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Dyno Mo Meter
Dyno Mo Meter
Kirchheim
Kistler Instrumente AG Winterthur Winterthur, Switzerland Tel + 41 - 52 - 224 11 11, Fax 224 14 14 sales@kistler.ch Kistler Instrumente GmbH Ostfildern, Germany Tel (07 11) 34 07-0, Fax (07 11) 34 07-159 info@kistler-deutschland.de Kistler SA Les Ulis Cdex, France Tel 01 69 18 81 81, Fax 01 69 18 81 89 info@kistler.fr Kistler Instruments Ltd. Mill Lane, Alton, Hampshire, UK Tel (0 14 20) 54 44 77, Fax (0 14 20) 54 44 74 sales@kistler.co.uk Kistler Italia s.r.l. Milano, Italy Tel (02) 481 27 51, Fax (02) 481 28 21 kistler@tin.it
Kistler Instrument Corp. Amherst, NY, USA Tel (716) 691 51 00, Fax (716) 691 52 26 kicsales@kistler.com Kistler Japan Co., Ltd. Tokyo, Japan Tel (03) 35 78 02 71, Fax (03) 35 78 02 78 sales@kistler.co.jp Kistler Instruments (Pte) Ltd. Singapore Tel 469 67 73, Fax 469 56 84 kistler.sales@kistler.com.sg Kistler China Ltd. North Point, Hong Kong Tel 2591 5930, Fax 2591 1885 kcnlibin@vol.net Kistler Korea Co., Ltd. Seoul, ROK Tel (02) 555 60 13, Fax (02) 555 60 15 kistler@kornet.net
20.185e 9.97
Abstract
Hi-tech products such as laser optics and hard disk components are being increasingly produced with high-precision machine tools. Dimensions and tolerances of components and also the resulting cutting forces are becoming smaller. Measuring the cutting forces to control machining forces and to achieve high quality is extremely important. Two new, miniaturized dynamometers for measuring minute cutting forces are described.
1 Introduction
High-precision machining is constantly increasing in importance. These new techniques can be applied in place of conventional machining methods for manufacturing complex components such as aspherical lenses at low cost or even making entirely new types products, e. g. machined from brittle materials. As the term high-precision machining indicates, the requirements for dimensional accuracy (0,2 m) and surface quality (Rt <0,05 m) in precision grinding, honing, lapping and polishing are very high [1]. These values are achieved only by meeting specific machine, machine environment, material, tool and process control requirements. At the same time, reliable and sensitive measuring instruments are needed for accurately analyzing, optimizing and monitoring these machining processes. Two new small, temperature-insensitive dynamometers, using highly sensitive piezoelectric 3-component force sensors, for measuring minute forces are described. They are particularly suitable for retrofitting to a large variety of machines.
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( 1)
M 6 x12/18
6,4
31 66
32
107
92
40
9,6 9
30
45
45
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Rm
in.
30
8 1
M 3 x4,5/6
25
24 5 1 5
75 12 70,5 43,5 80 12 12 12
12
12
19
8 39
57 75
As a result of the use of piezoelectric sensor materials, the two dynamometers can be characterized by the following main features: Low thermal error, Could be reduced substantially when comparing with previous dynamometers. High rigidity: Gives even under overload virtually negligible deformation. High natural frequencies: Compared with the excitation frequencies fA = 1500 Hz (n = 30000 r/min) in e. g. high-speed milling with a triple-edged tool, the natural frequencies of the dynamometer are still more than three times higher. Low threshold: Allows measuring at very small force levels with high reproducibility [1]. Low-profile design: Makes these dynamometers ideal for fitting them in the very confined spaces of an ultra-precision machine tool or surface grinding machine.
The top plates of the dynamometers have tapped holes for attaching the work. The dynamometer can be fixed on the machine table with magnetic plates, bolts or clamps. Good initial results from the use of the new dynamometers in conventional precision machining, wafer cutting and in ultra-precision machining have been obtained.
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mi
n. R
15
Technical data:
CompacDyn 9254 Measuring range Overload Response threshold Sensitivity Rigidity Natural frequency Dimensions Mounting area for the work Fx,y Fz Fz Fx,z Fy Cx,z Cy fox,y foy 500 ... 500 N 1000 ... 1000 N 1200 / 1200 N <5 mN 8,1 pC/N 4,3 pC/N 500 N/m 1 kN/m 3 kHz 4 kHz 260 x 107 x 32 mm 105 x 150 mm MiniDyn 9256 50 ... 50 N 50 ... 50 N 250 / 250 N <2 mN 11 pC/N 11 pC/N
5 Examples of application
The two dynamometers can be installed in a variety of machine tools at low cost because of their low profile. Both dynamometers are particularly suited for grinding and ultra-precision machines, where the distance between tool and work mounting surface must be kept to a minimum for achieving a high rigidity. Applications are in the fields of precision milling, turning and grinding wafer cutting High-precision hard turning High-speed machining Ultra-precision machining
The measuring chain dynamometer charge amplifier can be combined with the Dynoware data acquisition software for investigations in the laboratory. This software runs under Windows 3.x or Windows 95 and accommodates up to 8 data channels. Measuring chain configurations and data are filed in a data base. Drivers are incorporated for remote controlling all Kistler electronics via RS-232C or IEEE-interfaces. Various graphical display modes allow for easy analysis and interpretation of the measured data. The measurements shown were made with the CompacDyn and MiniDyn dynamometers [2]. Following preliminary testing at Kistler, further field tests are currently being done especially with the MiniDyn dynamometer.
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Breakage of workpiece
Figure 3: Grinding of a silicon sensing rod: vc = 39 m/s, vf = 60 mm/min, ap = 0,3 mm, Materials: silicon Fn (z): normal force, Ft (x): tangent force, Fa (y): axial force
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Figure 4: Wafer cutting: vc = 38 m/s, vf = 60 mm/min, ap = 2 m, Materials: silicon and glass, Fn (z): normal force, Ft (y): tangent force, Fa (z): axial force
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Tool
Workpiece
Figure 5: Ultra-precision machining: vc = 145 m/min, f = 20 ... 2 m, ap = 20 m, Material: Cleartran (ref. IPT Aachen)
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6 Conclusions
The measuring results obtained in precision machining or ultra-precision cutting demonstrate the low threshold, small temperature dependence and high rigidity of the new 3-component dynamometers CompacDyn and MiniDyn. These features are obtained by using highly sensitive piezoelectric sensors mounted in a special and novel way in the miniature dynamometers. These measuring instruments offer a highly accurate method for analyzing and optimizing precision and ultra-precision machining used as a manufacturing technique. Their small dimensions, low profile and flexible clamping facilities ensure their successful application in other areas, such as in assembling and in quality control.
Bibliography
1 Klocke, F.; Koch, K.-F.; Zamel, S.; Technologie der Hoch- und Ultraprzisionsbearbeitung, ZWF, 90 (1995)5, S. 217-221 Kirchheim A.; Sidler A.; Stirnimann J.; Zerspankraftmessung bei der Feinstbearbeitung, ZWF, 91(1996)6, S. 284-286 Heuberger A. (Hrsg.); Mikromechanik: Mikrofertigung mit Methoden der Halbleiterfertigung, Berlin, Springer-Verlag, 1991 Westkmper E.; Hoffmeister H.W.; Gbler J.; Spanende Mikrofertigung, F & M, 104 (1996) 7-8, S. 525-530 Taniguchi N.; Current Status in, and Future Trends of, Ultraprecision Machining and Ultrafine Materials Processing, Manufacturing Technology - CIRP Annals Vol. 3272 (1983) 2, S. 1-10
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