . ~.~.dependeD! s~lfic: beat and coofficin£ of tEwrmal eMpm:lStDmJof silicon.,
_" ._."_
...;1,:, . , . ·:,-b..rut.="",
'
. - ",.,.,":
... 1,-"
,"",....,,4' ,','
,,' ',-
--t"
. ""'"
:'~""U-
C -.
1---'
V.E.GENID,
Itf,. ,_,
~l
'=.
l:::
Y~~,g~'~ ]1_ij;Q(h~.~us,
:plas,tiicY,f~l~~'l!:mn~ i]:l~umatete:!1:si:Be ;iiJ~mgt~ tn.mnitill ,co.nti\(IDti,Ytily
Lk
,=
'Cl:
Ie
a;
speeii~
~:a,t
'~~~
SDeclfic h~t~
CQe'lfl'C'.l1t 01 t~t
~ 1<3
~"K
Od557' Od~W'
e~f1~
'1,..400
see
i2ZOI
"U-,K
~o
'1,7'1'e5,
0.1332
(]l,65151
200 200
300
O,;i6~l1
01::7113 O:i'6S,
ij,S32
Q,MQ
2J5;111O
~~,,25'3 ~"e,11,4,
4.00
~oo
600
~lS42
44····,JiII!Iii,
_ ~ J'~I~
O~Silicon
• Balut1tm
W'e -rfiay IU:S~'EQUla~rQnS(4.49) and l,4J5D) KJ 011oU late tlie inlerfacim fuN)eand ~he fa.d~us of Cuni\Blure· of the nested: strip with fa = '10 X" 10- ~ m "and b = 5 x 10-6) m, Ttu.li.S, by substituting, the ~e mal€1:na~ p rope l1igg. Mel th~ d irT1efn;iicfrn'S into Eqllattions (4.·49,) and (4·.50). ·we·tHl\f.e the ~a~ues 'for llfle interfacfa[ for-ee, F and the 'ra'd~ug,of a'!JNa!ure', pas t'oIIC\IV9,:
F~
{2,l1 x 1O~~ -
cs ~ '1J)~~)10
-
{10
10-6)(5
1 ~-____:__~~
385,000
x 10t
+- '
1 s 190~DCC x 10
P' =
x 10-8
,_
W'e q~aUZle' mal' the interfac~al fCfCB is S8 small that ~ ca~ be en Hrely miglected. The Il'adius of G~,.nva]lUfleof the bent stri p, howeve~~ne-eds 1.0 be, used to assess the con:8spondili1lQ ImoVlsment ~f 'the, free arid. whlch can Ibe approx'fmaled from ·the s ~tuatlon i'll ~strated in F1gur-e 4
i
.se.
Copyrlqhted material
[4tS?'a,]
w(~ z) = -
~:r
.r
r- ~ Z +.~(bMr)] ["
:T
«(
V) ~
m) tk
,a~ong the ,z:direction. The :normal :fQl\'QeaJnd ttD;ebendirD(g mDmen~ dne 00, ilenlH1lj, force, ,NT ,and ,M~, are 'expressed, in. E'.U!a!tioo~ (4,54a) ,aM I(4,54[b),~, ires:~fivelj',
, _, D,lfiI'
[4.!8~
C'Uw'vMu:[re
Det,etJIntllml€! ttherma~ rs,~lresses alii!d :s;trailf1s,as weill as, the: ej,Ellr'Owmation o,f ,is! ~hin the! beam
1 1~5aM~'r '~hJe! surfa-,c8' ,of ~he beam is, :subtec:t,ed 'to a, sudden 'hea't~nglby ~he rerop sistance heating o:i:t~le! at~aohed thin (i-oppe.r 'film",Tha te:mper,a'ttJ,r8 ,at: the top su r[ace, res'U!IUrug ~r.Qm~h1te' e~lIJtjng is ,4Q~. Th,e geometry' ,8Jlniddimensions, 01: the be'am ,are, h iUU$ltf8!t'9d in Figlure, ,4.. 0. The, beam' ~:Smooe of sij'l:poon and I~'as;the, 'f cdloW1ing mate'riai 4
1
nl~,~ trll~~I!;i"
n;n .ro!i"li('jj~~;·
~I ~~IE
Ooei1nd'ent: of' '~her'mal e,~pan8ion~' ~: 2.33 x 1(r""~v~c Y~~;;m.~t~B, modulus ,r =, '1190'1.000 x '10,~N/m~ Pt]~SSCHt~s; Ir'a;tio, p = 0.,20
,Jllcm·'~C-6)
4"..... '0'
I-I n .;i'I;.
T-:~uJi!::on, learn ·1 b
,1
'2,~m.
Ccpyrlqhtcd malarial
t_
['~5
:_
1
~I
x 10.;: -~1127.§
5 >t 10-11
z·tS x H)-a
11)5 z)
:!C 1~ z)
= ('~1Ia.78 X "O~a -
+ ,(~3-22X
1{)~'1'1 ,Z
+ 44.15)(
'0-;7)
Th~ maximum stll'ajn~ occur ~t ~hB ~~p ·aoB. Numar] Gall Vcalues cf these s12rains ~lJlr can be obtai l1Ied by r~lting,z = 5 ')( 10-e rn In the above ~J(press~cms:
e~, ~
,B~ ~
CJ]C92%
i~
The dl&p~a.cements,at the lop fr'aa cornsrs with ~ =. -:!:,~O X 1a-a 5, X 11 m can 'ce o~m~ ~Jre from lEe,Ua'tions C~ r:I B1a" ,enid (4. !J'] tJ):
'4.
m and
l -=
';;;:
500 ~ , 01"'9 [(5 X 10-".12:7.5 + (5 )( 1 a-e)(5 x 1(1 - 6)(71 .47' x 1C-iJ,] '190,000 x 10S 5 x 10-'1'1' 4.161 X 0-22
=. 0, lJ4!J
R .. "
fJJlI
22)
f5 X 1 C.,--fl)1,27 .5,
. " I,O-~
(5 X 1)
'"F
(5 X
Ii)]
X '10-'11
',ri6
+ ' .~ _~,25
1
19u Ouv x io
2,B.8)z
ox
=. -C,tH2~
The 'Clirva.'Wll"B ~h~ Ibent bMm ~6 ElSrfm!3Jted ~fom Eql()!tion (4JS8) to De: of
-I
II
IE'C'···'HA-N··' >
I,
. f,
!I'}lj'.........
,iI!I.~
~."""
'l:-,,,,,'[~.:t~A !.iIU,",~~
preBSUOO ~
c·
.....
,.
",
",'I"
lii'.:i:,
',fli ''''Ii' '0 lii-'L,,- ',.:".,', '''-. 'em" ',>t, '._ :~,.- ';::;";"" ~;, "!Ii 1- ~ ".:I '':ii ]' '9!' ,~.'O\I' u:~i!iWlCf08'C.I., alllOl~' It]] .11:-'~.gl~res •. !til! mlu ,£. ,.l 'I' ,;:i. 'F'" . I.·," ,&;.;7,!" .,.:JU ~ ,..il ~"_ " .. -'-.~D. ,1\gtl1ie8,,........ n '2~' ~. , ,iliFltu .., 3"'iIi ['11"(.'-. ,-,,~,.uere ,many ,~',~n,,,,
I
r.
,~re
ted~,ce~, etwe,e{(l. dissinlUat' :mat'eriab in t~.e~e~evices, As many (if.f· these de"r~ceS!,alFe b d 11.>;iri'ii'il!1' 11'"1iJ\if';],e~. t~_6 ;shr-e-iiJl'CrIi:h ~;;jltl;r:i;r~~~1 I~'D--:,' t'ii,~_f~'.i!i: w~,~ m-,-!I~ilill,i,o,··'~~~,~'w,:""''CI--::~]~eJ ~,rJ! ~ _ t. __~~ _ u. _~~= ,fif' ,4,r.i,L'!;;::' 1I..:~:n,~~d;, 'l·AiIj~r'=, ~~u. fiti~, U~I _ It!l~~ u~
~l'Iil.lt~ ~~III!~ ~. VY--'!I!"ll!
~!6P ..
IUUtHiU-:¥.
_l
,;0:;;
~1iM';~'IIili1.t'l ~.I.,LIJ,U;u..~
~fi,@i''i1i,a.rJj;'"
~-JlJ~.I.II,;!~1I1
d !t!t.. ~ua't.,~' • ~ ...IIi ,-' . :pitst,e::_, 'uiMl ",'"", ~or ~un,D~·e~:mo~e'_~rrt'CI1lIDre :p~enle~ .. ill·'~lI,...II!., L as tae i~;r-egoJ!n:gU b g :seot~O;Jj" ,A 'mAiJOF c-ompHc~.ti(.1 1~ 'lllil\tt, mo~t ,of 'i:h,ese iD:mr[.~c,e;su-e s,ulbjieclt, to s,imultllneo~~, Mode: ]' ,~nd, II ifand 'm in some cases) '~oadi'i'llilt., Mi :rwdlmodie [1t,iCWre anam'9:gjs,. '~IS, .. Ji . 8~gllm'Cant~y di:ff~l'e'llt 'rron.~w:b~twas ,e~!r~b~:i$hed 5':n~ :mooie fracture ,ainfdy'&~s,. :K;i1i f-Eere againl"we 'w~illOlrtiy' outline the gme[ai~ aiPjlIoa~h to tb.e;oo~~tLo.nof this ~ype'ill
11'"
a,
.•. _ . . I __ I'\._ =< _ _ . _. _. '. l'!!!
CUDl,"
.!!!.::..!i~~_
=r.
. __
1!!!!J .•
_.
--
:prob~,~4m" Let us refer to, d~emn~fare olf a. bQnded ~,j:ma,teIhtl ~tm~tU(feas :illu;:!itriljt,~d, 'fig,,, :i~ ure 4.4,j:., 'T~e,two ibonded malter.ials ha~e distirtct prrGpertje~ :such as YO'U!Qg~s, m,oouH,_
ICr,~
:r:",
'~" '4r' ,-," .", ~-r-'<--t'AIr It'I!.,,._ nor.,m.aJ!i.ii ,ainu. 1~'r~'" lILO~i.!I~]lI.:!In. lImllillE. ~liiLe, ,', " 'I '. 'i . r"f&1 mu;;;.a
",111 '., . ',' e,t'.'0lj,1)' ,aJRIlJI! 19';I,)" Y-If.,ese !II, , ..n
"I
",,;n.:lr;', ;:'.0.;;;.41 nr.,~ "'''';'lin ~'", i"",;;;'1Ii'1~,""'ii" ·;u """"i',-4i ~u. ~ru
l~
~IBIi!li~'
r.V,U~~lU£lr.I,
,jJ!
!1.[F.Ii~
,U~
RiII!IlU,
!I"~.
:u,.,
.... "~
._
'0' ,',' ....I~.uesl!!le.milITii,iti' ,m.L'lUe,.. <(, 1"',111,~ .;11.,. .!l..I!.1 'f'" :Pil':," 'il-r",: ','_...-iI,' iJt ... ',...... rm ,iI!.lLac,.;UOO," , _. :aIlu
,,;,'1,.;"': . ";0" , I'
.[ S(JI.I,c:anung,·d: ',LIiieCU!Q:U W~IIi!U ";.' ·,iIi.".' . ,11.. " , •... ,,'. ', 'I' "~~ -' ': . "iiih'-'1 ji'"'j-"" '," .respeClIl,lve '.. Su.,~--s~, ,ii::: ,'iiA . ~,~~U!liS: ~ iii' " .. ;ii,"';:: '~14 . .....:tk~ ,j.iI+ '·'-it. ~: ... , ,,'~', " - 1t..,'1 . ~,_ .'. r· :~' ..-•.!j ;; --:---,,-., . $ILJ',e.il,JiS, ,~le.llltl1S, ,1i1l~. me Iffi]J~ecl.!l,a£;e· v UiLne;r-ai,1lleI!!U !jpo~p.~eu ~pe-:'UIill,B,
,O'~:
a binuttreff]a~ s,tiUCWr"e.
,~tateriaJ:~,
E~.,"Iii'~
II!'
Tlle s~s~es\! u~wIth i.j - '~i' J" near the .mt~r,lf~da] crack. can be expressed b'y idle 'foUowmg 1e.qjlllllwJl~, 'WhlC-h, is Sil]lUOli [() :EcJ.aaJtIDon (4-.6!1):'
viable 'WGV rt,r'il ,a!itt(!ll~in fMi~,'-b:!Ii;i;!; i:.1\O'~!II~lt~TIii .. I~. p.01.1 Q'~ :,:'",,..:'"", ,ai" b net 1I1iili1liJ,uru1.!lC)",m'1l OJl. ,!OiL:', " ,poi_'_ ~,l U .memoc. ~~u.~HOE.l~Saou romm ','I: ~u"iDll -'~l-"" ,~DI,is ' ;'"J;,' ,;j;-...;..;I, '- :if". ,- " ",it' 1!J!Jl.lt$; ' "',, w~~~'1 '- "lL1I .1:. "-- , ',41 P I~:.i" , ,.,,:i:'lfrt.. ' --.~ 'Tt:."" '-I 'I..,,,, ,:ilt-." I d " '" .,.,~,L~_ ,,-'f' -- '11-'. '~""'d~' ,Jr-', " -.".t. :a.re iIJJ:e,l!w)ll,I!~r.e;~.,., ",,'itii<=":I' Onn!.ll'w'. ,I n>e:y C~U ~ .w.'uUtu, , ,M a imVm!W.lelli, 0 :SIe,~.6Cw:,' r.eJli,'e.reillOU, rSUC-JI ~Q"", 'iL1]'~!Ii'll ['~ '~CJJ~'I ' Hsu I[ ~ 9',~iII_''!II'n'';! 'It)'''''iL'I'<IZIol'' Irl'~ _ 7-_-]1_ Th'~ ,4"~!~nd,11 n'll"j.II:1Ip.jitn,]'.,..ill' of deriv.lf1L.3~l& ~,~ 70. ~J' 0;.3. 1, . ;"~J, ,U~i.'J.g ~ II "11' ing the k,ey tdieme,JWJ e,uat,~()~ wUl be preseated in Cl1lu~pt;er'Ut Wham t~e re-'ader wUl learn fInm rdte foUowing :~s.~~ e-'Ssen.twal~n'!ltrVIl:lpu:t :ip!$ormatioml tbat is 'requl:fied in. ' ushw,g iCufi't~ef.-cial :fiwdte- e'~eme~t.oodJe~ rSIJ~~. as ~he pOp'I~ar' ,ANISY,s,®code '!il:s~d.by the ,Mmd:S indru.sltry.,
",:~..~lit'5't~lI_j"
IWIIL.I!O,r!l.lk..!lJJ..
Ichi.,ev'lBd
b:y
,n I '~I~iii..'l: '1'.-'.'1""';,' ,a:Ii'H~lty~Ui I'·e. 'I 1('I~i',: ,': " 1!;,...-r~iJillJR}, e :Su.I!o;-'-SS Oil "I'~ ,~'....~ l:1!~
[;(:J
'tit.'~ .."
,'"
pi I '~~;' Ci®.m,p~.e::K.
I
:~gluJtion~, H, ,p~Jlted
IV !W~'I4!UJJII~ F'IP·..... ~J.lJeuJl - ~/~
in tms,
Ii<I!\
;i"i~Iij''\J'
u~~JIl,.J·
_.Jtt:j
r ~I!P.
"_._!IiI.J)'
l!:li ..
~li'Jk.l\I:.I.!IJii
'I
ga
nl_I/~l
'tl'~
III
-'j'
'~J11~{ljli/
..
1IJj1~1;!i,'n'''i':
~;LL~1I!.nW
..
r~IUjj~~~
.~.i!II
~llll_
47
.. ,Ii':
In ,elSs~~,oe~ principle of t'e :ijlrlJi~~e the: ,ernem.en~:metllod.(F£M) :~~ "~dj:~ideD]d conqtleli~~., The ~ery fmilt step ~n,a finite ,e~ement analySi~s, ,~sto di:vj,(ile die 'whole: soUd 8!lruc~ur-e_ 'mad,e, of ccn)t~!Jllwa 'inio e,/bd'te 'WlitlIm,bel' ,of ,8ubdii\fisions, ,of s:peerual shapes (c9!Jled the e.le'ments) iillite'reonnectedl fIli die: comers or ,s:~ci'fk: ~h]its on t'lm;e edges 61' the el~ :mem!m,(,calJoo 'the nodes). ,A'v,w~;~t ,geometry of' elements is usuaUy a'~a.'ila~l,e of froml '~e element 1l:br,m-y oNered 'by :m.ositcc0nmiliereial cedes, Once flIwe :sUuc.~re is sulbdlv,rud..ed inte a gyeait mml.y e1e:m,~n~s (a process cuUed df'9c,tr!:I.i~{1tio.n)!,e-nlin~1lI an,dy:si:s is :perfonmed, on da;es-e ,ele!tille~lj[J8; instead of 'wl!1.o~e; sttu.c~'tmie.SoIhltlonB, obbMDed. at the eLe:meDt :te:~r,e~. a~f16'~'lLlrned.to pt. mel' cor ' are
'"
~e:
:res1Po~~dl~nl sO~.Um:~OUfS f'Orthe 'whD,~e.structure, Qed"lb1e regnUs; 'f-roID:a fl~i!e e~tem~Wim: :afta],:y~ds (FEIA) are~aJtr~:n.able:'W~)t'h:l~r-elU,~· ,pl1rt ,dl~-cife'tim~in~ Ite :swcture, 'Iwo ;pri~lci.J-mlIU'rnes R~~d,o. be 'toU~wedh .of' t
I. Place OO!llBU' and sma'~ler'ie(ffiemen,t8:i~tile. p3!m of the ,slruc1ulie e!il,.~iIiii>O\ii;;,. u . ~~o'!f.. or ~~"',"li(;:iIj1iJ eeneensratiens ..rJJ_...... "'.i;i .... ,""f'~ -,;]o;i'!i;iIjliI"li1O~' ,,'",U~III'.,... IIli!i'S~:II, ,..";-;JI,IJUililiJl,
~I!O;IVlII!U)!;i'
'i!f,'
'~~hJl,a'nabrupt
~.I'!t;,Jt"'"'-""'""""
....
'!I[~,",,,,"~
!Dt¥ll!;t;~iC ""U,~iJI
U\
<l!iIi&QJ.llwl.I;;,''''''
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and intrinsic su'esse:s, in t~"e, s-lrruc1:awoo.A,s 'W~, wUl FeM~lfrom :~a~erch.~precI;S, , 'Vinu:aUy all '!miero:ft'ibri~dIDn, ~hnkIDues :res~dt,'~nswc'h ,ad,,,~er.s,efiiocts, e
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mere.l,y rembl~ ~)f f~(~~ a '~t Ile; power ~f'fEM: lite mans otheF too~s, for. c:rafismel1l and, p~(jIFeS!s"~onid~hi_Q, 'l~e in" :i~,
ate
wltb, a, t~Jnper.at~[e .rl~efrom 1[)QC 'to 5n~C. Plot 'llbe m_o,Ye«.ieulls of rth.efiiee, end ~f die acruatoc 'wiw :lWlpeCil ro '~e .ma,geof' tenlPeiat~· rise, Use ,OJ tem.p.em;wre i~cr~llt ,of :tOo,C,.
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indIl1Jced,W$l. 'beM'l, by ,3, t~peratNalre Y,arj;atio~in, ~be a thie~neudirecID.on,!, '11z) =: 2, X l06,~+ 30 'i~, e,gree-s cellsius,. The geometry ,~nd djntell:~~O~S'QJU' beam d Ibe are given in Figure 4.4{t The beam is :m~d)eof :8UiOQtl. "!Ii' 1 For the: same Cf(lndid,oos, and rQhe, ,r.eCJ.~redanswer d\eSlai!bed. ~n,EX3imp:~e 4..lS: w.M~hIrbe wmdi~h:Qf the '00anJ~,beLfalt;l b =, 1 00 i~. {Hin.t:, USCi the f-nrmlldaLoloDs for tbhl. 'p~;a~ ..) :Pind the :maximum the:Ol1& stress" s;train! ,aJr:I!d,dlisp)a.ce nte-iriJt5A :id a 'beuw, ,~1Jbje~red to he-atiIfi1Jl,g :~a tDP surface at Wnei t -- 0.1 p18~ 0.5 ,iJl.s~ :II, ,and 1.5 I~S., Tbe g'cometzy and loading and. oller c'Ond.it~olil$ identicail ~oilat ooKriJ'bed. ,are i~, l:amp~e 4.,1$, P101,tile :resrtJl.tsversus time during lh,e·:periOO of b,emng. E 14<; C;QWPUlte me 'f~ilut-e tou,gb:ne&s :~ot~, j1iooa ;irubsttate using a ~~:pohn .s bendi~g ;spec:imoo as, i1lmmsttar.ted, n.Ag.lre 4Mb. D~mensim1s, of the 'beam ~ $pe:c~m,enare ;shGwo :iml! IP:iBUif:ie P4.2 witih, S .;...;. 'C~ b ~ ,:5. :~ I ,f' ~ I 00 ~'m. 'The w"'dtb- of rh.e rerun _. B ~ -"40 _ ~_ m The ,.f_ force &~"1ILL[--,. 'lIt),- break 'rile, seecimeno reouired " __ - .. m ._ .",_. .• , -----' -- -- -\t."'" ~
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'l,S~ What :frac~u{-et,.ougllness clf 'the silieen specimea 'wa~lIiid,you I~t. jif th.~ 'width Ii' o:f'·t..I¥, ~reclm:tte( t:._ 100-:'." iII[m - ,- .-. " l!IJ!;___!llue~, - -",.:L . ·~:b.. u;seU. Ul n...~~]"em'lA' . '~,_, e ~.P_," __ n. ~s Y grea;ter Ulan ull1.!l! r.w Uu " ,.""t.ri .li3J[, WQuid .l!'Ol], have obse!iVed, ~rom comparison of 'the:results obtained tbe from ffbes;e two. ,cases'~'~'
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'De, :propcntiornrud, CO!lSJtawmt fl' :is,called tile ,lynartdC' '~is'"l}~,['~;GJ" '~,i8co,f,i't:)!!, of ifhe :Ruid., It is a v,elY :imporntlllD!£ property 01' a fluid,. We notice 'the linear' :fei~ano:lshi:1l et,woon b the, sbem stress Md, '~e she. mun, tIm ~X:hib[ted:~WM, Eq,lIait~oiil (,~",'),' FliU1Ws'bat: exhlbit, sueh :I,inem- :rel8JtiO:IlJSibii;pIre dasmued as ,~e.wj'OJd{J,nfl'~idg'i after' C:~as!SlifiCalti(),AS o:f:' :f],uiOJ UbJstr.tted ,tn, :F,ru!nIire S.3. ,am
(iMTlil~'[1'~H
'whit]] we, perceive a :~inem'variMiol) of' me \reloc~~y in. 'Il_e" mret!UQI., One :.a,. read'·'S .... -,- - - ----Vi' --.¥I in -ilv IP ,oJ 'mY':C 'rDaJ! dfJIdl:' - ---,-- -- -- --- ~fi:1C'>i"lu~t~fin, ~----,- - -- It,S.,~,), L eeual itJiD d/u~~'"'}la'~-- Wllicliru, 1I1'~})"if~ ---se~.m 'lite Il,,"'J:.... --- -- "v' ~~'- ----- ---c,
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v1elocity
of. '~e, flllWd, at ,3j, d~sh~iIill:J)e, DroOl, the ,s~;a)UO\llm'Y y :s.t~te ,31.the; butJ:om t fOUOIW:i!fIIj,l{J express.ion, ,fhar the ~IIm:,em: S~g;gl' 'f' is, ()bhiwted~
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It. is saf'e te assume a laminar 'flow ,~UUiaUorubecau~~;of' the low flow ,mite. We 'fur= ther O$l.J me th8t a 8t~~y ..St8~8'flow Is mal ri1tai [1ed, Th u~ ,from the' ,opntinuity eq,uaifor'l ~ ,EquatioC'] (5 .S)~ the, Irate of fluid now' 'throUQh -U;;eCGfb~OJ] n1 '8uriao9 1-1 i n
I
Figure, 5.6 should be the same as' Ulat 'lh ~ougn ,surface 2·-:2, Ffom Equation (,6.6), the,'vo~umetr~c 'mass 'fIO\tiI rate rs~
.0 = ,~V~
A1V1
in WhfC~, Q ;:;;:, x 1a-fi cnr1fmin ~ ".f.M x 'iO-14 mfJ'Isand 'the ,entll'an09 and the exM 1 ,cross~ect1orrm areas O'f ttl e' reci ucer 8I'1El':
A1 :;::;~100C x 10-8)214 ~ 0..7B5 x 10=6 m~ Ai!! ~ '11"(20 x 1 D-~:!/4, = ,314 X 10-12 m~ We' can thus compute the velocffies
V
V2 """" ~= ~
whic'b the fllmdd,:t1ow,s, This ,equation, Js d,erived en the bases ,of conservation, of .. mome,fllmm and, Newmn ',8 la'w of dyn~micequ:ilib.rium.
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be de,dv~d, :ftom th~ eq.uatID1li; ,of ,m~thnl ,in, :Bquaitions (~L8),~Ij1;~, (.5;,'9:) l~"USlI9,1 a ,
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'w~~mi 1i:s tb~ ~~e,ValJt1o\n th~'m'be :from a r.t1ji~r'~ffilce, of ,plane,. ''II1e pre8SIiN, drop' ,in, '®be:fl!'Ulrd, lover 'tlbe ~]jJbe: le:n.b L is;
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,,', "r,,rII';'~, "I -," :'- - ,"'; ,,:'iII " -, me pressure ,~,A'"" Ulf'OP ,a::HIj,_W u.!»0 &"l-C;,'" mcaon t.", 'd- 1"'" ~ , t.: - 1-aUUl1.ar,!I!.iII,OW'rS sre lnVelr:s:e.!I,:Y nea OBS J.Of , I: ,', proportional m. dw :fiJt].iI~:h. pl!!w'eI' ,O'f 'U:I~ coudru.dt~dl~3merer:.This :me.ans, that a :1,,6 times b~gbe:I' [p:um:pi!og:p:iJweiliwould] !be; required to pump the fsarme ,3im'o1MJ~m ,of v,o'~,u.mettic
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d.Ymliam:iJCs(CfU) codes ,~re bll~U;.,DerivattOI of 'Navier~t(lbs, equations. is, beYlond the scope of thls book. They ean 00 :f(uWlIld in :I:m)lny O~id meehanles boo:ks ~n~c'h I[Whi.te ,~,'994l. ere we WU~, p{eseot. only tile es H ,-"' __II''''/''''''~'~''-,P:I ."_" ,-" ,'-, :"",,.al-,,-,',[i,·:,-,,,,,,,.~'b-','I,--,:,,;,_,,,:,:t'i--:,', ',.' '," eq_ru~aEllo.ns,10.r. ':&rl'.",-,I-"'-;', h~,e UllOO,S, ,~:(U·'.'1-'-""-""""1",'-'''-'' ~ec,to.irS, ,~l~,v, atll,W iii' ,il!liOn~,1~l,e,re-s,pec.~,veX~,.Y, 00, ve oc.lt.y and,,~:coounm~~s, Hl a lI;l'.1OVlng :nwld, in :a tbme-dimewsi,mlru space:: '
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IDel,efliml~B the pressure requ~red to <Ntercome 'he' surfac@. te:~JSI:Qnof wa'~e'rin ,3, 'smalll ~u'be',~f' O.S mml ~,msr:de!diameter. Assume that the Wat'elr' is a~:20DlC"
l
.: SGIul'l.., We nr:st deterrrfl ne· 'Ui.B surf'Ba~ tension coeffbc18f1it of w:~rter a.t 2Q~C from E~ 1:.1 at~rli
(5.23) to be ')' = 0.07:9 N;m. The tube has a radius of a = 250 IJ.m = .250 :( 1lQ 0m. Fallowing 'th~ expresslcns in Equations (5.. ,4a, 'b)" we have the PFOOSUlrS' re2 3.., =, 3 x CJJ73 = a 250 X 1O-~
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'=
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FJnd the' height: of' 'water; hi! IrI1s~nglin 'trH9j :5mal ~tube' ii"n If;i gure 5. '18. The 'w1bs' has a dlams'mr of 1 mrn,
Salullon
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is very
'S mall!
The radi us lof 1ti e tu D6 is 0.51 mm Of SOC X '10-'& m. The ~unac8, cient of water at: 2.0 C is 'f = 0.073 Nfm an d 'the mass ~en'S.lrtyOl'~ water ls 1000 kg/fliP. whlon Is'ods to the spec~nc :gravl11f''10 be saiu k~h"
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in 'wbi~'hc,. ,ad c~, e 'Ole ms,pecllive s,peoific heatsof 'dle~ at [conSt'lUlm::peslDre and, H :g8 COJilstant ¥o:tume~,,R ils the su OOMtmt, $lid, T is the mlsolute leID_pe-t'atI:l!1le, ,(if the ps., " ,-,. ,.....,. ~ .:11 .... ,~!" o:::I!,~1' .....,.;i; ~urt For air at room, 'b~mpe_mturn,l[ (he [co.uesponchng s~, ....ot :SOO~iU,IS ....L....,-:~' 3' 'w.,:s., A, ,gas is coasidered as ~ooompre.,_.iib~e, 'if'tm Ma -c 0\.3~ W'e tbuS! oonsider a me-fi:ed, S~ ~ftO'W at, ex;~mt~ly ~()iW' pressure 'W :00 mcofi];.,; pressibie because, m' ~ts,mgll Kn!uds1en, illU!mbe~ (KJI~> III i) and :~aw' M~, BumJber (Ma -c O~3)[,.C[oUi-sjon, Qf' gg 'm~Je~o'~es!, w,ru~,l;s ,cbaracmd~dl, 'by tbe, m~i11n,free path ,4 i's ~xpeellro,'to 'be: dOllMlnant, in, th,e, 'behavior. 1(1[' [gacS:fllow"
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........ 'I ~ue:D'UW ..:it",.",1If -" ~ .' - 11 -..... 0411 0 ""'!!. 6 -,., ,i"iI!"" • ..t~", - ,.,.'IIA '" 'L, :fnrvo~vw m, 'Y~,... [Ues~gn ~\~, 'ml1t1'('llnUlwlt8, 'W1).;n,u, as!JL A ~~-.:wicail. "..,,:,: iUilliul ~~n, is, hJliW far coo, the,v' '"stretC:lii 'die ~.se of 'ite clMMeal~v~;ry'I:;111IDN:avitr~mms, [pao., ,~ C'~. ~'l.~ ~~, 'lions, ,Bqll3!OOl1, (S;.20)~In tb_e,:mi,Cro or nmo m,gifme. 'Ike speotnlm of gIS, :l'low :ia F.i.g(;o" ';:'In "..:1 .-, ", ~ D 'IJ!re~ .,J".,'~,;,: may' 'provJi,~,e ~ llsefill,,- eluIC i~I' 1le1 ,iWnswm'~ ,~,·,rom 4;:t..," S,~;tmDl.., we l!E~,ts en',v,iu_p Ullli '~he loonmml~1lBIm.iDoodes, ,and. di,rus the, N avier S:[i(lkes, e<Jjua!tiQns ~ be; '
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[mb_~ ~W1ttiu_n_:s s~cll, ,as B!Ltnl~hr ,and, ,m,OOifiOOj, :BottmurMO P~U8Jt~,OD5, wil be '~,fIuired [Patwmow, 1.91'7'[ Beskek and :Kamiadlalds, 1.999],.[The:-se,eq,~atinns ,are beyvnd, the :90Dpe ,of tis book. C1)(R8~Qeu,tl1lf~[ 'wi! not, 'be lllclud.ed in, this 'i.1b~~or;, The :re-adef' is :I-eferroo '00 'S~i'" dL~~ 'IIII!, II~':J ~!~ lr~ esal 'boob 00 (fa d~mnic.s (jiu:chas PaitreBon 1[19[1 1t '~ordew~ed J deminiJijoFIJ~ o[f .e~se .'IIi;' ~ -~~ .. ~ ~
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m",",I,I!Ii!~
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'ltbe n1ii"""'~tt'i,'~ ,;;~ it_ heat, 1!T!I..1i'i'~ ,iCif~IU~ ,~nl'HQ;'" n.n-]1,~r' RLl.:U ItllJIJI:JI,1!"!! pnl',41 0,",..1: '''';~~iii ~ J..:11I~JiJl~W, ~~~Y.· ,J.I·~!LIt!l! mMD1:1D.ka¥e hut ICM.mlcul ,capability iin, 'l1at ,ard«~ These.:materia1is, :have biglier : Jf.' vailuti 'dIJaD, m~,,' other' rnaterla]s~, ,md they are mue'h, better :bem oondoofi:n,g':nm,,f;.,;;,,-..ii~'~:",j;'Ii...~,-"----.,-_-,, ': -, :,,--,'J\;.-IIL!\"n~ I' --oIi,11 0·'~~Jiam lUi_, cermJl!ICS SIlC'H as iiJ'.iE.'V;2i1i OJ:1.'U'~ ... ;3:"
'~irni~"'~'
9.WI~ ~
~ng
~i""
r ",,.
II :mateJili, D~~:. 'ne: ,;altue, ,of It fur soIlids :~,n~o".' - --~ .. -- ---,!to~-~'''''.:r~- -- -~ -- --- ~--- !t:!1."~~ ;,}' ~'I(o-... , ~h'l-1'P" i!\ll(i" ,i1i,~.liL~Uv 'Ul~ ~'!Ii"oII~f!'''''-~'!I.'II~!IioII<I.'''''''''~'~'W"~'1f~ .lIi;J,U _ ""''If",",Il", '~~' m·ii"fI'_@~ P1fIIMiIffi;pa~lfrlili!!' m-J-:"'ii:&~:~;!I~, '~IlIi;!I~;fI:+iiry ,~IVJl, . '!J.;)iIl; ""''''I\!;J,"IIiIl","W,.lii'OiI\!;!I . _ iQip",.'j,~';J !III'"
:m
~i
'~m,pera;turm, ge1J ~
;r,'~.
1;;' 'C-Ifl
_"_,
1.,_Ul",l~·~t
1~~,r,r;!W"JlllJ
'~:li,f"!lJ (I",""ji,
w'un, ,I, 'WaIYto ,a;,ccoulilit ,fm tB,e: ·total heat :flow' .in, a p:hmar ~slaJb, mere reali'snie Irj,umtity to, account :[01" m, a hgl~ conductio ~_,ysu is, ,;zeQ1" A ,fl'ra' 'f~dWmed ,M, the; ~at flow' per unit I~~a a!nd, 'tifme., hus:_ ft-om Eqntinn (5,,33)t T 'we may express, 'the. heat :f}m iin, 'Ilhe s1Jab, ,as:~
EquadoD, (!t33)1 pr-ovfd-e8, us
'[Ill1'~ti;t, ,rm!.'i'~'
I£I..~~L '~~JIi~l~,
JI_.Il~~
~iitj,Q II,~ ~
'u",g,;f!j+n'ii' irn!ijH::ii~l!H;m
T~!"U.JI,
~,U.W~l~UIP.Ii7·i!!.R:O
:tii~,
;i'Ijj~~~~.rn.J+
.... A +.:!i''i'Ii'Ii,~lil':I:ittllii~
~_lJI.iP~l~I'~J~
'0::\,:,,1.., ~~
,""lJw il~JI}ermlce
Jilt
-- . -
'111:0.
i!' -
P' - .- ;';"I.~ "I' '1"'II.J.Li::i! n~L, Jj,1~X, n~, .1,:S'O~!LuSlUi.l.a~ ""I,] .... '""~""'"..,. ,a;I!i;'
,,,Me,
~niiliiif!;+-pr.i+,~1 BI,'y~'''_]j!Q''~U.
,~iPi 1hlll
'~i m'~ '~!h~JL~11 '[:1Ii ,~;~n ,~....,~'I;Qittl ... Ai r,I.a~'~' ~;.., I~ .:i~IMI'~
I ~,~~.
' 1-..... ~
''''''r..a, U_Ii!IiP.I
k,v
,r... "'"if, ..... l,...,,;J:j\ii\ .... ~.'ti',..:MI I!UiBuH'I'-l!l, r ,g,f!' 'lif'h'il1:ni"!i;~ ~J "ICUIi' '~"1u-~'"'H~~I~~#~, ~ ,,~ - - - ~I"A ~ '+i",,~ 111·... _..11 '. -- - - - . ..,:1,.~..11
,if11i~
ma
spa.ce'Il,te\ fi'B~, ..
'\J
,,,,\
~J 1 ·
ii"U"'i'..._.j~""'-""+'Ai,
lIU'U.iIl,U1llJJit!IJL'.!I;i,
;i.!jiV'n~-~""-~
~,r-J.~.i!f.CU,
B~"
Ig:.o.li
q-(F~ t) ,
.
", '. ~.' '~
~I_.'-
. k- V T{r~,~j ..
..
'
..
.•••
-".
'I
'.'[
'1
--_,',;f,
The :ne,gM~,ve ;sign :m. :Bqlla!tiOll, f~L3,5]bulc-ates 'bt the, heart fllux 'vecOOJ;!"q(r:!1 0 is,
:o;i:~O'~P'w~ ~IL .II:JI=. ·'iI;-a
l;n,ili1'l'";;;",GF_..:I
~~t'¥.r!lrl!ll"LI;
BY
1iiI'n:m;-
1ll!WlI
'11",'11
'IUJ.I! '1II-:t..:J; """~+'~Qi"!o~ ,"t1..~ !i:I'0"lf~'d-, Por>: w..~ ~WJlj,1A,~~ u). !LU.~ G~Jl~ .•
1
,~;
~I~.I!~~"'
,~,1Ji;)'-", .qjJiIfIi'd'- I
[~~ __
(,S.. 4)~ we ma, ItSSlgjl, the unit WI" heiBit 'flux t,o be W/m.'l or J/~8, 3
-O~' ,N/m..s,.
:BqrlmtiJo'O(5 ..:3S) is the :m.ath,~matrem, expresd.on, of the :Fo~~ l~,w' 'of he.ait oo~ .., du,otion, B'lpMdiJog: the, eq~tian, in cmeslan, 'coordiin_3Jtes, wUlI :iead 'lu tibe :foUlc~iw,WRg: ex,'tesswn for :bat flux. :tn. a solid: [5.36J
-
Flgure 5i1Z1I
I
Plurid
~
III il!Li" ...... \",-.,.. IJI ~~~~J.l . -, ..... iii ",""' resL~~~,
~oiih ~. _
Bomuillary sudfm~
nnm_lLtioo!: :1':r 1""-
'Thus 'because' of this msmstace 'the surface tlemnera'br.u'e of' me solid is 'not ,etrl~al'to L "',,-.----,,:__ Jl"'-"=-'C~"'!'~ the 'bulk fl'lJiijd. wmperamm" 1J. S'u~h lhermaI :ms:~stance'may- 00 numeric~al1,y evail!~ated tfJ be 'l.11L in, whicib, h is h.est b7usfeJ' coeim,Clellit ,of 'the Ooid. By equaug: 'iJe :hgat flux "cotor. q~entering 'dle :m.te:rface 'from, the '8oHd side and
,,, ·iii __ '__'---' '. ., ~-._
<-' -~-~
"1'
--
.~.
1-- ---'-
.:__,__I_
-:__~--
-'----
_,.c,
.-
c__~_-_"
'--'";1,---'
--
me
iW~ -n
fl-
'nr\~,
,;i;!L.li:li,
I1IJ~
IJ.1···· :.
:!I."T;f
!I;,::.--
'\,11:, ~
:::::::;,I,..I[\H'II'r _ ,(II)"
If'
,f~ "~~
~!, ,il
![!!"g
I { .....
I!!'...
"P.1I
,,t
f" ~
~
I[SAl]
.
-, .. . .' -. .' - 0 f' .mres~, aee, TIle-...e: vecltor ,0 !: 'Il"- e normat- vroto[ al m~'e ,po,mlt .,r .'.' --, . 0'.0 :lS_ ·'smP.cmc bo1l1nd!!ll~' betw,e~D.lhe &'Old and. 'IDe 'tluid. r(~'J..: -"i ,II, lh.
,...;. .' ..... it ,~n ,
Ielf" --
- , .. ~;. _
••• ~.
f-
"
';
.-..; .[.:
_,
'.
."
I .. ~:. 1-
:. ~
fl·
...
1..' J
..
~I·.'
lb- e . ,.
1 •••
:iJnrolvin,S 'tfuemliaJ~,effects., The SO~OUO:I1lJ, Equ-atioll, (5,.38] :reqiaiIies 'propel' mrmulatioJll,lof 'bo~ndary' OOlJfi!"'" IO:€' 'DOllS,.There a:Ri thme types ~f 'bo;u(ndlllY oon4itio~nl; tIliIat e am,'be 'lW~edl,la, tlteooal analj':S~S~
n~
F(-
',~1,lID,,~u;au'on,
--I "No.,
R ..... .-'. ,
flj.J,.,"'f..JI
'I.";:"JiI"l")'
...
-.' ra.."", .- " - ,"-, ,., - .~",,1 -, , ean- '1JIiI:i a COMraDI -. tli.1I,;...~pec~~ cases.
Ccpyrlqhtcd material
188
So,IIII_D ~. We, may oOfisider tlnal 'the ~"duced temperature. Ma'id ~n tlhe bsam predominan'~ly v.arrJ!~·s in tnB "th~ckrlUg~S'f ~B be.ami U is; thu areasen ac~e' to assume II temperature. O krnetUon T(x. In the beam, wUth x be if1g the coon:Unate in Uie th~ckn6OOdirac.t1 on as illus~r.'a;t~dl ~nFigure 5.28.
Still] 3ir
.s,
riI'
II = (lI
==-I!O
I:;i"
"][bp
x;;o
fn'Cc
The govl~rnlng diffeFenliBJ eQLJB'hon. from, the general form in EQuation (5.38), 'for the press Mt naS-!l3 is:
=~~
~~r{x~n
dX~
1 af(x, = -.." ~~
II
t)
lMf
The. the~maJ di'ffusivity 0; ~n EQuaUsn (fL46} 'for sHieon beam ean be obt.aJned by ·the ·thermplPhysl·oaJ propertije\S listed in 'Tabre 'lJ3 in Chapter 7'1 wi,th the 'thermal QQnch,J01Iv~lyk ~ '1.0'1 W/cm-QC ~he mass demcSity (J ~ 2.3 gJcrn-3~and. 'tthe speoWc he~t e= 0.7 J1/g=~[;1whnch gi~,~!!!!!! '0..9752 cm2/~. Th a lnit~aJoand ['1ton ~s
i
[a]j Fer the bOlUlnda'1l "Condition at the t,op .surfaee. cencllilicn; ~T(Xl t)
,j(' ~
ax
~...J (
_,
..........
'I'
wh ere I'll =. heat fllljiI generated DY the cop per film 8.nd k is the ~'he rmal co n due1iivlityOr· the silicon beam. The mag nitude ,0' the heat 'flUK ge ne rated by the capper film is, Q = 1;2 RIA, in wh~ch l is the eleotrio ourrent. :~a:$:sJng throL!lgh 'the' itllm (,a.mperes) and R is th e !eJs,Otric reSistance of '(n e film (O)! The ~cp surface Mea of the be'lm A is
llIi_
I ~ __ •• ~
.:
' ....
1....
~~~IIU~!W'~
I""~J" Il"ilIi"II
!!JII
'-rlr-lI"If'til ItrIU'~~~
ioh. ~
'eil
il<llil....._~a'tI.a!1' Ii..'~"-~~!:i&.l'~~
,.
_J ~
~~
8iU~
81
_I
liQ
1!Ii
II
~================~======~x
(5·48c1
,S ..
2WP1'
= r~~,)~." t
;;;: ~
- 2:~
t)
N"'I:II-~'
D Tt(x, 8:')
X
..
""'2'~
af'B SlS:V'eraJ wa.)ilS'W sC)~va·ttl a tampB,rmum. dimnl burion functions r~ t) lx, and T~( . t·) from Eq uation (5.. -8)1 w~th'In e co ndi~ians speGrfied in Equation (5.,49). x 4 The "anowin 9 solu'til'c)n is obtained by ys,i'rl.gJ the j ntegr.arl fransro rm method presented in OZiS1k '[19S8]:
fnare
i!iI 'lA:
I",)C"
".,Jr-uK JI a«
!I;.;II_A
..-.iI ... ]
'\IIIh; mljH
'1l"
'I, £
[5",601)
wl1are ~he fUnotions F1{X)1 and IFJxl a~;B the respective· :in[ti~dcondli~Qf:1s~n S~02
and $ilicon. Th fa' no rm N'rJls def ned
8LS~
'Th.eo averaee ~ ____ .. __ ..~ '~,P 'In the [aOOVel leX'If\:ve-'5S~ o:n__ . _ a heart C'--~ rier :bl oo:1!iids p_ ySL--UJo\i' . }" __ IL fur' .. . ~ ~ _ __ '-<hf'~--~'C~llU~ means the avua,le, d~stan,ce ~_at results ml the c'.M'['1~"s :~os;in,g,m.b, ,e.xc~~Si:~Irf.ie;Re:~)' .
'while 'tm,YeUn:g: in. a,bulk m_atariaL ,]BXtld: '~a.~w:e~[ roth )dFp and MFr arm ;SCHr~., O'f They Idepend strongly UB, rth~ :m.-olecmilar stmdct.tU~e~ f ihe :l'Ui!te:tim:s ,and, the ~_.aJ o CUJUoume-ntIl_. '~cin~w~ni~' - the ani'im[dmil!~e ,.;a]I1-eS) tllat eIlM'fie:-;B, - m~f~'-l'S'-· fu- g ,Ul ., t, __ ~_ . _ -b 3[:'i: --- -- . _ -ei .='Y l Ie . r,...-q~r. 'tati,v,e ilSSeSSitliltBm 0,0 :beam,ttutsportatioD. in ~otids, :hm Siubmicrnmettt asd nmiLosc~le. The MFP fm ellccilroilli_S, :is[,aboll1t 10-8 '01 at room lempemtu_Jr.'e. Tu ~IF" f:br '-,::L ---- ~ ~·~'~rls:;·,~msca~~n::-;' , Ibe~,--'--c''t:-, :frr;;-::- -:; ~(lF e:1;- -'---:-Ie~ !tbe:e Ji,\!'I!Jr.'JJ" i:- ,jolk-:~'--I dia .., ,P!tl!!nmlo_'[l, Cli:l.JI1!_tQ "~!L g, 10:'-",~ m~_lI!~ __I!ge:-f_ ~p __ _ _ 1t.tj~ m uD _~~ mond 'fibns is :me--lS'u.f~daJt. appmxjjm_at~ly' :~O-'l mi' As, 'meDHrJJ1~, mn~;r '~is,ic;:hI'.P~' i.1l ,S:t1!m~ 'wiIle:~ t'be :rdFP f.or ,I.iqjllirls, tel .., '~beMW' for I,ases is aIp,pMltwmlltely' lequ~~, 6 '~D is aOOUIt. ~.ice ,this ma,!Ij1~ltndle., 'The MW fbI' builb, e:m.ecU(Dl~~, 'phOlmo;ms, :i.~, tliQ]1j,gWf ,arnd ~ clepeJDd_~ilon, ~pe'mklJr'e., li: betontes sh'ort:er as [eJDp~re :incre~~.,
-);",F:- ------------~--,!I,-" _ _ __
]I,L[Y:
of _
AI ... , . ,:1 '~,.... ,", ,A, '11) pl[~oSe(;om;u~e... o.:im~emc mI~en~JJiS!.,IL-IIl~:magmlmue ,1U.r ,..1,:,.-,:al·
:iu. :H1ia£fO 'lm_\e·-'E_ tf"Ii'i!S,~er.'M;,""_. _ ~i"''''~ mi!Y'O COD~I!:S:~'O.··:,./~C<'i;UD"':·I~!I!t '~I~~"!'t"l_I1;'OO ,C'/S ,:-''''''J'"," ___ __ _ ___ ~ _=~~_ = __ _ 'OW~~I: Il't~ 'n~o'-,~y-, _ k~~--. I .. !I!~ '~'i!,""n~ett~~ beeom-:--;--: Jeal 'when tlte size of so id, s:bEiJIib to, ~~blnIDcm~kl' ,i3ln>d, '~aI1oBcaJl~~,. C()~ge,.. IQlm.l1t1.yj! heat 'h'8!M,1D~n s~bmiclnu;u.~-mr.- and n_aQ-s~zed;SiQ:~i"ds,"Ui~ ~~ '00 cousidered i ~n bomb itzt",h ,a~d ,t~";me'seales, The SWll'IiJlary :in, Ta'hfe ,5 .2, :wn,ay- be u~_ef~lill uR:d\e~tmdln;g, UU~, :prWBciV41he-M 'eM-;" riers in rsrlllbs!laflt~e~new ,atm;d Cbf;-[fl, :1'994J: r
~bviouFd,yvaries s~gllifi~al9It:1:JJneases 'with abrupt: cb.ange <crr goom,eby~ ,e.g,.t c4liCb, and interfaces of tbin :filmfL In macro:~f:i[e be;3il tr,an~lilliss,io:n~, exmlpIDe~ bl! the :flb of th~dm~s, :111 :f'OI' ,8 Figure ,S;.,313,~ space h~ d1ie :Iar;ge ellolllliOb, n'O alio'w h!1l!DdredlS ,and 't1il'()DstWds, :pmn!liilion,lcol1i8'~o(Bu;[ take: place, These lon~Uslo,DS, :~mply~jUmctemit1y ]~ns;d:m~,e;'f.ilF the: 'tJau~poF.... tOI 'WiiOiilJ., [The MFP' ,;}R~ MFf are 'not [critjca'~ j!~ ttIe 'ptocecu as these ,effi"ts, [~f''1l~US~aDSJ are a¥etag:ed o~t @ver'the, Size 'dle ~Dlid~ as well [as'tlle ~_iImee th~t is urvoJ:voo ~
J
ll
me
'l!f"""~~!,
_L
Q_
GlllnU,
!
,
H·-. w
..... ~-:" _~,
-= .. .. . ..
:. n. _ • __ ~.~
;;
--
Slubstance! of
dio!l!i1!irra!ilC~
He;a-.t
(roll'lidllJ'c~en
j~
~n !ITIi!!'lt.ais
Va'ISJ!iO@ 'or ,~ti~Bd
'di6;la:-elIr~c and
~~eclF!lJi!'liffi'
~ril '\/,aCI!Jjli!f"!iii. orr'
f\rop'aga~m nn~dr:a,
App~o);~~tJij, 'Ij~~frty, nV$
rna-ega
!n ~u~
[QJ Ir.rt~di!a,
'HJil;
~Ofl
,Ilmoscme
,~''''[G'liI:'Ii·,·,iiYP.
JL • 'ill." ,.-1 '" • ~,1.. (i~lM.ge--5,U'D! eat oo:nuu.cncn In 'uje~ l.. ,. u :suuJ~nCJlOnielter ancd demains. These ,a;~-e (l) f'lle change in fuelt1l11n1Jot1nd~ti 1V~ty ;3Jt1dJ2) 't,b,e (
,.
•C
~l~~iJ[~~
___ ~1!:!J
,~iiil!il .o!~.c;"
_
,*!Il.~ ~IU~
~J~-~IJ., ~~_
V~\ll~.:
14;f:i'i'i:"'lt~"":i'ii 'l.~ i'iinnro':- ,'!j,!" ~ift'i'I,~!~, ,!IlJ.l!~. ~~I!LJ~I4t~U ,:::_.·~~"lO!! ~,L"'~I~r,r'· ':'_ .... ~~~I'-~
,~riT'il
I(::at~'ifi'.-fi between ~¥
~~
~i'Abl!itiJlili"'rO:f!lJ!I!eili\.,., ... ,i!jI;lI"]Il"j~, ~1.!!t!:B'~t!!YJ~ .,~_~'Y I~t~'Y- ;Oi"'lIm,.-5;n~~n ~!!!H'_~ __ ~_ ~~HIlY lIl¥I"i('!'niifm' [!'lemn' b';::ol!ili~' _ ~!J~~'I!r.r''''~\!:'_''1
,''!' ,<
,~ F~::i:i~, 11 l,Jlr\ll.lUiiil
u
4gcTFil(~rr:~ U~I.tl~·-
IO~ The nlomentum. equ;auon is 'used to ~vallm!t:e.1)1 YDlmll~tric. flow mte~, ( (2) r~'latio~ship 'iaetwee]J.1he· :motiQ:Aand the dri.v.mg forees, 1(3) 'Ile md'u,ced
.s:
,ames
lll~
ef
monon. to aMeSS the :fluid ,iud1!a1oed. :tnn:§ 0]], mic:rosySttml e-ompol1Mifs,. 1%~ Hydr:dluUe IDMD,eter Is used lQ evruuO!te: 'lte proutgsecru.\(mlBJl. ,Miea ,of 'flrUlid, :t1Dw,mg:
·-1 U] ("1)· [~;'~l'ii~-'-;: 1('1), " ,'!;,;I!li~~J.:aI...,~"
"'-;i'!~!"ri'ilml'I:g,~ re""'I~~~I;~,~,
13,.. CFD SltauuilJ fillit (I) criucal ftluld d,yn3!rfJlcsr (2') oompU![mo:oo~ :[lutd, d~miics." (3) Icmn,p~m.iimd, 'fluid. d~mIlDiiCS'i
:1,4~ N'av,ier-a..S~.ok:e~eq[l1Itions r-ellme (t) :pliCssuml-vlelot·i'~y~ 'il'~~ensiity (2) ctmnge~,(.3) pre-ssurer=viscosilty :in a :moiVin;g: flurdL :1l5't, Surface, 'wnstOD :m ai, 'fluid, 'IS, a form [of' (1)1 3JPfUed, tension at the :sttmface of
'1he tl1J!iid,(2) an mds.ting tensi,on.,at ~he o'wd sumre~ (_3,)l:e'uinn tb.11
~,~'Iil~ii;!;e, ,.,i..@ ,,,,,~~_.fq""Q' ,;i"i'lf- ~.1,.\"", n~,-ri. UliIl& e rilI Ul~ iOUJ.il~ v lUI""". I~;I,U.
fll
I.~, Suriace ten81o~, Is flfL.g ptmclpaJ IC~Ul~e (1) c:apj;HMY~(2) :n'ew~mti;m~ 10['
(3)1
Ii
I.7 1'l'w IClOOm.c1ent ,of Scud~ tension of' a, Ouid is a • .easm:e ,of the m~p;ihlde (I,t"
,... a L
UI,~
Jj." JI:UJ.lnl_w.~,~·
tl. liZI!!I;.Ll~.lI.5l~IIt!i!
I~
"2,
_I)'"
....
i3ylJ,.l~
iDltillr::,·.i"I'QI;
+-=-nil?'j;Ofi ~1!_:liajJtU''':J_"
r.J!,
i"'~r·~·,iiuc..J.'
vL
g. lilJj~_W
'QI -iC'!IIn~d,,-
I e~~~QII"'\~
~U1,t~lIh-\ti
c~Dc1mjJt.,It is inve~].y :p~portio~M!'t) th~ >(1), :ottd, (2) tint (3)1 fQ~, ~ poww [of ' mMneter of the co:nd~il'" 20,. The, Idriviro,g; Intee in 11m: :p.ie.zooleetri!C puM"in.@;: ,af t]wds, ~n ml!m:mllllt'2: ,condU!~b :is, of'the, (I) l_~~ (2) sludac~,(3) volumetric -1·1- A- 'r-~ .... '~iL,,:,:, :D!a~[ ;j,,.. '1"~;;I!"""'~'m,;i];'llv '~..,.,~~~,... ~4',\tf~;t''COJ--:-, .. ,.;alii'''''~iI; [Iii ",ij_m~JI~,~ ·A !WiW l:i~ ,1 dtl· r ~~;f J!lji~,illi\\iU~~
I11~ ['film, cap,ruUiBJ':he:l:gb!t of' ,I, :Buid.1in, ,3, small 'tube: ,is [(1) 16q,lWaI, 'Wj[ (2) di!r.ootly' pn>pamolilt:11 to, (3) iuve.r:serny pn}portioDa'M, ~ the, dliJameMr of the tube. 19,t ~llft, dFop[ ,IE,MO JiOmm :~ft, . 'fluid, driw~,h-t low of tim: :Ruid,in.a ciroolat a t
me
."Wi
~' ..
IIf.
[p'Q~
~-&iJi
T1iih~!l;n,1li'
~1;t_~1Q!
£ill!
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G~l
~,~"..I;~
,~,U'!!!1!'
fiTP~~lrli~.
,-.-.-a.u.IJ.'~!I!
pmss~~,
--__ = ~'-. -.
(3.) 'vacuum,.
~f',~;~,:, oyer- .~'I;;..--;iI;;.~:~,\~_.,:1 -;-'!-:-!ti::r~i:;' v., me G;3", :a.u.e puYSl:Cm, ;Slm of &e [oonitln~B1~, (;2) me mean, free, :rU4Itb, over the pb,ysicaJ'l, sU!e of tile ctmfiif:iemeJl~ (3) tllre ',eloci~Y',of 'me gas over the, !i.peed. o:f so~ndi' Clollv-~n~h)~a!I,1~id d,yn.ami'C$, 'dtwriie-s, He valid. for (:0 '~~ry ,smal~ (2) lar.gleJ t (3),1 v'my :~Mg,e, nudse-n 'llllunJbelS" K ifi.. .Ibn...,,~,~.~. ;~ __:~~j, ,.-, Al...c,- '- " me ,..I " "t· .,oif,',,,'b.' , " ' '''' :IJ~ 1,;, [' ,", " '1 ,~,, _, ,.....;13 "A'''''!!th :nttm'~...- IS: ~mne~-d' as ii'l"), +,1...,;;, 'uen.SLY 10'1. Illue gas iOry·er: .-'11.."",:El[~y;slca. '"' _
The KDwke"n :nrnm'be-If ~ !l;;L.II,il'llLeJ ;;;,~\Ji.,j!! i[il!''''':e~n':.d; ~11\ ________________ . =
gQ
:2:2~ A, ,1000 esdmat~ o:f"tlhe MFP for ,p~s,:~r( m,) 165; Dmi, ,(2)[15 :~ (3) 1]01 'mn. ,2-3"~ A,iOioo(W,[esiiilW.l!te o:f"i.ie~ MFPforr-:-uid'~, ~ ,~s'il'~165:,nm~" 1(2;,), 1.5 .Dm,,)(.]'1130 , om. t:-: II;, ,,/1 -.--:11 ',' "'-,',-~ . " .-..--.' ,uq
--------." ---~.=" -'"
~_c _
size o:f.' , 'lbe~ '~~H~,-"II'iI'-' e:iliIIjii,giilif ,.uu~. m ~ainl ~~~, 'n~'i'k.~k;i;!;, ~_Il UID.C ,~w..JJI1 ~I;--'= 'n'1:-.iV-i!',~LffO,,:" 1 [,:";,"""",, , lllllW ~lilJlllra~,..iU ralll.£~ ·ryfU' 'tlbeconfi~t~ (3) fhe ,doo~ of the ,gQ'S. 'o,¥er me speed o'£' :sal!J)ndL 37'., Ii,gas ~Sl ,c,oos1~red, 'to be compressible: if the· :Ma.c~b, 'IUlnllOOr' is, (I) l~.s~, 'than" (2,) equal 'tn~ (,3) ,wel.WT dlm, 0.,,]", 2&. The :IH:D\P~'Ute KDmldften. num-.I5..~r", '~fi'I'oe ...~'ifrii~m·-.,j;O_.n., uw [~-'i L~:"_, :;.', • cn [mJl.~~,,", ':,,"4il"'il"'" :gasI~Dmes ~,..... . _ ~,w w, (1) Imaner;~(2) IMlFt (3-) remains '~e S~,.
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~I
[iili9>i =~ 1',e
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214
,pmpel1ies, :mTn ,e 1.. In 'Cbapw , if neeessary. Heat,florw in, 'dIe normal 3 dD!eCtiiCUI, to tJlm ,~y plue :isn-egngiilble.,
12~ 'Prove that the, ooJ!ll,vedive llcat 'ttmsfer oowdMJ" rCO!iltfttion ,in Equati~n (5,.. 5) 4 Meludes both, rthe~ lKJUD.dary rcoomnons of' pre.soribed rempemtm-e rum :he·atflux .. P{'J{l" ~le,r liet ,n ~ ,0 ~ a '~M1l,y' :u.ulaledl ~d lei, h ,--+ a') :for
~t ",loA
lUlI~ lAJ,·W-L~',7
~tn'i':dl,
~l!rdJl~-~~'
..... ~)i;;.:i~n
~u.JlW~J~~b
Fllgu,
.~
m1n"Orrmater[alll the mass moment of' inertia of Ile m[li~or 1'& thus:
pbrfB .~ ~ :3~.
'w
~tIs '~~eaf'f(om he above, snrnple ca~cu~atiDn that a ,red ~ction -of a 'factor of 32 1's achieved in the mass moment of ~ nertia; and rhus 'the requ.fred 'IorQ~6' or rot'ating f the m'rrOf with a 50 percent reduc~on of' U1a dimensioo.
Copyrlqhted material
218,
(~~
~-""~,,
Use 'the scaJing II,IWS, 'to est~m~t8 'varidcm~c~U1J€) va;1WI etrru'[Q '~Iow' and p res5!Ufe lltu~' m dloop il:n a c1rculaf' t~be[ jj'f tnel [radius oJ th.e ~lioeis, reduoed DY a '~ootor of 10. Make' an obse'Na~ioo, an ~hijssoolmngl ~wacticB"
J
'FWiomEql:fstion (6.2,4)'1 we !lave [the, vch.n~etrlc [flOW (J ~ a4'1 fn whlth sis the ratUus of tne rube. From tr,~~ scalJnQ taw, we have 'tae volumetric flow redt.JOO{j 'fly 104 = U0.000 tl'mes. Li~ew~s:€'. scali n9 law In E~ u anon (fl.25) Ina [catss a pressure the drop per un f! length tnoreaS-B by 1()2 = 100 tr~s. This i's ,rtbvi.ou si:y a 11i Q h ry LJ n dU[IiM Ie s'itu atlen far fW sealed -C:lown de,vice. Alternative' meGhani~ms wOLiId tlnus be des~raJ]~e m~r,rQ if1uid rlow_ 'for
'bDJ
,£1..,-,(.-
.l:-,-:~,,"- ':-'.--~". :smiillWJ.~n " IlJ:I,e @JlOiuUh, ,~S' v:e.ry -, .-,-"1~1 'e' c
.-
r.egam:-d ®o~ailjti.g o[f filJJtdd flow' in Qlpi.Wl~' WOO~t'for' eases w:bem 'ilhe tadiUlS o;f'
'~'!:.'-, maJc~~e,!, 11,-: Ulle -c-,~,·. -·""....,!.1
r.;. ,--- .... --:-~, Q, J]i!I!!;;I',IJie_
c:.,..~,-;'llfU!e 'sc.aiWlO" e....1'''ll'iillcro flmd . ...... u~PL___ '__~__ ,~ ",y~ ,_._ ___ _ _ -__
'flow would inC1!lrude, capila_ry' el[eclt~'which, occurs '~Oliqllid :Oow' illmiDurte con.", 'the, d~ruts as i~b,~~crlibed S~ti~;m, 50.,6. This ·eff~t :~s,3!lltirtiwced to !lie,donnnamme. of'surface ;in te.f:is:io~,of 'the :Oiuids :ifg, smaJll. :SCa;~e:.
Th~ 'ii'\iijItlI,.'
~ 'i!I!O:~i!ii'Lii; ,rll!,~ai:IHI:.:IlJI,,,",,
~..,., [.... 'IIJ'[li1iiijof!i"ii'Ini'Ii,;i'Ii; IUt",", il!I·II..I!I:,ru.iIlII .. ;1..~ il'J~'Ii""'~~;e;" !Ii.'!<,.l!' U T !k>i1 .....'IU!'J..I!IL!k;i .....~
a: ,a=:1to in wh~ch a
t-;;i!iinl Il'! ',o:.,~ ,J.a .cif!li"nj'Jili; ~oi"'J ..... ~ -'i!;'U~J .m ~~ ~lIt ...",,~;aaJ.
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The pressuoo' drep per uftiit. length ~f 'the tube from the seal i ng Jaw in 8q uation (EtaS) ~rtc;mases lOOO [U es with a 10 (Ima s r~ductio~ cd' ~hB~ube radii us. 1n8 ~it~ IT! uatio:n is, thus; one order of magnitude mom SBvem ~ar1 the case lin mesg~ or
l
maJorosc-ahG! fn Examllle
6.4.
:MIIJltiple, Ctulioo
phyMes" (3) too, ~ma[ket,dmlimds., ,1, St.Wmg ill geoD!le'bl' ,is ai-ti:cd, in mirdliaJtnr:izing (~.) :mow,in,g ooa,pone;nm" (2) senmns oom,pmenu; {3) ,ov~, di!m.ens,iom of'MEM! p-rodooL~. ,Ai,', "11"1..~ 1J.if-;~, ---~ -'~,s___ ~ .I,lU;:;; __ Jm.m.er _ :r(.-,-~,-"__ .roe s.c~"11iin~' g, ''Ye.Qt(lf ~s ~ ___ :tn, assess, :mit:tJilrf~nrimdon re:lmm(~ ______ _ __ __ ___ ___ __ __ _ _ _ __ _ __ _ ,! _ __ __ '~ t'I'), h",:,":~" '81 iiirli: ~i'ii~"d'-;!:i'I'(?"\I Rn,jid-' "Ilttu .-. ;(-~,), .fi,~Al~"t'~I\i" d'Vii~ -I ~w ,;i1;ol'iJ\V '. '!he t-v \_. ll~'-~ _v ~~u.:,~'J 11~_' . ~J!'
;g!,IL __
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:l~The ap,plicailfjJD of' the ~: laws, ,in rmniaturiunnn, is to itSimS 'lbe c~nces roD(J.) the: phymicld ,~ffoot~ (2) 'IDe OO~BOmiC.oo~, thee :mM'm, (3) eftioot, on nmdurimd, ]lRldwoU'o 1, Scaling la!Ws, ate eDved], :mom (:1) dHilD engineet'S,'~' ex:peJience!, (2) the :~aw8 gf
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"'''''~Q ,r'l!n:''Ai"'f'''d i1!;'JI~~n-li'Qi'!IHlI,g;~;1I"Ii ... ~ ,1.u.-'jlU_J,:~ !II_II-\Jilll f'0Ke8 in,:microacmlUon ~s'IJbat ielecoosmti;,c forees seale (1) 'belttt (2) WOfie (J.) about de: ;smDe as. w:ectromagu;etlc forces, ~ ,~l-;.ro;!!iif!, ~_41~'II... I(J= .... ~,~ ... .... )'1 ~l,,,:",1,)1'J~ ~,~ ,4,omer-s ~f' m:aJiifi1~lifltrj_.A",:< W'Or:~,Q; 'Iha, l~ .. ~', ~1'): ... -_~ ,=~~~t1JI.IJ~ 7-'£. ~
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5~ :POIlomer 1 scaHng ;slll'Cn as :sWiface-,to-',vo~.n.e scaulm,g!o the, ,&ooeletartion, Ym~s, (1) lUmur.~J~ b'the square pow~rlJ'(3) to, die, '~Ib~c' (2') :po:wiel~
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:& 'Th~ power'lMs dUe te ~iectr.i,c,msist~,yjt,.is (I} macb more sevm'e~(2:) less s,ev,e-re; (.3) ,about '~ same :~n, malil.-'!i21ed, is:y-ste.mso., s 9~ Pressure dlf-op iill ,i'fluid :8ow,i.,.@,'thro:UI'~ ,a,,smaUer 'Ck~i;IWat'conduril IS, (:1) mllch l'' ' I!_)" IP.!UU~ [P\(ijiltl!"'il, '~~ (:') ~l1tpo'lj<;, :Ip~'f! ~b,~,~, .I!o,"'rr: In ~, ~;~~' ~I'b."!'rut-; "''':aI-~ ~'""~l!i;':t_ it\I'~'!ir'~I"""~'I' \'''", ",v" \;;;1.1 ~!~'!IL"",Jll!! 1"-'_",-, tY:k~L ~ ",,-v.u,y_IJI;o,o
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I.«t 'The, vo]umemc flow' of fl'DlIid in a smaller cu:oular eondult :is I(~.):nmc:~, ,~ater;! (2) aJOOllJ!,~ua1l, 'to..., (3-) much, is.all.er. 'ibm that, :m a :btrg~r- colllllk., il~ 'The ,cHhc11lof :s.lace teMlon, on :t1JUtdf1!owin,gin a, capJUmy t~flbe:make-s, the
'pm88ure· 'Mo,p' (I) mnch ~er~
(2) ,a'oou;l: eqnai, to~ (3) mudl less, dum the ;S-iliI1U"
12t The
1111 d*.
'Huid o.o,vrim;g irA, a capiUary 'm-m~: ak'M t_h~ m v,O\'nT'i"!i~trilC :60.w '(:~)I much :~ili1!~:F matt ~'1'~ ,'(~:)I 1-- '1.. 1~,~:,~;, _ .l!1!.LM~ ___ _ __"- __ ,!i., ~_ \=1 ;iI!1.r-"1'!ij~I,~.~-t'I'~' t.... __ eq Ww.;'U, ,"",SiS ,~L...""", ~, the :same; 'flow' in meso-sUe mbes, I::f~;j~''illv.~~ t 1;c~.l!.cirl.'t.]!u.v.~1i ~,)C." ,fo!'I,..,_u,:.,;Mo'_ f"l~)'A1~JIl. IUltw '~~~o: in u """"i".~;liil&'l" rJ.!UdlllU ~ :i-'llntiiior:c, \),! iL. n,"'riif, ..' ~mllIJi.t.& 1:'.\ifiii11:~ ~1.u.~ ,B~~ \~. ,v.n~-.l:JI \~.
effeot. o:f.';smace
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a J.W:5,'e'r 'J1~ .ill sana; 1,4~ The mode .af 'hem: tmiilswsswn iim,gaEj :i.n,,ex~rem.elyfllaRiO'W:IJlISS-iil!CS :is (r) oondUCrU,cui, (2) tonv,ectiLoll ,(3) ,mdbdifiu. IS. Heat 'tm~s,lni:ssi,oo in gases :is,dfMticailily' ,~:~t in a ll~ :p~s(\ge,,of s~
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S-ILII'C'--'O-"'N-'~: 'A' 'S-·UIBS-'T'R· ··eM··ER-··IA· AS-' ,,: _ ", __I, ,.',', >_--::, ,~:,_, '_ ,.' 'i',M, II i '':-.M I ~ 7.4.tiThe ldeall Subsl~at., MIEMS fori 74
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c_ --,,:Ii,e:. __ CQmpo;un~!:) W"illfl"'ll O'··t~:-:,,_'IIC-:!m eJiJ,__ ~',·'--~"I-,-,"--- ,-,-'Ii'~l~·I:-_-c,--- ',~S'tI''''-~:WfJIIS '_w·:-1:] :';'used "su Ib;.,~U~ __fir eiie __ - -m:.s " ~l~gg_e-=try,~~~ _UlICiOJI. \:- uC nest J!UebY U;~. :- . strrur material for MIlJrwIS: aJlId, mb.~ro&'iI)'}s;tems.The POt" ---= Y (L Sn~C;(!f:-,'fail' ,,,I!t,~b,,'-j= ______ __~ Ie ~_ _ _ ~ "" _ __ _ ~_ -~:;-:fnulmi'r_- :of -~ _iJl =_ !LC __ a~ pliic~&j'OEl:is :J.nrhnarrilly :f.ilr 'm~ folofWi~e :mm;oms::
J~ I~ is 'fned1n~mmcaU.y s~abl,e,md]:i~can. be, integrated. into e~eCb"-nnics, ,O~,~e~same ~l!illbSM:.alfL 'mectt(Ul\C~ fOF s1' naI ~m_S.dUc)tlof1ti SA!Jtcb as ,aJ, ,t:' 'OJ' ,-:;",m:~!.... 'm", . 1m -,J,r' _m -,g -, . ._~_J~_ ,p~e:m:r~:ismI~carn he r.e:~dily :i:nt~gltalw 'w~~htie ~Usu'bstttam,. 1, S'lilico:ml Is almost all, ideal ,strllctl1m1. :rnat-:elLiaJt k has aoout t"bt1;. same 'Yollng~s moomd.lU~ as ~~e~, (aoollit 2, x: 'i ij.'i :MPa}j, tHJlt is as Ug'bit as aluunnom!, ~',ith :u-mSS, a den..!iii,ty o:FIiJoout :2.3 ;81(;m,~',.Matedal8 'wit~ ,al, hig'h 'Yonog~s mod~lu~ ean bette
- -=. - ~-=
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de!o~ad,QtlJ8,.
l~ It. bas a :nle]iti~g, 'po~nt at '~,4DJPC~ bLcb :b;,ab01J1t~ ~w!ce;as, high as 'Ullt of w
alU;g~~fll~m,. :h~g~, o~l:tiit1l:point :mat,es ,siUton d~men:$h)IMly ~S'tableeven at, Tbi,s r
elevated t.em:pela!ntre~,
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and
is more ~ha'll;10 i['ilines. ~lnBlruler ti:ttU~,'~J;lMof ,WJN~mj_n'U'm";, ,S~ Abo~;e ,a'~~,~ sUicQIQ. shows v~f1lU;aUy no, nlecnulcat :~~;S'te]'eiSis", Is thus, an, t~al It candidate ~nal~e;rL'll soo:sors; ana !8ctnaitQ,~"M:Oreo,~«~ ,S 'Ucom~'waf~ ,are for e;x.t-fiem,eJy'nat and accept iOOlti:I1JY!l' and acldJiJDOmJtd th'i~-'fUlm, btyers, for buUdbll
'i'1i:'iIl~li'·~''''''''''I,"Ii''if.I·I:I!'"~.!I;~,~II.?'U~~[I!;i{~I 'D1~n~';;';iil'I"!II 1,lIllIHI:""'I..IIJr~jlW 1~~~'YlI:,[~~_:Il ;'1
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6\1; There; Is a ,gfe3te:r' ne~ldh~Uty in, design and manufacmre wiiil sU"coo than, ~!itb otlileJ" Sru.dls,tr,lte mateJl'ia]s" Ttealtm~nrm,and, fabricI:9Jti[J(1]processes lb:r silicon substrates are 'wen ut11lb~:i;&hoo and, doc~w~nooted,
FII'IU.
7'!!8 II smear!. e~n{sta~ :Structure and pllafl'i!ei~, and m~enta~i\on:9,. (Y) ,<:010>,
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en t11e paper. We thus find the radius of 'the spherical inj.t droplet, r 1C) ~ rn, \Nitti D .~ 84"t).'1 j.dT1 and t ~ 1 ,~. Ne)(t, we aSilll~me that the voi~me of en Ink d ro plet Isaving '~he,inkwel'l j.S e quhraJent to ~he volume oreated by vertr caJ 16XP ansien oJ the PZT PGezoeJ8'c1r fa cover 'at In B bee k of: the ,In k\lvell. Let the v'Swtic'at expBllsijO n o·r the piewa I ecntc COO8r ~e Wand the' corres ~(]nding volume of 'the dis,placeti ink eEl I( ~l4) tJi'~· ~ in which ,.d/; lis '~h dia.me~er of 'tn e' P~BLoslectrjccover at 2OClO#tm. 8 By eQuBt~ng ~he·~bove di~p~aced iruk volume ~nd the volume of the ~n1<ot, d
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