Current Status and Future Applications for DMD-Based Projection Displays

Larry J. Hornbeck
Texas Instruments, Digital Imaging P.O. Box 655012, MS992 Dallas, Texas 75265 USA Email: l-hornbeck@ti.com
ABSTRACT
The Digital Micromirror Device (DMD) is a reflective array of fast, digital light switches that are monolithically integrated onto a silicon address chip. Digital Light Processing (DLP) projection display systems based on the DMD provide high-quality, seamless, all-digital images that have exceptional stability and freedom from image lag. This paper gives an update of current applications and manufacturing techniques and addresses potential projection display and other applications of the future.
Mirror -10 deg Mirror +10 deg

Hinge Metal 3 Yoke CMP oxide Spring tip

INTRODUCTION
The digital electronics revolution has brought us such advanced services and products as CD audio for the home and digital sound for theaters; the Internet, digital satellite TV, digital cell phones, and the digital video disc (DVD). Soon digital terrestrial broadcasting of high-definition television will begin. Until recently however, light-valve technologies for projection display applications have been unable to take full advantage of the economies and stability offered by the digital revolution. Increasing digital content has been incorporated into the transmission and signal processing chain from source material to the projection display light valve. Ultimately, however, the light valve itself is analog in nature and subject to analog limitations. The possibility of an all-digital (source-to-eye) display was realized in 1987 with the invention of the Digital Micromirror Device (DMD) at Texas Instruments [1]. The DMD is an array of fast digital micromirrors, monolithically integrated onto and controlled by a memory chip. Digital Light Processing (DLP) systems based on the DMD present bright, seamless images to the eye, with the characteristics that we have come to expect from digital technology, namely high image fidelity and stability. DLP-based displays exhibit no lag or smearing of the image from one digital frame to the next. The first DLP-based projection display products were introduced to the market in April 1996. Today, just 2 years after the first product introduction, more than 100,000 DLP subsystems have been shipped to customers. DMD reliability has been demonstrated in excess of 100,000 operating hours (more than 1 trillion mirror cycles) [2].

CMOS substrate

Figure 1. Two DMD pixels (mirrors shown as transparent).

DISPLAY OPERATION
As shown in Figure 1, each digital light switch of the DMD is an aluminum micromirror, 16 m square, that can reflect light in one of two directions, depending on the state of an underlying memory cell. The mirror is rotated by electrostatic attraction produced by voltage differences developed across an air gap between the mirror and the

memory cell. The mirror rotation is limited by mechanical stops to 10 degrees. With the memory cell in the on state, the mirror rotates to +10 degrees. With the memory cell in the off state, the mirror rotates to 10 degrees. When we combine the DMD with a suitable light source and projection optics, the mirror reflects incident light either into or out of the pupil of the projection lens by a simple beam-steering action. Thus, the on state of the mirror appears bright and the off state of the mirror appears dark. The fast switching time of the mirrors enables the use of a pulsewidth modulation technique for the production of gray scale [3]. The DMD accepts electrical words representing gray levels of brightness at its input and then outputs digital light as optical words to the eye. Because of the short pulse duration, the optical words are interpreted by the eye of the observer as analog light containing up to one billion or more color and gray scale combinations per pixel. Furthermore, the fast switching time results in a lagfree image. Digital light is accurate because the light pulse durations are determined by the precise division of time. The resulting projected image faithfully reproduces the original source material and the image is stable, independent of temperature or age of the projector, and is free from photodegradation effects, even up to brightness levels necessary for electronic cinema. The tiny gaps between the mirrors diminish objectionable pixelation effects and create a seamless

image that has long been the hallmark of DMD-based projection displays. Current DMD architectures have a mechanical switching time of ~15 s and an optical switching time of ~2 s. Based on these times, and for video frame rates, 24-bit color (8 bits or 256 gray levels per primary color) is supported in a single-chip, time-multiplexed color projector, while 30-bit color (10 bits or 1024 gray levels per primary color) is supported in a three-chip projector. Even greater bit depths can be achieved by multiplexing techniques. Improved visual performance is achieved by splitting each gray level bit and repeating it many times per frame [3].

Table 1. DMD manufacturing sequence. CMOS SILICON BACKPLANE 0.72 micron, twin-well process Metal 1 (word lines) Metal 2 (bit lines) CMP oxide (for planarization) Metal 3 (mirror bias bus, address electrodes for yoke)

DISPLAY CONFIGURATIONS
Three configurations of DLP projection systems are currently being manufactured, differentiated by the number of DMD chipsone, two, or three. Figure 2 shows an example of a three-chip projector. The configuration choice depends on the intended market application and is based on a tradeoff between light utilization efficiency, brightness, power dissipation, lamp technology, weight, volume, and cost. The one- and two-chip systems rely on the time multiplexing of color, a unique feature of DMD technology arising from the fast switching time of the mirrors. Each projector has its own benefits and tradeoffs. The single-chip projector is self-converged, lower in cost, and permits the very lightest portable designs. The two-chip projector provides greater light efficiency and is well suited to applications requiring the very longest lifetime lamps. (These often may be spectrally deficient in the red.) The three-chip projector has the highest optical efficiency and is required in the brightest large-venue applications such as trade shows and public information displays [4]. The DMD is the only display-on-a-chip technology that is monolithically formed over a completed CMOS address circuit. A special low-temperature fabrication process for the DMD superstructure preserves the integrity of the underlying aluminum CMOS metallization. The mechanical elements are sputter-deposited aluminum alloys, and the sacrificial layers (or spacers) are deep ultraviolet (DUV)hardened photoresist. The air gaps are formed by plasma etching to remove this sacrificial photoresist. Table 1 lists the major steps in the DMD manufacturing process [5].
Color splitting prisms DMD (R) TIR prism

DMD SUPERSTRUCTURE Spacer1 (sacrificial photoresist) Hinge metal Beam metal (yoke, address electrodes for mirror) Spacer 2 (sacrificial photoresist) Mirror metal PACKAGING Wafer saw (partial) Plasma undercut (remove Spacer1,2) Passivation (anti-adhesion layer) Initial test in wafer form (multiprobe vision system) Wafer break (break into individual chips) Chip attachment to ceramic package and wire bond Plasma activation (clean) and repassivation Getter strip attachment to window Hermetic window attachment (weld glass-to-metal fused window assembly to metal seal ring of package) Burn in and final test

MANUFACTURING

Cost reduction strategies for both DMD wafer manufacturing and packaging are being implemented. The packaging strategy includes development of a nonhermetic package. The glass-to-metal seal of the current window assembly will be replaced with glass epoxied to a metal frame [6]. In 1998, DMD wafer manufacturing was transferred from TIs DMD-1 (a specialized facility) to DMOS-IV (a conventional wafer fabrication facility for logic chips). Such compatibility with conventional wafer fabs lowers costs, provides a reliable second source, and allows increased volume for future consumer TV products.

PRODUCTS
The fast switching speed of DMD mirrors has enabled one-, two-, and three-chip DLP projector configurations. This versatility has led to a wide range of differentiated DLP-based products, as shown in Table 2. More than 20 Digital Imaging customers are selling DLPbased products in a wide range of markets including mobile, stationary conference room, home theater, video wall, and large venue. Systems with resolutions of SVGA (800600) and XGA (1024768) are available. Prototype SXGA (12801024) resolution systems have been demonstrated and will be introduced to the market in 1999. Packaged DMD chips at various resolutions are shown in Figure 3. In the mobile market, a 7 pound projector has been the best-selling product in its classa one-chip DLP-based ultraportable projector with 500 ANSI lumens of brightness. In the video wall market, where color and gray scalematching from cube to cube are critical, two-chip DLPbased video cubes are setting new standards for edge-toedge uniformity and stability.

R,G,B

DMD (G) DMD (B)

W Projection lens

Light from integrator rod

Figure 2. Three-chip DLP projector configuration (simplified for clarity).

Figure 3. Packaged DMD chips: SVGA (800600), XGA (1024768), and SXGA (12801024). Table 2. DLP markets. Business Entertainment Video walls Home theater Large venue Digital cinema* Conferencing Mobile solutions (ultraportable) Monitors Digital ruggedized display *Under development Photofinishing* Digital photofinishing

Figure 4. SEM photomicrographs of DMD mirrors. (a) Original mirrors, (b) SRV (small rotated via), (c) SMG (small mirror gaps) + SRV.

Ruggedized DLP monitors at SXGA resolution are being manufactured for military, air traffic control, and telemedicine applications. Two- and three-chip DLP-based home theater systems are found in both front and rear projection configurations. They bring clear, film-like images to the home and even double as large-screen PC monitors. In the ultrabright, large-venue market, three-chip DLPbased projectors with up to 6500 ANSI lumens of brightness and XGA resolution are widely accepted as the industry standard for digital fidelity, stability, and ease of setup. Several television networks currently use DLP-based projectors in the studio because of their image quality and faithful and stable color reproduction. As a result, the Academy of Television Arts & Sciences has awarded Emmys to the developers of this technology (TI and one of its customers), the first ever such awards for a projection technology [7]. Steady contrast ratio improvements have been made since the introduction of DMD products in April 1996. At the chip level, contrast ratio was improved by a reduction of light scattering from the mirror and substructure between the mirror gaps. Figure 4 shows the DMD mirror architectures as changed, beginning with the original version (Figure 4a). The first improvement was to rotate and reduce the size of the via support structure that attaches the mirror to the underlying yoke (Figure 4b). Next, the gap size between mirrors was reduced (Figure 4c). Full-on/full-off contrast ratio was improved from 308:1, 442:1, and 575:1, respectively (f/3.0 optics). Experimental dark layers deposited on Metal 3 have led to contrast ratios better than 800:1.

FUTURE DLP APPLICATIONS

Currently there are development programs for future DLP applications that include digital photofinishing and digital cinema (Table 2). Digital PhotofinishingThe photofinishing market, based on silver-halide imaging, was fundamentally trans-

formed in 1976 by the introduction of small-scale and selfcontained systems that completed the cycle of film development to finished prints in 45 minutes. Depending on the throughput, these systems are called minilabs (~200 prints/ hour) or maxilabs (up to 20,000 prints/hour). Currently, only analog exposure systems are available. The precise, stable control of light at high bit depths gives DLP-based photofinishing systems a performance advantage from both an image quality and processing speed perspective [8]. A prototype Digital Photofinishing (DPF) system has been demonstrated using a conventional SXGA (12801024) resolution DMD. A resolution of 320dpi is achieved in a 46 inch print format. The system incorporates a single DMD chip and time-multiplexed color. To achieve 12 bits of gray scale per color without image blurring, 279 DMD rows are scanned past each pixel row on the photographic paper using a combination of spatial integration and pulsewidth modulation of the light source. The prototype DPF system has produced high-quality photographic images that have withstood the test of expert scrutiny with positive results. Digital CinemaAn exciting DLP development program is digital cinema (all-digital electronic cinema from telecine transfer to the eye) [9,10]. Texas Instruments solution to digital cinema is called DLP Cinema. In an era when virtually all other forms of entertainment are based on digital distribution (or soon will be), the motion picture is being distributed just as it has been for more than 100 years, as a film (based on silver-halide imaging). Film-based projection technology has its limitations, including the inability to provide live content to the audience; inconvenient updating of previews and advertisements; difficulties with simultaneous release of a product in international markets; the expense of film duplication and distribution; travel ghosting, focus flutter, jump, and weave; and the inexorable deterioration of the film with repeated screenings (color fading, dirt, and scratches). Although the advantages of digital distribution and projection are clear, until recently no electronic projection technology could compete with film for visual clarity and no technology provided the stability needed for long-term operation unattended by a projectionist. In May 1997, a program was initiated to develop a DLP Cinema Technology Demonstration Projector based on a

At the writing of this paper, the DLP Cinema Prototype Projector (Figure 5) is close to meeting all of the above capabilities. Key experts of the motion picture industry are now reviewing and critiquing the performance of this all-digital system. Their response will be the ultimate test of its success and will provide a steppingstone for the digital cinema of the future. DLP-based projection display systems based on the DMD provide high-quality, seamless, all-digital images with exceptional stability and freedom from image lag. One-, two-, and three-chip configurations are being manufactured to provide a broad range of differentiated products that include video walls, large-venue projectors, conferencing, ultraportable projectors, home theater, and ruggedized monitors. DMD manufacturing is compatible with that of conventional CMOS products, as recently demonstrated by the transfer of volume manufacturing of DMD wafers to TIs DMOS-IV facility in Dallas, Texas. Cost reduction strategies include production in a conventional wafer fab and a nonhermetic DMD package. DLP applications under development include Digital Photofinishing and DLP Cinema. They are leveraging the fundamental DMD advantages of digital precision and stability. Both technologies promise to transform the way their respective industries do business in the digital age of the 21st century.
[1] L.J. Hornbeck, From cathode rays to digital micromirrors: A history of electronic projection display technology, Texas Instruments Technical Journal (special DLP issue), Vol. 15, No. 3, pp. 7-46 (1998). [2] M.R. Douglass, Lifetime estimates and unique failure mechanisms of the Digital Micromirror Device (DMD), IEEE International Reliability Physics Proc., pp. 9-16 (1998). [3] D. Doherty, G. Hewlett, Phased reset timing for improved Digital Micromirror Device (DMD) brightness, SID Sym. Dig. Tech. Papers, Vol. 29, pp.125-128 (1998). [4] L.J. Hornbeck, Digital Light Processing for high-brightness, high-resolution applications, Proc. SPIE, Vol. 3013, Projection Displays III, pp. 27-40 (1997). Contains a comprehensive set of references through 1996. [5] M.A. Mignardi, From ICs to DMDs, TI Tech. J., Vol. 15, No. 3, pp. 56-63 (1998). [6] J. Faris and T. Kocian, DMD packagesevolution and strategy, TI Tech. J., Vol. 15, No. 3, pp. 87-94 (1998). [7] Digital Light Processing web site: http://www.ti.com/dlp [8] C.L. Bohler, E. Nelson, R.R. Bhuva, W.M. Bommersbach, D.Powell, and D. Whitney, Photofinishing with Digital Light Processing, TI Tech. J., Vol. 15, No. 3, pp. 172-182 (1998). [9] W.B. Werner and D.S. Dewald, Striving to achieve the ultimatedigital cinema, TI Tech. J., Vol. 15, No. 3, pp. 165171 (1998). [10] W.B. Werner and D.S. Dewald, Application of DLP technology to digital electronic cinemaa progress report, to be presented at the 140th Society of Motion Picture and Television Engineers (SMPTE) Technical Conference (October 1998). Note: TI Technical Journal DLP articles (as well as other selected DLP articles) are available at the DLP web site: http:// www.ti.com/dlp

SUMMARY

Figure 5. DLP Cinema Projector Prototype (projector head is circled).

12801024 DMD. The goal was to rapidly upgrade an existing projector to produce high-quality, high-brightness images for evaluation in cinema applications. The technical and creative communities in the motion picture industry were involved in this evaluation process. Based on the experience and knowledge gained from the demonstration projector, work began in 4Q97 on the DLP Cinema Prototype System, a system-level approach to an all-digital cinema of tomorrow. It is outside the scope of this paper to describe the system-level approach to an all-digital cinema, but key elements of the prototype projector are listed here: 1. Reduce the financial and remodeling impact on theater installation by (a) using standard film projector lamp housings with a slightly modified lamp reflector, (b) using high-power, off-the-shelf xenon lamps, and (c) designing a DLP projection head that maintains the same optical axis as a conventional film projector head. 2. Develop a DLP projector with more optical efficiency than a film projector to reduce power consumption and heating in the projection booth. 3. Leverage existing TI investments in DLP and DMD technology by using a 12801024 DMD (5:4 aspect ratio) with anamorphic projection lenses to project the two common formats, flat (1.85:1) and Cinemascope, or scope, (2.35:1). 4. Display at 24 frames/second for cinematic look. Perceptible flicker is eliminated by a bit-splitting sequence in which each gray scale bit is presented many times each 1/24 second. 5. Increase the power-handling and brightness capability of the projector to accommodate 50-foot-wide theater screens. 6. Meet or exceed the contrast ratio (full-on/full-off) of a typical theater release print to establish equal or lower black levels. 7. Improve projector color processing capabilities by increasing bit resolution for color-space conversion (predegamma) and color-space correction (post-degamma). 8. Increase the projectors effective bit depth to 42 bits (14 bits/color) in linear space by using digital signal processing algorithms. Increased bit depth gives the necessary gray scale resolution for the most demanding lowlight level scenes.

REFERENCES